• Safety and Health at Work
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• 제15권1호
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• pp.87-95
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• 2024

Background: This study focuses on assessing occupational risk for the health hazards encountered during maintenance works (MW) in semiconductor fabrication (FAB) facilities. Objectives: The objectives of this study include: 1) identifying the primary health hazards during MW in semiconductor FAB facilities; 2) reviewing the methods used in evaluating the likelihood and severity of health hazards through occupational health risk assessment (OHRA); and 3) suggesting variables for the categorization of likelihood of exposures to health hazards and the severity of health effects associated with MW in FAB facilities. Methods: A literature review was undertaken on OHRA methodology and health hazards resulting from MW in FAB facilities. Based on this review, approaches for categorizing the exposure to health hazards and the severity of health effects related to MW were recommended. Results: Maintenance workers in FAB facilities face exposure to hazards such as debris, machinery entanglement, and airborne particles laden with various chemical components. The level of engineering and administrative control measures is suggested to assess the likelihood of simultaneous chemical and dust exposure. Qualitative key factors for mixed exposure estimation during MW include the presence of safe operational protocols, the use of air-jet machines, the presence and effectiveness of local exhaust ventilation system, chamber post-purge and cooling, and proper respirator use. Using the risk (R) and hazard (H) codes of the Globally Harmonized System alongside carcinogenic, mutagenic, or reprotoxic classifications aid in categorizing health effect severity for OHRA. Conclusion: Further research is needed to apply our proposed variables in OHRA for MW in FAB facilities and subsequently validate the findings.

• 한국산업보건학회지
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• 제34권2호
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• pp.125-133
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• 2024

Objectives: The aim of this study is to develop a comprehensive Occupational Safety and Health (OSH) guide for maintenance tasks in semiconductor processing, specifically focusing on etching, deposition, and ion implantation processes. Methods: The development of the OSH guide involved a literature review, consultations with industry experts, and field investigations. It concentrates on Maintenance Work (MW) operations in these specialized areas. Results: The result is a detailed OSH guide tailored to MW in etching, deposition, and ion implantation facilities within semiconductor processing. This guide is structured to assist maintenance workers through pre-, during and post-MW phases, ensuring easy comprehension and adherence to safety protocols. It highlights the necessity of safety and health measures throughout the MW process to protect personnel. The guide is enriched with real-life scenarios and visual aids, including cartoons and photographs, to aid in the understanding and implementation of safety and health principles. Conclusions: This OSH guide is designed to enhance the protection of workers engaged in maintenance activities in the electronics sector, particularly in semiconductor manufacturing. It aims to improve compliance with safety and health standards in these high-risk environments.

• 한국산업보건학회지
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• 제34권1호
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• pp.18-25
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• 2024

Objectives: The primary aim of this study is to create an Occupational Safety and Health (OSH) guide for high-risk maintenance tasks, specifically one designed for maintenance work (MW) in the electronics industry. Methods: The methodology involved a literature review, field investigations, and discussions. An initial draft of the OSH guide was created and then refined through consultations with experts possessing extensive experience in MW for electronic processes. Results: Specific MW tasks within electronics processing facilities identified as high-risk by the research were selected. A comprehensive OSH guide for these tasks was developed consisting of approximately 11 to 12 components and encompassing about 20-25 pages. Implementing safety and health measures before, during, and after MW is crucial for the protection of maintenance personnel. The guide is enriched with real-case scenarios of industrial accidents and occupational diseases to enhance maintenance workers' comprehension of the OSH principles. For a clearer understanding of and adherence to the safety protocols, the guide incorporates visual aids, including cartoons and photographs. Conclusions: This OSH guide is designed to ensure the protection of workers involved in maintenance activities in the electronics industry. It aligns with global standards set by the International Organization for Standardization (ISO) and Semiconductor Equipment and Material International (SEMI) to ensure a high level of safety and compliance.

• Journal of Power Electronics
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• 제11권5호
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• pp.759-766
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• 2011

This paper focuses on monitoring and predicting the short circuit faults of the rotor windings of large turbo-generator systems. For the purpose of increasing efficiency and decreasing maintenance cost, a method that combines the HHT (Hilbert Huang Transform) with a wavelet has been studied. This method is based on analyzing a classical Albright detecting coil. Due to the Empirical Mode Decomposition (EMD) and the Intrinsic Mode Functions (IMF) of the HHT the exact location of a short circuit of rotor windings may be given. However, a part of the useful information is eliminated by the unreasonable decomposing scale of the wavelet. Based on the thermodynamics modeling method, this study was illustrated with a 50MW turbo-generator system that is installed in Northern China. The analysis results, which have very good agreement with those of a previous study, show that the method of combining the HHT with a wavelet is an effective way to analyze and predict the short circuit faults of the rotor windings of large generators, such as supercritical turbo-generator systems and wind turbo-generator systems. This work can offer a useful reference for analyzing smart grids by improving the power quality of a distribution network that is supplied by a turbo-generator system.