• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.9
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• pp.69-76
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• 2018

The present study analyzed the effect of film hole position of 45 degree ribbed cooling channel on film cooling performance of gas turbine blades. We also investigated the influence of the ribs under the fixed blowing ratio. Three-dimensional numerical model was constructed and extensive simulation was conducted using the commercial code (Fluent ver. 17.0) under steady-state condition. Base on the simulation results, We investigated the cooling effectiveness, flow velocity, streamline, and pressure coefficient. Moreover, We analyzed the effect of cooling hole position on ejection of the secondary flow caused by the rib structure. From the results, It was found that internal flow of the cooling channel forms a vortex pair in the counterclockwise from the top side, and clockwise from the bottom side. For the channels with ribs, the vortex flow generated by the ribs caused a higher pressure difference near the hole outlet, resulting in at least 12% higher cooling effectiveness than the channel without ribs. Additionally, when the hole is located on the left side of the ribbed channel (Rib-Left), it can be found that the secondary flow generated by the ribs hits against wall surface near the hole to form a flow in the direction of the hole inclination angle. Therefore, It is considered that the region where the cooling gas discharged to the blade surface stays in the main flow boundary layer is wider than the other cases. In this case, The largest pressure coefficient difference was observed near the outlet of the hole, and as a result, the discharge of the cooling gas was accelerated and the cooling efficiency was slightly increased.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.3
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• pp.29-36
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• 2007

The main objectives of this study are to investigate the micro-scale energy transfer mechanism for silicon wafer and to find an efficient way for fabrication of silicon wafer through-hole by using the femtosecond pulse laser ablation. In addition, the electron-phonon interactions during laser irradiation are discussed and the carrier number density and temperatures are estimated. In particular, the present study observes the shapes of silicon wafer through-hole with $100\;{\mu}m$ diameter and it also measures the heat-affected area and the ablation depths fur different laser fluences by using the optic microscope and the three-dimensional profile measurement technique. First, from numerical investigation, it is found that the nonequilibrium state exists between electrons and phonons during laser irradiation. From experimental results, it should be noted that the heat-affected area increases with laser fluence, and the optimal conditions for through-hole formation with minimum heat affected zone are finally obtained.

• Transactions of Materials Processing
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• v.24 no.1
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• pp.37-43
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• 2015

The purpose of the current study is to improve the clinching joint strength of aluminum and fiber metal laminates (FMLs) comprised of three layers. The joining of FML and Al 5052 by a conventional clinching joint has some disadvantages such as necking of the upper sheet, lack of interlocking, defects caused by the vertical load, and especially loss of strength of the composite material due to the low ductility. In the current study, a tapered-hole clinching method is proposed as an alternative for the joining of Al 5052 and FMLs. A hole with a tapered shape is formed before the joining process. The design parameters were evaluated using the Taguchi method for the geometry of the tapered hole in order to determine the maximum separation load. The diameter of the punch corner, clearance, punch stroke and the tapered length were used as the main variables in the Taguchi method. In conclusion, the contribution ratio for each of the fours variable examined was 35.07%, 22.44%, 21.32% and 14.11%, respectively. In addition, the appropriate combination of the design parameters can make a 5% improvement in the vertical direction joint strength.

• Journal of ILASS-Korea
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• v.5 no.3
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• pp.17-26
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• 2000

The main parameter commonly used to evaluate spray distribution is spray angle. Spray angle is important because it influences the axial and radial distribution of the fuel. Spray angles were measured and compared for the two non-air assisted injectors such as 2hole-2stream 4hole-1stream injectors used for port fuel injection gasoline engines with n-heptane as a fuel by three different measuring techniques, i.e., digital image processing, shadowgraphy, and spray patternator, respectively. Fuel was injected with the injection pressures of 0.2-0.35 MPa into the room temperature and atmospheric pressure environment. In digital image processing approach, the selection of the transmittance level is critical to obtain the edge of spray and hence to measure the spray angle. From the measurement results by the shadowgraphy technique, it is dear that the spray angle is varied during the spray injection period. The measurement results from spray patternator show that the different spray angles exist in different region. Spray angle increases with the increase in the injection pressure. it is suggested that the spray angle and stream separated angle should be specified when spray is characterized for 2hole-2stream injector, because spray angle is much different though stream separated angle is same. It was also considerably affected by the measurement techniques introduced in this experimental work. However, the optimal axial distance for measuring the spray angle seems to be at least 60-80 mm from the injector tip for two non-air assisted injectors.

• Journal of Mechanical Science and Technology
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• v.18 no.9
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• pp.1623-1629
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• 2004

The objective of this study is the rapid bulk combustion of mixture in a constant volume chamber with a tiny sub-chamber. Some narrow passage holes were arranged to induce simultaneous multi-point ignition in the main chamber by jet of burned and unburned gases including radicals from the sub-chamber, and the equivalence ratios of pre-mixture in the main chamber and the sub-chamber were the same. The principal factors of the Radical Induced Auto-Ignition (RIAI) method are the diameter of the passage holes and the volume of sub-chamber. The relationship between the sub-chamber and diameter of passage hole was represented by the ratios of sub-chamber volume to passage hole volume. The ratios are non-dimensional coefficients for sub-chamber characteristics. As a result, the RIAI method reduced the combustion period, which expanded the lean limit in comparison with SI method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1749-1752
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• 2005

High speed machining has become the main issue of metal cutting. Due to increase of the rotational speed of the spindle, problems, such as the run-out errors, reduced stiffness, must be overcome to improve the machining accuracy. In order to solve the problems, it is important to determine the appropriate clamping unit and tooling system. This paper presents an investigation into an evaluation of contact interval which is the interface between spindle taper hole and tool holder shank of the spindle. Finite element analysis is performed by using a commercial code ANSYS according to variation of clamping forces and rotational speeds. This paper proposed fit tolerance in order to evaluate the effects of clamping force and rotational speed on the contact interval in the spindle interface. From the finite element results, it has been shown that the rotational speed rather than clamping force mostly influence on the variation of the contact interval.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.3 s.168
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• pp.15-20
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• 2005

This paper describes the PCB drilling using an ultra high-speed air bearing spindle system and micro drill. For this research, we have developed the ultra high-speed air bearing spindle of 125,000 rpm and made an experiment for the application possibility in the PCB drilling. In order to estimate the drilling performance, we have investigated the size and damage of drilled hole, and the wear of drill at 90,000rpm. Results are as follows; we have confirmed the possibility in the PCB drilling of air bearing spindle. In case of micro-drilling PCB at $0.1mm\sim0.3mm$, the increase in the number of drilling has resulted in a bigger size of holes and also a bigger size of damage. It has been found that the wear of micro drill tends to concentrate in the main cutting edge.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.147-155
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• 2006

High speed machining has become the main issue of metal rutting. Due to increase of the rotational speed of the spindle, problems, such as the run-out errors, reduced stiffness, must be overcome to improve the machining accuracy. In order to solve the problems, it is important to determine the appropriate clamping unit and tooling system. This paper presents an investigation into an evolution of contact interval which is the interface between spindle taper hole and tool holder shank of the spindle. Finite element analysis is performed by using a commercial code ANSYS according to variation of clamping forces and rotational speeds. This paper proposed fit tolerance in order to evaluate the effects of clamping force and rotational speed on the contact interval in the spindle interface. From the finite element results, it has been shown that the rotational speed rather than clamping force mostly influence on the variation of the contact interval.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.1 s.256
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• pp.76-82
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• 2007

The present study investigated the effects of channel rotation and bleed flow on heat/mass transfer in a square channel with $45^{\circ}$ rib turbulators. The bleed holes were located between the rib turbulators on the leading surface and those on the trailing surface case by case. The tests were conducted under the conditions of various bleed ratios (0.0, 0.2, 0.4) and rotation numbers (0.0, 0.2, 0.4) at Re=10,000. The results suggested that heat/mass transfer characteristics were influenced by the Coriolis force, decrement of main flow rate, secondary flow by angled ribs and bleed hole location. As the bleed ratio (BR) increased, the heat/mass transfer decreased on both surfaces due to the reduction of main flow rate. With increment of the rotation number, heat/mass transfer also decreased and almost the same because the reattachment of the secondary flow induced by angled ribs was weakened on the leading surface and the secondary flow was disturbed on the trailing surface by the Coriolis force.