• Title/Summary/Keyword: magnetic grain

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New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

  • Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.100-101
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    • 2012
  • The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

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Clay Mineralogical Characteristics and Origin of Sediments Deposited during the Pleistocene in the Ross Sea, Antarctica (남극 로스해 대륙대 플라이스토세 코어 퇴적물의 점토광물학적 특성 및 기원지 연구)

  • Jung, Jaewoo;Park, Youngkyu;Lee, Kee-Hwan;Hong, Jongyong;Lee, Jaeil;Yoo, Kyu-Cheul;Lee, Minkyung;Kim, Jinwook
    • Journal of the Mineralogical Society of Korea
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    • v.32 no.3
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    • pp.163-172
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    • 2019
  • A long core (RS15-LC48) was collected at a site in the continental rise between the Southern Ocean and the Ross Sea (Antarctica) during the 2015 Ross Sea Expedition. The mineralogical characteristics and the origin of clay minerals in marine sediments deposited during the Quaternary in the Ross Sea were determined by analyzing sedimentary facies, variations in grain size, sand fraction, mineralogy, clay mineral composition, illite crystallinity, and illite chemical index. Core sediments consisted mostly of sandy clay, silty clay, or ice rafted debris (IRD) and were divided into four sedimentary facies (units 1-4). The variations in grain size distribution and sand content with depth were very similar to the variations in magnetic susceptibility. Various minerals such as smectite, chlorite, illite, kaolinite, quartz, and plagioclase were detected throughout the core. The average clay mineral composition was dominated by illite (52.7 %) and smectite (27.7 %), with less abundant clay minerals of chlorite (11.0 %) and kaolinite (8.6 %). The IC and illite chemical index showed strong correlation trends with depth. The increase in illite and chlorite content during the glacial period, together with the IC and chemical index values, suggest that sediments were transported from the bedrocks of the Transantarctic Mountains. During the interglacial period, smectite may have been supplied by the surface current from Victoria Land, in the western Ross Sea. High values for IC and the illite chemical index also indicate relatively warm climate conditions during that period.

Characteristics and Stratigraphic Implications of Granitic Rock Fragments in the Pyroclastic Rocks, SE Jinhae, Korea (진해시 남동부 화성쇄설암 내 화강암편의 특징과 층서적 의미)

  • Cho, Hyeong-Seong;Kim, Jong-Sun;Lee, Jeong-Hwan;Jeong, Jong-Ok;Son, Moon;Kim, In-Soo
    • The Journal of the Petrological Society of Korea
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    • v.16 no.3
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    • pp.116-128
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    • 2007
  • Detailed geological mapping, petrographic study, analyses of geochemistry and magnetic susceptibility, and K-Ar dating were carried out in order to determine the origin, age, and stratigraphic implications of granitic rock fragments in the pyroclastic rocks, SE Jinhae city, southern part of the Gyeongsang Basin. As a result, it was found that the area is composed of volcanics and tuffaceous sediments of the Yucheon Group, Bulguksa granites, pyroclastics bearing granitic rock fragments, $basalt{\sim}basaltic$ andesite, and rhyolite in ascending stratigraphic order. The granitic rock fragments in the pyroclastic rocks are divided into granodiorite and biotite granite, which have approximately the same characteristics as the granodiorite and the biotite granite of the Bulguksa granites, respectively, in and around the study area including color, grain size, mineral composition, texture (perthitic and micrographic textures), intensity of magnetic susceptibility (magnetite series), and geochemical features (calc-alkaline series and REE pattern). This leads to the conclusion that the rock fragments originated from the late Cretaceous Bulguksa granites abundantly distributed in and around the study area, but not from the basement rocks of the Yeongnam massif or the Jurassic granites. Based on relative and absolute ages of various rocks in the study area, the pyroclastics bearing granitic rock fragments are interpreted to have erupted between 52 and 16 Ma, i.e. during the Eocene and early Miocene. These results indicate that the various volcanisms, acidic to basic in composition, occurred after the intrusion of the Bulguksa granites, contrary to the general stratigraphy of the Gyeongsang Basin. Very detailed and cautious mapping together with relative and absolute age determinations are, thus, necessary in order to establish reliable stratigraphy of the Yucheon Group in other areas of the Gyeongsang Basin.

Formation Environment of Quaternary deposits and Palynology of Jangheung-ri Archaeological Site (Jiphyeon County, Jinju City), Korea (진주 집현 장흥리 유적 제4기 퇴적층 형성 및 식생환경 연구)

  • 김주용;박영철;양동윤;봉필윤;서영남;이윤수;김진관
    • The Korean Journal of Quaternary Research
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    • v.16 no.2
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    • pp.9-21
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    • 2002
  • In Korea, many open-air upper palaeolithic sites are located at the river valley, particularly exposed in gently rotting terrain along the river course. They are situated at an altitude less trail 30 m above present river bottom, and covered with the blankets of slope deposits of several meters in thickness. The purpose of this research is to eluridate depositional and vegetational environment of the alluvial upper palaeolithic Jangheung-ri sites on the basis of analytical properties of grain size population, chronology, palynology, soil chemistry and clay mineralogy and magnetic susceptibility of the Jangheung-ri Quaternary formations. The lithostratograpy of Jangheung-ri sit is subdivided into 3 layers based on the depositional sequence and radiocarbon ages. From bottom to top, they are composed of slope deposits with lower paleosol layers, young fluvial sand and gravel with backswamp organic muds, and upper paleosol layers. The upper paleosol was formed under rather dry climatic condition between each flooding period. Dessication cracks were prevalent in the soil solum which was filled with secondarily minuted fragments due to pedogenetic process. The soil structure shows typical braided-typed cracks in the root part of cracking texture, and more diversified pattern of crackings downward. The young fluvial sand gravel were formed by rather perennial streams after LGM. The main part of organic muds was particularly formed after 15Ka. Local backswamp were flourished with organic muds and graded suspension materials in the flooding muds were intermittently accumulated in the organic muds until ca. 11Ka. This episode was associated with migration of Nam River toward present course. Organic muds were formed in backswamp or local pond. Abies/Picea-Betula with Ranunculaceae, Compositae, Cyperaceae were prevalent. This period is characterized with B$\Phi$lling, Older Dryas, Allerod, and Younger Dryas (MIS-1). Stone artefacts were found in the lower paleosol layers formed as old as 18Ka-22Ka. Based on the artefacts and landscape settings of the Jangheung-ri site, it is presumed that settlement grounds of old people were buried by frequent floodings of old Nam River, the river-beds of which were heavily fluctuated laterally and river-bed erosions were activated from south to north in Jangheung-ri site until the terminal of LGM9ca 17Ka).

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Effect of sputtering conditions on the exchange bias and giant magnetoresistance in Si/Ta/NiFe/CoFe/Cu/CoFe/FeMn/Ta spin valves (스파터링 조건이 FeMn계 top 스핀 밸브의 exchange bias 및 자기적 특성에 미치는 영향)

  • Kim, K.Y.;Shin, K.S.;Han, S.H.;Lim, S.H.;Kim, H.J.;Jang, S.H.;Kang, T.
    • Journal of the Korean Magnetics Society
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    • v.10 no.2
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    • pp.67-73
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    • 2000
  • Top spin valve samples with a structure Ta/NiFe/CoFe/Cu/CoFe/FeMn/Ta were deposited on a Si(100) substrate by changing d.c. magnetron sputtering conditions and the exchange-bias and magnetic properties of samples were investigated. The Exchange field, H$\_$ex/ increased with increase of sputtering power of FeMn from 30 to 150 W and CoFe from 30 to 100 W deposited on the Cu, the increase of H$\_$ex/ was found due to the improvement of preferred orientation of (111) FeMn phase from XRD results. In the case of Cu, H$\_$ex/ decreased with the increase of sputtering pressure ranging from 1 to 5 mTorr. The relationship between exchange field and resistance was investigated, spin valve samples with a large exchange field showed the lower resistance, which was strongly dependent on the good crystallinity and grain size increase as well as lower scattering effects. The Cu thickness was changed from 22 to 38 $\AA$ for Si/Ta/NiFe/CoFe/Cu(t), 30 W/CoFe, 100 W/FeMn, 100 W/Ta spin valve structures, MR ratio of 6.5 % and exchange field of about 190 Oe were obtained for the sample with Cu of 22 $\AA$ thickness. The increase of exchange field with decrease of Cu thickness was explained by FM/AFM spin-spin interaction.

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Quaternary Geology of the Conjunction Area of the Yeongsan and Sampo rivers (영산강 하류와 삼포강 합류부 일대 제4기 지질 연구)

  • Kim, Ju-Yong;Yang, Dong-Yoon;Hong, Sei-Sun;Nahm, Wook-Hyun;Lee, Heon-Jong;Lee, Jin-Young;Kim, Jin-Kwan;Oh, Keun-Chang
    • The Korean Journal of Quaternary Research
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    • v.19 no.1
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    • pp.1-17
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    • 2005
  • This study aims to study the distribution and formation age of Quaternary deposits in the downstream of Yeongsan Estuarine River, encompassing Muan, Illo and Donggang counties. For this purpose the authors examine several borehole data, and step trench survey for excellent profiles was studied in connection with grain size population and magnetic susceptibility. As a result, it is interpreted that the coastal plain of the Yeongsan River was formed by sea level rise after Last Glacial Maximum(LGM). The fore edge/escarpment of coastal terraces distributed 7-10 m asl is assumed to be formed during the last glacial period, while the coastal terraces distributed above 7-10m asl formed during MIS 5a. In addition, the fore edge/escarpment of coastal terraces distributed above 15 m asl is presumed to be have been formed during the stadial of last interglacial period, while the formation age of coastal terraces distributed above 15m(asl) is assumed to be MIS 5e. This formation age can be estimated by the coastal terrace ages of the southeastern coast of Korean Peninsula. The characteristics of Quaternary deposits linked to paleolithic culture will eventually lead to the reconstruction of ecosystem environment of paleolithic peoples.

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Effect of Reaction Factors on the Properties of Complex Oxide Powder Produced by Spray Roasting Process (분무배소법에 의해 생성되는 복합산화물 분말들의 특성에 미치는 반응인자들의 영향)

  • 유재근;이성수;박희범;안주삼;남용현;손진군
    • Resources Recycling
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    • v.9 no.4
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    • pp.16-27
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    • 2000
  • In order to produce raw material powder of advanced magnetic material by spray roasting process, newly modified spray roasting system was developed in this work. In this spray roasting system, raw material solution was effectively atomized and sprayed into the reaction furnace. Also, uniform temperature distribution inside reaction furnace made thermal decomposition process fully completed, and produced powder was effectively collected in cyclone and bag filter. This system equipped with apparatus which can purify hazard produced gas. In this study complex acid solution was prepared by dissolution of mill scale and ferro-Mn into the acid solution, and the pH of this complex acid solution was controlled about to 4. It was conformed that mill scale and ferro-Mn containing a lot of impurities such as $SiO_2$, P and Al could be used as raw material by reducing the impurities content of complex acid solution below 20 ppm. Complex oxide powder of Fe-Mn system was produced by spraying purified complex acid solution into the spray roaster through nozzle, and the variations of produced powder characters were studied by changing he reaction conditions such as reaction temperature, the injection velocity of solution and air, nozzle tip size and concentration of solution. The morphology of produced powder had spherical shape under the most experimental conditions, and concentration of solution. The morphology of produced powder has spherical shape under the most experimental conditions, and the composition and the particle size distribution were almost uniform, which tells the excellence of this spray roasting system. The grain size of most produced powder was below 100 nm. From the above results, it will be possible to produce ultra fine oxide powder from the chloride of Fe, Mn, Ni, Cu and rare earth by using this spray roasting system, and also to produce ultra fine pure metal powder by changing reaction atmosphere.

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Suggestions of Stone Materials for Restoration of Gwanghwamun Woldae in Seoul Based on Lithological Study (암석학적 연구를 통한 서울 광화문 월대 복원용 석재 제안)

  • Myeong Seong Lee;Yu Bin Ahn;Se Rin Park;Myoungju Choie;Jiyoung Kim
    • Economic and Environmental Geology
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    • v.56 no.6
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    • pp.647-659
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    • 2023
  • This study is to analyze the lithological similarities between railing stones of Gwanghwamun Woldae and stone blocks stored in Donggureung Royal Tombs, Guri, to interpret the provenance of the stones, and to suggest the most suitable quarry for a new stones supply among the rocks in the Seoul-Pocheon area in order to select stones for the restoration of the Gwanghwamun Woldae. The railing stones in Donggureung are medium to coarse-grained pink biotite granite, and their lithological characteristics, magnetic susceptibility(Average 5.20 ×10-3 SI unit), and gamma spectrometer data(K 5.00~6.38%, U 4.92~8.56 ppm, Th 27.60~36.44 ppm) show similarities with the remaining railing stones in Gwanghwamun Woldae(Average 5.38). Therefore, the railing stones in Donggureung can be reused for the restoration of Gwanghwamun Woldae. They have similar lithological and geochemical charateristics to the pink biotite granite found the Suraksan Mt. and Buramsan Mr. areas in Seoul, suggesting that these areas are the source of the stone. However, since the Suraksan Mt. and Buramsan Mt. areas are currently unavailable for quarrying, lithological and geochemical analyses on granite from the Yangju and Pocheon areas are conducted to determine the suitability of the new stone for restoration. As a result, a pink biotite granite similar to the Woldae stones was identified in the Pocheon area, and it is suggested that the stones similar in grain size and colour to the railing stones of Gwanghwamun Woldae should be selected and used for the restoration of Gwanghwamun Woldae.