• 제목/요약/키워드: low resistivity

검색결과 1,004건 처리시간 0.022초

새로운 트랜치 방법을 이용한 저저항 실리콘 기판에서의 High Q 인덕터의 구현 (Realization of High Q Inductor on Low Resistivity Silicon Wafer using a New and simple Trench Technique)

  • 이홍수;이진효유현규김대용
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 추계종합학술대회 논문집
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    • pp.629-632
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    • 1998
  • This paper presents a new and simple technique to realize high Q inductor on low resistivity silicon wafer with 6 $\Omega$.cm. This technique is very compatible with bipolar and CMOS standard silicon process. By forming the deep and narrow trenches on the low resistivity wafer substrate under inductor pattern, oxidizing and filling with undoped polysilicon, the low resistivity silicon wafer acts as high resistivity wafer being suitable for the fabrication of high Q inductor. By using this technique the quality factor (Q) for 8-turn spiral inductor was improved up to max. 10.3 at 2 ㎓ with 3.0 $\mu\textrm{m}$ of metal thickness. The experiment results show that Q on low resistivity silicon wafer with the trench technique have been improved more than 2 times compared to the conventional low resistivity silicon wafer without trenches.

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RF 마그네트론 스퍼터링법에 의해 증착된 구리막의 특성 (The properties of copper films deposited by RF magnetron sputtering)

  • 송재성;오영우
    • E2M - 전기 전자와 첨단 소재
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    • 제9권7호
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    • pp.727-732
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    • 1996
  • In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

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전기, 전자탐사에 의한 경주남부 (입실지역)의 울산 단층 심부구조 (Deep structure of Ulsan fault by electric and EM surveys in ipsil area, South of Kyeongju)

  • 손호응
    • 자원환경지질
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    • 제32권2호
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    • pp.161-167
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    • 1999
  • Electric and electromagnetic surveys were conducted to investigate the deep structure of the Ulsan fault in Ipsil area, south of Kyeongju. On this study, especially high-frequency magnetotelluric method of electromagnetic survey in the frequency range of 10~100,000 Hz was mainly employed to study the deep subsurface configuration. High-frequency MT survey was performed at 70 points of spacing 30~50 m, making 3.8 km survey line. As a survey result, a 2-km-depth 2-D cross-section was achieved. It shows vertical and horizontal subsurface variations of resistivity values. Near-surface layer having low resistivity value becomes thicker eastward up to 800m. There is a steep low resistivity zone in the west side of survey line, and there exists two low resistivity zones dipping west in the east side of survey line. Two low resistivity zones are interpreted to be related to major movement pattern of the Ulsan fault. This suggests that major fault lines are developed on both peripheral sides of the broad fault zone.

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충적층 조사를 위한 모래와 점토의 유도분극 특성 고찰 (A study on induced polarization characteristics of sand and clay for alluvium investigation)

  • 최상혁;김형수;김지수
    • 한국지구물리탐사학회:학술대회논문집
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    • 한국지구물리탐사학회 2008년도 공동학술대회
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    • pp.179-184
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    • 2008
  • 충적층 구성 물질 중 포화된 실트 혹은 점토층은 상대적으로 낮은 전기비저항 값을 나타낸다. 낮은 전기비저항 값은 이 지층을 투수성이 높은 대수층으로 오인하는 문제를 발생시킨다. 이러한 문제를 극복하고 충적층 내 포화된 실트 혹은 점토층과 모래 혹은 자갈 대수층을 구분하기 위해 전기비저항 조사와 함께 유도분극 조사를 활용하는 방안을 검토하였다. 본 연구에서는 우선, 실내 실험을 통해 충적층 구성 물질별 전기비저항(resistivity)과 충전성(chargeability)을 조사하였고, 비분극 전극을 활용한 현장 수직 전기비저항/유도분극 조사를 수행하였다. 실내 실험을 통해 모래/점토 혼합층에서 점토함량이 증가함에 따라 비저항은 낮아지고, 충전성은 높아짐을 확인하였다. 이러한 실험 결과를 바탕으로 강변여과 현장에서 전기비저항/유도분극 조사를 수행하였다. 자료의 정량적 해석을 통해, 낮은 비저항과 낮은 충전성을 갖는 지층이 상대적으로 투수성이 우수하고 지하수 산출성이 높은 충적 대수층에 해당되는 것으로 최종 해석하였다.

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농경지 오염탐사를 위한 비저항콘의 적용성에 관한 연구 (A Study on the Applicability of Resistivity Cone for Contaminant Investigation in Farm Land)

  • 유찬;윤춘경
    • 농촌계획
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    • 제5권1호
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    • pp.45-55
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    • 1999
  • The applicability of resistivity cone for contaminant investigation in farm land was examined in laboratory and in-situ. To verify the resistivity variations in sand with contaminants, laboratory experiment used soil resistivity test box was performed. Heavy metal and others ions were appeared steep variations in low concentration. Pilot test results were the same as laboratory test results. In the in-situ test used resistivity cone, resistivities of waste landfill layer were low than the common soil layers and resistivities had been difference with concentration of contaminant components. Therefore contaminant investigation in farm land using resistivity cone was expected very effective.

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A COMPARATIVE ANALYSIS BETWEEN GROUND SUBSIDENCE AT ABANDONED UNDERGROUND COAL MINE AND ELECTRICAL RESISTIVITY SURVEY RESULTS USING GIS

  • Ahn, Seung-Chan;Lee, Sa-Ro;Kim, Ki-Dong
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2006년도 Proceedings of ISRS 2006 PORSEC Volume II
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    • pp.728-731
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    • 2006
  • Ground subsidence near abandoned underground coal mines has become a serious social problem in Korea. The purpose of this study is to perform a comparative analysis between the ground subsidence area and the electrical resistivity measured by field survey at Samcheok City. A raster database composed of ground subsidence areas and electrical resistivity data was constructed for GIS. To analyze correlation between the two constructed raster datasets, we used a frequency ratio model. The results show that low and high electrical resistivity anomaly zones coincide with the existing subsidence areas. We infer that the high anomaly zone means saturated and low anomaly zone means vacant. It suggests that electrical resistivity might be a useful factor for analyzing ground subsidence hazard zone.

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수분함유량에 따른 토양의 전기적 파라미터의 주파수의존성 (Frequency-dependent electrical parameters of soils as a function of the moisture content)

  • 이복희;김기복
    • 조명전기설비학회논문지
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    • 제28권6호
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    • pp.68-74
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    • 2014
  • The electrical parameters of soils are highly dependent on the various factors such as types of soil, chemical compositions, moisture content, temperature, frequency, and so on. The analysis of soil parameters is of fundamental importance in design of grounding systems. In this paper, we present the experimental results of frequency-dependent impedance, resistivity, permittivity of soils as functions of types of soil and moisture content. The impedance and resistivity of soils are decreased as the moisture content and the frequency increase. In particular, the variation of the soil resistivity with the frequency is pronounced in the conditions of high resistivity and low moisture content. On the contrary, the permittivity of soils are sharply decreased with increasing the frequency below 10kHz and the frequency-dependent permittivity of soils are highly changed in the conditions of high moisture and low resistivity.

전기비저항 탐사법을 이용한 지하 천부 파쇄대 조사 (Dipole-Dipole Array Geoelectric Survey for Gracture Zone Detection)

  • 김건영;이정모;장태우
    • 지구물리
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    • 제2권3호
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    • pp.217-224
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    • 1999
  • 단층은 지질조사에 의하여 쉽게 발견될 수 있지만, 그 연장선은 지표에서 잘 발견되지 않기 때문에 전통적인 지질조사 방법에 의해 쉽게 파악하기가 어렵다. 단층 및 파쇄대의 경우 점토광물 및 지하수가 많이 함유되어 있어 주위보다 상대적으로 전기비저항이 낮게 나타나므로, 지표에서 발견되지 않는 단층 및 파쇄대 조사에 전기비저항 탐사가 효율적이다. 동래단층에 인접한 경상남도 양산시 웅상읍 용당리 지역과, 울산단층에 인접하고 또 근처 산 사면에서 아직 논란의 대상이 되는 제 4기 단층이 보고된 경상북도 경주시 외동읍 말방리 지역 두 곳에서 2차원적인 지하구조를 알 수 있는 쌍극자 배열 전기비저항 탐사를 실시하였고, 분석해를 이용하여 그 신뢰도를 검토한 역산 프로그램을 이용하여 전기비저항 단면도를 구하였다. 역산 결과 용당리 지역에서는 하나의 저비저항대(low resistivity zone)를, 말방리 지역에서는 2개의 저비저항대를 발견할 수 있었으며, 이들은 거의 수직에 가까운 선상으로 발달하며 그 폭은 15∼20 m 정도로 나타났다. 이들 저비저항대(<100 Ωm)는 그 주변지역에 비해 상대적으로 매우 낮은 비저항을 보이므로 이는 단층작용에 의해 생성된 파쇄대에 의한 경과로 사료된다. 최종 판단은 시추나 트렌치에 의하여 이루어지겠지만 주위에 평행한 전기비저항 탐사 측선들을 추가하여 3차원적 해석을 시도하거나 다른 물리탐사 방법을 추가함으로 해석결과에 대한 신뢰도를 ?상시킬 수 있다.

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실버 페이스트의 치밀화 및 비저항에 미치는 소결조제와 프릿의 영향 (Effect of Sintering Aid and Glass-Frit on the Densification and Resistivity of Silver Paste)

  • 이종국;박성현;양권승
    • 한국재료학회지
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    • 제18권5호
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    • pp.283-288
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    • 2008
  • The effect of sintering aids and glass-frit on the densification and resistivity of silver paste was investigated in an effort to enhance the sintered density and electrical conductivity of the silver electrode. To prepare Pb-free silver paste for use at low sintering temperatures, two commercial silver powders ($0.8\;{\mu}m$ and $1.6\;{\mu}m$ in size) and 5wt.% lab-synthesized nanoparticles (30-50 nm in size) as a sintering aids were mixed with 3 wt.% or 6 wt.% of glass frit ($Bi_2O_3$-based) using a solvent and three roll mills. Thick films from the silver paste were prepared by means of screen printing on an alumina substrate followed by sintering at $450^{\circ}C$ to $550^{\circ}C$ for 15 min. Silver thick films from the paste with bimodal particles showed a high packing density, high densification during sintering and low resistivity compared to films created using monomodal particles. Silver nanoparticles as a sintering aid enhanced the densification of commercial silver powder at a low sintering temperature and induced low resistivity in the silver thick film. The glass frit also enhanced the densification of the films through liquid phase sintering; however, the optimum content of glass frit is necessary to ensure that a dense microstructure and low resistivity are obtained, as excessive glass-frit can provoke low conductivity due to the interconnection of the glass phase with the high resistivity between the silver particles.

전기비저항과 투수계수 측정을 통한 celite가 가미된 필터의 투과 성능 모니터링 (Monitoring the performance of a celite-based filter by using electrical resistivity and permeability measurements)

  • 김규원;권태혁;조계춘
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2009년도 춘계 학술발표회
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    • pp.673-676
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    • 2009
  • Non-point pollutants, which mainly originate from high traffic roads and rural areas, contaminate the environment by flowing into various rivers and lakes and thus are of interest as an environmental issue. Accordingly, efforts have been made to design and maintain efficient filter systems for the control of the non-point pollutants. Meanwhile, clay-type materials are widely used for the absorption of chemicals included in pollutants and the absorption performances of various clays have been reported in the literature. Thus, the present study proposes a non-destructive monitoring method for the performance of a clay-type filter using electrical resistivity measurement. A series of experimental tests is performed on celite-based particulate filters with infiltrating non-point source pollutants having the same characteristics as pollutants on high traffic roads. Each test measures permeability, resistivity of the filter materials and resistivity of the filtrated water. As the particulate filter materials filtrate pollutants and absorb heavy chemicals (e.g., $Cr^{6+}$, lead, nickel, among others), ionic concentration increases resulting as the electrical resistivity decrease. When the filter systems approach the end of their lifetime, the electrical resistivity of the filter material converges to a very low value due to lowered filter absorption efficiency. Hence, the electrical resistivity of the filtrated water also converges to a low value due to high concentrations of heavy metals. The permeability converges to a very low value because of significantly reduced porosity due to clogging and absorption of pollutants on the filter material. The experimental results show that electrical resistivity monitoring of filter materials is a promising approach to estimation of filter performance and its life expectancy.

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