• Title/Summary/Keyword: linear type

Search Result 3,552, Processing Time 0.032 seconds

Analysis on the motion characteristics of surface XY aerostatic stage (평면 XY 공기정압 스테이지의 운동특성 분석)

  • 황주호;박천홍;이찬홍;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2003.06a
    • /
    • pp.359-362
    • /
    • 2003
  • The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

  • PDF

Convergent Synthesis and Characterization of Dumbbell Type Dendritic Materials by Click Chemistry

  • Sung, Sae-Reum;Han, Seung-Choul;Jin, Sung-Ho;Lee, Jae-Wook
    • Bulletin of the Korean Chemical Society
    • /
    • v.32 no.11
    • /
    • pp.3933-3940
    • /
    • 2011
  • General, fast, and efficient stitching methods for the synthesis of dendrimers with linear PEG units at a core, as dendritic-linear-dendritic materials, were developed. The synthetic strategy involved the click reaction between an alkyne and an azide. The linear core building blocks, three dialkyne-PEG units, were chosen to serve as the alkyne functionalities for dendrimer growth via click reactions with the azide-dendrons. These three building blocks were employed together with the azide-functionalized Fr$\acute{e}$chet-type dendrons in a convergent strategy to synthesize the Fr$\acute{e}$chet-type dendrimers with different linear core units. Their structure of dendrimers was confirmed by $^1H$ and $^{13}C$ NMR spectroscopy, IR spectroscopy, mass spectrometry, and GPC analysis.

Development for Scanning Type Stage Driven by Linear Motors (리니어모터를 이용한 고속 저중심 스테이지의 개발과 정밀도 향상)

  • 송창규;김정식;김경호;박천홍
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
    • /
    • 2004.04a
    • /
    • pp.445-448
    • /
    • 2004
  • Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

  • PDF

Large Area Plasma Characteristics using Internal Linear ICP (Inductively Coupled Plasma) Source for the FPD processing

  • Kim, Kyong-Nam;Lim, Jong-Hyeuk;Yeom, Geun-Young
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2006.08a
    • /
    • pp.544-547
    • /
    • 2006
  • In this study, the characteristics of large area internal linear ICP sources of $1,020mm{\times}920mm$ (substrate area is $880mm{\times}660mm$) were investigated using a multiple linear antennas with U-type parallel connection. Using the multiple linear antennas with U-type parallel connection, a high plasma density of $2{\times}10^{11}/cm^3$ and a high power transfer efficiency of about 88% could be obtained at 5kW of RF power and with 20mTorr Ar. A low plasma potential of less than 26V and a low electron temperature of $2.6{\sim}3.2eV$ could be also obtained. The measured plasma uniformity on the substrate size of 4th generation $(880mm{\times}660mm)$ was about 4%, therefore, it is believed that the multiple linear antennas with U-type parallel connection can be successfully applicable to the large area flat panel display processing.

  • PDF

A Comparison of Seasonal Linear Models and Seasonal ARIMA Models for Forecasting Intra-Day Call Arrivals

  • Kim, Myung-Suk
    • Communications for Statistical Applications and Methods
    • /
    • v.18 no.2
    • /
    • pp.237-244
    • /
    • 2011
  • In call forecasting literature, both the seasonal autoregressive integrated moving average(ARIMA) type models and seasonal linear models have been popularly suggested as competing models. However, their parallel comparison for the forecasting accuracy was not strictly investigated before. This study evaluates the accuracy of both the seasonal linear models and the seasonal ARIMA-type models when predicting intra-day call arrival rates using both real and simulated data. The seasonal linear models outperform the seasonal ARIMA-type models in both one-day-ahead and one-week-ahead call forecasting in our empirical study.

Design of a optimum structure for Ultrasonic Linear Motor using a travelling wave (진행파를 이용한 직선형 초음파 모터의 최적구조 설계)

  • 김연보;한우석;노용래
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.13 no.4
    • /
    • pp.280-285
    • /
    • 2000
  • The conventional ultrasonic linear motors developed so far utilize a standing wave and are of a pi-type or a hybrid transducer type structure. Traveling wave type bi-direction linear motors have not been developed yet. This paper describes design of a new bi-directional ultrasonic linear motor working by means of a traveling wave. With the finite element method we design and verify validity of the new structure. And we determine its optimal structure size of design variables material and boundary conditions for proper generation of the traveling wave.

  • PDF

Development of hybrid type linear motor and its driving system (Hybrid type linear motor의 개발과 구동)

  • Kim Moon-Hwan;Kim Soon-Ho
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2006.05a
    • /
    • pp.278-281
    • /
    • 2006
  • A Hybrid type LPM(Linear Pulse Motor) is designed as single side stator structure. Experimental results are shown that the static and dynamic characteristics. By the computer simulation, the permanent magnet design method is also clarified to desired thrust force. And microstep driver is adopted to the position controller to the designed LPM. The driver suppressed position errors within ${\pm}1501{\mu}m$.

  • PDF

Descriptor Type Linear Parameter Dependent System Modeling And Control of Lagrange Dynamics

  • Kang, Jin-Shik
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 2003.10a
    • /
    • pp.444-448
    • /
    • 2003
  • In this paper, the Lagrange dynamics is studied. A state space representation of Lagrange dynamics and control algorithm based on the state feedback pole placement are presented. The state space model presented is descriptor type linear parameter dependent system. It is shown that the control algorithms based on the linear system theory can be applicable to the state space representation of Lagrange dynamics. To show that the linear system theory can be applicable to the state space representation of Lagrange dynamics, the LMI based regional pole-placement design algorithm is developed and present two examples.

  • PDF