• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.368-373
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• 1998

As device dimensions approach submicrometer size in ULSI, the demand for interlayer dielectric materials with very low dielectric constant is increased to solve problems of RC delay caused by increase in parasitic resistance and capacitance in multilevel interconnectins. Fluorinated amorphous carbon in one of the promising materials in ULSI for the interlayer dielectric films with low dielectric constant. However, poor thermal stability and adhesion with Si substrates have inhibited its use. Recently, amorphous hydrogenated carbon (a-C:H) film as a buffer layer between the Si substrate and a-C:F has been introduced because it improves the adhesion with Si substrate. In this study, therfore, a-C:F/a-C:H films were deposited on p-type Si(100) by ECRCVD from $C_2F_6, CH_4$and $H_2$gas source and investigated the effect of forward power and composition on the thickness, chemical bonding state, dielectric constant, surface morphology and roughness of a-C:F films as an interlayer dielectric for ULSI. SEM, FT-IR, XPS, C-V meter and AFM were used for determination of each properties. The dielectric constant in the a-C:F/a-C:H films were found to decrease with increasing fluorine content. However, the dielectric constant increased after furnace annealing in $N_2$atomosphere at $400^{\circ}C$ for 1hour due to decreasing of flurorine content. However, the dielectric constant increased after furnace annealing in $N_2$atmosphere at $400^{\circ}C$ for 1hour due to decreasing of fluorine concentration.

• Proceedings of the Korean Geotechical Society Conference
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• 2001.03a
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• pp.167-174
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• 2001

Reflection method using ultrasonic source has been attempted to obtain the information about tunnel lining structures composed of lining, shotcrete, water barrier and voids at the back of lining. In this work, two different types of sources, i.e. single-pulse source and sweep source, can be used. Single-pulse source with short time duration has the frequency content whose amplitudes tend to be concentrated around the dominant frequency, whereas sweep source with long time duration denotes a flat distribution of relatively larger amplitude over a broad frequency band, although the peak to peak amplitude of single-pulse source wavelet is equivalent to that of sweep source one. In traditional seismic application, a single-pulse source(weight drop, dynamite) is typically used. However, to investigate the fine structure, as it is the case in the tunnel lining structure, the sweep wavelet can be also a desirable source waveform primarily due to the higher energy over a broad frequency band. For the investigation purposes of sweep source, a physical modeling is a useful tool, especially to study problems of wave propagation in the fine layered media. The main purpose of this work was using a physical modeling technique to explore the applicability of sweep source to the delineation of inner layer boundaries. To this end, a two-dimensional physical model analogous to the lining structure was built and a special ultrasonic sweep source was devised. The measurements were carried out in the sweep frequency range 10 ∼ 60 KHz, as peformed in the regular reflection survey(e.g. roll-along technique). The measured data were further rearranged with a proper software (cross-correlation). The resulting seismograms(raw data) showed quitely similar features to those from a single-pulse source, in which high frequency content of reflection events could be considerably emphasized, as expected. The data were further processed by using a regular data processing system "FOCUS" and the results(stack section) were well associated with the known model structure. In this context, it is worthy to note that in view of measuring condition the sweep source would be applied to benefit the penetration of high frequency energy into the media and to enhance the resolution of reflection events.

• Asian-Australasian Journal of Animal Sciences
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• v.18 no.5
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• pp.601-605
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• 2005

Three lines of White Leghorn (WL) chickens (IWJ, IWG and IWC) maintained at Central Avian Research Institute, Izatnagar (UP), were used for chorioallantoic membrane (CAM) and liver tumour (LT) assay. Eleven-day-old embryos of each line were partitioned into three groups and inoculated with 0.2 ml of subgroup A, subgroup C and an equal mixture of subgroup A and C Rous sarcoma virus (RSV). Subgroup virus receptor on the cell surface membrane for subgroup A is coded for by tumour virus a (tva) locus and for subgroup C by tumour virus c (tvc) locus. The random association of the genes at the tva and tvc loci in IWJ and IWC line was assessed and the $x^2$-values for phenotypic classes were found to be significant, indicating the linkage between the tva and tvc loci. The linkage value was estimated to be 0.09 on pooled sex and pooled line basis. On the basis of four subclass tumour phenotypes a 4-allele model was proposed for tva locus having $a^{s1}$, $a^{s2}$, $a^{r1}$ and $a^{r2}$ alleles and the frequencies were calculated as 0.47, 0.13, 0.13 and 0.27 for IWJ line, 0.31, 0.33, 0.14 and 0.22 for IWG line and 0.44, 0.11, 0.21 and 0.24 for IWC line, respectively. Similarly, for tvc locus the frequencies of four alleles i.e. $c^{s1}$, $c^{s2}$, $c^{r1}$ and $c^{r2}$ were calculated as 0.42, 0.20, 0.21 and 0.17 for IWJ line, 0.42, 0.17, 0.27 and 0.14 for IWG line and 0.30, 0.21, 0.16 and 0.33 for IWC line, respectively. The $x^2$-values for all classes of observations were not significant (p>0.05), indicating a good fit to the 4-allele model for the occurrence of 4-subclass tumour phenotypes for tva and tvc loci. On the basis of the 2-allele model both tva and tvc locus carries three genotypes each. But, on the basis of the 4-allele model tva and tvc locus carries 10 genotypes each. The interaction between A-resistance and C-resistance (both CAM and LT death) was ascertained by taking the 10 genotypes of tva locus and 3 genotypes of tvc locus by pooling the lines and partitioning the observations into 3 classes. The $x^2$-values for the genotypic classes of CAM (-) LT (+) and CAM (-) LT (-) phenotypes to mixed virus (A+C) infection were found to be highly significant (p<0.01), indicating increased resistance, which indicates the joint segregation of $a^r$ and $c^r$ genes, suggesting the existence of close linkage between the tva and tvc loci. Therefore, an indirect selection approach using subgroup C viruses can be employed to generate stocks resistant to subgroup A LLV, obviating contamination with the most common agent causing LL in field condition.

• Journal of the Korean Applied Science and Technology
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• v.29 no.1
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• pp.102-107
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• 2012

The recovery of a Pt anode in a PEMFC through 30 ppm $H_2S/H_2$ exposure was evaluated by using a cyclic voltametry(CV) scan. First, the PEMFC unit cell performanc loss was measured three times under an anode feeding with 30 ppm $H_2S/H_2$ for 1hr at $0.5A/cm^2$ of current density. The initial cell performance was $1.16A/cm^2$ at 0.6 V without $H_2S$ poisoning. After first poisoning step for 1hr the cell performance was decrease to $0.77A/cm^2$, and the further poisoning steps decreased up 0.57 V. Finally, the recovery of the cell performance of $H_2S$ poisoned PEMFC was achieved up to 90.3% by applying CV scan. Moreover, we also found out that another possible approach for over 80% recovery of the cell performance of $H_2S$ poisoned anode Pt catalyst layer was to just inject fresh hydrogen into the anode feeding stream.

• Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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• 2008.05a
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• pp.47-70
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• 2008

Cost efficiency is today the primary requirement in the paper and board industry. This has led therefore, to a greater preponderance of products with specifically designed functionality to take account of current industry needs. Continually increasing machine coating speeds together with these new coating colour components have put more emphasis on the importance of the correct rheology and water retention of the coating colours to achieve good runnability and end product quality. In the coating process, some penetration of the aqueous phase, to the base paper or board must occur to anchor the pre-coating to the base or the topcoat to the pre-coat. The aqueous phase acts as a vehicle not only for the binder, but also for the other components. If this water or material penetration is not controlled, there will be excessive material shift from the coating colour to the base, before immobilization of the coating colour will stop this migration. This can result in poor machine runnability, unstable system and uneven coating layer, impacting print quality. The performance of rheology modifiers or thickeners on the coating color have tended to be evaluated by the term, "water retention". This simple term is not sufficient to explain their performance changes during coating. In this paper we are introducing a new concept of "material retention", which takes note of the total composition of the coating colour material and therefore goes beyond the concept of only water retention. Controlled material retention leads to a more uniform z-directional distribution of coating colour components. The changes that can be made to z-directional uniformity will have positive effects on print quality as measured by surface strength, ink setting properties, print gloss, mottling tendency. Optical properties, such as light scattering, whiteness and light fastness delivery should also be improved. Additionally, controlled material retention minimizes changes to the coating colour with time in re-circulation giving less fluctuation in quality in the machine direction since it more closely resembles fresh coating for longer periods. Use of the material retention concept enables paper and board producers to have more stable runnability (i.e. lower process costs), improved end product quality (i.e. better performance of used chemicals) and/or optimized use of coating colour components (i.e. lower total formulation cost)

• Journal of Chest Surgery
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• v.8 no.1
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• pp.19-28
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• 1975

The thoracoscopic study was reported on 21 cases of spontaneous pneumothorax requiring surgical management, and clinical values of thoracoscopic examination on spontaneous pneumothorax were also discussed. patients were treated in the Department of .Thoracic Surgery, Hanyang University Hospital for the period of two Years from May 1972 to April 1974. For exact detection of etiologic factors on spontaneous pneumothorax, the thoracoscopic examination in the intrapleural space was performed in parallel with X-ray study. this study, the difference of diagnostic and therapeutic significance between radiological and thoracoscopic findings were observed and compared simultaneously. The results are summerized as follows: Patients age was distributed between 3 and 70 years old with highest incidence in the age group of sixty decade [33. 3%], and sex ratio of male to female was 5:2. The tuberculous processes which developed superficial subpleural layer in the lung parenchyme, on the pulmonary surface could be observed by thoracoscopic examination in a characteristic picture. detection ratio of pulmonary tuberculosis by the radiologic study to that by thoracoscopy was 8:2. The adhesion between the visceral and the parietal pleura which could possibly make a rupture of the alveola and the visceral pleura was found to be localized in a small area of the lung surface. The other part of the lung surface was free of the adhesion and, therefore, the movement of the lung took place completely without any difficulty. The ruptured orifice of the pleura and pathological changes surrounding the orifice can be detected by thoracoscopy, but not by other means such as radiologic examination. A single tuberculous bleb and multiple emphysematous blebs were found on 6 cases out of 21 cases of spontaneous pneumothorax. Among these cases, radiologic Study revealed the bleb only in one patient. On the other hand, the blebs were found in all the six patients by means of thoracoscopic examination. It gives the detection ratio of bleb by radiologic study to that by thoracoscopy was 1:6. By thoracoscopy, the rupture on the lung surface were visualized on the 10 patients out of a total of 21 patients [10 patients of visual rupture]. However, the rupture of the pleura was not observed on the rest of 11 patients even by thoracoscopic examination [11 patients of non visual rupture]. Five patients [50%] out of ten who had the visual rupture on the lung surface was required a surgical operation to remove pneumothorax. For the patients who were detected to have the visual rupture of the pleura by thoracoscopy, be considered in the early stage of closed thoracostomy. of 21 patients, 16 patients [11 patients of non visual rupture of the pleura and 5 patients of visual rupture of the pleura] who received no surgical management, were treated with closed thoracostomy with continuous suction, and the` pneumothorax was healed completely up in each cases. Therapeutic measures for the remaining 5 patients of visual rupture of the pleura who were subjected to surgical approach for radical treatment of spontaneous pneumothorax were accordingly complicated, and the following different procedures were properly indicated case by case, that is, rib resection thoracostomy, simple closure of ruptured visceral pleura, wedged resection of the lung, and lobectomy.

• World Technopolis Review
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• v.8 no.2
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• pp.74-81
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• 2019

Cities will soon host two third of the population worldwide, and already today 80% of the world energy is used in the 20 largest cities. Urban areas create 80% of the greenhouse gas emission, so we should take care that urban areas are smart and sustainable as implementations have especially here the greatest impact. Smart Cities (SC) or Smart Sustainable Cities (SSC) are the actual concepts that describe methodologies how cities can handle the high density of citizens, efficiency of energy use, better quality of life indicators, high attractiveness for foreign investments, high attractiveness for people from abroad and many other critical improvements in a shifting environment. But if we talk about Entrepreneurship Ecosystem and Innovation, we do not see a lot of literature covering this topic within those SC/SSC concepts. It seems that 'Smart' implies that all is embedded, or isn't it properly covered as brick stone of SC/SSC concepts, as they are handled in another 'responsibility silo', meaning that the policy implementation of a Science and Technology Park (STP) is handled in another governing body than SC/SSC developments. If this is true, we will obviously miss a lot of synergy effects and economies of scale effects. Effects that we could have in case we stop the siloed approaches of STPs by following a more holistic concept of a Smart Sustainable City, covering also a continuous flow of innovation into the city, without necessarily always depend on large corporate SSC solutions. We try to argue that every SSC should integrate SP/STP concepts or better their features and services into their methodology. The very limited interconnectivity between these concepts within the governance models limits opportunities and performance in both systems. Redesigning the architecture of the governance models and accepting that we have to design a system-of-systems would support the possible technology flow for smart city technologies, it could support testbed functionalities and the public-private partnership approach with embedded business models. The challenge is of course in complex governance and integration, as we often face siloed approaches. But real SSC are smart as they are connecting all those unconnected siloes of stakeholders and technologies that are not yet interoperable. We should not necessarily follow anymore old greenfield approaches neither in SSCs nor in SP and STP concepts from the '80s that don't fit anymore, being replaced by holistic sustainability concepts that we have to implement in any new or revised SSC concepts. There are new demands for each SP/STP being in or close to an SC/SCC as they have a continuous demand for feeding the technology base and the application layer and should also act as testbeds. In our understanding, a big part of STP inputs and outputs are still needed, but in a revised and extended format. We know that most of the SC/STP studies claim the impact is still far from understood and often debated, therefore we must transform the concepts where SC/STPs are not own 'cities', but where they act as technology source and testbed for industry and new SSC business models, being part of the SC/STP concept and governance from the beginning.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Economic and Environmental Geology
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• v.43 no.4
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• pp.371-379
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• 2010

Fresh water injection test in a fractured bedrock aquifer was applied as an efficient approach to lower saline concentrations in the saltwater-freshwater transition zone formed by seawater intrusion in a coastal area. The methodology and effectiveness of fresh water injection for hydraulically controlling seawater intrusion is overwhelmingly site dependent, and there is an urgent need to characterize the permeable fractures or unconsolidated porous formations which can allow for seawater flow and transport. Considering aquifer characteristics, injection and monitoring boreholes were optimally designed and completed to inject fresh water through sand layer and fractured bedrock, respectively. We devised and used the injection system using double packer for easy field operation and maintenance. Overall fracture distribution was systematically identified from borehole image logs, and the section of fresh water injection was decided from injection test and monitoring. With fresh water injection, the fluid electrical conductivity of the monitoring well started to be lowered by the inflow of fresh water at the specific depth. And this inflow leaded to the replacement of the fluid in the upper parts of the borehole with fresh water. Furthermore, the injection effect lasted more than several months, which means that fresh water injection may contribute to the mitigation of seawater intrusion in a coastal area.

• 한국지구물리탐사학회:학술대회논문집
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• 2008.10a
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• pp.51-56
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• 2008

The waveform inversion for isotropic media has ever been studied since the 1980s, but there has been few studies for anisotropic media. We present a seismic waveform inversion algorithm for 2-D heterogeneous transversely isotropic structures. A cell-based finite difference algorithm for anisotropic media in time domain is adopted. The steepest descent during the non-linear iterative inversion approach is obtained by backpropagating residual errors using a reverse time migration technique. For scaling the gradient of a misfit function, we use the pseudo Hessian matrix which is assumed to neglect the zero-lag auto-correlation terms of impulse responses in the approximate Hessian matrix of the Gauss-Newton method. We demonstrate the use of these waveform inversion algorithm by applying them to a two layer model and the anisotropic Marmousi model data. With numerical examples, we show that it's difficult to converge to the true model when we assumed that anisotropic media are isotropic. Therefore, it is expected that our waveform inversion algorithm for anisotropic media is adequate to interpret real seismic exploration data.