• Title/Summary/Keyword: lattice thermal conductivity

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Application of Modified Rapid Thermal Annealing to Doped Polycrystalline Si Thin Films Towards Low Temperature Si Transistors

  • So, Byung-Soo;Kim, Hyeong-June;Kim, Young-Hwan;Hwang, Jin-Ha
    • Korean Journal of Materials Research
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    • v.18 no.10
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    • pp.552-556
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    • 2008
  • Modified thermal annealing was applied to the activation of the polycrystalline silicon films doped as p-type through implantation of $B_2H_6$. The statistical design of experiments was successfully employed to investigate the effect of rapid thermal annealing on activation of polycrystalline Si doped as p-type. In this design, the input variables are furnace temperature, power of halogen lamps, and alternating magnetic field. The degree of ion activation was evaluated as a function of processing variables, using Hall effect measurements and Raman spectroscopy. The main effects were estimated to be furnace temperature and RTA power in increasing conductivity, explained by recrystallization of doped ions and change of an amorphous Si into a crystalline Si lattice. The ion activation using rapid thermal annealing is proven to be a highly efficient process in low temperature polycrystalline Si technology.

Sn Filling Effects on the Thermoelectric Properties of CoSb3 Skutterudites (Skutterudite CoSb3의 열전특성에 미치는 Sn의 충진효과)

  • Jung, Jae-Yong;Ur, Soon-Chul;Kim, Il-Ho
    • Korean Journal of Materials Research
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    • v.16 no.9
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    • pp.529-532
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    • 2006
  • Sn-filled $Co_8Sb_{24}$ skutterudites were synthesized by the encapsulated induction melting process. Single ${\delta}-phase$ was successfully obtained by subsequent annealing and confirmed by X-ray diffraction analysis. Temperature dependences of Seebeck coefficient, electrical resistivity and thermal conductivity were examined from 300 K to 700 K. The positive Seebeck coefficient confirmed the p-type conductivity of the Sn-filled $Co_8Sb_{24}$. Electrical resistivity increased with increasing temperature, which shows that the Sn-filled $Co_8Sb_{24}$ skutterudite is a highly degenerate semiconductor. Thermal conductivity was reduced by Sn-filling because the filler atoms acted as phonon scattering centers in the skutterudite lattice. Thermoelectric figure of merit was enhanced by Sn filling and its optimum filling content was considered to be $z{\leq}0.5$ in the $Sn_zCo_8Sb_{24}$ system.

Thermoelectric Properties of Nano Structured $CoSb_3$ Synthesized by Mechanical Alloying

  • Ur, Soon-Chul;Kwon, Joon-Chul;Choi, Moon-Kwan;Kweon, Soon-Yong;Hong, Tae-Whan;Kim, Il-Ho;Lee, Young-Geun
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.665-666
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    • 2006
  • Undoped $CoSb_3$ powders were synthesized by mechanical alloying (MA) of elemental powders using a nominal stoichiometric composition. Nano-structured, single-phase skutterudite $CoSb_3$ was successfully produced by vacuum hot pressing (VHP) using MA powders without subsequent annealing. Phase transformations during synthesis were investigated using XRD, and microstructure was observed using SEM and TEM. Thermoelectric properties in terms of Seebeck coefficient, electrical conductivity, thermal conductivity and figure of merit(ZT) were systematically measured and compared with the results of analogous studies. Lattice thermal conductivity was reduced owing to increasing phone scattering in nano-structured MA $CoSb_3$, leading to enhancement in the thermoelectric figure of merit. MA associated with VHP technique offers an alternative potential processing route for the process of skutterudite.

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Microstructure and thermal conductivity of AIN ceramics with ${Y_2}{O_3}$ fabricated by pressureless sintering (상압 소결법으로 제조된 이트리아 첨가 질화 알루미늄 세라믹스의 미세 구조 및 열전도도)

  • Chae, Jae-Hong;Park, Joo-Seok;Ahn, Jong-Pil;Kim, Kyoung-Hun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.1
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    • pp.33-38
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    • 2009
  • The effect of ${Y_2}{O_3}$ as a sintering additive on thermal conductivity and microstructure of pressureless sintered AIN ceramics was investigated at sintering temperature range from 1,700 to $1,900^{\circ}C$. ${Y_2}{O_3}$ added AIN specimens showed higher densification rate than pure AIN because of the formation of the yttrium aluminates secondary phase by reaction of ${Y_2}{O_3}$ and ${Al_2}{O_3}$ of AIN surface. The thermal conductivity of AIN specimens was promoted by the addition of ${Y_2}{O_3}$ in spite of the formation of secondary phase in AIN gram boundaries and grain boundary triple junction, because ${Y_2}{O_3}$ addition could reduced the oxygen contents in AIN lattice which is primary factor of thermal conductivity. The them1al conductivity of AIN specimens was promoted by increasing sintering time because the increases of average grain size and the elimination of secondary phases from the grain boundary due to the evaporation. Particularly. the thermal conductivity of AIN specimen sintered at $1,900^{\circ}C$ for 5 hours improved over 20 %. $141\;Wm^{-1}K^{-1}$, compared with the specimen sintered at $1,900^{\circ}C$ for 1 hour.

Effects of $Y_2O_3$ addition and sintering time on denazification and thermal conductivity of AlN ceramics during hot-press sintering ($Y_2O_3$ 첨가와 소결 시간이 AlN 세라믹스의 일축 가압 소결 거동 및 열전도도에 미치는 영향)

  • Chae, Jae-Hong;Park, Joo-Seok;Ahn, Jong-Pil;Kim, Kyoung-Hun;Lee, Byung-Ha
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.18 no.6
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    • pp.237-241
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    • 2008
  • Hot-press sintering of AlN ceramics were carried out with $Y_2O_3$ as sintering additive at a sintering temperature $1,750{\sim}1,850^{\circ}C$. The effect of $Y_2O_3$ addition and sintering time on sintering behavior and thermal conductivity of AlN ceramics was investigated. $Y_2O_3$ added AlN showed noticeably higher denazification rate than pure AlN. The thermal conductivity of AlN specimens was promoted by the addition of $Y_2O_3$ in spite of the formation of YAG secondary phase in AlN grain boundaries and grain boundary triple junction because $Y_2O_3$ addition could reduced the oxygen contents in AlN lattice which is primary factor of thermal conductivity. Typically, the thermal conductivity of 5 wt% $Y_2O_3$ added specimen was dramatically improved by the increase of sintering time because the elimination of YAG secondary phases from the grain boundary due to the evaporation, as well as the grain-growth of AlN grains.

Self Heating Effects in Sub-nm Scale FinFETs

  • Agrawal, Khushabu;Patil, Vilas;Yoon, Geonju;Park, Jinsu;Kim, Jaemin;Pae, Sangwoo;Kim, Jinseok;Cho, Eun-Chel;Junsin, Yi
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.2
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    • pp.88-92
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    • 2020
  • Thermal effects in bulk and SOI FinFETs are briefly reviewed herein. Different techniques to measure these thermal effects are studied in detail. Self-heating effects show a strong dependency on geometrical parameters of the device, thereby affecting the reliability and performance of FinFETs. Mobility degradation leads to 7% higher current in bulk FinFETs than in SOI FinFETs. The lower thermal conductivity of SiO2 and higher current densities due to a reduction in device dimensions are the potential reasons behind this degradation. A comparison of both bulk and SOI FinFETs shows that the thermal effects are more dominant in bulk FinFETs as they dissipate more heat because of their lower lattice temperature. However, these thermal effects can be minimized by integrating 2D materials along with high thermal conductive dielectrics into the FinFET device structure.

Effects of Alloying Elements on the Tensile Strength and Electrical Conductivity of Cu-Fe-P Based Alloys (Cu-Fe-P계 합금의 강도 및 전기전도도에 미치는 첨가 원소의 영향)

  • Kim, Dae-Hyun;Lee, Kwang-Hak
    • Korean Journal of Materials Research
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    • v.20 no.2
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    • pp.65-71
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    • 2010
  • In this study, the effect of Sn and Mg on microstructure and mechanical properties of Cu-Fe-P alloy were investigated by using scanning electron microscope, transmission electron microscope, tensile strength, electrical conductivity, thermal softening, size and distribution of the precipitation phases in order to satisfy characteristic for lead frame material. It was observed that Cu-0.14wt%Fe-0.03wt%P-0.05wt%Si-0.1wt%Zn with Sn and Mg indicates increasing tensile strength compare with PMC90 since Sn restrained the growth of the Fe-P precipitation phase on the matrix. However, the electrical conductivity was decreased by adding addition of Sn and Mg because Sn was dispersed on the matrix and restrained the growth of the Fe-P precipitation. The size of 100 nm $Mg_3P_2$ precipitation phase was observed having lattice parameter $a:12.01{\AA}$ such that [111] zone axis. According to the results of the study, the tensile strength and the electrical conductivity satisfied the requirements of lead frame; so, there is the possibility of application as a substitution material for lead frame of Cu alloy.

Self-Heating Effects in β-Ga2O3/4H-SiC MESFETs (β-Ga2O3/4H-SiC MESFETs에서의 Self-Heating)

  • Kim, Min-Yeong;Seo, Hyun-Su;Seo, Ji-Woo;Jung, Seung-Woo;Lee, Hee-Jae;Byun, Dong-Wook;Shin, Myeong-Cheol;Schweitz, Michael A.;Koo, Sang-Mo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.35 no.1
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    • pp.86-92
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    • 2022
  • Despite otherwise advantageous properties, the performance and reliability of devices manufactured in β-Ga2O3 on semi-insulating Ga2O3 substrates may degrade because of poorly mitigated self-heating, which results from the low thermal conductivity of Ga2O3 substrates. In this work, we investigate and compare self-heating and device performance of β-Ga2O3 MESFETs on substrates of semi-insulating Ga2O3 and 4H-SiC. Electron mobility in β-Ga2O3 is negatively affected by increasing lattice temperature, which consequently also negatively influences device conductance. The superior thermal conductivity of 4H-SiC substrates resulted in reduced β-Ga2O3 lattice temperatures and, thus, mitigates MESFET drain current degradation. This, in turn, allows practically reduced device dimensions without deteriorating the performance and improved device reliability.

Oxygen Permeation Properties and Phase Stability of Co-Free $La_{0.6}Sr_{0.4}Ti_{0.2}Fe_{0.8}O_{3-{\delta}}$ Oxygen Membrane

  • Kim, Ki-Young;Park, Jung-Hoon;Kim, Jong-Pyo;Son, Sou-Hwan;Park, Sang-Do
    • Korean Membrane Journal
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    • v.9 no.1
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    • pp.34-42
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    • 2007
  • A perovskite-type ($La_{0.6}Sr_{0.4}Ti_{0.2}Fe_{0.8}O_{3-{\delta}}$) dense ceramic membrane was prepared by polymerized complex method, using citric acid as a chelating agent and ethylene glycol as an organic stabilizer. Effect of Ti addition on lanthanum-strontium ferrite mixed conductor was investigated by evaluating the thermal expansion coefficient, the oxygen flux, the electrical conductivity, and the phase stability. The thermal expansion coefficient in air was $21.19\;{\times}\;10^{-6}/K$ at 473 to 1,223 K. At the oxygen partial pressure of 0.21 atm ($20%\;O_2$), the electrical conductivity increased with temperature and then decreased after 973 K. The decrement in electrical conductivity at high temperatures was explained by a loss of the lattice oxygen. The oxygen flux increased with temperature and was $0.17\;mL/cm^2{\cdot}min$ at 1,223 K. From the temperature-dependent oxygen flux data, the activation energy of oxygen ion conduction was calculated and was 80.5 kJ/mol at 1,073 to 1,223 K. Also, the Ti-added lanthanum-strontium ferrite mixed conductor was structurally and chemically stable after 450 hours long-term test at 1,173 K.

Optical and Electrical Property of $\beta$-Phases $In_2Te_3$ Single Crystal by Vertical Bridgman Method (수직 Bridgman법으로 제작한 $\beta-In_2Te_3$ 단결정의 광학적 전기적 특성)

  • Kim, Nam-Oh;Lee, Kang-Yeon;Jeong, Byeong-Ho;Choi, Youn-Ok;Shin, Hwa-Young;Cho, Geum-Bae
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.58 no.4
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    • pp.451-454
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    • 2009
  • The $\beta-In_2Te_3$ single crystal was grown by vertical Bridgman method. The $\beta-In_2Te_3$ single crystal had a face centered cubic(fcc) structure. The lattice constants were found to be $a\;=\;0.617\;{\AA}$. The direct optical energy gap ($E_g$) was found to be 1.11 ev at 300 K. Raman spectra peak of $\beta-In_2Te_3$ single crystal showed the low $E_{LO}$ mode at $105\;cm^{-1}$. The electrical conduction type was measured by the thermal method and was p-type. The electrical conductivity was found to be $1.8\;{\times}\;10^{-2}\;{\Omega}^{-1}cm^{-1}$ at 300 K. The activation energy was found to be 0.51 eV.