• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.125-129
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• 2022

The current display technology tends to be highly integrated with high resolution, the element size is gradually downsized, and the structure becomes complicated. Inductively coupled plasma (ICP) dry etcher of various types of etching equipment is a structure that places a large multi-divisional antenna source on the top lid, passes current to the Antenna, and generates plasma using the induced magnetic field generated at this time. However, in the case of a device of a large area size, a support that can withstand a load structurally is necessary, and when these support portions are applied, arrangement of antenna becomes difficult, which causes reduction in uniformity. As described above, the development of antenna source of a large area having a uniform plasma density on the whole surface is difficult to restrict hardware (H/W). As a solution to this problem, we confirmed the change in uniformity of plasma by applying two kinds of specific shape faraday shield(FICP) to the lower part of the large area upper lid antenna of 6 and 8th more than that generation size. In this thesis, we verify the faraday shield effect which can improve plasma uniformity control of ICP dry etcher equipment applied to medium and large displays.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.29 no.1A
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• pp.95-100
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• 2009

This study proposed mix proportions of early strength pavement concrete for large size area using calcium nitrate. Therefore, we used type III cement with calcium nitrate. Laboratory tests conducted to air content, slump loss test, setting time test, compressive strength test and flexural strength test. Our early strength pavement concrete mixture proportion proposed in this study for large size area attained the required compressive strength of 21 MPa and a flexural strength of 3.8 MPa, which allowed it to be opened to traffic within 8 hours. Based on test results, we suggested optimum mix proportions of early strength pavement concrete for large size area using calcium nitrate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.182-183
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• 2007

In large area scanning with a micro-electron column, the optimal operation condition for the best visibility was studied. A micro-electron column can realize nearly unlimited scanning size with distribution of micro-electron columns, therefore applicable to large sized SEM or VSEM. The maximum scanning size with a micro-electron column was about $200cm^2$ when only one deflector was employed. However, a double deflector equipped micro-electron column provided 1.7 times larger scanning area with the same visibility as that of one deflector.

• 한국정보디스플레이학회:학술대회논문집
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• 2007.08a
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• pp.85-86
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• 2007

As the manufacturing capacity needs for large size LCD TV shifts very fast into next generation, equipment manufactures face more challenges in development of the systems which can accommodate productivity, reliability and high process quality requirements from the panel makers. AKT committed to continue its contribution to the growth of the LCD market by providing excellent PECVD products. The cost containment and performance improvement are key challenges for large size processing equipment development and this presentation discusses various challenges and AKT's solutions in developing large size PECVD equipment beyond Gen. 8.

• Journal of the Korean Society of Costume
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• v.36
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• pp.43-52
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• 1998

This study was to analyze properties of the foot form through a development figure of the surface area by factor analysis, cluster analysis, and reglation analysis. This study was performed 71 college women between 19 adn 23 years old residing in Pusan urban area. The result was as follows; 1. There are four factors selected by factor analysis. The 1st factor signifies the surface area of the toe. The 2nd factor signifies the surface area between Metatarsal circumfer-ence and Tarsal circumference. The 3rd factor signifies the surface area between Toe circumference and Metatarsal circumference. The 4th factor signifies the surface area between Heel-ankle circumference. 2. There are three clusters selected by fast cluster. Cluster 1 : The foot size, most parts of foot surface area and total foot surface area are relatively small to other clusters, but the surface area between Metatarsal circumference and Tarsal circumference is relatively large to other clusters. Cluster 2 : The foot size, all parts of foot surface area and total foot surface area are relatively large to other clusters as Cluster 1, but the surface area of the sole of the heel and the ankle is relatively large to other clusters. 3. Total surface area of the foot=-274.94+24.01* Foot lengh+9.28*Metatarsal circumference.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.6
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• pp.481-486
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• 2007

In large area scanning with a micro-electron-column, the operating condition for the best resolution was investigated in factors of working distance and field of view. The resolution of a test sample was dependent on electron beam energy and scanning field size. The best resolution with single deflector was obtained at 300 V and 30 mm in the electron emitting tip voltage and a working distance, respectively. The scanning area at that condition was $13.9{\times}13.9mm^2$, linearly increased with the working distance. Double deflector was employed for larger scanning size without increasing working distance, but showed only 1.7 times larger than that of single deflector, and the resolution was inverse proportional to the scanning size.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.5
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• pp.71-80
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• 1995

The usual approach for desinging a fast multiplier involves finding a way to quickly add up all the partial products, based on parital product recoding scheme and carry-save addition. This paper describes theoretical medels for area and time complexities of Multibit Reconding Paralle Multiplier (MRPM), which is a generalization of the modified Booth recoding scheme. Based on the proposed models, time performance, hardware requirements and area-time efficiency are analyzed in order to determine optimal recoding size for very large scale integration (VLSI) realization of the MRPM. Some simulation results show that the MRPM with large multiplier and multiplicand size has optimal area-time efficiency at the recoding size of 4-bit.

• The Korean Journal of Ecology
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• v.17 no.4
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• pp.453-461
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• 1994

Size class structure and vegetative growth of a perennial herb of the temperate deciduous forests, Symplocarpus renifolius Schott, were studied from 1991 to 1994 in Namhansansung, Kyonggi Province, Korea. The size class structures of leaf number and leaf area per individual followed bell-shape curve, i.e. frequency of middle class was relatively high. The leaf area increased from the late-March to mid-May. At the end of the growing season, leaf area(length X breadth) was proportional to biomass, especially aboveground biomass. The leaf number and leaf area per individual increased at the rate of 0.08 leaf/year and 9.7 $cm^2/year$, respectively. The size of the individuals in large-sized classes, in leaf number and leaf area, decreased in next year, while the size of the individuals in small-sized classes increased. Therefore, it was concluded that the size class structure of S. renifolius population was largely determined by the growth form.

• Journal of Radiation Industry
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• v.8 no.3
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• pp.147-153
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• 2014

This paper describes a large area CMOS image sensor module Implementation using the precision align inspection program. This work is needed because wafer cutting system does not always have high precision. The program check more than 8 point of sensor edges and align sensors with moving table. The size of a $2{\times}1$ butted CMOS image sensor module which except for the size of PCB is $170mm{\times}170mm$. And the pixel size is $55{\mu}m{\times}55{\mu}m$ and the number of pixels is $3,072{\times}3,072$. The gap between the two CMOS image sensor module was arranged in less than one pixel size.

• New & Renewable Energy
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• v.3 no.1 s.9
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• pp.27-37
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• 2007

This study is to analyse the feasibility for providing Co-generation plant in Apartment Complex for 4 typical Apartment Complexes located Seoul metropolitan area, The selected complexes are three midium-large size Apartment[nearby 35pyoug of floor area] and one complex of small size Apartment[below 25 pyoung of floor area] for comparison. The necessary data for the study were collected with visitation of each site. The study showed very positive result for the three medium-large size Apartment Complexes of which the average floor area is more than 25 pyoungs, while negative result for the Complex of which average floor area is less than 25 pyoungs. Other than floor size it was found that the electric consumption density also influence the economic feasibility. In study the unit fixed cost of the energy produced from Co-generation plant is one third of the unit variable cost[fuel cost] and it seems better to select high thermal efficiency machine for Co-generation plant even with some higher cost of the plant.