• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.624-627
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• 2003

Microcontact printing (uCP) of alkanethiols on gold was the first representative of soft-lithography processes. This is an attempt to enhance the accuracy of classical to a precision comparable with optical lithography, creating a low-cost, large-area, and high-resolution patterning process. Microcontact printing relies on replication of a pattered PDMS stamp from a master to form an elastic stamp that can be inked with a SAM solution(monolayer -forming ink) using either immersion inking or contact inking. The inked PDMS stamp is then used to print a pattern that selectively protects the gold substrate during the subsequent etch.

• Macromolecular Research
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• 제12권1호
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• pp.127-133
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• 2004

We have studied the surface micelle formation of polystyrene-b-poly(2-vinyl pyridine) (PS-b-P2VP) at the air-water interface. A series of four PS-b-P2VPs were synthesized by anionic polymerization, keeping the PS block length constant (28 kg/㏖) and varying the P2VP block length (1, 11, 28, or 59 kg/㏖). The surface pressure-area ($\pi$-A) isotherms were measured and the surface morphology was studied by atomic force microscopy (AFM) after Langmuir-Blodgett film deposition onto silicon wafers. At low surface pressure, the hydrophobic PS blocks aggregate to form pancake-like micelle cores and the hydrophilic P2VP block chains spread on the water surface to form a corona-like monolayer. The surface area occupied by a block copolymer is proportional to the molecular weight of the P2VP block and identical to the surface area occupied by a homo-P2VP. It indicates that the entire surface is covered by the P2VP monolayer and the PS micelle cores lie on the P2VP monolayer. As the surface pressure is increased, the $\pi$-A isotherm shows a transition region where the surface pressure does not change much with the film compression. In this transition region, which displays high compressibility, the P2VP blocks restructure from the monolayer and spread at the air-water interface. After the transition, the Langmuir film becomes much less compressible. In this high-surface-pressure regime, the PS cores cover practically the entire surface area, as observed by AFM and the limiting area of the film. All the diblock copolymers formed circular micelles, except for the block copolymer having a very short P2VP block (1 kg/㏖), which formed large, non-uniform PS aggregates. By mixing with the block copolymer having a longer P2VP block (11 kg/㏖), we observed rod-shaped micelles, which indicates that the morphology of the surfaces micelles can be controlled by adjusting the average composition of block copolymers.

• Composites Research
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• 제36권5호
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• pp.377-382
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• 2023

그래핀 기반 소자의 성능을 개선하기 위해서는 그래핀과 기판 사이의 계면 상호 작용을 이해하는 것이 중요하다. 본 연구에서는 유전체 기판에 놓인 단일층 그래핀의 접착에너지를 모드 I 시험을 통해 측정하였다. 메탄과 수소 가스 분위기에서 화학기상증착법(CVD)을 통해 구리 포일 위에 대면적 단일층 그래핀을 합성하였다. 합성한 그래핀을 폴리머를 이용한 습식 전사 공정을 통해 유전체 기판 위에 전사하였다. 이중외팔보 형상을 이용한 모드 I 시험을 통해 기판 위에 올려진 그래핀을 기계적으로 박리하였다. 이 때, 얻어지는 힘-변위 곡선을 분석하여 접착에너지를 평가하였는데, 산화실리콘 기판에 대해서는 1.13 ± 0.12 J/m², 질화실리콘 기판에 대해서는 2.90 ± 0.08 J/m²의 접착에너지를 나타냈다. 본 연구를 통해 유전체 기판 위에 올려진 CVD 그래핀의 계면 상호 작용력에 대해 정량적인 측정을 진행하였다.

• 접착 및 계면
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• 제22권2호
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• pp.57-62
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• 2021

원자층 두께의 이차원 전이금속 칼코겐화합물은 그래핀과 비슷한 형태의 이차원 구조로 이루어져 있으며, 전기적 특성을 비롯한 우수한 물리적특성을 보여 차세대 반도체 물질로 각광받고 있다. 그래핀의 대면적 합성의 경우 이미 기술적으로 성숙되어 화학기상 증착법을 이용하여 웨이퍼 수준의 크기만큼 단결정 합성이 가능해졌으나, 이차원 전이금속 칼코겐화합물의 경우 현재 수에서 수백 ㎛ 수준에 머물러 있는 것이 실정이다. 본 논문에서는 최근에 보고된 용융염 기반의 화학기상증착법을 통한 이차원 단층 MoS2₂합성법에서 공정변수가 MoS₂단결정의 크기에 미치는 영향에 대해 조사하였다. 그 결과, 최적화된 조건에서 약 420 ㎛의 고품질 단층 단결정 MoS₂가 합성될 수 있다는 사실을 광학 현미경, 원자력 현미경, 라만 분광, 그리고 광루미네선스 분광 분석을 통하여 밝혀내었다.

• Carbon letters
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• 제15권3호
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• pp.151-161
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• 2014

Exceptional progress has been made with chemical vapor deposition (CVD) of graphene in the past few years. Not only has good monolayer growth of graphene been achieved, but large-area synthesis of graphene sheets has been successful too. However, the polycrystalline nature of CVD graphene is hampering further progress as graphene property degrades due to presence of grain boundaries. This review will cover factors that affect nucleation of graphene and how other scientists sought to obtain large graphene domains. In addition, the limitation of the current research trend will be touched upon as well.

• Bulletin of the Korean Chemical Society
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• 제35권8호
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• pp.2281-2284
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• 2014

Polystyrene beads (PS beads) with narrow size distribution were synthesized, and their diameter was controlled from 1.2 to $5{\mu}m$ by varying the injection rate of a styrene solution containing initiator and the concentration of reactant, such as initiator and capping material. The diameter of the PS beads increased with increasing in the injection rates and the initiator concentration or decreasing the capping material concentration. Then, we used the PS beads as building block, and organized them into a hexagonally close-packed monolayer on substrate with template-assisted manual assembly. We showed perfect hexagonally close-packed organization of the PS beads with various sizes in large-scale area. And we demonstrated the superiority of the dry manual assembly over the wet self-assembly in terms of simplicity, speed, perfect ordering, and large scale.

• 한국결정학회지
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• 제16권2호
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• pp.89-101
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• 2005

Among many material processing related issues for successful scaling down of devices for the next 10 years or so, the advanced gate stack and interconnect technology are two most critical research areas, which need technical innovation. The introduction of new metallic films and appropriate processing technologies are required more than ever. Especially, as the device downscaling continues well into sub 50 nm regime, the paradigm for metal nano film deposition technique research has been shifted to high conformality, low growth temperature, high quality with uniformity at large area wafers. Regarding these, ALD has sparked a lot of interests for a number of reasons. The process is intrinsically atomic in nature, resulting in the controlled deposition of films in sub-monolayer units with excellent conformality. In this paper, the overview on the current issues and the future trends in device processing technologies related to metal nano films as well as the R&D trends in these applications will be discussed. The focus will be on the applications for metal gate, capacitor electrode for DRAM, and diffusion barriers/seed layers for Cu interconnect technology.

• 한국전기전자재료학회논문지
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• 제24권12호
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• pp.1002-1009
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• 2011

The light extraction efficiency of top-emitting organic light-emitting diode (OLED) was improved by insertion of corrugation patterns between indium tin oxide and organic layers. The corrugation patterns was fabricated by nanosphere lithography, which could form a self-assembled particle monolayer over a large area. The electrical and optical properties for the OLED devices fabricated by vacuum evaporation, were investigated. We have demonstrated the enhancement of the power efficiency of corrugated OLED. As a result, the power efficiency of the corrugated OLED was found to be more than 42%.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.188.2-188.2
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• 2014

Chemical vapor deposition (CVD) method is usually used to grow high-quality large area graphene. In the CVD process, copper is an especially important catalytic-substrate due to the fact that graphene films grown on Cu foils are predominantly one monolayer thick. In this study, we has grown graphene on several types of copper substrates: Cu foils and copper single crystal surfaces such as Cu(100) and Cu(111) are chosen. To investigate the differences between graphene grown on foils and single crystals, we use Raman spectroscopy, X-ray diffraction and atomic force microscopy. Details of the experimental results will be presented.

• 한국환경보건학회지
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• 제38권1호
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• pp.1-7
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• 2012

Carbon nanotubes (CNTs) stand at the frontier of nanotechnology and are destined to stimulate the next industrial revolution. Rapid increase in their production and use in the technology industry have led to concerns over the effects of CNT on human health and the environment. The prominent use of CNTs in biomedical applications also increases the possibility of human exposure, while properties such as their high aspect ratio (fiber-like shape) and large surface area raise safety concerns for human health if exposure does occur. It is crucial to develop viable alternatives to in vivo tests in order to evaluate the toxicity of engineered CNTs and develop validated experimental models capable of identifying CNTs' toxic effects and predicting their level of toxicity in the human respiratory system. Human lung epithelial cells serve as a barrier at the interface between the surrounding air and lung tissues in response to exogenous particles such as air-pollutants, including CNTs. Monolayer culture of the key individual cell types has provided abundant fundamental information on the response of these cells to external perturbations. However, such systems are limited by the absence of cell-cell interactions and their dynamic nature, which are both present in vivo. In this review, we suggested two viable alternatives to in vivo tests to evaluate the health risk of human exposure to CNTs.