• 한국재료학회지
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• 제12권8호
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• pp.676-681
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• 2002

Microstructure, mechanical properties, and oxidation resistance of TiAIN thin films deposited on quenched and tempered STD61 tool steel by arc ion plating were studied using XRD, XPS and micro-balance. The TiAIN film was grown with the (200) orientation. The grain size of TiAIN thin film decreased with increasing Al contents, while chemical binding energy increased with Al contents. When hard coating films were oxidized at $850^{\circ}C$ in air, oxidation resistance of both TiN and TiCN films became relatively lower since the surface of films formed non-protective film such as $TiO_2$. However, oxidation resistance of TiAIN film was excellent because its surface formed protective layer such as $_A12$$O_3$ and $_Al2$$Ti_{7}$$O_{15}$, which suppressed oxygen intrusion.

• 한국정밀공학회지
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• 제13권11호
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• pp.32-37
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• 1996

Using the are ion plating(AIP) process, TiN coating was deposited onto high speed steel substrates. The effects of coating thickness, titanisum interlayer and shield on wear resisting capability of the coated tools were investigated. In order to promote good adhesion between the substrate and the TiN coating a thin Ti interlayer was deposited. A shield was set up also between Ti target and high speed steel substrates to prevent molten droplets from reaching the substrate. Three series of varying thickness of TiN coated layer were prepared with or without the Ti interlayer, and with or without the shield. The tools with the Ti layer and the shield showed longer tool lifes than those of other series of tools and the commercially available TiN coated HSS tools, by up to 70%.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 제5회 압연심포지엄 신 시장 개척을 위한 압연기술
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• pp.91-97
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• 2004

The drawbead is one of the most important factors in sheet metal forming for automotive parts. So clarifying the friction characteristics between sheets and drawbead is essential to improve the formability of sheet metal. Therefore in this study, drawbead friction test was performed at various bead materials(FC300, HC891, FCD550, HD700, HK600, HK700, SKD11) and surface treatment of beads(Base, induction hardening, Cr plating, ion nitriding, Toyoda diffusion process, TiCN, TiN, CrN). Circular shape bead has been used for the test. The results show that friction and drawing characteristics were mainly influenced by surface treatment.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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• pp.600-602
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• 1995

Using the $O_2$ RIE process, 20{\mu}m$-height polyimide microstructures are fabricated. In LIGA-like process, metal microstructure can be formed by the electroplating using these polyimide microstructures as a plating mould. Reactive ion Etching technique using oxygen gas is used for the patterning of polyimide. The etching rate of the polyimide is increased with increased pressure and RF power. The anisotropic vertical sidewall can be obtained at low pressure, but the etched surface state is not so good yet. "Micrograss", which is formed during the RIE and disturbs uniform electroplating, can be removed effectively by the wet itching of the chromium sacrificial layer. More studies about the improvement of an etched surface state and the removal of microsgrass are needed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.307-314
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• 1999

By using AIP(Arc Ion Plating) of a physical vapor deposition for the first time in Korea a ceramic tool whose surface is coated single layeredly with TiN is developed. In addition, cutting resistance appearing in the process of finishing cut of hardened carbon tool steel, STC3 is studied. The principal and radial components of cutting resistance in those cutting conditions appear to be the same or similar, and the feed component is relatively small. The feed component is found to be in proportion to cutting width, and the radial component in proportion to cutting thickness. Owing to coating the cutting resistance of a TiN coated ceramic tool increases compared with that of a general ceramic tool.

• 한국표면공학회지
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• 제29권6호
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• pp.607-614
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• 1996

Yttrium(Y) coating was incorporated by ion-plating method either directly on the TiAl substrate or after pack aluminizing on TiAl to improve the oxidation resistance of TiAl alloy. After Y-coating, heat treatment at low oxygen partial pressure was carried out. Performance of various coating was evaluated by isothermal and cyclic oxidation tests. A simple Y-coating without pack aluminizing can give a detrimental effect on the. oxidation resistance of TiAl alloy, because it enhances formation of $TiO_2$. On the other hand, a composite coating of aluminide-yttrium has shown excellent oxidation resistance. A continuous protective $Al_2O_3$ scale is formed on the aluminized TiAl, and Y-coating improves $Al_2O_3$ scale adherence and substantially prevents depletion of Al in the aluminide-coating layer.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1992년도 제15회 학술강연회초록집
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• pp.71-76
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• 1992

초고진공중에 있어서의 기계, 기기의 설계에 있어서 마찰의 제어는 가장 중요한 과제의 하나이다. 지금까지 그 마찰면의 윤활을 위해서는 고체 윤활제로서 Au, Ag 등 $MoS_2$ 피막이 많이 쓰여져 왔다. 또한 그것들의 피막 형성법으로서 Plasma Coating, Sputtering 및 Ion-Plating 등의 여러가지 피막형성법이 개발되어 왔다. 그러나 어느 경우도 형성된 $수\mum$의 피막의 마모에 의한 유한의 수명이 존재하고, 마찰게수의 면에서도 아직 충분하다고 말 할수 없는 것이 현상이다. 이것에 대하여 필자들은 우주에 있어서 사용을 목적으로 새로운 피막 형성법으로서 Tribo-Coating법을 개발하여 그 유효성을 나타내어 왔다. 본 연구에서는 초고진공중에 있어서 Tribo-Coating법에 의한 In막의 윤활 특성에 영향을 미치는 지배적 제인자의 역활을 밝히고져한다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.178-181
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• 2005

Quaternary Ti-Si-C-N coatings were deposited on WC-Co substrates by a hybrid coating system of arc ion plating (AIP) and sputtering techniques using Ti and Si targets, in an $Ar/N_2/CH_4$ gaseous mixture. The crystallinity, bending status, and microstructure of the Ti-Si-C-N coatings were measured by X-ray diffractometer (XRD) and X-ray photoelectron spectroscope (XPS), The micro-hardness of Ti(C,N) and Ti-Si-N coatings were about 30 and 40 GPa, respectively. As the Si was incorporated into Ti(C,N) coatings, the Ti-Si-C-N coatings having Si content of $8.9\;at.\%$ showed the maximum hardness value of about 55 GPa. In this work, the microstructure and mechanical properties of Ti-Si-C-N coatings were systematically investigated.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 추계총회 및 학술대회 논문집
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• pp.196-198
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• 2012

TiN 박막을 자전거용 서스펜션 프레임의 재질로 사용되는 고비강도 경량 합금에 적용하기 위해 Arc ion plating 방식으로 코팅하고 기계적 특성을 분석하였다. TiN 박막의 코팅 특성 평가는 XRD, 박막 경도, 마찰 계수, 밀착력을 측정하였고 피로시험을 실시하였다. 박막의 경도는 약 19 GPa로 측정되었고, 마찰 계수는 약 0.4로써 박막의 코팅 전(마찰계수 0.8)보다 낮아졌다. 밀착력은 약 13.9 N로 나타났으며, 피로 시험은 약 30,000회의 수직 하중 실험에도 박막의 가시적 크랙과 파손이 관찰되지 않았다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 추계총회 및 학술대회 논문집
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• pp.110-110
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• 2012

아크이온플레이팅법과 스퍼터링법을 이용하여 금형의 보호코팅으로서 CrTiAlSiN 박막을 합성하였다. 연구는 CrTiAlN 피막에 Si이 첨가됨에 따른 농도변화가 피막의 경도 및 내열성에 미치는 영향을 조사하였다. Si 함유량 변화에 따른 특성의 변화에 대해 XRD, TGA, 경도분석, 윤활성의 분석을 통해 조사하였으며, 함성된 피막은 기존 CrN 박막 대비 내열성이 우수하게 향상되었으며 경도의 향상과 낮은 윤활성을 보였다.