• Journal of the Korean institute of surface engineering
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• v.48 no.4
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• pp.179-184
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• 2015

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.

• Bulletin of the Korean Chemical Society
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• v.35 no.5
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• pp.1541-1544
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• 2014

• Bulletin of the Korean Chemical Society
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• v.34 no.7
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• pp.2183-2186
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• 2013

• Bulletin of the Korean Chemical Society
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• v.34 no.1
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• pp.275-278
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• 2013

• Journal of Biomedical Engineering Research
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• v.14 no.2
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• pp.185-193
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• 1993

In this paper, the peak detection algorithm was developed for the purpose of screening of the target compounds. Algorithm is divided into searching the characteristic ion and peak detection. The heuristic knowledge about analytical chemistry was applied for the searching the characteristic ion. Peak detection was accomplished in comparison with the peak identification strings and pattern strings around the retention time. Pattern strings are composed with the number which generated by pattern identification function. The variables of pattern identification function are the codes which represent the difference of two adjacent abundances Some of the free steroids were selected to demonstrate the proposed algorithm.

• Analytical Science and Technology
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• v.36 no.4
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• pp.161-169
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• 2023

In this study, a straightforward and precise nitrogen/sulphur-codoped carbon dots (N/S-CD) was produced using a microwave irradiation approach. The N/S-CD was formulated from succinic acid (SA), bis-(3-aminopropyl)-amine (BAPA), and sodium thiosulphate (STS) as sources of carbon, nitrogen, and sulphur, respectively. The synthesized N/S-CD established a valuable quantum yield (QY) of 70 % and was sensitive to aluminium ion (Al³⁺) with a detection limit of 0.21 µM and a linear concentration range of 0-100 µM. When detecting Al³⁺ in real water samples, the N/S-CD resulted in a satisfactory recovery in the range of 91.14 %-103.37 %. Thus, the proposed study is very promising for Al³⁺ detection in environmental water samples.

• Transactions on Electrical and Electronic Materials
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• v.6 no.6
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• pp.262-271
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• 2005

In order to achieve timely and accurate fault detection of plasma etching process, neural network based time series modeling has been applied to reactive ion etching (RIE) using two different in-situ plasma-monitoring sensors called optical emission spectroscopy (OES) and residual gas analyzer (RGA). Four different subsystems of RIE (such as RF power, chamber pressure, and two gas flows) were considered as potential sources of fault, and multiple degrees of faults were tested. OES and RGA data were simultaneously collected while the etching of benzocyclobutene (BCB) in a $SF_6/O_2$ plasma was taking place. To simulate established TSNNs as incipient fault detectors, each TSNN was trained to learn the parameters at t, t+T, ... , and t+4T. This prediction scheme could effectively compensate run-time-delay (RTD) caused by data preprocessing and computation. Satisfying results are presented in this paper, and it turned out that OES is more sensitive to RF power and RGA is to chamber pressure and gas flows. Therefore, the combination of these two sensors is recommended for better fault detection, and they show a potential to the applications of not only incipient fault detection but also incipient real-time diagnosis.

• Analytical Science and Technology
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• v.5 no.2
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• pp.169-176
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• 1992

Analytical detection limits and Relative Ion Yield (RIY) by a jet type ion source glow discharge mass spectrometer(GD/MS) have been measured. With a jet type ion source, the sample loss rate for a Cu sample is 0.23 mg/min with 0.1 L/min gas flow rate and 0.11 mg/min with no gas flow rate. However, the ion intensity of Cu does not change significantly with thee variation of the gas flow rate. The RIY values obtained from the calibration curves of the six copper based standards were between 0.57 of Fe and 3.5 of Cr. The detection limits of most elements were in the range of 0.9 and 2.0 ppm when the glow discharge was operated at 4 mA, 1000V.

• Journal of Korean Society of Environmental Engineers
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• v.28 no.11
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• pp.1148-1153
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• 2006

Signal measuring system to analyze ion concentrations in biofilm was constructed with ion selective microeleclrode and electrometer. In order to evaluate the performance and applicability of signal measuring system, the following characteristics, such as slope of calibration curve, detection limit, variation of response according to the time, and potentiometric selectivity coefficient, were investigated. The slope of calibration curve showed high degree of association for primary ion concentration. The response of the system was log-linear in standard solution down to $10{\mu}M$ and signal measuring system was not sensitive for interfering ions. In comparison with commercial electrometer, the fabricated electrometer system had similar tendencies for the slope of calibration curve, detection limit, and response time. Therefore the signal measuring system could be used to investigate ion profiles in biofilm as a cost effective and reliable measuring system.

• Bulletin of the Korean Chemical Society
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• v.32 no.3
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• pp.1055-1058
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• 2011