• 제목/요약/키워드: ion detection

검색결과 665건 처리시간 0.025초

Time Series Support Vector Machine을 이용한 Reactive Ion Etching의 오류검출 및 분석 (Fault Detection of Reactive Ion Etching Using Time Series Support Vector Machine)

  • 박영국;한승수;홍상진
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2006년도 춘계종합학술대회
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    • pp.247-250
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    • 2006
  • 현재 고밀도 반도체제작 환경에서는 Reactive ion Etching (RIE) 과정에서의 생산성을 극대화하기 위해서 비이상적인 공정장비를 발견하는 것이 매우 중요하다. 생산과정에서 오류발견의 중요성을 설명하기 위해 Support Vector Machine (SVM)은 실시간으로 공정오류에 대한 판단에 대한 도움을 주기 위해 사용되었다. baseline run으로부터 얻은 데이터로 SVM 모델을 구성하고 정상인 run 데이터와 비정상 run 데이터로 SVM 모델을 검증한다. 통계적 공정제어에서 흔히 이용되는 control limits를 도입하여 정상데이터가 내재하고 있는 램덤 변화율이 반영된 SVM 모델 기반의 control limits를 수립하고, 그 control limits를 바탕으로 오류발견을 실행한다. SVM을 이용함으로써 RIE의 오류발견은 run to run 기반에 정상인 run데이터는 0% 오류율이 증명되었다.

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이온프로브 장착 점화플러그를 이용한 노크발생 판정 (Knock Detection Using an Ionization Probe Installed Spark Plug)

  • 한성주;이용규;민경덕;김응서
    • 한국자동차공학회논문집
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    • 제8권6호
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    • pp.1-8
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    • 2000
  • A new method of knock detection in SI engines, using a change of ion concentration in the combustion chamber, was developed. In order to measure in-cylinder ionization current, ionization probes were installed at spark plug and cylinder head of production engine. It was found that the electric current generated by ionized gas in core burned gas region of knocking cycle is between 2 and 10 times larger than that of normal cycle, because the burned gas temperature which is the dominant parameter of a change of ion concentration increases. However, a change of ionization current in boundary region of burned gas is relatively weak. Hence a change of ion concentration in core burned gas region can be used for knock detection.

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효율적인 수은이온 검출을 위한 피렌-보론산 기반의 형광센서 개발 (A Pyrenylboronic Acid-based Fluorescence Sensor for Highly Efficient Detection of Mercury(II) Ions)

  • 이승엽;이성호
    • 한국환경과학회지
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    • 제29권2호
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    • pp.201-207
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    • 2020
  • A new chemosensor based on a self-assembled system has been devised to detect Hg2+ions efficiently. We demonstrated that the amphiphilic building blocks consisting of pyrene and boronic acid (1) aggregate in aqueous solutions and provide an outstanding sensing platform for sensitive detection. The self-assembled 1 exhibited high selectivity and sensitivity for Hg2+ion detection via fluorescence quenching, where the Hg2+ion detection ensued from a fast transmetallation of 1. The Stern-Volmer (SV) quenching constant for its fluorescence quenching by Hg2+ions was approximately 1.58 × 108 M-1. In addition, self-assembled 1 exhibited excellent sensing abilities at nano-molar concentration levels when tap water and freshwater samples were contaminated with of Hg2+ ions.

질량분석기를 위한 스펙트럼 검출 알고리즘의 개선 (Improvement of Spectrum Detection Algorithm for Mass Spectrometer)

  • 이영학;최훈
    • 한국정보통신학회논문지
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    • 제23권1호
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    • pp.47-54
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    • 2019
  • 질량 스펙트럼 분석 시스템을 위한 스펙트럼 검출 알고리즘의 개선 방법을 제안하였다. 질량지수별 이온신호블록에 대한 선형 근사 및 2차 커브피팅의 결과를 활용한 기존의 스펙트럼 검출 알고리즘에서 무효 이온신호 제거조건을 추가 개선함으로써 질량 스펙트럼 검출 시 발생하는 오검출을 개선할 수 있다. 또한 제안한 방법은 피크위치오차가 보정된 유효이온신호블록에 대한 2차 피팅 커브 의 결과를 사용하여 질량 스펙트럼의 피크값 추정오차를 줄일 수 있다. 제안한 방법의 유효성을 보이기 위해 실제 취득한 이온신호를 입력으로 알고리즘 단계별 컴퓨터 시뮬레이션을 수행하였다. 또한 다수의 입력에 대한 오검출 율을 비교함으로써 제안한 방법이 기존 방법에 비해 검출 성능이 우수함을 보였다.

정적챔버에서 스파크 플러그 이온프로브를 이용한 공연비와 이온신호와의 상관관계에 대한 연구 (A Study on Correlation between A/F and ion signal in a Constant-Volume Chamber Using Spark-plug Ionization Probe Itself)

  • 박종일;전광민;한재원;박철웅
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2002년도 제25회 KOSCI SYMPOSIUM 논문집
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    • pp.223-229
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    • 2002
  • Spark plug ionization signal could be useful in an internal combustion engine as a feedback signal for combustion diagnostics such as misfire detection, knocking detection and lambda control, but the signal has high level of cyclic fluctuation in an internal combustion engine due to residual gas, pressure, temperature, mixture composition in the spark gap. Because of this reason it is very difficult to apply ion signal to commercial engine control. In this Study, a correlation between A/F and spark plug ionization signal was studied in a constant volume chamber. Constant volume chamber with gas phase fuel(Propane) has homogeneous fuel composition , no mixture flow, same pressure and temperature on each test. The results show that mean chemi-ion signal has the highest correlation with A/F and intial pressure change has on effect on the thermal-ion signal and not on chemi-ion signal.

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KPFM을 통한 수은이온 검출 방법 (Mercury ion detection technique using KPFM)

  • 박찬호;장규환;이상명;유준석;나성수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2014년도 추계학술대회 논문집
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    • pp.358-360
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    • 2014
  • For the several decades, various nanomaterials are broadly used in industry and research. With the growth of nanotechnology, the study of nanotoxicity is being accelerated. Particularly, mercury ion is widely used in real life. Because the mercury is representative high toxic material, it is highly recommended to detect the mercury ion. In previous reported work, thymine-thymine mismatches (T-T) capture mercury ion and create very stable base pair ($T-Hg^{2+}-T$). Here, we performed the high sensitive sensing method for direct label free detection of mercury ions and DNA binding using Kelvin Probe Force Microscope (KPFM). In this method, 30 base pairs of thymine (T-30) is used for mercury specific DNA binding ($T-Hg^{2+}-T$). KPFM is able to detect the mercury ion because there is difference between bare T-30 DNA and mercury mediated DNA ($T-Hg^{2+}-T$).

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흐름주입 분석에 의한 아염소산 이온의 분광광도법 정량 (Photometric Determination of Chlorite ion by Flow Injection Analysis)

  • 최용욱;이수영;김미경;박성호
    • 대한화학회지
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    • 제44권6호
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    • pp.556-562
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    • 2000
  • 간접 요오드화법의 UV 검출을 이용한 흐름주입분석에 의한 아염소산 이온의 정량에 관하여 연구하였다. 산성 조건하에서 아염소산은 요오드화 이온을 요오드로 산화시키고 자신은 염화 이온으로 환원된다. UV 370nm에서 노란 색으로 발색된 요오드의 흡광도를 측정하여 아염소산 이온을 간접적으로 정량 하였다. 흐름주입분석-UV검출 장치를 이용한 무기성 소독부산물인 아염소산 이온을 선택적으로 정량하기 위한 분석 인자로서 혼합 및 반응코일 길이, 산성 용리액의 pH, 요오드화 이온의 농도, 주입고리부피, 반응 온도, 유속을 최적화 하였다. 조제수로부터 산화제나 방해 물질들을 제거하기 위한 가리움제를 조사하였다. 아염소산 이온에 대한 0.002~0.2 mg/L의 선형 농도 범위에서 검정곡선은 0.999이상의 상관계수를 나타내였다. 아염소산 이온의 검출한계는 0.18 ${\mu}g/L$이었다.

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A Quinoline carboxamide based Fluorescent Probe's Efficient Recognition of Aluminium Ion and its Application for Real Time Monitoring

  • Manivannan, Ramalingam;Ryu, Jiwon;Son, Young-A
    • 한국염색가공학회지
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    • 제32권4호
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    • pp.185-192
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    • 2020
  • A novel binding site for metal ion made by designing molecule with tetrazolo quinoline with hydrazine carboxamide (TQC) and the designed molecule successfully synthesized. The probe works by selectively detecting Al3+ ion via both fluorimetric and colorimetric approach. The probe's effectiveness towards aluminium ion detection is highly sensitive and selective with no substantial interference with other competing ions. The added Al3+ ion to TQC fetched a rapid change of visual color to yellow from colorless, also the response of fluorescence turn-on. The fluorescence turn-on and color change visibly by the probe TQC with Al3+ ion credited to the ICT phenomenon (intramolecular charge-transfer transition). The likely interaction of the probe with aluminium ion has also been there predicted from ESI-MS spectral analysis results. The usefulness of the probe confirmed by practical utility by making a test kit to monitor Al3+ ion in water which showed a naked eye detection by notable color change.

Superconducting Strip Ion Detectors for Time-of-flight Mass Spectrometer

  • Zen, N.;Suzuki, K.;Shiki, S.;Ukibe, M.;Koike, M.;Casaburi, A.;Ejrnaes, M.;Cristiano, R.;Ohkubo, M.
    • Progress in Superconductivity
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    • 제14권2호
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    • pp.92-95
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    • 2012
  • Superconducting detectors are promising as ion detectors for time-of-flight mass spectrometers (TOF MS). They can achieve mass-independent detection efficiency even for macromolecular bombardments, because output signals are produced through the deposited kinetic energy at ion impact instead of secondary electron emission that is the ion detection mechanism of conventional microchannel plate (MCP) detectors or secondary electron multipliers (SEM). Among the superconducting detectors, the superconducting strip ion detectors (SSIDs), which consist of several hundreds of superconducting lines with a width of a few hundreds nm and a thickness of a few tens of nm, have a fast response time of less than 1 ns. Inherently, the response time of SSIDs is determined by kinetic inductance, so that it was difficult to realize a fast SSID with a large detection area. However, we succeeded in realizing the detector size up to $5{\times}5mm^2$ without response time degradation by using a parallel configuration.

원유중 Ivermectin 구충제의 잔류실태 조사 (Examination of ivermectin residues in raw milk after skin administration)

  • 박준조;육지혜;김휴경;박혜원;김인경;이우성
    • 한국동물위생학회지
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    • 제30권3호
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    • pp.421-428
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    • 2007
  • This study was conducted two kinds of aims: 1) to modify the analytical methods (conditions) by high performance liquid chromatography - fluorescence detector for the detection of residual ivermectin in raw milk, 2) to provide basic information for the evaluation of standard of the residual ivermectin in raw milk. It could be considerable that negative ion spectra can be better method in the LC/MS analysis for the detection of residues, Characteristic daughter ions were observed in negative ion spectra, however, linear line was not formed in positive ion one. Three Holstein cows ($500{\pm}10kg$) were applied to commercial ointment of ivermectin just one time at the first day of test, and residues in raw milk were examined for 20day after administration. The limit of detection (LOD) was 0.65ng (n=5) by HPLC/FLD, and recovery rates were $87.85%{\sim}99.47%$. The peak was observed at the 4th day, and residues lasted to the end. Thus ivermectin was prohibited when lactating.