• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2004.04a
• /
• pp.482-486
• /
• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies, such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper presents that the recent development and our research goals in FIB nano machining technology are given. The emphasis will be on direct milling, or chemical vapor deposition techniques (CVD), and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it. After an introduction to the technology and its FIB principles, the recent developments in using milling or deposition techniques for making various high-quality devices and high-precision components at the micro/nano meter scale are examined and discussed. Finally, conclusions are presented to summarize the recent work and to suggest the areas for improving the FIB milling technology and for studying our future research.

• Proceedings of the KIEE Conference
• /
• 1995.11a
• /
• pp.459-461
• /
• 1995

An omegatron mass spectrometer was designed and fabricated. Experiments have been performed to demonstrate the instrument's operation in the ECR plasma device. By using this analyzer, mass spectra have been obtained in hydrogen plasmas, and typical results are presented. In the plasma omegatron, downstreaming plasma generated by ECR are entering the analyzer through a smsll floating aperture. We employ a biasing technique to reduce the ion velocity along the magnetic field and to keep the ions from drifting to the side pintos, and thus achieved improved ion collection and sensitivity. Mass spectra obtained show that main positive ion components are $H_3{^+}$ and $H_2{^+}$ with the density ratio of $H_2{^+}$ to $H_3{^+}$ $\simeq$ 0.2.

• Journal of the Semiconductor & Display Technology
• /
• v.3 no.2
• /
• pp.5-9
• /
• 2004

Microcircuit fabrication requires precise control of impurities in tiny regions of the silicon. These regions must be interconnected to create components and VLSI circuits. The patterns to define such regions are created by lithographic processes. In order to image features smaller than 70 nm, it is necessary to employ non-optical technology (or next generation lithography: NGL). One such NGL is extreme ultra-violet lithography (EUVL). EUVL transmits the pattern on the wafer surface after reflecting ultra-violet through mask pattern. If particles exist on the blank mask, it can't transmit the accurate pattern on the wafer and decrease the reflectivity. It is important to care the blank mask. We removed the particles on the wafer using focused ion beam (FIB). During removal, FIB beam caused damage the multi layer mask and it decreased the reflectivity. The relationship between particle removal and reflectivity is examined: i) transmission electron microscope (TEM) observation after particle removal, ii) reflectivity simulation. It is found that the image mode of FIB is more effective for particle removal than spot and bar mode.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.29 no.12
• /
• pp.759-763
• /
• 2016

We demonstrate the utilization of ion gel gate dielectrics for operating non-volatile transistor memory devices based on polymer semiconductor thin films. The gating process in typical electrolyte-gated polymer transistors occurs upon the penetration and escape of ionic components into the active channel layer, which dopes and dedopes the polymer film, respectively. Therefore, by controlling doping and dedoping processes, electrical current signals through the polymer film can be memorized and erased over a period of time, which constitutes the transistor-type memory devices. It was found that increasing the thickness of polymer films can enhance the memory performance of device including (i) the current signal ratio between its memorized state and erased state and (ii) the retention time of the signal.

• Archives of Pharmacal Research
• /
• v.5 no.2
• /
• pp.71-77
• /
• 1982

Improvements in the analytical methodology used in the gas chromatographic/mass spectral analysis of phenolic compounds from cigarette smoke are described. For the direct analysis of crude samples, pyridine extraction and the glass capillary column GC was used for the separation of phenolics as trimethylsilyl derivativatives. The separations of cigarette smoke on Carbowax 20M and SE-54 wall coated open tubular columns are given. Improved methodology for the routine quantitation of the identified components using the computer-controlled multiple ion selection technique of MS presented. Considerations pertaining to routine analyses of a multitude of complex smoke samples are also discussed.

• Journal of the Semiconductor & Display Technology
• /
• v.22 no.4
• /
• pp.131-135
• /
• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• Food Science of Animal Resources
• /
• v.38 no.5
• /
• pp.1080-1091
• /
• 2018

The eggshell, which is a complex and highly ordered structure, is very important factor for food safety and egg marketing. This study investigated the changes in eggshell structure and shell components in relationship to hen age. For this study, we examined the histological change of the endometrium of the 30-, 60-, and 72-wk-old commercial layers, and analyzed the ultrastructure and ionic composition of their eggshells. The results showed that histological deformation, fibrosis, atrophy and elimination of micro-villi in the uterus endometrium were found through microscopic observation that was associated with increasing hen age. Concentration of blood-ion components such as $Ca^{2+}$, $Na^+$, $K^+$, and $Cl^-$ ions did not change with age. Along with the results from the ultrastructure analysis of the eggshell, the palisade layer ratio and the density of mammillary knobs were significantly decreased in older hens. In addition, the type B mammillary knobs were frequently observed with increasing hen age. In the mineral element assay from the eggshell, $Ca^{2+}$, $S^{2-}$, and $Co^{2+}$ significantly decreased with increasing hen age, whereas $Na^+$, $K^+$, and $V^{2+}$ significantly increased. Therefore, the damages of endometrial tissue inhibit the processes of ion transmission and the crystallization of eggshell formation, resulting in a large and non-uniform mammillary knob formation. This means the conditions of endometrial cells affect the formation of the eggshell structure. In conclusion, hen aging causes the weakness of the eggshell and degrades the eggshell quality.

• Journal of Environmental Science International
• /
• v.23 no.1
• /
• pp.69-79
• /
• 2014

The seasonal variation of pH and ion components in precipitation were investigated from January to December 2009 at Busan, Korea. The precipitation was acidic with a volume-weighted mean pH concentration of 5.32, which ranged from 3.79 to 8.66. The volume-weighted mean conductivity showed 86.77 ${\mu}S/cm$ and indicated higher concentration about 96.69 ${\mu}S/cm$ in summer. The volume-weighted mean equivalent concentration of components followed the order: $K^+$ > $Ca^{2+}$ > $nss-Ca^{2+}$ > $NH_4^+$ > $Mg^{2+}$ > $Na^+$ > $Li^+$ in cations and $Cl^-$ > $SO_4^{2-}$ > $nss-SO_4^{2-}$ > $NO_3^-$ > $NO^{2-}$ > $F^-$ > $Br^-$ in anions. Particularly, concentration of $K^+$ and $Cl^-$ showed 56 and 78 % in cations and anions. The higher concentration in $K^+$, $Na^+$, $Mg^{2+}$ and $Cl^-$ were shown in Busan city as compared to the other cities. The neutralization factors have been found to have higher value for potassium ion in winter compared with different seasons, indicating significant neutralization of acidic components over the region by potassium. Therefore, the precipitation characteristics at Busan had both continental and coastal as consequence of pH, conductivity and ionic analyses.

• Journal of Korean Society for Atmospheric Environment
• /
• v.4 no.2
• /
• pp.57-66
• /
• 1988

Sandy dust phenomena was observed from April 19 to 23, 1988 in Seoul and suspended particulate was collected by Andersen air sampler during this period. The samples were analyzed for 16 components $(SO_n^{2-}, NO_3^-, Cl^-, PO_4^{3-}, NH_4^+, F^-, Al, Fe, K, Cu, Mn, Na, Pb, Mg, Ca, Cd)$. The conclusions are as follwes: 1. Total suspended particulate concentation during the period of sandy dust phenomena was 489 $\mug/m^3$ (ordinary times: 140-125 $mug/m^3$) 2. The water - soluble ion component concentration of suspended particulate during the period of sandy dust phenomena was few and the metal concentration of that was more than that of ordinary times. 3. The cumulative frequency distribution of suspended particulates in logarithmic diagram did not show similar to normal log distribution during the period of sandy dust phenomena. 4. $SO_4^{2-}, NO_3^-, Cl^-, and PO_4^{3-}$ was onsided to coarse particle, and $NH_4^+$ and F to fine particle in the size distribution of water - soluble ion components during the period of sandy dust phenomena. 5. Metal concentration was high and Al, Fe, Cu, Mn, Na, Mg, and Ca was onsided to coarse particle, and K, Pb, and Cd to fine particle in the size distribution of metal components. 6. During the period of sandy dust phenomena the quantity of respirable particle (< 1 $\mum$) was about 3 times and that of metal components were about 2 - 11 times than that of ordinary times. 7. The concentrations of $NO_3^-, Cl^-, NH_4^+$ at ordinary times were 1.1 - 4 time than that of the period of sandy dust phenomena.

• Current Photovoltaic Research
• /
• v.10 no.1
• /
• pp.16-22
• /
• 2022

The long-term stability of PSCs against visual and UV light, moisture, electrical bias and high temperature is an important issue for commercialization. In particular, since the operation temperature of solar cell can rise above 85℃, a study on thermal stability is required. In this study, the cause of thermal-induced degradation of PSCs was investigated using the SCAPS-1D simulation tool. First, PSCs of TiO₂/CH₃NH₃PbI₃/Spiro-OMeTAD/Au structure were exposed to a constant temperature of 85℃ to observe changes in conversion efficiency and quantum efficiency. Because the EQE reduction above 500 nm was remarkable, we simulated PSCs performance as a function of lifetime, doping density of perovskite and spiro-OMeTAD. Consequently, the main cause of thermal-induced degradation is considered to be the change in the perovskite doping concentration and lifetime due to ion migration of perovskite.