• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.540-540
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• 2012

Selective detection of single nucleotide polymorphism (SNP) of Cytochrome P450 2C19 (CYP2C19) was carried out by the PNA chips which were electrically-interfaced with interdigitated nanogap electrodes (INEs). The INEs whose average gap distance and effective gap length were about ~70 nm and ${\sim}140{\mu}m$, respectively, were prepared by the combination of the photo lithography and the surface-catalyzed chemical deposition, without using the e-beam lithography which is almost inevitable in the conventional lab-scale fabrication of the INEs. Four different types of target DNAs were successfully detected and discriminated by the INE-based PNA chips.

• Smart Structures and Systems
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• 제4권3호
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• pp.291-304
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• 2008

Piezoelectric materials have been widely used in ultrasonic nondestructive testing (NDT). PZT ceramics can be used to receive and generate surface acoustic waves. It is a common application to attach PZT transducers to the surface of structures for detecting cracks in nondestructive testing. However, not until recently have piezoelectric polymers attracted more and more attention to be the material for interdigitated (IDT) surface and guided-wave transducers. In this paper, an interdigitated gold-on-polyvinylidene fluoride (PVDF) transducer for actuating and sensing Lamb waves has been introduced. A specific etching technology is employed for making the surface electrodes into a certain finger pattern, the spacings of which yield different single mode responses of Lamb waves. Experiments have been performed on steel and carbon fiber composite plates. Results from PVDF IDT sensors have been compared with those from PZT transducers for verification.

• 한국산학기술학회논문지
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• 제20권6호
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• pp.604-609
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• 2019

본 논문에서는 열경화성 폴리이미드를 정전용량형 습도센서의 감습재료로 사용하여 공정이 간단한 IDT(Interdigitated) 전극을 갖는 정전용량형 습도센서를 제작하고 특성을 측정 및 분석하였다. 먼저 일정한 용량값을 얻기 위하여 용량형 센서의 전극 수, 전극의 두께와 간격 및 폴리이미드 감습막의 두께 등을 최적화하여 마스크 설계 및 제작을 했으며, 실리콘 기판 상에 반도체 공정 장비를 이용하여 정전용량형 습도센서를 제작하였다. 제작된 센서의 면적은 $1.56{\times}1.66mm^2$ 이며, 전극의 넓이와 전극간 폭은 동일하게 각각 $3{\mu}m$, 센서의 감도를 위해 전극 수를 166개, 전극의 길이는 1.294mm로 제작하였다. 그런 다음 센서 특성을 측정하기 위해 PCB상에 패키징 하였다. $25^{\circ}C$ 챔버 환경에 센서를 삽입하고 LCR Meter에 연결하여 1V, 20kHz를 인가한 상태에서 20%RH에서 90%RH까지 습도변화에 대한 용량값 변화를 측정하였다. 제작된 정전용량형 습도센서의 측정 결과 감도는 26fF/%RH, 선형 특성 < ${\pm}2%RH$ 그리고 히스테리시스는 < ${\pm}2.5%RH$를 얻을 수 있었다.

• 센서학회지
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• 제27권2호
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• pp.69-75
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• 2018

In this study, we propose a multichannel interdigitated capacitor (IDC) sensor for detecting the bitterness of coffee. The operating principle of the device is based on the variation in capacitance of a sensing membrane in contact with a bitter solution. Four solvatochromic dyes, namely, Nile red, Reichardt's dye, auramine-O, and rhodamine-B, were mixed with polyvinylchloride (PVC) and N,N-dimethylacetamide (DMAC), to create four different types of bitter-sensitive solutions. These solutions were then individually inserted into four interdigitated electrodes (IDEs) using a spin coater, to prepare four distinct IDC sensors. The sensors are capable of detecting bitterness-inducing chemical compounds in any solution, at concentrations of approximately $1{\mu}M$ to 1 M. The sensitivity of the IDC bitterness sensor containing the Reichardt's dye sensing-membrane was approximately 1.58 nF/decade. The multichannel sensor has a response time of approximately 6 s, and an approximate recovery time of 5 s. The proposed sensor offers a stable sensing response and linear sensing performance over a wide measurement range, with a correlation coefficient ($R^2$) of approximately 0.972.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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• pp.9-15
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• 2006

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1686-1687
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• 2011

A microfabricated chip with in-channel electrochemical cell using interdigitated gold electrode was fabricated for sensitive electrochemical analysis. The gold electrodes were fabricated on glass wafer using thermal evaporator and were covered using PDMS mold containing microchannel for analyte and electrolyte. The active area of each electrode was $250\;{\mu}m{\times}200\;{\mu}m$ with a gap of 200 ${\mu}m$ between the electrodes. Microelectrodes results in maximum amplification of signal, since the signal enhancement effect due to cycling of the reduced and oxidized species strongly depends on the inter electrode distance. Analytes such as methylene blue and guanosine were characterized using the fabricated electrodes and their electrochemical characteristics were compared with conventional bulk electrodes. The device so developed shall find use as disposable electrochemical cell for rapid and sensitive analysis of electroactive species.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.419-419
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• 2014

Interdigitated nanogap device (IND) is an attractive tool for biomolecular detection due to its huge on-off signal ratio, great tolerance to the variation in biochemical environment, and relatively simple implementation processes. Here, we report on the IND-based detection of Influneza A virus by sandwich immunoassay. The INEs were fabricated by photo lithography followed by the in-house chemical lithographic technique for the narrowing the initial gap distance. The surface of the silicon oxide between the two gold electrodes was chemically modified to immobilize primary antibodies for the immuno-specific interaction with the influenza A virus antigen. After immersing the functionalized-IND into the sample solution containing the influenza A virus, the device was exposed to the secondary antibody conjugated Au nanoparticles (Au NPs). The INDs showed a huge jump in the electric conductance when the sample solution contained the influenza A virus of the concentration as low as 10 ng/mL. We hope that this IND-based sensing can be applied to the development of simple and reliable diagnostic means of influenza viruses.

• Bulletin of the Korean Chemical Society
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• 제34권9호
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• pp.2781-2786
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• 2013

We examined the effect of electrode fingers and gaps of coplanar interdigitated electrode (IDE) structures to characterize the ammonium salt-containing polyelectrolyte film of resistance-based humidity sensors. IDEs designed for this purpose were flexible gold electrodes deposited on a polyimide substrate using a printing process because the geometry presents a potential for tunable sensitivity over other electrode designs. The basic design of the sensors consisted of IDEs with a different number of electrode fingers such as 3, 4, and 5 and gap sizes of 310, 360, 410, and $460{\mu}m$. Details of the AC complex impedance characteristics such as the Nyquist plot, Bode plot, and activation energy based on electrode construction were investigated.

• Journal of Biosystems Engineering
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• 제41권1호
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• pp.60-65
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• 2016

Purpose: The necessity for precise manipulation of bioparticles has greatly increased in the fields of bioscience, biomedical, and environmental monitoring. Dielectrophoresis (DEP) is considered to be an ideal technique to manipulate bioparticles. The objective of this study is to develop a DEP microfluidic device that can trap fluorescent beads, which mimic bioparticles, at the low voltage and frequency of the sinusoidal signal supplied to the microfluidic device. Methods: A DEP microfluidic device, which is composed of polydimethylsiloxane (PDMS) channels and interdigitated electrode networks, is fabricated to trap fluorescent beads. The geometry of the interdigitated electrodes is determined through computational simulation. To determine the optimum voltage and frequency of the sinusoidal signal supplied to the device, the experiments of trapping beads are conducted at various combinations of voltage and frequency. The performance of the DEP microfluidic device is evaluated by investigating the correlation between fluorescent intensities and bead concentrations. Results: The optimum ratio of the widths between the negative and positive electrodes was 1:4 ($20:80{\mu}m$) at a gap of $20{\mu}m$ between the two electrodes. The DEP electrode networks were fabricated based on this geometry and used for the bead trapping experiments. The optimum voltage and frequency of the supplied signal for trapping fluorescent beads were 15 V and 5 kHz, respectively. The fluorescent intensity of the trapped beads increased linearly as the bead concentration increased. The coefficient of determination ($R^2$) between the fluorescent intensity and the bead concentration was 0.989. Conclusions: It is concluded that the microfluidic device developed in this study is promising for trapping bioparticles, such as a cell or virus, if they are conjugated to beads, and their concentration is quantified.

• 한국세라믹학회지
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• 제41권3호
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• pp.216-220
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• 2004

본 논문은 압전세라믹의 압전상수 d$_{33}$ 를 이용한 적층 세라믹 박판 작동층 IDEAL (InterDigitated Electrode Actuation Layer)의 개발에 관한 것이다. 대부분의 박판 압전 작동층은 압전상수 d$_{31}$ 효과를 이용하고 있다. 현재 개발된 압전작동기의 성능을 향상시키기 위해 많은 연구가 수행 중에 있으며, 그 중 한 방법이 압전상수 d$_{33}$ 를 이용하는 방법이다. 압전세라믹의 압전상수 d$_{33}$ 는 압전상수 d$_{31}$ 보다 일반적으로 두배 정도이기 때문에 d$_{33}$ 작동 효과를 활용하면 작동기의 성능을 향상시킬 수 있다. 미국 MIT에서 개발된 AFC와 NASA Langley 연구소 연구팀이 개발한 LaRC-MFC$^{TM}$는 d$_{33}$ 작동 효과를 활용하였으나 빗살형 전극이 작동층 상하 표면에 부착되어 있어 완전한 d$_{33}$ 작동 효과를 활용하였다고 볼 수 없다. 본 논문에서는 빗살형 전극을 세라믹 층간에 삽입한 적층형 세라믹 박판 작동층을 설계하고 제작하였다. 제작된 작동층의 작동 스트레인을 측정하였고 LaRC-MFC$^{TM}$의 작동 스트레인과 비교한 결과, 본 연구에서 개발한 박판 세라믹 작동층이 15% 이상의 작동 스트레인을 발생시킬 수 있음을 확인하였다.