• Title/Summary/Keyword: inter-diffusion

Search Result 161, Processing Time 0.027 seconds

Ohmic contact formation of single crystalline 3C-SiC for high temperature MEMS applications (초고온 MEMS용 단결정 3C-SiC의 Ohmic Contact 형성)

  • Chung, Gwiy-Sang;Chung, Su-Yong
    • Journal of Sensor Science and Technology
    • /
    • v.14 no.2
    • /
    • pp.131-135
    • /
    • 2005
  • This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

Exposure Possibility to By-products during the Processes of Semiconductor Manufacture (반도체 제조 공정에서 발생 가능한 부산물)

  • Park, Seung-Hyun;Shin, Jung-Ah;Park, Hae-Dong
    • Journal of Korean Society of Occupational and Environmental Hygiene
    • /
    • v.22 no.1
    • /
    • pp.52-59
    • /
    • 2012
  • Objectives: The purpose of this study was to evaluate the exposure possibility of by-products during the semiconductor manufacturing processes. Methods: The authors investigated types of chemicals generated during semiconductor manufacturing processes by the qualitative experiment on generation of by-products at the laboratory and a literature survey. Results: By-products due to decomposition of photoresist by UV-light during the photo-lithography process, ionization of arsine during the ion implant process, and inter-reactions of chemicals used at diffusion and deposition processes can be generated in wafer fabrication line. Volatile organic compounds (VOCs) such as benzene and formaldehyde can be generated during the mold process due to decomposition of epoxy molding compound and mold cleaner in semiconductor chip assembly line. Conclusions: Various types of by-products can be generated during the semiconductor manufacturing processes. Therefore, by-products carcinogen such as benzene, formaldehyde, and arsenic as well as chemical substances used during the semiconductor manufacturing processes should be controlled carefully.

Dip Coating of Amorphous Materials on Metal Surface (금속표면에 비정질의 피복)

  • Park, Byung-Ok;Yoon, Byung-Ha
    • Journal of the Korean institute of surface engineering
    • /
    • v.20 no.2
    • /
    • pp.49-59
    • /
    • 1987
  • The properties of $Cr_2O_3-Al_2O_3-SiO_2$ composite oxide coatings on steel surface were investigated. The results obtained were as follows: The microhardness of oxide coating layer increased with increasing heat-treatment temperature and $Cr_2O_3$ content in coating layer. The hardness showed the highest value (850Hv) treated at 700$^{\circ}C$ for $SiO_2:Al_2O_3:Cr_2O_3$=1:1:4. Increasing heat-treatment temperature, corrosion current density became lower and coating layer became denser. The corrosion current density showed the lowest value $(6.5{\times}10^{-5}\;Acm^2)$ treated at 750$^{\circ}C\;for\;SiO_2:Al_2O_3:Cr_2O_3$=1:1:3. These results were explained by protective layer which was formed during heat-treatment. The bonding between matrix and coating layer is expected to be made mechanically and chemically by the inter diffusion of Ni and Fe. The composite oxide coating was formed by softening of the binder with increasing heat-treatment temperature. The strengthening of coating layer is to be resulted from the dispersion of major oxide particles.

  • PDF

Micro-scale Observation of Corrosion of Hot-Dip Aluminized 11% Cr Stainless Steel

  • Cho, Min-Seung;Park, Choong-Nyeon;Park, Chan-Jin
    • Corrosion Science and Technology
    • /
    • v.18 no.3
    • /
    • pp.73-77
    • /
    • 2019
  • Hot-dip aluminized coating has been widely used to protect steel substrate against corrosion. In this study, the corrosion behavior of hot-dip aluminized type 409L (11% Cr) stainless steel (SS) was investigated using macro- and micro-scale polarization tests. An Al-Fe-Si alloy layer that was formed due to inter-diffusion of alloying elements between Al coating and SS substrate was observed between Al coating and 409L SS substrate. In both macro- and micro-scale polarization tests, the corrosion potential ($E_{corr}$) of the 409L SS substrate was much nobler than that of the Al coating and alloy layer. $E_{corr}$ of the alloy layer was between that of Al coating and 409L SS substrate. This indicates that the alloy layer can act as a buffer between the more active Al coating and the nobler SS substrate for pit growth in aluminized SS. The presence of the alloy layer appears to be helpful in hindering pitting corrosion of aluminized SS.

Irradiation enduced In-plane magnetization in Fe/MgO/Fe/Co multilayers

  • Singh, Jitendra Pal;Lim, Weon Cheol;Song, Jonghan;Kim, Jaeyeoul;Asokan, K.;Chae, Keun Hwa
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2015.08a
    • /
    • pp.188.1-188.1
    • /
    • 2015
  • For present investigation Fe/MgO/Fe/Co multilayer stack is grown on Si substrate using e-beam evaporation in ultrahigh vacuum. This stack is irradiated perpendicularly by 120 MeV $Ag^{8+}$ at different fluences ranging from $1{\times}10^{11}$ to $1{\times}10^{13}ions/cm^2$ in high vacuum using 15UD Pelletron Accelerator at Inter University Accelerator Centre, New Delhi. Magnetic measurements carried out on pre and post irradiated stacks show significant changes in the shape of perpendicular hysteresis which is relevant with previous observation of re-orientation of magnetic moment along the direction of ion trajectory. However increase in plane squareness may be due to the modification of interface structure of stacks. X-ray reflectivity measurements show onset of interface roughness and interface mixing. X-ray diffraction measurements carried out using synchrotron radiation shows amorphous nature of MgO and Co layer in the stack. Peak corresponding body centered Fe [JCPDS-06-0696] is observed in X-ray diffraction pattern of pre and post irradiated stacks. Peak broadening shows granular nature of Fe layer. Estimated crystallite size is $22{\pm}1nm$ for pre-irradiated stack. Crystallite size first increases with irradiation then decreases. Structural quality of these stacks was further studied using transmission electron microscopic measurements. Thickness from these measurements are 54, 36, 23, 58 and 3 nm respectively for MgO, Fe, MgO, Fe+Co and Au layers in the stack. These measurements envisage poor crystallinity of different layers. Interfaces are not clear which indicate mixing at interface. With increase fluence mixing and diffusion was increased in the stack. X-ray absorption spectroscopic measurements carried out on these stacks show changes of Fe valence state after irradiation along with change of O(2p)-metal (3d) hybridized state. Valence state change predicts oxide formation at interface which causes enhanced in-plane magnetization.

  • PDF

Economic Integration and Structural Changes in the International Agro-Food Trade Network (경제통합과 농식품 교역의 국가 간 네트워크 변화)

  • Hyun, Kisoon;Lee, Junyeop
    • Journal of the Economic Geographical Society of Korea
    • /
    • v.19 no.1
    • /
    • pp.83-103
    • /
    • 2016
  • This paper examines the characteristics of structural change in the international agro-food trade network with a global trend of the FTA diffusion. By focusing on the centralities and the community structure to identify the agro-food trade network, we use the social network analysis and the trade data contained of 07, 08, 20, and 21 at the 2-digit HS product level among 45 countries over the last 15 years. The main analytical results are as follows: 1) Not only has intra trade network intensified more than inter-regional trade, but also, there is no doubt that inter-regioanl trade by linking has steadily increased. 2) EU countires have the high indices of centrality, which have already been highly integrated. 3) Intraregional agro-food trade network for fresh vegetables and processed food sector in Asia is shown to be strongly integrated. This finding suggests that the processes of economic integration will help strengthen the trade network for agro-food in a culturally homogeneous region. 4) The case of Korea's participation in the RCEP and TPP, Korea's power in the agro-food network tends to be reinforced, especially in the processed food sector. Overall, there is a need for establishment of spatial strategies and policies across the different regions for Mega FTAs.

  • PDF

The Impact of Enterprise R&D Investment on Inter-industry Technology Spillover in Korea under the new Normal Era (뉴 노멀 시대하 한국기업의 R&D투자가 산업간 기술파급에 미치는 영향)

  • Kim, Seon Jae;Lee, Younghwa
    • The Journal of the Korea Contents Association
    • /
    • v.13 no.2
    • /
    • pp.390-399
    • /
    • 2013
  • The purpose of this study is to examine the impact of enterprise R&D investment on inter-industry technology spillover in Korea under the new Normal Era. In order to do this, we tested the effect of production inducement, backward and forward linkage effects, and the effect of technology spillover such as technology intensity effects and technology diffusion effects based on an input-output framework. The results show that the high index industries of the production inducement effect were professional, scientific and technical activities, manufacture of metal products, and general machinery. Some manufacturers of other non-metallic mineral products and transport equipment sectors appeared to have the strong effect of forward and backward linkages that were almost equivalent to high-tech manufacturing industries. In particular, the industries of professional, scientific and technical activities appeared to have the strong effect of both forward and backward linkages. Therefore, we need to drive a strong policy support to higher enterprise R&D investment in the those particular industries not only to increase global competitiveness, but also to widen up the technology spillover effect on other industries.

Diagnostic Performance of Simulated Abbreviated MRI for Early-Stage Hepatocellular Carcinoma Screening: A Comparison to Conventional Dynamic Contrast-Enhanced MRI (초기 간암 선별 검사로서 단축 자기공명영상 검사의 진단능: 고식적 역동학적 자기공명영상검사와의 비교)

  • Eun Sol Lim;Sung Mo Kim;Sang Soo Shin;Suk Hee Heo;Jong Eun Lee;Yong Yeon Jeong
    • Journal of the Korean Society of Radiology
    • /
    • v.82 no.5
    • /
    • pp.1218-1230
    • /
    • 2021
  • Purpose To compare the per-patient diagnostic performance of simulated abbreviated MRI (AMRI) to that of conventional MRI (CMRI) with full-sequence dynamic gadoxetic acid (GA) enhancement for early-stage hepatocellular carcinoma (HCC) screening in high-risk patients. Materials and Methods A total of 201 consecutive patients at high-risk for HCC, who underwent 3T liver MRI, were included in this retrospective study. The AMRI protocol comprised T2-weighted imaging, hepatobiliary phase imaging after GA injection, and diffusion-weighted imaging. For each patient, two AMRI and CMRI image sets were independently reviewed by two radiologists. Inter-reader agreement was assessed using Cohen's kappa value. A composite reference standard was used to determine the diagnostic performance of each image set for each reader. Results A total of 93 HCCs were detected in 79 patients. The inter-reader agreement was almost perfect for both image sets (κ = 0.839, 0.948). In AMRI, the per-patient sensitivity and negative predictive values (NPV) were 94.9% and 96.4%, respectively. In CMRI, the per-patient sensitivity and NPV were 96.2% and 97.5%, respectively. Conclusion AMRI, using only three sequences, had a comparable diagnostic performance to CMRI in screening early-stage HCC. AMRI could be an alternative HCC screening tool for high-risk HCC patients.

Detecting Peripheral Nerves in the Elbow using Three-Dimensional Diffusion-Weighted PSIF Sequences: a Feasibility Pilot Study

  • Na, Domin;Ryu, Jaeil;Hong, Suk-Joo;Hong, Sun Hwa;Yoon, Min A;Ahn, Kyung-Sik;Kang, Chang Ho;Kim, Baek Hyun
    • Investigative Magnetic Resonance Imaging
    • /
    • v.20 no.2
    • /
    • pp.81-87
    • /
    • 2016
  • Purpose: To analyze the feasibility of three-dimensional (3D) diffusion-weighted (DW) PSIF (reversed FISP [fast imaging with steady-state free precession]) sequence in order to evaluate peripheral nerves in the elbow. Materials and Methods: Ten normal, asymptomatic volunteers were enrolled (6 men, 4 women, mean age 27.9 years). The following sequences of magnetic resonance images (MRI) of the elbow were obtained using a 3.0-T machine: 3D DW PSIF, 3D T2 SPACE (sampling perfection with application optimized contrasts using different flip angle evolution) with SPAIR (spectral adiabatic inversion recovery) and 2D T2 TSE (turbo spin echo) with modified Dixon (m-Dixon) sequence. Two observers used a 5-point grading system to analyze the image quality of the ulnar, median, and radial nerves. The signal-to-noise ratio (SNR) and contrast-to-noise ratio (CNR) of each nerve were measured. We compared 3D DW PSIF images with other sequences using the Wilcoxon-signed rank test and Friedman test. Inter-observer agreement was measured using intraclass correlation coefficient (ICC) analysis. Results: The mean 5-point scores of radial, median, and ulnar nerves in 3D DW PSIF (3.9/4.2/4.5, respectively) were higher than those in 3D T2 SPACE SPAIR (1.9/2.8/2.8) and 2D T2 TSE m-Dixon (1.7/2.8/2.9) sequences (P < 0.05). The mean SNR in 3D DW PSIF was lower than 3D T2 SPACE SPAIR, but there was no difference between 3D DW PSIF and 2D T2 TSE m-Dixon in all of the three nerves. The mean CNR in 3D DW PSIF was lower than 3D T2 SPACE SPAIR and 2D T2 TSE m-Dixon in the median and ulnar nerves, but no difference among the three sequences in the radial nerve. Conclusion: The three-dimensional DW PSIF sequence may be feasible to evaluate the peripheral nerves around the elbow in MR imaging. However, further optimization of the image quality (SNR, CNR) is required.

An Efficient Dynamic Workload Balancing Strategy (리트윗 행위의 동기, 이유와 가치: 요인 분석)

  • Kim, Hyo D.
    • Journal of the Korea Society of Computer and Information
    • /
    • v.19 no.11
    • /
    • pp.137-147
    • /
    • 2014
  • The study aims at exploring motivation, rationale, and values in twitter users' retweet behavior. It proposes that diffusion of message is based on the complex interactional relationships among attributes of original message, user's rationale, and values. Based on a pilot study, we constructed a total of 34 questions asking message attributes, motivation, and values of retweeting. Then, twitter users participated in an online survey, in which they evaluate their own 5 retweet messages based on the constructed questions(5 messages ${\times}$ 34 questions = 170). Then, a factor analysis is done in order to see the dimensions of the concepts in retweet behavior; and understand how message attributes, motivations, and values are inter-related with each other. The main factors extracted were: (1) public fairness, (2) fun and playfulness, (3) communal help, (4) news and information, etc. Factor 2 and 4 show the traditional journalism characteristics; while factor 1 and 3 do alternative journalistic values. The latter may work as a rectifying factors for traditional journalism; however, backfiring mechanism for group polarization. In addition, (1) users' internal identities, (2) communal unity and (3) belongness were identified as rationales and values for retweet behavior.