• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• 자원리싸이클링
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• 제19권3호
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• pp.62-70
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• 2010

종이에 대한 수요가 꾸준히 증가함에 따라 백상지 고지(White ledger)나 신문지 고지(Old newspaper pulp)등의 재활용지에 대한 중요성이 지속적으로 증가하고 있다. 또한 재활용지의 사용은 산림자원의 보호와 지구온난화 등의 환경문제 차원에서 더욱 부각되고 있다. 하지만 재활용지의 경우 종이에 필수적인 광학적 성질이 저하하고 기계적 성질이 감소하는 등 일반 종이에 비해 단점을 가지고 있다. 이러한 재활용지의 문제점을 보완하기 위해 입자 크기에 따라 $0.1{\mu}m{\sim}0.9{\mu}m$의 교질형 초미립자와 $0.1{\mu}m{\sim}0.9{\mu}m$의 입방형 미립자로 나눠지는 침강성 탄산칼슘을 In-situ 공정으로 재생펄프 표면에 합성하였다. 서로 다른 결정 형태와 크기가 다른 침강성탄산칼슘이 재활용지의 광학적 기계적 물성에 어떠한 영향을 주는지 연구하였다. 또한 화학펄프와의 혼합을 통해 침강성 탄산칼슘이 코팅된 재생펄프의 기계적 물성을 감소시키는 점을 보완하여 다른 첨가물에 전혀 의존하지 않고도 우수 재활용 인증마크인 GR규격을 만족하는지 알아보았다.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.71-72
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• 2006

We investigated a simultaneous living anionic polymerization process of isoprene (I) and 4styrene-d_8$ (S) in $benzene-d_6$ as a solvent with sec-buthyllithium as an initiator into polyisoprene(PI)-block-poly($styrene-d_8$)(PS) and the polymerization-induced molecular self-assembling process. This process was observed in-situ by time-resolved small-angle neutron scattering (SANS) experiment. The SANS profiles measured exhibited three time regions, where (i) the selective growth of PI chains occurs; (ii) the living chain ends switch from isoprenyllithium to styryllithium, and (iii) the SANS exhibited the polymerization induced disorder-to-order transition and order-to-order transition.

• Smart Structures and Systems
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• 제7권4호
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• pp.289-302
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• 2011

In marine clay deposits, naturally formed or artificially reclaimed, the evaluation and monitoring of the consolidation process has been a critical issue in civil engineering practices due to the time frame required for completing the consolidation process, which range from several days to several years. While complementing the conventional iconographic method suggested by Casagrande and recently developed in-situ techniques that measure the shear wave, this study suggests an alternative experimental procedure that can be used to evaluate the consolidation state of marine clay deposits using the shear wave velocity. A laboratory consolidation testing apparatus was implemented with bimorph-type piezoelectric bender elements to determine the effective stress-shear wave velocity (${\sigma}^{\prime}-V_s$) relationship with the marine clays of interest. The in-situ consolidation state was then evaluated by comparing the in-situ shear wave velocity data with the effective stress-shear wave velocity relationships obtained from laboratory experiments. The suggested methodology was applied and verified at three different sites in South Korea, i.e., a foreshore site in Incheon, a submarine deposit in Busan, and an estuary delta deposit in Busan. It is found that the shear wave-based experimental procedure presented in this paper can be effectively and reliably used to evaluate the consolidation state of marine clay deposits.

• Transactions on Electrical and Electronic Materials
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• 제13권2호
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• pp.93-97
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• 2012

In this study, the fabrication and the characteristic analyses of OLED using in-situ passivation are investigated. OLEDs represent a disadvantage in decreasing its life due to the degradation caused by the penetration of moisture and oxygen. After the fabrication of OLED, an in-situ passivation method for inorganic thin films is developed. A process that uses PECVD method which can apply a vapor deposition process at room temperature is also developed. Changes in the degradation and electric characteristics of OLEDs are also analyzed by applying $SiO_2$ and SiNx thin films to OLED as a passivation layer. By applying the fabricated thin film to OLEDs as a passivation layer, the moisture penetration in a single layer film is ensured below $1{\times}10^{-2}\;g/m^2.day$. This leads to the improvement of such degradation characteristics in the application of multilayer films.

• Corrosion Science and Technology
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• 제7권2호
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• pp.112-118
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• 2008

We observed initial rusting process of steel containing Al under wet/dry cyclic condition with NaCl solution film using in situ X-ray diffraction spectroscopy at SPring-8 synchrotron radiation facility. It was found that mass fraction of iron oxides such as ${\alpha}-FeOOH$, ${\beta}-FeOOH$ and ${\gamma}-FeOOH$ varied with Al content. Some kinds of Al oxides were also found at the initial stage of corrosion. Those corrosion products might affect the corrosion process and corrosion rate of the steel.

• Parasites, Hosts and Diseases
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• 제43권4호
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• pp.141-147
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• 2005

A practical and convenient method of rearing Eucyclops serrulatus in a microculture environment is described. A complete life cycle of E. serrulatus was maintained in a narrow space on a microscope slide glass on which a cover glass of $22{\times}40mm$ in size was mounted at a height of 0.8mm. The culture medium was constituted by bottled mineral water boiled with grains of Glycine max (soybean). Chilomonas paramecium, a free-living protozoan organism, was provided as live food. Growth of nauplii hatched from eggs to the first stage of copepodite took an average of 7.7 days, and the growth of copepodite 1 to the egg-bearing adult female took an average of 20.1 days in the microculture cell with an average life time of 44.7 days. Continuous passage of cope pods was successfully maintained as long as sufficient medium and food were provided. The microculture method enables an in situ microscopic observation on the growth and developmental process of helminth larvae experimentally infected to copepods as well as of copepod itself. Furthermore, it does not require anesthetization and, therefore, minimize the amount of stress exposed to cope pods during the handling process.

• 한국정보통신학회논문지
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• 제5권6호
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• pp.1128-1135
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• 2001

본 논문에서는 HSG형성을 위한 Si$_2$H$_{6}$의 조사와 어닐링을 통한 seeding method를 64Mbit DRAM에 적용하였다. 이 기술을 사용함으로서 인이 도우핑된 Amorphous 실리콘의 전극에 HSG grain 크기를 조절할 수 있었고, 이 새로운 HSG형성조건은 기존의 stack 캐패시터보다 약 2배의 정전용량을 확보할 수 있었다. 이와같은 방법을 이용한 HSG형성에서 인농도, 저장폴리 증착온도 및 HSG의 두께에 대한 공정 최적 조건으로는 각각 3.0-4.OE19atoms/㎤ , 53$0^{\circ}C$ 및 400$\AA$이었다. 이들 최적화된 공정조건으로 64M bit DRAM 캐패시터에 적용시 질화막의 두께 한계는 65$\AA$으로 확인되었다.

• 한국초지조사료학회지
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• 제34권1호
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• pp.60-67
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• 2014

본 연구는 조사료의 반추위 발효가 진행됨에 따른 볏짚표면에 부착된 섬유소 분해 박테리아의 군집변화와 섬유소 소화율을 비교 관측하기 위하여 볏짚의 in situ 반추 발효를 실시하였다. 그리고 부착 박테리아의 군집 변화를 측정하기 위하여 RT-PCR 기법을 이용하여 F. succinogenes. R. albus와 R. flavefaciens의 군집을 모니터링 하였다. 본 연구를 수행하기 위하여 in situ 볏짚 발효를 0. 2, 4, 8, 12, 24시간 실시하였을 때 반추위내 볏짚의 in situ 분해는 발효 시간이 진행됨에 따라 가속화되어 발효 8~12시간 사이에 최고 분해 속도를 나타내었으나, F. succinogenes, R. flavefaciens과 R. albus는 모두 발효 0~1시간 사이에 볏짚 표면에 부착이 80% 이상 완료되어 이후 발효가 계속 진행되는 동안 일정 수준의 군락을 유지하는 것이 발견되었다. 그리고 반추위내 유입된 조사료의 표면에 초기 부착과정을 관찰하기 위하여 0, 5, 10, 30 및 60분 간격으로 볏짚의 in situ 샘플을 채취하여 조사하였을 때 F. succinogenes, R. flavefaciens 및 R. albus의 군락 모두 볏짚이 반추위 유입 후 5분 내에 상당량의 수가 부착함을 발견하였다. 또한 조사료의 반추위 발효 용이성에 따른 섬유소 분해 박테리아의 부착 정도를 관찰하기 위하여 0, 2, 4 및 8% NaOH를 처리한 볏짚을 12 및 24시간 in situ 배양 볏짚의 소화율과 부착 박테리아의 군집 변화를 관측하였을 때, 볏짚의 NaOH 처리 농도가 높아짐에 따라 in situ 소화율이 증가하였으며, 동시에 부착된 박테리아 군집의 증가 경향이 F. succinogenes, R. flavefaciens 및 R. albus의 3균주 모두 배양 12시간에 나타났으나 배양 24시간에서는 각기 다른 양상을 나타냈다. 따라서 본 연구결과는 반추위내 섬유소 발효과정에서 섬유소 분해 박테리아의 부착은 조사료의 반추위 유입 초기에 반드시 이루어지고, 발효 시간이 진행됨에 따라 조사료 표면에 안정된 군락을 형성하며, 섬유소 분해가 가속화된다는 사실을 보여 주었다.

• Composites Research
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• 제33권5호
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• pp.256-261
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• 2020

본 연구에서는 Al-Ti-C 반응계의 점화온도에 대해 고찰하고, 자전연소합성법 및 교반주조 공정을 통해 TiC/Mg 금속복합재료를 제조하여 미세조직 및 기계적 특성을 분석하였다. 0, 10, 20, 30 vol.% TiC 입자가 균일하게 분산된 Mg 복합재료를 제조하였고, 강화재의 양이 증가할수록 기지 대비 우수한 압축강도 및 내마모특성을 보였다. 이는 in-situ 자전연소합성법에 의해 결함이나 불순물 등의 오염이 적은 TiC/Mg 금속복합재료 제조로 기지에서 강화재로의 효과적인 하중 전달에 의한 것으로 판단된다.