• 제목/요약/키워드: high-purity water system

검색결과 44건 처리시간 0.029초

Monitoring and Characterization of Bacterial Contamination in a High-Purity Water System Used for Semiconductor Manufacturing

  • Kim, In -Seop;Lee, Geon-Hyoung;Lee, Kye-Joon
    • Journal of Microbiology
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    • 제38권2호
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    • pp.99-104
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    • 2000
  • Hydrogen peroxide has been used in cleaning the piping of an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16 megabyte DRAM semiconductor manufacturing. The level of hydrogen peroxide-resistant bacteria in UHPW water was monitored prior to and after disinfecting the piping with hydrogen peroxide. Most of the bacteria isolated after hydrogen peroxide disinfection were highly resistant to hydrogen peroxide. However, the percentage of resistant bacteria decreased with time. The hydrogen peroxide-resistant bacteria were identified as Micrococcus luteus, Bacillus cereus, Alcaligenes latus, Xanthomonas sp. and Flavobacterium indologenes. The susceptibility of the bacteria to hydrogen peroxide was tested as either planktonic cells or attached cells on glass. Attached bacteria as the biofilm on glass exhibited increased hydrogen peroxide resistnace, with the resistance increasing with respect to the age of the biofilm regrowth on piping after hydrogen peroxide treatment. In order to optimize the cleaning strategy for piping of the high-purity water system, the disinfecting effect of hydrogen preoxide and peracetic acid on the bacteria was evaluated. The combined use of hydrogen peroxide and peracetic acid was very effective in killing attached bacteria as well as planktonic bacteria.

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Isolation and Characterization of Biofouling Bacteria in Ultra-high Purity Water Used in the Semiconductor Manufacturing Process

  • Kim, In-Seop;Lee, Kye-Joon
    • Journal of Microbiology and Biotechnology
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    • 제10권4호
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    • pp.554-558
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    • 2000
  • Bacteria were isolated and identified from an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16-megabyte DRAM semiconductor manufacturing. Scanning electron microscopic and microbiological observations revealed that the primary source of the bacteria isolated from the UHPW was detached cells from biofilms developed on the pipe wall through which the UHPW, a man-made and extremely nutrient poor environment, was passing. About 63-65% of the bacteria isolated from the UHPW and the pipe wall were Gram-positive, whereas only 10% of the bacteria isolated from the feed water were Gram-positive. The of Gram-positive bacteria and seven genera of Gram-negative bacteria. Strains of the UHPW bacteria effectively adhered to and formed a biofilm on the surface of polyvinyl chloride (PVC) pipe.

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Nutritional Flexibility of Oligotrophic and Copiotrophic Bacteria Isolated from Deionzed-ultrapure Water Made by High-purity Water Manufacturing System in A Semiconductor Manufacturing Company

  • Kim, In-Seop;Kim, Seung-Eun;Hwang, Jung-Sung
    • Journal of Microbiology and Biotechnology
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    • 제7권3호
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    • pp.200-203
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    • 1997
  • Bacteria isolated from ultrapure water made by a high-purity water manufacturing system in a semiconductor manufacturing plant were classified into two groups which either grew in diluted nutrient broth medium (oligotrophic bacteria) or could not grow (copiotrophic bacteria). The nutritional flexibility of oligotrophic and copiotrophic bacteria was investigated. The oligotrophic bacteria were shown to be able to utilize a significantly broader range of organic substrates than the copiotrophic bateria. This finding substantiates the hypothesis that nutritional flexibility is adaptive for oligotrophic bacteria.

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고순도 용제 회수 시스템의 공정 조건 탐색을 위한 AMESim 모델 개발 (Developing AMESim Model to Find out Process Condition of High Purity Solvent Recovery System)

  • 김대현;주강우;김광선
    • 반도체디스플레이기술학회지
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    • 제14권4호
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    • pp.8-12
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    • 2015
  • As NMP (N-Methyl-2pyrrolidone) is becoming important in many fields, the demand for it is also rising rapidly. With its chemical property of high boiling point, low vapor pressure and high water solubility, it is easy to recover it after processing. Therefore, it is increasingly needed to develop a system that effectively recovers NMP solvent. The study produced a system modeling using AMESim software before developing high purity solvent recovery (HPSR) system to recover NMP solvent. Then, it verified reliability by comparing the simulation model with the test result.

Efficient Isolation of Dihydrophaseic acid 3'-O-β-D-Glucopyranoside from Nelumbo nucifera Seeds Using High-performance Countercurrent Chromatography and Reverse-phased High-performance Liquid Chromatography

  • Rho, Taewoong;Yoon, Kee Dong
    • Natural Product Sciences
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    • 제24권4호
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    • pp.288-292
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    • 2018
  • High-performance countercurrent chromatography (HPCCC) coupled with reversed-phase highperformance liquid chromatography (RP-HPLC) method was developed to isolate dihydrophaseic acid 3'-O-${\beta}$-D-glucopyranoside (DHPAG) from the extract of Nelumbo nucifera seeds. Enriched DHPAG sample (2.3 g) was separated by HPCCC using ethyl acetate/n-butanol/water system (6:4:10, v/v/v, normal-phase mode, flow rate: 4.0 mL/min) to give 23.1 mg of DHPAG with purity of 88.7%. Further preparative RP-HPLC experiment gave pure DHPAG (16.3 mg, purity > 98%). The current study demonstrates that utilization of CCC method maximizes the isolation efficiency compared with that of solid-based conventional column chromatography.

Use of laminar flow water storage tank (LFWS) to mitigate the membrane fouling for reuse of wastewater from wafer processes

  • Sun, Darren Delai;Wu, You
    • Membrane and Water Treatment
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    • 제3권4호
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    • pp.221-230
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    • 2012
  • This study employed the modified fouling index (MFI) to determine the performance of a two-step recycling system - a membrane filtration integrated laminar flow water storage (LFWS) tank followed by an ion exchange process to reclaim ultrapure water (UPW) from the wastewater generated from semiconductor wafer backgrinding and sawing processes. The first step consisted of the utilization of either ultrafiltration (UF) or nanofiltration (NF) membranes to remove solids in the wastewater where the second step consisted of an ion exchanger to further purify the filtrate. The system was able to produce high purity water in a continuous operating mode. However, higher recycling cost could be incurred due to membrane fouling. The feed wastewater used for this study contained high concentration of fine particles with low organic and ionic contents, hence membrane fouling was mainly attributed to particulate deposition and cake formation. Based on the MFI results, a LFWS tank that was equipped with a turbulence reducer with a pair of auto-valves was developed and found effective in minimizing fouling by discharging concentrated wastewater prior to any membrane filtration. By comparing flux behaviors of the improved system with the conventional system, the former maintained a high flux than the latter at the end of the experiment.

초전도 자기분리에 의한 제지폐수의 정수 (Purification of wastewater from paper factory by superconducting magnetic separator)

  • 하동우;김태형;권준모;손명환;백승규;오상수;하홍수;고락길;김호섭;김영훈;하태욱
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.342-343
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    • 2009
  • Paper factories use a large amount of water and same amount of wastewater is generated. It is important to purity and recycle the wastewater because of water shortages and water pollution. The existing water treatment facilities like precipitation process need large-scale equipment and wide space to purity the wastewater of paper factory. High gradient magnetic separation (HGMS) system has the merits to purity rapidly because of large voids at filter and to occupy small space. In this paper, two types of superconducting magnets were used for HGMS systems. Cryo-cooled Bi-2223 superconducting magnet system with 70 mm room temperature bore and 200 mm of height was prepared. Cryo-cooled Nb-Ti superconducting magnet with 100 mm room temperature bore and 600 mm of height was used for magnetic separator. Magnetic filters were designed by the analysis of magnetic field distribution at superconducting magnets. The various magnetic seeding reactions were investigated to increase the reactivity of coagulation. The effects of magnetic separation of wastewater were investigated as variation of magnetic field strength and flow rate of wastewater.

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Hydrogen Production from Water Electrolysis Driven by High Membrane Voltage of Reverse Electrodialysis

  • Han, Ji-Hyung;Kim, Hanki;Hwang, Kyo-Sik;Jeong, Namjo;Kim, Chan-Soo
    • Journal of Electrochemical Science and Technology
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    • 제10권3호
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    • pp.302-312
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    • 2019
  • The voltage produced from the salinity gradient in reverse electrodialysis (RED) increases proportionally with the number of cell pairs of alternating cation and anion exchange membranes. Large-scale RED systems consisting of hundreds of cell pairs exhibit high voltage of more than 10 V, which is sufficient to utilize water electrolysis as the electrode reaction even though there is no specific strategy for minimizing the overpotential of water electrolysis. Moreover, hydrogen gas can be simultaneously obtained as surplus energy from the electrochemical reduction of water at the cathode if the RED system is equipped with proper venting and collecting facilities. Therefore, RED-driven water electrolysis system can be a promising solution not only for sustainable electric power but also for eco-friendly hydrogen production with high purity without $CO_2$ emission. The RED system in this study includes a high membrane voltage from more than 50 cells, neutral-pH water as the electrolyte, and an artificial NaCl solution as the feed water, which are more universal, economical, and eco-friendly conditions than previous studies on RED with hydrogen production. We measure the amount of hydrogen produced at maximum power of the RED system using a batch-type electrode chamber with a gas bag and evaluate the interrelation between the electric power and hydrogen energy with varied cell pairs. A hydrogen production rate of $1.1{\times}10^{-4}mol\;cm^{-2}h^{-1}$ is obtained, which is larger than previously reported values for RED system with simultaneous hydrogen production.

오존발생시스템을 이용한 하천수질 개선기법 (Techniques of Water Quality Improvement by Using Ozone Generation System)

  • 김민영;류재욱;이승윤;지홍기
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2008년도 학술발표회 논문집
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    • pp.2122-2126
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    • 2008
  • With the degradation of water quality and, at the same time increased water usage, the sources of high quality, for examples, river/stream, municipal reservoir, wells, artisan and surface water, are diminishing. Therefore, the importance of water quality has been emphasized over the years through publications and various literature sources. Even though considerable research has resulted in significant strides for providing interpretive information and mitigation strategies for improvement of waters, the quality of which is still questionable. This study aims to propose a completely independent self-contained system for purifying waters, solar-powered ozone generator. It is a semi-permanent and cost effective environmental solution. Functions of ozone treatment are: 1) to maintain oxidative flexibility, 2) remove harmful chemicals, wastes, and other substances, and 3) prevent epizootic microbial outbreaks. Recent advances in technology have allowed the development of the practical, self-contained and independent solar powered device. Solar electrical producing panels that charge batteries are the key to using these systems anywhere electrical power is not available. This paper invites the readers to examine the problem and consider the viable, proven solution the solar powered ozone purifying system. This paper also introduces basic concept and background of solar powered ozone generators and examine its feasibility for improving water quality in rivers and streams.

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A study on performance and smoke emission characteristics by blending low purity methanol in a DI diesel engine with the EGR rates of 0, 12.8 and 16.5%

  • Syaiful, Syaiful;Bae, Myung-Whan
    • Journal of Advanced Marine Engineering and Technology
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    • 제37권7호
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    • pp.701-710
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    • 2013
  • The purpose of this study is to investigate experimentally the effect of low purity methanol (LPM) on performance and smoke emission characteristics by using a four-cycle, four-cylinder, water-cooled, direct injection diesel engine with EGR system. The experiments are performed by the change of engine load in the engine load ranges of 25 to 100% with an interval of 25% under the constant engine speed of 2000 rpm. The LPM in the fuel blends contained 24.88% water by volume. The blended fuel ratios of diesel oil to LPM are maintained at 100/0, 95/5, 90/10 and 85/15% on the volume basis. In this paper, EGR rates are varied in three conditions of 0, 12.8 and 16.5%. The result shows that the brake power of a blended fuel with 15% LPM is reduced more 11.1% than that of the neat diesel oil at the full load with the EGR rate of 16.5%. At this condition, also, the brake specific fuel consumption (BSFC) is increased by 3.2%, the exhaust gas temperature is decreased by 10.7%, the smoke opacity is decreased by 18.7% and the brake thermal efficiency is increased by 7.3%. The sharp reduction of smoke opacity for a blended fuel with the LPM content of 15% at the full load without EGR system is observed by 68.4% compared with that of the neat diesel oil due to the high oxygen content of LPM.