• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.366-369
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• 2003

The vertical fountain plating system with the point contact has been used in semiconductor industry. But the plating shape in the opening of photoresist becomes gradated shape, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. So, we designed the tilted electrode ring contact to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and $\alpha$-step. A photoresist was coated to a thickness of $60{\mu}m$ and vias were patterned by a contact aligner After via opening, solder layer was electroplated using the fountain plating system and the tilted electrode ring contact system. In $\alpha$-step measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were ${\pm}16%,\;{\pm}3.7%$ respectively. In this study, we could get high uniformity bumps by the tilted electrode ring contact system. So, tilted electrode ring contact system is expected to improve workability and yield in module process.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.56-56
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• 1999

For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

• Transactions of the Korean Society of Automotive Engineers
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• v.19 no.3
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• pp.83-89
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• 2011

Diesel engines can produce higher fuel efficiency and lower $CO_2$ emission, they are subject to ever more stringent emission regulation. However, there are two major emission concerns fo diesel engines like such as particulate matter (PM) and nitrogen oxides (NOx). Moreover, it is not easy to satisfy the regulations on the emission of NOx and PM, which are getting more strengthened. One of the solutions is to apply the new combustion concept using multistage injection such as HCCI and PCCI. The other solution is to apply after-treatment systems. For example, lean NOx trap catalyst, Urea-SCR and others have various advantages and disadvantages Especially, Urea-SCR system have advantages such as a high conversion efficiency and a wide operation conditions. Hence the key factor to implementation of Urea-SCR technology, good mixing of urea(Ammonia) and gas, reducing Ammonia slip. Urea mixer components are required to facilitate evaporation and mixing because the liquid state of urea poses significant barriers for evaporation, and the distance to mixer is the most critical that affect mixer performance. In this study, to find out the distance from injector to mixer and simulation factor, a laser diagnostics and high speed camera are used to analyze urea injector spray characteristics and to present a distribution of urea solution in transparent manifold In addition, Droplet Uniformity Index is calculated from the acquired images by using image processing method to clarify the distribution of spray.

• Transactions of the Korean Society of Automotive Engineers
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• v.21 no.5
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• pp.15-24
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• 2013

Numerical studies were conducted to investigate the internal flow field and combustion characteristics of DISI engine with methanol blended in gasoline. Dual injection was applied and the characteristics were compared to single injection strategy. The amount of the fuel injection was corresponded to air-fuel ratio of each fuel for complete combustion. The preforming model in this study, software STAR-CD was employed for both modeling and solving. The operating speed condition were at 4000 rpm/WOT (Wide open throttle) where the engine was fully warmed. The results of single injection with M28 showed that the uniformity, equivalence ratio, in-cylinder pressure and temperature increased comparing to gasoline (M0). When dual injection was applied, there was no significant change in uniformity and equivalence ratio but the in-cylinder pressure and temperature increased. When M28 fuel and single injection was applied, the CO (Carbon monoxide) and NO (Nitrogen oxides) emission inside the combustion chamber increased approximately 36%, 9% comparing with benchmarking case in cylinder prior to TWC (Three Way Catalytic converter). When dual stage injection was applied, both CO and NO emission amount increased.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.779-782
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• 2004

Establishing and maintaining optimum lamp operating temperature is critically important in backlight systems for large area displays. The information presented in this paper is based upon work completed for a tiled 37.5" AM LCD, plus projections for a 37.5", 42" & 50" monolithic display. Due to the size of the units, a requirement for highly collimated light and a requirement for high brightness, >550 nits at the display surface, significant wattage is required which generates high heat levels in the backlight display assembly and potentially, at the display rear surface. Uniformity of illumination becomes an important element in the system design because of the large area involved.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1795-1797
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• 2001

This machine is a high-vacuum exhaust sealing device which makes the inside of PDP element in high vacuum state, blows inactive gases into it and finally seals it. This machine consists of vacuuming parts, heating parts and exhausting parts. Applying the energy saving technology, this machine improves the temperature uniformity of vacuuming and heating parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1273-1274
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• 2013

• International Journal of Industrial Entomology and Biomaterials
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• v.14 no.1
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• pp.15-21
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• 2007

Three newly authorized bivoltine silkworm hybrids namely, $CSR2{\times}CSR4$ (productive single hybrid), $(CSR6{\times}CSR26){\times}(CSR2{\times}CSR27)$ (productive double hybrid) and $CSR18{\times}CSR19$ (robust single hybrid) were chosen for the present study. These hybrids were subjected to different temperature and humidity treatments i.e., $25{\pm}$1^{\circ}C and RH $65{\pm}5%$ (control), $30{\pm}1^{\circ}C$, with combinations of low relative humidity (RH $65{\pm}5%$) and high RH ($85{\pm}5%$) at different stages during rearing and spinning of silkworm larvae. The larvae of after 3rd moult were subjected to different thermal and humidity stress till the assessment of cocoon traits. The comparative rearing and reeling performance clearly indicated that the deleterious effect of high temperature and high RH was more pronounced for the majority of traits such as cocoon uniformity, cocoon weight, shell weight, shell percentage, reelability, filament length, raw silk percentage raw silk recovery denier and waste percentage on silk weight than other temperature and RH treatments and this effect was almost similar for all three silkworm hybrids studied. The present investigation clearly indicate that the deleterious effect of high temperature and high RH was more pronounced on rearing and spinning of silkworm larvae than other temperature and RH treatments and similar effect was noticed for all the three silkworm hybrids studied. The cocoon characters can be improved by providing ideal environmental conditions even during spinning stage of larvae affected with high temperature and RH. The study also suggest that high temperature and low humidity has greater effect during rearing stage than spinning stage.

• Management Science and Financial Engineering
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• v.4 no.2
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• pp.43-58
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• 1998

Packet switch is a key component in high speed digital networks. This paper investigates congestion phenomena in the packet switching with input buffers. For large value of switch size N, mathematical models have been developed to analyze asymptotic maximum switch throughput under nonuniform traffic. Simulation study has also been done for small values of finite N. The rapid convergence of the switch performance with finite switch size to asymptotic solutions implies that asymptotic analytical solutions approximate very closely to maximum throughputs for reasonably large but finite N. Numerical examples show that non-uniformity in traffic pattern could result in serious degradation in packet switch performance, while the maximum switch throughput is 0.586 when the traffic load is uniform over the output trunks. Window scheduling policy seems to work only when the traffic is relatively uniformly distributed. As traffic non-uniformity increases, the effect of window size on throughput is getting mediocre.

• Journal of the Korean institute of surface engineering
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• v.46 no.6
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• pp.283-289
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• 2013

The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{\circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.