• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.477-477
• /
• 2008

For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.97-97
• /
• 2013

Recently, Cu2ZnSn(S,Se)4 (CZTSS), which is one of the In- and Ga- free absorber materials, has been attracted considerable attention as a new candidate for use as an absorber material in thin film solar cells. The CZTSS-based absorber material has outstanding characteristics such as band gap energy of 1.0 eV to 1.5 eV, high absorption coefficient on the order of 104 cm-1, and high theoretical conversion efficiency of 32.2% in thin film solar cells. Despite these promising characteristics, research into CZTSS based thin film solar cells is still incomprehensive and related reports are quite few compared to those for CIGS thin film solar cells, which show high efficiency of over 20%. I will briefly overview the recent technological development of CZTSS thin film solar cells and then introduce our research results mainly related to sputter based process. CZTSS thin film solar cells are prepared by sulfurization of stacked both metallic and sulfide precursors. Sulfurization process was performed in both furnace annealing system and rapid thermal processing system using S powder as well as 5% diluted H2S gas source at various annealing temperatures ranging from $520^{\circ}C$ to $580^{\circ}C$. Structural, optical, microstructural, and electrical properties of absorber layers were characterized using XRD, SEM, TEM, UV-Vis spectroscopy, Hall-measurement, TRPL, etc. The effects of processing parameters, such as composition ratio, sulfurization pressure, and sulfurization temperature on the properties of CZTSS absorber layers will be discussed in detail. CZTSS thin film solar cell fabricated using metallic precursors shows maximum cell efficiency of 6.9% with Jsc of 25.2 mA/cm2, Voc of 469 mV, and fill factor of 59.1% and CZTS thin film solar cell using sulfide precursors shows that of 4.5% with Jsc of 19.8 mA/cm2, Voc of 492 mV, and fill factor of 46.2%. In addition, other research activities in our lab related to the formation of CZTS absorber layers using solution based processes such as electro-deposition, chemical solution deposition, nano-particle formation will be introduced briefly.

• Journal of the Korean Institute of Gas
• /
• v.23 no.4
• /
• pp.1-9
• /
• 2019

Large-scale industrial boilers operating at high temperature and high pressure, have a large amount of water, and a large amount of energy is released at the time of explosion. Currently, most industrial boilers use gas fuel such as LNG and LPG, etc. and fuel exists in the same space as equipment, so there is a high possibility of secondary damage such as fire or explosion in the event of a boiler accident. Both special care and management are required to operate the very dangerous equipment that causes casualty 2.51 per accident. For boilers of a certain size or more, the Korea Energy Agency conducts inspections in accordance with the Energy Usage Rationalization Act, KS, and public notice of the Ministry of Industry, Trade and Resources. In this research, based on the results of the inspection, the hazard factorss are configured, and a questionnaire is conducted to the inspector, the equipment manager, the maintenance person, and the person in charge of the manufacturer. We analyzed the results by using AHP (Analytic Hierarchy Process). As a result of analysis, generally recognized hazard factorss are not good management, measurement failure, specification failure, water leak, leak analysis, but connection, welding, scale, and corrosion, etc. are relatively less important. It is judged that the adverse factors that are recognized to be highly important among all groups and careers are already well managed, but less important and adverse factors should be well managed to ensure that the safe usage of the boiler.

• Korean Journal of Food Science and Technology
• /
• v.53 no.5
• /
• pp.553-560
• /
• 2021

Theanine, the major amino acid and a sweet umami component of green tea, has anti-stress effects in humans. From green tea, theanine was extracted at 80℃ for 2 h using a low temperature, high pressure extractor, and caffeine was removed using an HP-20 column with 80% ethanol. Theanine extracts were applied to produce functional jelly using three kinds of gelling agents (I, II, and III) or various concentrations of theanine extracts (10-50%). Theanine jelly was characterized with respect to its physical properties, product stability, and physiological function. Gelling agent III (tamarind gum, xanthan gum, and locust bean gum=2:3:5, w/w/w) and S3 (35% theanine extracts) jelly exhibited the optimum textural properties with lower hardness and high springiness. Among theanine jellies, S3 exhibited optimum product stability, high 1,1-diphenyl-2-picrylhydrazyl (DPPH) scavenging, and acetylcholinesterase inhibitory activity. These results indicate that the anine extracts could be used as a neuroprotective source in the food industry.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.35 no.4
• /
• pp.398-406
• /
• 2022

In order to increase the electrochemical performance of thermal battery anode, LIFT anode having the same weight but a larger lithium content in electrodes was fabricated by mixing lithium, iron and titanium. By applying these electrodes, a single cell and a thermal battery were prepared, and the effect of LIFT anode on electrochemical performance was evaluated. The LIFT-applied single cell presented a better cell performance than LIFe-applied single cell at 500℃ and 550℃. The discharge performance of LIFT-applied single cell, which included the operating time (787s), specific capacity (1,683 Asg^-1), and electrode utilization (80.7%), was improved collectively compared to the LIFe applied single cell (736s, 1,245 As g^-1, and 74.6%) at 500℃. As the discharge progressed, the internal resistance of LIFT anode decreased, because the lithium migration path was formed due to the presence of large titanium particles among iron particles. These results were analyzed in terms of the microstructure of electrode using SEM. Energy density of LIFT-applied single cell also increased by 10% to 142.1 Wh kg^-1 compared to that of LIFe-applied single cell (127.4 Wh kg^-1). In addition, the LIFT-applied single cell presented a stable discharge performance for 6,500s without a short circuit which could occur by molten lithium under an open circuit voltage condition with a high pressure (4 kgf cm^-2). As observed in the high temperature thermal battery performance tests, the voltage and specific capacity of LIFT-applied thermal battery are superior to those of LIFe-applied thermal batteries, indicating that the energy density of LIFT-applied thermal batteries should remarkably increase.

• Journal of Life Science
• /
• v.15 no.5 s.72
• /
• pp.840-846
• /
• 2005

This study was carried out to investigate the effect of electron beam irradiation and cooking temperature on physico-chemical characteristics and lipid oxidation of beef. A total of six beef carcasses ($280\∼300 kg$) that were quality grade $1^{+}$(marbling score No.7, meat color No.4, maturity No.1, texture No.1) was purchased at the commercial slaughter house. The carcasses were transported and washed using high pressure water, and pasteulized with $ 50\% $ ethyl alcohol in the laboratory. After the carcasses were deboned and trimmed, loin and round were taken out to make steak (1.5cm thickness) or ground beef respectively. Samples were wrap or vacuum packaged and irradiated with 0, 3, 4.5, 6 and 7.5 kGy using electron-beam accelerator at Samsung Heavy Industries Ltd. Co. (in Taejun). Irradiated samples were cooked with different methods(electronic pan and gas oven) and temperatures ($ 60^{\circ}C, 70^{\circ}C and 80^{\circ}C$) and used to measure fatty acid composition, TBARS, cholesterol oxide products and panel test scores. The content of saturated fatty acids increased by increasing heating temperature in oven boiling steak (OBS) and pan boiling steak (PBS), and there was no difference by electron-beam irradiation. Both irradiated and non-irradiated treatment were high as the heating temperature increased in TBARS by heating temperature in PBS (p < 0.05) and the amount of Malonaldehyde (MA), standard of fat deterioration, was increased in OBS (p < 0.05). Non-irradiated and 3, 6 kGy treatment produced about 2 fold amount of MA at $ 60^{\circ}C $ compared with $ 80^{\circ}C $. In comparison with PBS, OBS produced much amount of MA and a bit different from non-irradiated treatment but did not show no tendency. As irradiation levels and heating temperature increased, the amount of cholesterol oxides products was increased and also pan-heating method, direct heating method, significantly increased the degree of oxidation compared with oven-heating method, indirect heating method (p < 0.05).

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.17 no.2
• /
• pp.183-202
• /
• 2019

For design and performance assessment of a high-level radioactive waste (HLW) disposal system, it is necessary to understand the characteristics of coupled thermo-hydro-mechanical (THM) behavior. However, in previous studies for the Korean Reference HLW Disposal System (KRS), thermal analysis was performed to determine the spacing of disposal tunnels and interval of disposition holes without consideration of the coupled THM behavior. Therefore, in this study, TOUGH2-MP/FLAC3D is used to conduct THM modeling for performance assessment of the Korean Reference HLW Disposal System (KRS). The peak temperature remains below the temperature limit of $100^{\circ}C$ for the whole period. A rapid rise of temperature caused by decay heat occurs in the early years, and then temperature begins to decrease as decay heat from the waste decreases. The peak temperature at the bentonite buffer is around $96.2^{\circ}C$ after about 3 years, and peak temperature at the rockmass is $68.2^{\circ}C$ after about 17 years. Saturation of the bentonite block near the canister decreases in the early stage, because water evaporation occurs owing to temperature increase. Then, saturation of the bentonite buffer and backfill increases because of water intake from the rockmass, and bentonite buffer and backfill are fully saturated after about 266 years. The stress is calculated to investigate the effect of thermal stress and swelling pressure on the mechanical behavior of the rockmass. The calculated stress is compared to a spalling criterion and the Mohr-Coulumb criterion for investigation of potential failure. The stress at the rockmass remains below the spalling strength and Mohr-Coulumb criterion for the whole period. The methodology of using the TOUGH2-MP/FLAC3D simulator can be applied to predict the long-term behavior of the KRS under various conditions; these methods will be useful for the design and performance assessment of alternative concepts such as multi-layer and multi-canister concepts for geological spent fuel repositories.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.39 no.9
• /
• pp.871-877
• /
• 2015

Deep-sea equipment such as underwater robots and unmanned submersible vehicles, include various machine components and sensors, and it is important that their reliabilities be tested before use in the fields. This is necessary because they are affected by complex extreme-environment conditions, such as high pressures, extreme temperatures, and tidal forces that are present in the deep sea. We require test equipment that can conduct empirical tests in conditions that mimic these complex oceanic environments. In this study, we propose specifications that should be met, and a design plan for the primary components, which should limit their use to a maximum water pressure of 2.0 MPa, water temperature of $5{\sim}60^{\circ}C$, and a maximum flow velocity of 2 m/s. in work-in type underwater combined environment test equipment and. We present test system development procedures to verify the reliability of products and systems used in deep-sea environments.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
• /
• v.9 no.3
• /
• pp.111-118
• /
• 2004

An ocean buoy was deployed 10 km off Donghae city, Korea at a depth of 130 m to measure meteorological (air pressure, air temperature, wind speed, wind gust, wind direction, relative humidity) and oceanographic data (water properties and currents in the whole column) in real-time. The buoy recorded a maximum wind gust of 25 m/s (10 minutes' average speed of 20 m/s) and a minimum air pressure of 980 hPa when the eye of typhoon Maemi passed by near the Uljin city, Korea at 03:00 on 13 September 2003. The wave height reached maximum of 9 m with the significant wave height of 4 m at 04:00 (1 hour after the passage of Maemi). The currents measured near the surface reached up to about 100 cm/s at 13:00 (10 hours after the passage of Maemi). The mixed layer (high temperature and low salinity) thickness, which was accompanied by strong southward current, gradually increased from 20 m to 40 m during the 10 hours. A simple two layer model for the response to an impulsive alongshore wind over an uniformly sloping bottom developed by Csanady (1984) showed reasonable estimates of alongshore and offshore currents and interface displacement for the condition of typhoon Maemi at the buoy position (x=8.15 km) during the 10 hours.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.11a
• /
• pp.24-25
• /
• 2006

SmBCO coated conductors were successfully fabricated using EDDC (Evaporation using Drum in Dual Chambers) deposition system that is a bath type co-evaporation system for fabrication of superconducting tape and divided into two chambers named evaporation chamber and reaction chamber. To obtain long and high quality superconducting coated conductor, it is very important to secure the uniformity of all the deposition parameters m the deposition system such as deposition temperature, oxygen partial pressure, compositional ratios and so on. Therefore, we investigated the distribution of the parameters along the axis of the drum m EDDC on which tapes were wound helically. When the temperature on the middle point of deposition zone was $700^{\circ}C$, that on the edge of deposition zone was $675^{\circ}C$. When the thickness of SmBCO layer on the middle point of deposition zone was 1063 nm, that on the edge of deposition zone was 899 nm. The partial pressure of oxygen was 5 mTorr in the reaction chamber while that was $7{\times}10^{-5}$Torr in the evaporation chamber. The composition ratio of Sm:Ba:Cu, that was measured by EDX, was very uniform along the axis of the drum. Under these deposition conditions, critical current distribution along the drum axis was 175 A/cm, 190A/cm, 217.5 A/cm, 182.5 A/cm, 175 A/cm with the interval of 9 cm between samples. It means that the EDDC system has the potential of fabricating (100m, 200A) class coated conductor.