• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.103-104
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• 2006

$Pb(Zr,Ti)O_3(PZT)$ is very attractive ferroelectric materials for ferroelectric random access memory (FeRAM) applications because of its high polarization ability and low process temperature. However, Chemical Mechanical Polishing (CMP) pressure and velocity must be carefully adjusted because FeRAM shrinks to high density devices. The contaminations such as slurry residues due to the absence of the exclusive cleaning chemicals are enough to influence on the degradation of PZT thin film capacitors. The surface characteristics of PZT thin film were investigated by the change of process parameters and the cleaning process. Both the low CMP pressure and the cleaning process must be employed, even if the removal rate and the yield were decreased, to reduce the fatigue of PZT thin film capacitors fabricated by damascene process. Like this, fatigue characteristics were partially controlled by the regulation of the CMP process parameters in PZT damascene process. And the exclusive cleaning chemicals for PZT thin films were developed in this work.

• Journal of Hydrogen and New Energy
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• v.21 no.5
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• pp.442-451
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• 2010

This paper describes the calculation method to obtain the product composition of coal pyrolysis at high pressure and high temperature. The products of coal pyrolysis should be determined for the coal gasifier simulation, and this is the first step of the coal gasifier simulation. The pyrolysis product distribution greatly affects the coal gasifier efficiency such as carbon conversion, cold gas efficiency and the syngas composition at the outlet of the gasifier. The present calculation method is based on the coal ultimate/proximate analysis and several correlations among gasifier pressure, coal properties and pyrolysis products. The calculated products for 5 coals have been compared with those from the commercial pyrolysis model.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.5
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• pp.444-450
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• 2000

We prepared Co-Cr thin film for perpendicular magnetic recording media with facing targets sputtering system(FTS system) which can deposit a high quality thin film in plasma-free state and wide range of working pressure. The effect of sputtering conditions(argon gas pressure and substrate temperature) on the magnetic and the crystallographic characteristic of Co-Cr thin film was investigated. And the variation of perpendicular coercivity with the variation of film thickness was studied. As a result we obtained the high perpendicular coercivity of 1900Oe and the good dispersion angle of c-axis($\Delta$$\theta$$_{50}$) of 5$^{\circ}$on the film thickness of 100nm for the promising recording layer of perpendicular magnetic recording media.c recording media.a.

• Proceedings of the KIEE Conference
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• 2000.11b
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• pp.309-311
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• 2000

An advanced angular position detector (APD) for the SMART CEDM (control element drive mechanism) was designed. The APD is required to be small size with high resolution for angular displacement of rotary step motor. Unfortunately the proximity sensors can not be adopted to SMART CEDM because the motor shaft is located in the pressure boundary cylinder filled with the primary coolant under high temperature and pressure. This paper describes the electromagnetic finite element analysis for the design of advanced angular position detector for the SMART CEDM. The electromagnetic properties obtained will be used as Input for the optimization analysis of the APD.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.29-30
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• 2005

Experimental results are presented for the degradation of 3 nm-thick gate oxide ($SiO_2$) under both Negative-bias Temperature Instability(NBTI) and Hot-carrier-induced(HCI) stresses using P and NMOSFETs that are annealed with hydrogen or deuterium gas at high-pressure (1~5 atm.). Statistical parameter variations depend on the stress conditions. We suggest that deuterium bonds in $SiO_2$ film is effective in suppressing the generation of traps related to the energetic hot electrons.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.445-448
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• 2005

Recently, injection molding process became more popular than ever to produce large quantities of high precision products or optical products. Injection molding products can cause sensorial problems because of high birefringence or deformation from the residual stresses in the optical media. In the present study, we have focussed on the effect of holding and compression pressures on the optical anisotropy remaining in the MOD by examining the gapwise distribution of birefringence and extinction angle The effect of holding pressure was found to form the inner two birefringence peaks. But the effect of compression pressure on the birefringence distribution was found to make the uniform distribution near the center in the gap-wise direction. Finally, the value of the birefringence near the wall decreased as the mold temperature increased.

• Archives of Metallurgy and Materials
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• v.66 no.3
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• pp.679-682
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• 2021

The objective of the present research is to develop new admixed lubricants which can be used for high-density sintered iron when processed using warm die and warm compaction. Depending on various lubricants, the effect of compaction temperature on the ejection behavior and sintered properties was studied. Lubricants were prepared by mixing of Zn-stearate and ethylene bis stearamide (EBS) in various compositions. The iron powders blended with lubricants were compacted under the pressure of 700 MPa at various temperatures. The green compacts were sintered at 1120℃ for 30 min. Microstructure, density, hardness, and transverse rupture strength of sintered materials with different lubricants were investigated in detail.

• Journal of the Korean Society of Safety
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• v.28 no.2
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• pp.1-5
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• 2013

Liquefied Natural Gas is liquefied at the condition of atmosphere pressure and cryogenic temperature. LNG is exposed very long time under the cryogenic temperature and high pressure, and it is very important to retain the structural safety in this envelopment. Until now, the material which are composing the storage tank of LNG ship has experimented at room temperature, so it is not enough to apply for the design at the cryogenic temperature. The purposes of this study are investigated mechanical properties for aluminum alloy. To evaluate tensile and fatigue test for aluminum alloy, it was considering static and fatigue conditions at room and cryogenic temperature. S-N curves were designed at both temperature respectively. Also, P-S-N curve was performed statistical method by JSME-S002.

• Journal of Sensor Science and Technology
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• v.13 no.6
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• pp.473-478
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• 2004

This study focused on the charateristic of magnetic fluids, the viscosity deviation of magnetic fluids due to temperature changes, and fabrication of a 'purely' liquid type microvalve. The viscosity of magnetic fluids decreases sharply during increasing of temperature. The viscosity of magnetic fluids is rated 1,000 cP at the room temperature and 25 cP when the temperature reaches $100^{\circ}C$. Briefly, it is remarkable that the fluid flow can be controlled by the temperature and this characteristic can be adopted to the microfluidics as a microvalve. The fabrication of a liquid type microvalve is more easy than solid state microvalves and which can increase an efficiency of the controlability with respect to the thermo-pneumatic micropump which is studied broadly for many years. When the magnetic fluid used as a sealant for high level sealing, the pressure leakage is less than solid state microvalve. The experimental results show that the pressure drop in microchannel, filled with the magnetic fluid, is significant in the temperature range of $20^{\circ}C{\sim}50^{\circ}C$ and this result explains why the use of magnetic fluids is possible as a microvalve searcher uses this characteristics. Well known thermo-pnumatic.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2989-2994
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• 2007

Gas hydrates are ice-like crystalline compounds that form under low temperature and elevated pressure conditions. Although hydrate formation can pose serious flow-assurance problems in the gas pipelines or facilities, gas hydrates present a novel means for natural gas storage and transportation with potential applications in a wide variety of areas. An important property of hydrates that makes them attractive for use in gas storage and transportation is their very high gas-to-solid ratio. In addition to the high gas content, gas hydrates are remarkably stable. The main barrier to development of gas hydrate technology is the lack of an effective method to mass produce gas hydrate in solid form. The first objective of this study is investigating the characteristics of gas hydrate formation related to several factors such as pressure, temperature, water-to-storage volume ratio, concentration of SDS, heat transfer and whether stirred or not respectively. And the second objective is clarifying the relation between the formation efficiency and each factor in order to find the proper way or direction to improve the formation performance.