• Title/Summary/Keyword: high speed deposition

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The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD (RF-PECVD로 증착된 DLC 박막의 온도 변화에 따른 트라이볼로지 특성)

  • Lee Young-Ze;Cho Yong-Kyung;Shin Yun-Ha
    • Tribology and Lubricants
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    • v.22 no.3
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    • pp.127-130
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    • 2006
  • DLC (Diamond Like Carbon) films show very desirable surface interactions with high hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of hydrogenated DLC film is dependent on tribological environment, especially surrounding temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were conducted at a sliding speed of 60 rpm, a load of 10N, and surrounding various temperatures of $25^{\circ}C,\;40^{\circ}C,\;55^{\circ}C\;and\;75^{\circ}C$. The results show considerable dependency of DLC tribological parameters on temperature. The friction coefficient decreased as the surrounding temperature increased. After tests the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track were also obtained by an atomic force microscope (AFM).

Interaction of Laser Beam with PZT - Target and Observation of Laser - Induced Plume and Particle Ejection (Laser와 PZT - Target간의 반응과 그에 따른 Plume 형성 및 입자 방출에 관한 연구)

  • Lee, Byeong-U
    • Journal of Advanced Marine Engineering and Technology
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    • v.20 no.5
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    • pp.93-102
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    • 1996
  • Laser-induced plume and laser-target interaction during pulsed laser deposition are demonstrated for a lead zirconate titanate (PZT). A KrF excimer laser (wavelength 248nm) was used and the laser was pulsed at 20Hz, with nominal pulse width of 20ns. The laser fluence was~$16J/cm^2,$ with 100mJ per pulse. The laser-induced plasma plume for nanosecond laser irradiation on PZT target has been investigated by optical emission spectra using an optical multichannel analyzer(OMA) and by direct observation of the plume using an ICCD high speed photography. OMA analysis showed two distinct ionic species with different expansion velocities of fast or slow according to their ionization states. The ion velocity of the front surface of the developing plume was about $10^7$cm/sec and corresponding kinetic energy was about 100eV. ICCD photograph showed another kind of even slower moving particles ejected from the target. These particles considered expelled molten parts of the target. SEM morphologies of the laser irradiated targets showed drastic melting and material removal by the laser pulse, and also showed the evidence of the molten particle ejection. The physics of the plasma(plume) formation and particle ejection has been discussed.

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Multi-hole RF CCP 방전에서 방전 주파수가 미치는 영향

  • Lee, Heon-Su;Lee, Yun-Seong;Seo, Sang-Hun;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.145-145
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    • 2011
  • Recently, multi-hole electrode RF capacitively coupled plasma discharge is being used in the deposition of microcrystalline silicon for thin film solar cell to increase the speed of deposition. To make efficient multi-hole electrode RF capacitively coupled plasma discharge, the hole diameter is to be designed concerning the plasma parameters. In past studies, the relationship between plasma parameters such as pressures and gas species, and hole diameter for efficient plasma density enhancement is experimentally shown. In the presentation, the relationship between plasma deriving frequency and hole diameter for efficient multi-hole electrode RF capacitively coupled plasma discharge is shown. In usual capacitively coupled plasma discharge, plasma parameter, such as plasma density, plasma impedence and plasma temperature, change as frequency increases. Because of the change, the optimum hole diameter of the multi-hole electrode RF capacitively coupled plasma for high density plasma is thought to be modified when the plasma deriving frequency changes. To see the frequency effect on the multi-hole RF capacitively coupled plasma is discharged and one of its electrode is changed from a plane electrode to a variety of multi-hole electrodes with different hole diameters. The discharge is derived by RF power source with various frequency and the plasma parameter is measured with RF compensated single Langmuir probe. The shrinkage of the hole diameter for efficient discharge is observed as the plasma deriving frequency increases.

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Flow and heat transfer in a thermal CVD for carbon nanotubes according to variation of the inlet and outlet areas (유입.유출구 크기 변화에 따른 CNT용 CVD 장비 내의 열 및 유동해석)

  • Ha, Da-Som;Jang, Young-Woon;Kim, Jong-Seok;Yoon, Suk-Bum;Im, Ik-Tae
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.4
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    • pp.119-124
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    • 2011
  • Flow and temperature field in reactors are important factors for design of thermal chemical vapor deposition system to grow carbon nanotubes. In this study, effects of the variations of the inlet and outlet areas of the CVD reactor to the flow characteristics and temperature field are numerically analyzed. High temperature of the gas in the entrance region is obtained with slow gas speed resulted from the enlarged inlet area. Variation of the exit area has little effects on the flow field and temperature in the reactor. However the largest area among considered cases gives the highest gas temperature though the differences are small.

Mechanical Properties of 316L manufactured by Selective Laser Melting (SLM) 3D printing (Selective Laser Melting (SLM) 방식 3D Printing으로 제조한 스테인레스 316L 기계적 물성 분석)

  • Park, Sun Hong;Jang, Jin Young;Noh, Yong Oh;Bae, Byung Hyun;Rhee, Byong Ho;Eo, Du Rim;Cho, Jung Wook
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2017.05a
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    • pp.872-876
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    • 2017
  • Laser Based 3D Printing is an recently advance manufacturing technology for making complex shape comopnent such as automobile and aerospace. So in this article, stainless steel 316L was manufactured by Selective Laser Melting (SLM) and Laser Melting Deposition (LMD) method. SLM is an additive manufacturing process that allow for the manufacture of small and complex component by laser melting and solidification of powder in bed using a high intensity laser beam. The results showed that the laser scanning speed and laser power affects the defect, microstructure and the hardness of the components.

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Microstructures and Mechanical Properties of Al-B4C Composites Fabricated by DED Process (DED 공정으로 제조된 Al-B4C 복합재의 미세조직 및 기계적 특성)

  • Yu-Jeong An;Ju-Yeon Han;Hyunjoo Choi;Se-Eun Shin
    • Journal of Powder Materials
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    • v.30 no.3
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    • pp.262-267
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    • 2023
  • Boron carbide (B4C) is highly significant in the production of lightweight protective materials when added to aluminum owing to its exceptional mechanical properties. In this study, a method for fabricating Al-B4C composites using high-energy ball milling and directed energy deposition (DED) is presented. Al-4 wt.% B4C composites were fabricated under 21 different laser conditions to analyze the microstructure and mechanical properties at different values of laser power and scan speeds. The composites fabricated at a laser power of 600 W and the same scan speed exhibited the highest hardness and generated the fewest pores. In contrast, the composites fabricated at a laser power of 1000 W exhibited the lowest hardness and generated a significant number of large pores. This can be explained by the influence of the microstructure on the energy density at different values of laser power.

Physical Properties Variation of Grout Materials Based on the Water to Cement Ratio and the Mixing Speed (물시멘트비 및 혼합속도에 따른 주입재의 물성변화 연구)

  • Chun, Byung-Sik;Kim, Jin-Chun;Jang, Bui-Woong;Lee, Jun-Woo
    • Journal of the Korean GEO-environmental Society
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    • v.1 no.1
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    • pp.87-96
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    • 2000
  • Generally, OPC(ordinary portland cement) is used for grouting in Korea, and bentonite has usually been added to prevent the deposition of cement particles. The dispersion of CB(cement bentonite) grout is influenced by variable factors i.e. water to cement ratio, particle size of cement, kind of bentonite, adding volume, method of adding, viscosity of CB grout materials and curdling time. Among variable factors, the viscosity of CB grout materials is influenced by the dispersion, and dispersion is improved as the speed of grout mixer increase. In this paper, the specification of construction was derived by estimating physical characteristics of CB grout materials and confirming the sate of dispersion. The results show that the engineering characteristics of CB grout materials vary with the water to cement ratio and the mixing speed.

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Mechanical Properties of HfN/Si$_3$N$_4$and NbN/$Si_3N_4$Multilayer Coatings (HfN/Si$_3$N$_4$와 NbN/$Si_3N_4$다층박막의 기계적 특성)

  • Jeong, Jin-Jung;Hwang, Seon-Geun;Lee, Jong-Mu
    • Korean Journal of Materials Research
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    • v.11 no.3
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    • pp.236-242
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    • 2001
  • HfN/Si$_3$N$_4$and NbN/Si$_3$N$_4$ multilayer coatings were deposited onto a high speed tool steel substrate by reactive sputtering and their mechanical properties were evaluated in terms of the dependence of hardness and adhesion strength on the sputter deposition process parameters. The hardnesses of both HfN/Si$_3$N$_4$and NbN/Si$_3$N$_4$ multiplayer coatings increase up to the flux ratio of 0.4 but nearly do not change after that as the $N_2$/Ar flux ratio in nitride sputter deposition increases. The hardnesses of both multiplayer coatings nearly do not change with annealing at low temperatures but decrease owing to oxidation with annealing at a high temperature like 80$0^{\circ}C$ after depositing the layers by sputtering. Post-annealing at low temperatures increases the adhesion strength of the multilayers. but high temperature annealing is not desirable since it decreases the adhesion strength besides the hardness deterioration.

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An Evaluation of Skiving Cutting Characteristics of TiCN PACVD Coating Caribide Hob (TiCN PACVD코팅 초경호브의 Skiving절삭특성 평가)

  • Cheon, Jong-Pil
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.2
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    • pp.471-477
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    • 2012
  • SCM420 steel tempered after performing gear hove PACVD carbide coating on the surface after the cutting surface hardness was high. Difficult-to-cut, without coating is classified as mild as large, including materials like mild, high strength that improves tool life and productivity have limited availability. Drive to improve it in the TiCN-coated carbide call for war to the finish coating on cutting a hob skiving good workability, tool wear less, 2.5-fold increase in tool life results were obtained. Experiments using CNC Skiving hobbing machine with wet cutting conditions, cutting speed and feed rate to apply a variety of the tool wear and surface roughness data were obtained. Results from condition 2 (V = 200m/min F = 0.7mm/rev) cutting speed feed mark the cutting surface microstructure and surface roughness Rmax $4.7{\mu}m$(Ra $1.19{\mu}m$) of the data was obtained.

Development of Variable Deposition manufacturing for Ethylene Vinyl Acettecopolymer (EVA를 이용한 가변 용착 쾌속 조형 공정의 개발)

  • Lee, Sang-Ho;Sin, Bo-Seong;Jeong, Jun-Ho;An, Dong-Gyu;Yang, Dong-Yeol
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.9
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    • pp.189-195
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    • 2000
  • RP techniques have their unique characteristics according to the working principles : star-stepped surface of parts due to layer-by-layer stacking low build speed caused by line-by-line solidification to fish one layer and post processing to improve surface finish etc The objective of this study is to propose a new RP technique Variable Deposition Mnanufacturing (VDM) which can make up for the disadvantages of the existing RP techniques and to develop an apparatus to implement the technique. The proposed process can greatly reduce the build time and improve the surface finish of parts generated. Experiments are carried out to obtain the range of temperature of molten material to maintain its fluidity and to investigate the effect of gas cooling on the preservation of the slopes. Some simple shapes such as a line-shape an S-shape and a circle-shape are fabricated from Ethylene Vinyl Acetatecopolymer(EVA) In order to examine the applicability of VDM to more general shapes a tensile specimen and a yo-yo shape were manufactured by the proposed RP method using EVA material as a trial approach. The current basic study shows a high potential of practical use of the proposed VDM process to prototyping of a general three-dimensional shape.

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