• Title/Summary/Keyword: high pressure discharge

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Simulation and Characteristic Measurement with Sputtering Conditions of Triode Magnetron Sputter

  • Kim, Hyun-Hoo;Lim, Kee-Joe
    • Transactions on Electrical and Electronic Materials
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    • 제5권1호
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    • pp.11-14
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    • 2004
  • An rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of E${\times}$B field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

금속증기레이저 연구 II (Metal Vapor Laser Research II.)

  • 이재경;정환재;임기건;이형종;정창섭;김진승
    • 한국광학회지
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    • 제3권3호
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    • pp.178-182
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    • 1992
  • 내경 1.6cm, 길이 50cm의 알루미나 세라믹 방전관을 사용하여 방전전극간의 거리가 45cm인 공쟁식 방전가열형 구리증기레이저를 제작하였다. 방전가열 및 여기를 위한 6kV, 500mA 정격의 직류 고전압 전원장치, 1.8H의 중전 인덕터와 5nF의 에너지저장 캐패시터를 포함하는 resonant charging 방식의 고전압 충전회로와 1-7kHz 범위의 펄스반복률로 동작하는 thyratron 구동회로가 각각 설계 제작되었다. 개발된 레이저장치는 방전관의 온도 $1350^{\circ}C$ 부근에서 발진을 시작하였고, 충전전압 12kV, 펄스반복률 4.5kHz, 네온완충기체압력 50mbar, 동작온도 $1460^{\circ}C$일 때 0.7W의 최대평균 출력을 얻었다.

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수소충전용 직접 및 간접 냉각시스템 비교 평가 연구 (The Study of Comparison of Cooling System for H2 Discharge Station)

  • 이현찬;이종열;배찬효;허정호;전재영
    • 한국수소및신에너지학회논문집
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    • 제30권2호
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    • pp.163-169
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    • 2019
  • This study is a research to compare efficiency of new cooling system (chiller, pre-cooler) to that of the conventional system at the hydrogen refueling station (HRS). This study includes contents for thermodynamic comparison of cooling system for HRS and comparison of pros and cons of its components. So It is to establish design concept of cooling system of HRS supplying with fuel cell electric vehicle (FCEV). HRS is charging high pressure H2 (700 bar) to FCEV. However cooling system is need to prevent temperature rise in tank. This cooling system consists of pre-cooler and chiller system.

스크러버 연계 배기가스 배출제어용 3방향 댐퍼밸브의 구조 안전성 평가 (Structural Safety Evaluation of a 3-way Damper Valve for Scrubber-linked Exhaust Gas Control)

  • 김영훈
    • 한국산업융합학회 논문집
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    • 제23권6_2호
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    • pp.1007-1014
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    • 2020
  • IMO(International Maritime Organization) continues to strengthen environmental regulations on exhaust gases such as CO2, NOx, SOx. As for sulfur oxides, from 1 January 2020, all ships on international voyages must use fuel with a sulfur content of 0.5% or less. Or, it is obligatory to use an exhaust gas treatment device that has the same effect. Shipping companies are using low-sulfur oil, replacing them with LNG fuel, or installing scrubbers that suppress sulfur oxide emissions. In the case of ships using bunker C oil, the load on the engine is lower when entering and departing, so the exhaust gas pressure is lowered and the scrubber cannot be properly utilized. Therefore, diesel oil with low sulfur content is used when entering and leaving the coast. When diesel oil is used, exhaust gas is directly discharged through the control system and piping system, and when bunker C oil is used, sulfur oxides are reduced by scrubbers through other control systems and piping systems to discharge exhaust gas. Accordingly, a company has developed a system called a three-way damper valve that can control exhaust gas emissions while integrating these two control systems and piping systems into one. In this study, the control characteristics of the integrated exhaust gas control system and structural safety against external loads in a high-temperature exhaust gas environment were reviewed.

Development of a low energy ion irradiation system for erosion test of first mirror in fusion devices

  • Kihyun Lee;YoungHwa An;Bongki Jung;Boseong Kim;Yoo kwan Kim
    • Nuclear Engineering and Technology
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    • 제56권1호
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    • pp.70-77
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    • 2024
  • A low energy ion irradiation system based on the deuterium arc ion source with a high perveance of 1 µP for a single extraction aperture has been successfully developed for the investigation of ion irradiation on plasma-facing components including the first mirror of plasma optical diagnostics system. Under the optimum operating condition for mirror testing, the ion source has a beam energy of 200 eV and a current density of 3.7 mA/cm2. The ion source comprises a magnetic cusp-type plasma source, an extraction system, a target system with a Faraday cup, and a power supply control system to ensure stable long time operation. Operation parameters of plasma source such as pressure, filament current, and arc power with D2 discharge gas were optimized for beam extraction by measuring plasma parameters with a Langmuir probe. The diode electrode extraction system was designed by IGUN simulation to optimize for 1 µP perveance. It was successfully demonstrated that the ion beam current of ~4 mA can be extracted through the 10 mm aperture from the developed ion source. The target system with the Faraday cup is also developed to measure the beam current. With the assistance of the power control system, ion beams are extracted while maintaining a consistent arc power for more than 10 min of continuous operation.

마취된 흰 쥐 시상의 복후내측핵내 유해성 뉴론의 특성 (RESPONSE CHARACTERISTICS OF VENTRAL POSTEROMEDIAL THALAMIC NOCICEPTIVE NEURONS IN THE ANESTHETIZED RAT)

  • 이형일;박수정
    • Restorative Dentistry and Endodontics
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    • 제27권6호
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    • pp.587-599
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    • 2002
  • Extracellular single unit recordings were made from the ventral posteromedial thalamic (VPM) nociceptive neurons to determine mechanoreceptive field (RF) and response properties. A total of 44 VPM thalamic nociceptive neurons were isolated from rats anesthetized with urethane-chloralose. Based on responses to various mechanical stimuli including touch, pressure and pinch applied to the RF, 32 of 44 neurons were classified as nociceptive specific (NS) neuron. The other 12 neurons, classified as wide dynamic range (WDR), showed a graded response to increasingly intense stimuli, with a maximum discharge to noxious pinch. The VPM nociceptive neurons showed various spontaneous activity ranged from 0-6 Hz. They were located throughout the VPM, and had an contralateral RF including mainly intraoral (and perioral) regions. The RF size was relatively small, and very few neurons had a receptive field involving 3 trigeminal divisions. The NS neurons activated only by pressure and pinch stimuli had high mechanical thresholds compared to WDR neurons activated also by touch stimuli. The VPM nociceptive neurons were tested with suprathershold graded mechanical stimuli. Most of 21 NS and 8 WDR neurons showed a progressive increase in number of spikes as mechanical stimulus intensity was increased. In some neurons, the responses reached a peak before the highest intensity was given. Application of 5 mM $CoCl_2{\;}(10{\;}{\mu}\ell)$ solution to the trigeminal subnucleus caudalis did not produce any significant changes in the spontaneous activity, RF size, mechanical threshold, and response to suprathreshold mechanical stimuli of 9 VPM nociceptive neurons tested. 17 of 33 VPM nociceptive neurons responded to noxious heat as well as noxious mechanical stimuli applied to their RF. Application of the mustard oil, a small-fiber excitant and inflammatory irritant, to the right maxillary first molar tooth pulp induced an immediate but short-lasting neuronal discharges upto approximately 4 min in 16 of 42 VPM nociceptive neurons. These results suggest that VPM thalamic nucleus may contribute to the sensory discriminative aspect of orofacial nociception.

리튬 이차전지에서 Si 음극박막의 스퍼터링 증착조건에 따르는 구조적, 전기화학적 특성 연구 (Influence of Sputtering Conditions on Structural and Electrochemical Properties of the Si Anode Film for Lithium Secondary Batteries)

  • 주승현;이성래;조병원;조원일
    • 한국재료학회지
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    • 제19권2호
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    • pp.73-78
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    • 2009
  • This study investigated the dependence of the various sputtering conditions (Ar pressure: $2{\sim}10\;mTorr$, Power: $50{\sim}150\;W$) and thickness ($50{\sim}1200\;nm$) of Si thin film on the electrochemical properties, microstructural properties and the capacity fading of a Si thin film anode. A Si layer and a Ti buffer layer were deposited on Copper foil by RF-magnetron sputtering. At 10 mTorr, the 50 W sample showed the best capacity of 3323 mAh/g, while the 100 W sample showed the best capacity retention of 91.7%, also at 10 mTorr. The initial capacities and capacity retention in the samples apart from the 50W sample at 10 mTorr were enhanced as the Ar pressure and power increased. This was considered to be related to the change of the microstructure and the surface morphology by various sputtering conditions. In addition, thinner Si film anodes showed better cycling performance. This phenomenon is caused by the structural stress and peeling off of the Si layer by the high volume change of Si during the charge/discharge process.

병원에 입원한 고혈압 환자에 대한 조사연구(I) (Clinical Review of Hypertensive Patients Admitted in the Hospital)

  • 최영희;모경빈
    • Journal of Nutrition and Health
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    • 제9권4호
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    • pp.47-53
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    • 1976
  • As the seriousness of hypertension in adults is increasingly recognized, attention is being focussed on its control through continuous health supervisions. Complications arising from high blood pressure exceed those of many other adult health problems and affect the nursing needs of these patients. In order to contribute to effective nursing care planning and improved health supervision, 248 medical records of hypertensive patients admitted to Internal Medicine at Ewha Medical Center from January 1971 to August 1976 were examined. Results were as fellows: 1. The sample group averaged 5.0% of the total number of patients admitted to internal medicine during the period studied. The proportion increased slightly with each successive year. 2. Patients with hypertension averaged 31.4% of all patients with cardiovascular discease. This proportion was stable over the period. 3. Hypertensive patients were primarily in their 40s. The average age was 55.1 years. 4. Women were most frequently affected in their 60s and men in their 40s. 5. The bloo pressure of these in their 30s was not well controlled on discharge. Rates for those in their 30s averaged 151.5/107mmhg, for those in their 40s 161.5/110mphg, and for those in their 60s 169/100mmhg. 6. Complications increased with each age range from the 40s to the 60s for both men and women. 7. Complications related to systolic hypertension occurred most frequently when the rate exceeded 200mmhg. Cerebral vascular accident was the primary complication, presenting implications for nursing intervention. 8. Complications related to diastolic hypertension occurred most frequently when the rate was in the $110{\sim}129mmhg$ range. C.V.A. again was the primary complication needing nursing care planning. 9. Diets ordered for patients were low salt 79.%, salt free 4.19%, diabetic 6.1%, and protein free ('no protein') 2.0%. Caloric, salt end protein levels were not defined. Recommendations based on the findings were directed to diet and other therapies.

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기체 블로우 다운의 동적 모델링 및 분석 (Dynamic Modeling & Analysis of Vapor Phase Blowdown of Depressurized Vessel)

  • 김경운;서지원;황성원;이윤주;문영식
    • Korean Chemical Engineering Research
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    • 제54권3호
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    • pp.350-359
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    • 2016
  • 본 연구는 vessel blowdown 시 발생하는 온도와 압력 변화를 보다 정확히 예측하기 위하여 기존에 개발된 dynamic model을 기반으로 새로운 모델을 개발하고, 개발한 모델의 정확도를 높이기 위하여 vessel 내부의 흐름이 층류일 때와 난류일 때를 모두 고려하여 vessel 벽면으로부터 기체로의 열 전달량을 계산하였다. 효율적인 열역학 계산을 위해 일체의 계산식은 압력이 감소하는 단계 별로 나누어 진행하였으며 계산의 부담을 덜어주면서 계산의 정확도를 유지하기 위한 압력변화 size를 결정하였다. 개발한 모델에 Peng-Robinson equation과 Soave-Redlich-Kwong equation을 적용하여 각각의 경우에 따른 결과의 차이를 비교하였다. 마지막으로 모델의 검증을 위해 Haque et al.의 실험조건을 동일하게 적용하여 실험 결과와 시뮬레이션 결과를 비교 하였으며, 이를 통해 모델의 정확도를 입증하였다.

4불화탄소 플라즈마처리에 의한 폴리에스테르 직물의 발수가공 (Water Repellent Finish of Polyester Fabric Using Carbontetrafluoride Plasma Treatment)

  • 모상영;이용운;김태년;천태일
    • 한국염색가공학회지
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    • 제6권3호
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    • pp.27-36
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    • 1994
  • In order to produce a water repellent surface on polyester fabric, samples were treated in the atmosphere of $CF_4$ glow discharge plasma. The samples used in the study were ployester fabric and poyester film. The purpose of film treatment is for the comparison of hydrophobicity with fabric sample at same treatment condition. Radio frequency(13.56MHz) generator was used as electric source and its in put power is 100 Watt. Water repellency was evaluated by contact angle measurement. Result obtained are as follows. 1) Fiber interstice of original fabric was ana lysed as 0.43$\mu$m, and this value was sufficiently ideal for making water repellent fabric. 2) The most favorable setting position of substrate was the center area between two electrodes. 3) Fabric contact angle was higher than film contact angle at same treatment condition, and its difference was more than 50${\circ}$. And it was incapalbe of fabric contact angle measurement when the film contact angle was less than 90${\circ}$. because the fabric is susceptible to absorption of water by the capillary effect. 4) Fabric contact angle can not revealed the precise defferences of surface hydrophobicity, however, the film contact angle showed the real hydrophobic nature. 5) It was not sufficient method to evaluate the hydrophobicity of fabric surface by merely measure of the water contact angle. 6) It showed high water repellent nature at 0.06 torr of $CF_4$ plasma gas pressure and duration of 45 seconds treatment, and it can not be anticipated more improved nature if the pressure and duration of treatment time were increased.

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