• 제목/요약/키워드: high pressure device

검색결과 567건 처리시간 0.025초

유도결합형 플라즈마원을 이용한 고선택비 산화막 식각에 관한 연구 (A Study on the High Selective Oxide Etching using Inductively Coupled Plasma Source)

  • 이수부;박헌건;이석현
    • 한국전기전자재료학회논문지
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    • 제11권4호
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    • pp.261-266
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    • 1998
  • In developing the high density memory device, the etching of fine pattern is becoming increasingly important. Therefore, definition of ultra fine line and space pattern and minimization of damage and contamination are essential process. Also, the high density plasma in low operating pressure is necessary. The candidates of high density plasma sources are electron cyclotron resonance plasma, helicon wave plasma, helical resonator, and inductively coupled plasma. In this study, planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, flow rate, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

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Analysis of Auxiliary Device in a Gas-solid Cyclone by Experimental and Computational Approaches

  • Lee, Ju-Yeol;Park, Duck-Shin;Jo, Young-Min
    • Journal of Korean Society for Atmospheric Environment
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    • 제19권E1호
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    • pp.21-28
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    • 2003
  • An auxiliary device, called Post Cyclone (PoC). had been introduced and primarily examined in earlier works which proved the reduction of the emission of fine dust from the gas-solid cyclones without incurring significant increase of cost and pressure drop. It has been known that the PoC has some advantages over other secondary dust treatment devices such as (a) simple design, (b) low cost of manufacture, (c) minimum additional pressure drop, (d) high recoverbility of the product dust, and (e) simplicity of operation. Despite the potential advantage, however, lack of practical data confined its plausible application in wide areas. Thus, in this work, a few serial experiments were conducted in terms of a few operation conditions, and the particle trajectories throughout the cyclone set-up were visually analyzed by using a commercial computer simulation program (FLUENT).

A STUDY ON THE ENGINE PERFORMANCE OF A SPARK IGNITION ENGINE ACCORDING TO THE IGNITION ENERGY

  • Han, Sung Bin
    • 에너지공학
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    • 제23권3호
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    • pp.1-6
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    • 2014
  • The more or less homogeneous fuel-air mixture that exists at the end of the compression process is ignited by an electric ignition spark from a spark plug shortly before top dead center. The actual moment of ignition is an optimization parameter; it is adapted to the engine operation so that an optimum combustion process is obtained. Brake mean effective pressure (BMEP) of the spark ignition energy control device (IECD) than conventional spark system at the stoichiometric mixture is increased about 9%. For lean burn engine, the lean limit is extended about 25% by using the IECD. It was considered the stability of combustion by the increase of flame kernel according to the high ignition energy supplies in initial period and discharge energy period lengthen by using the IECD.

SHPB를 이용한 구조용 AL합금재의 동적거동 특성 시험에 관한 연구 (Dynamic Behavior Characteristic Test of Structural Aluminium Alloy Materials using SHPB)

  • 허신;김동성;구정서;강흥식;홍성인;정동택
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집A
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    • pp.419-423
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    • 2001
  • It is important to know the mechanical properties of the materials under dynamic load. The mechanical properties of most materials are influenced to some extent by strain rate. One of the reliable test device for determining the mechanical properties of materials at high strain rate is Split Hopkinson Pressure bar. In this paper, we conducted the mechanical properties test for the aluminium alloy 6063 and 6061 using the SHPB device.

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분사 조건이 다공형 GDI 인젝터의 분무 거동에 미치는 영향 (Effect of Injection Conditions on the Spray Behaviors of the Multi-hole GDI Injector)

  • 박정환;박수한;이창식;박성욱
    • 한국자동차공학회논문집
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    • 제20권2호
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    • pp.116-122
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    • 2012
  • The purpose of this study is to investigate the overall spray behavior characteristics for various injection conditions in a gasoline direct injection(GDI) injector with multi-hole. The spray characteristics, such as the spray penetration, the spray angle, and the injection quantity, were studied through the change of the injection pressure, the ambient pressure, and the energizing duration in a high-pressure chamber with a constant volume. The n-heptane with 99.5% purity was used as the test fuel. In a constant volume chamber, the injected spray was visualized by the spray visualization system, which consisted of the high-speed camera, the metal-halide lamp, the injector control device, and the image analysis system with the image processing program. It was revealed that the injection quantity was mainly affected by the difference between the injection pressure and the ambient pressure. For low injection pressure conditions, the injection quantity was decreased by the increase of the ambient pressure, while it nearly maintained regardless of the ambient pressure at high injection pressure. According to the increase of the ambient pressure in the constant volume chamber, the spray development became slow, consequently, the spray tip penetration decreased, and the spray area increased. In additions, the circular cone area decreased, and the vortex area increased.

공기부양판을 적용한 에어쿠션 트랜스포터의 개발 (Development of Air Cushion Transporter Using the Pneumatic Floating Pad)

  • 정현목;홍준희;윤동원;박희창;김병인;이성휘
    • 한국생산제조학회지
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    • 제25권5호
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    • pp.338-344
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    • 2016
  • Recent trends in transport system for carrying heavy freight are that demands of a high efficiency, economic efficiency, convenience and safety are increased. Conventional transport systems were poor in transport efficiency and economic efficiency. And Safety problems can be caused to products and workers. In order to overcome these problems, an air cushion transport device with a high-pressure air is required. The air cushion transporter is a device for reducing the frictional force of floor surface and lifting the heavy freight by spraying the high-pressure air to the floor. Technology to float and transfer freight using high-pressure air is very convenient and initial cost can be reduced. In this paper, the study on the levitation performance and transport efficiency of air cushion transport system is conducted and verified that air cushion transporter has a significantly higher transport efficiency than conventional heavy handling systems.

가솔린 예혼합 압축 착화 엔진의 농후 한계에서 연소와 노킹 특성 (Knocking and Combustion Characteristics at Rich Limit of Gasoline HCCI Engine)

  • 염기태;장진영;배충식
    • 한국자동차공학회논문집
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    • 제14권6호
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    • pp.9-16
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    • 2006
  • Variable valve timing is one of the attractive ways to control homogeneous charge compression ignition (HCCI) engine. Hot internal residual gas which can be controlled by variable valve timing(VVT) device, makes fuel evaporated easily, and ignition timing advanced. Regular gasoline was used as main fuel and di-methyl ether(DME) was used as ignition promoter in this research. HCCI engine operating range is limited by high combustion peak pressure and engine noise. High combustion pressure can damage the engine during operation. To avoid engine damage, the rich limits have to define using various methods. Peak combustion pressure, rate of cylinder pressure rise was considered to determine rich limit of engine operating range. Knock probability was correlated with the rate of cylinder pressure rise as well as the peak combustion pressure.

Fabrication of Micromachined Ceramic Thin-Film Pressure Sensors for High Overpressure Tolerance

  • Chung, Gwiy-Sang
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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    • pp.59-63
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    • 2002
  • This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

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엉덩관절 모음근의 수축 압력이 배가로근의 근 단면적에 미치는 영향 (The Effect of the Contraction Pressure of the Hip Adductor Muscles on Thickness of Transversus Abdominis: A Randomized Controlled Trial )

  • 박주철;이명호;김명권
    • 대한물리의학회지
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    • 제17권4호
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    • pp.53-63
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    • 2022
  • PURPOSE: This study examined the changes in the thickness of the abdominal muscles, including the transversus abdominis, according to the set pressure applied by a pressure biofeedback unit during contractions of the hip adductor muscles. METHODS: After randomizing 40 healthy adult males in their 20 s and 30 s, the participants were instructed to match the pressure gauge indication of the pressure biofeedback device to continue contracting the hip adductor while maintaining it at 10 mmHg (low), 40 mmHg (medium), or 70 mmHg (high). The measurement was taken over five seconds using an ultrasound device. RESULTS: According to the contractile pressure applied to the hip adductor muscle, there was a significant difference in the muscle thickness change of the transverse abdominis muscle between 10 mmHg and 70 mmHg and between 40 mmHg and 70 mmHg. The muscle thickness ratio of the external oblique/abdominal muscle was significantly different between 10 mmHg and 70 mmHg and between 40 mmHg and 70 mmHg. CONCLUSION: Increased contraction pressure on the hip adductor muscle increases the muscle thickness of the abdominal transverse muscle. Interbody stability exercise with contractions of the hip adductor muscle is expected to help increase in the muscle thickness of the hip adductor muscle.

수소연료 생산의 효율향상을 위한 고주파수 초음파 응용 (극간격과 온도 중심으로) (An Ultrasonic Application with High Frequency for the Efficiency Elevation of the Hydrogen Fuel Production (On the Pole Interval and the Temperature))

  • 송민근;손승우;주은선
    • 한국수소및신에너지학회논문집
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    • 제13권2호
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    • pp.127-134
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    • 2002
  • A Study on the application of ultrasonic with high frequency is carried out as a plan to rise the efficiency of the hydrogen fuel production in an electrolysis of water. KOH is selected as an electrolyte and concentrations are 0 %, 10 %, 20 %, and 30%. The solvent is city water. A measurable device of buoyancy by an electronic balance and a measurable device of voltage with a sensor of pressure are planned newly as a measuring device to measure the quantity of hydrogen production. An ultrasonic transducer with high frequency of 2 MHz is selected to give them the ultrasonic forcing. In results, it is clarified that ultrasonic influences the decrease of overpotential in the electrolytic solution. And basic data according to the pole interval and the temperature are obtained.