• 제어로봇시스템학회논문지
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• 제3권6호
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• pp.613-618
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• 1997

In this paper, we designed a line CCD camera for a flying image, which is composed of a line CCD sensor(2048 cells) and a rotating mirror, and investigated its optical properties. We also made the 3-D image from the flying image which is made of 2-D image being juxtaposed to 1-D images obtained by the camera, and performed the calibration to acquire high precision 3-D data. As a result, we obtained the 3-D measurement system using the slit type of laser projector is available to measure the high precision shape of objects.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.199-202
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• 2002

Moire topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement by moire topography has been required since the method was frequently applied to the engineering and medical fields. 3-D measurement using digital projection moire topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using different N-bucket algorithm method of digital projection moire topography is tested to measuring object with the 2$\pi$-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding measurement errors that decreased more by using the flour-three step algorithm method than the same step in the phase shifting of different pitchs.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.49-52
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• 2001

Moire topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement by moire topography has been required since the method was frequently applied to the engineering and medical fields. 3-D measurement using projection moire topogrphy is very attractive because of it s high measuring speed and high sensitivity. In this paper, using two-wavelength method of projection moire topography tested to measuring object with the $2\pi$-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the $2\pi$-ambiguity problem can be effectively overcome so as to treat large step discontinuities in measured objects.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.1075-1076
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• 2013

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.16-21
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• 2008

The demand for three-dimensional (3D) shape measurements is increasing in a variety of fields, including the manufacture of molds and dies. The most popular technology for 3D shape measurement is the coordinate measuring machine (CMM) with a contact trigger probe. Although a CMM provides a high degree of accuracy, it is inefficient due to its long measuring time. It also has difficulty measuring soft objects that can be deformed by the touch of the contact probe. In addition, a CMM cannot digitize areas that are difficult to reach, and cannot capture very minute details on the surface of complex parts. For these reasons, optical non-contact measurement techniques are receiving more attention since they eliminate most of the problems associated with contact methods. Laser scanning is emerging as one of the more promising non-contact measurement techniques. This paper describes various acquisition considerations for laser scanning, including the accuracy of the 3D scan data, which depends on the charge-coupled device (CCD) gain and noise. The CCD gain and noise of a 3D laser scanner are varied while keeping the other conditions constant, and the measurement results are compared to the dimensions of a standard model. The experimental results show that a considerable time savings and an optimum degree of accuracy are possible by selecting the proper CCD gain and noise.

• 한국정밀공학회지
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• 제22권7호
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• pp.88-93
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• 2005

$Moir\acute{e}$ topography method is a well-known non-contacting 3-D measurement method. Recently, the automatic 3-D measurement by $Moir\acute{e}$ topography has been required, since the method was frequently applied to the engineering and medical fields. The 3-D measurement using projection $Moir\acute{e}$ topography is very attractive because of its high measuring speed and high sensitivity. In this paper, using two-wavelength method of projection $Moir\acute{e}$ topography was tested to measuring object with $2\pi-ambiguity$ problems. The experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the $2\pi-ambiguity$ problems can be effectively overcome so as to treat large step discontinuities in measured objects.

• 한국정밀공학회지
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• 제17권1호
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• International Journal of Advanced Culture Technology
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• 제8권3호
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• pp.260-268
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• 2020

Currently, it is usually a 3D scanner processing method as a laser method. However, the laser method has a disadvantage of slow scanning speed and poor precision. Although optical scanners are used as a method to compensate for these shortcomings, optical scanners are closely related to the distance and precision of the object, and have the disadvantage of being expensive. In this paper, 3D scanner using variable focus lens-based structured light module with improved measurement precision was designed to be high performance, low price, and usable in industrial fields. To this end, designed a telecentric optical system based on a variable focus lens and connected to the telecentric mechanism of the step motor and lens to adjust the focus of the variable lens. Designed a connection structure with optimized scalability of hardware circuits that configures a stepper motor to form a system with a built-in processor. In addition, by applying an algorithm that can simultaneously acquire high-resolution texture image and depth information and apply image synthesis technology and GPU-based high-speed structured light processing technology, it is also stable for changes to external light. We will designed and implemented for further improving high measurement precision.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.220-223
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• 1997

Moire topography method is a well-known non-contacting 3-D measuement method. Recently, the automatic 3-D measurement by moire topography has been required since the method was frequently applied to the engineering and medical fields. 3-D measurement using projection moire topography is very attractive because of it's high measuring speed and high sensitivity. In this paper, using two-wavelength method of projection moire topography tested to measuring object with the 2x-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding absolute fringe orders, so that the 2x-ambiguity problem can be effectively overcome so as to treat large step discontinuities in measured objects.