• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.145-145
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• 2011

Recently, multi-hole electrode RF capacitively coupled plasma discharge is being used in the deposition of microcrystalline silicon for thin film solar cell to increase the speed of deposition. To make efficient multi-hole electrode RF capacitively coupled plasma discharge, the hole diameter is to be designed concerning the plasma parameters. In past studies, the relationship between plasma parameters such as pressures and gas species, and hole diameter for efficient plasma density enhancement is experimentally shown. In the presentation, the relationship between plasma deriving frequency and hole diameter for efficient multi-hole electrode RF capacitively coupled plasma discharge is shown. In usual capacitively coupled plasma discharge, plasma parameter, such as plasma density, plasma impedence and plasma temperature, change as frequency increases. Because of the change, the optimum hole diameter of the multi-hole electrode RF capacitively coupled plasma for high density plasma is thought to be modified when the plasma deriving frequency changes. To see the frequency effect on the multi-hole RF capacitively coupled plasma is discharged and one of its electrode is changed from a plane electrode to a variety of multi-hole electrodes with different hole diameters. The discharge is derived by RF power source with various frequency and the plasma parameter is measured with RF compensated single Langmuir probe. The shrinkage of the hole diameter for efficient discharge is observed as the plasma deriving frequency increases.

• Journal of the Korean Society of Propulsion Engineers
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• v.26 no.6
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• pp.1-9
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• 2022

This study introduces the calculation model of ionization composition and electrical conductivity for metallic plasma for practical application to modeling and simulation of modern electrical detonators. The present model includes the correction for non-ideality of dense plasma conditions which are expected in electrical explosion of bridge in detonators. The computational results for copper plasma show favorable agreement with experimental data for a wide range of plasma temperature and high density conditions and the model is proper for detonator modeling with good prediction accuracy.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.12
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• pp.1992-1999
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• 2016

The plasma process is applied to various industrial fields such as high-tech IT industry, textiles and medical. Therefore, there is increasing interest in the plasma power supply, and demand for power devices of high efficiency and high power density is increased. Plasma power supply for process must solve the arc problem, when the plasma is unstable. The output capacitor is closely related to the arc problem. If the output capacitor is smaller, the damage from the arc problem is reduced. However, the small value of the output capacitor affects the operating characteristics of the power supply. In this paper, a LLC resonant converter is adopted, because it can achieve high efficiency and power density in the plasma DC power supply. However, due to the small value of the output capacitor, the converter is operated as a LLCC resonant converter. Therefore, a gain characteristic of LLCC resonant converter is analyzed by using the FHA (First Harmonic Approximation) in plasma power supply. Simulation and experimental results are presented to verify the characteristic analysis of LLCC Resonant Converter.

• Journal of Surface Science and Engineering
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• v.32 no.6
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• pp.658-664
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• 1999

Helicon sources are attractive for plasma processing because they provide high plasma density in low magnetic fields. Helicon waves were excited by a Nagoya type III antenna in a magnetized plasma column. Plasma parameters were measured with a double probe, and the structure and adsorption of the helicon wave fields were determined with the probes. Argon is fed through a MFC (mass flow controller) for operation pressure of 10~110 mtorr. A 13.56 MHz r.f. power of 50~450 W is induced through the antenna. The plasma density and electron temperature are measured as functions of external magnetic field, r.f. power and pressure. The plasma density as functions of r.f. power and magnetic field at a constant pressure increased linearly, and the electron temperature did not change largely with various operation parameters and the value was around 5~7 eV.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.146-150
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• 2021

Plasma information based virtual metrology (PI-VM) that predicts wafer-to-wafer etch rate variation after wet cleaning of plasma facing parts was developed. As input parameters, plasma information (PI) variables such as electron temperature, fluorine density and hydrogen density were extracted from optical emission spectroscopy (OES) data for etch plasma. The PI-VM model was trained by stepwise variable selection method and multi-linear regression method. The expected etch rate by PI-VM showed high correlation coefficient with measured etch rate from SEM image analysis. The PI-VM model revealed that the root cause of etch rate variation after the wet cleaning was desorption of hydrogen from the cleaned parts as hydrogen combined with fluorine and decreased etchant density and etch rate.

• Bulletin of the Korean Space Science Society
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• 2011.04a
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• pp.26.3-27
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• 2011

Formation of a steep plasma density gradient in the middle-latitude ionosphere during geomagnetic storms and the latitudinal migration of its location depending on the storm phase are suggested to be associated with the ionospheric signature of the plasmapause. We test this idea by using the satellite and ground observation data during the 11 April 2001 storm. The locations of the steep plasma density gradient identified by TOPEX/Poseidon (2001 LT) and DMSP (1800 and 2130 LT) satellites coincide with the ionospheric footprints of the plasmapause identified by the IMAGE satellite. This observation may support the dependence of the middle-latitude plasma density gradient location on the plasmapause motion, but does not explain why the steep density gradient whose morphology is largely different from the morphology of the middle-latitude ionization trough during quiet period is formed in association with the plasmapause. The ionospheric disturbances in the total electron content (TEC) maps shows that the steep TEC gradient is formed at the boundary of the positive ionospheric storm in low-middle latitudes and the negative ionospheric storm in middle-high latitudes. We interpret that the thermospheric neutral composition disturbance in the dayside is confined within the middle-high latitude ionospheric convection zone. The neutral composition latitudes and, therefore, the locations of the steep plasma density gradient coincide with the footprints of the plasmapause. The TEC maps show that the appearance of the steep plasma density gradient in the pre-midnight sector during the recovery phase is related to the co-rotation of the gradient that is created during the main phase.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.7
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• pp.1211-1217
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• 2016

Discharge characteristics of inductively coupled plasma were investigated by using electrostatic probe and fluid simulation. The Inductively Coupled Plasma source driven by 13.56 Mhz was prepared. The signal attenuation ratios of the electrostatic probe at first and second harmonic frequency was tuned in 13.56Mhz and 27.12Mhz respectively. Electron temperature, electron density, plasma potential, electron energy distribution function and electron energy probability function were investigated by using the electrostatic probe. Experiment results were compared with the fluid simulation results. Ar plasma fluid simulations including Navier-Stokes equations were calculated under the same experiment conditions, and the dependencies of plasma parameters on process parameters were well agreed with simulation results. Because of the reason that the more collision happens in high pressure condition, plasma potential and electron temperature got lower as the pressure was higher and the input power was higher, but Electron density was higher under the same condition. Due to the same reason, the electron energy distribution was widening as the pressure was lower. And the electron density was higher, as close to the gas inlet place. It was found that gas flow field significantly affect to spatial distribution of electron density and temperature.

• Food Science of Animal Resources
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• v.20 no.1
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• pp.1-7
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• 2000

The influence of the ditary containing boiled eggs on the plasma cholesterol level and antithrombotic activity in rats was studied. Rats were fed basal diet(0% boiled eggs) as a control group or diets containing 25% and 50% boiled eggs or a mixed diet with 95% boiled eggs plus 5% $\alpha$-cellulose powder as a experimental groups for 30 days. The bleeding time and whole blood clotting time were significantly(P<0.05) increased by feeding diet containing 25% boiled eggs compared to groups of basal diet, 50% or 95% boiled eggs diets. The plasma clotting time was high in group of 25% boiled eggs diet. However, there were no difference in plasma clotting time among rats fed the dietary boiled eggs. The levels of plasma total cholesterol(TC) and low density plus very low density lipoprotein cholesterol(LDL, VLDL-C) were significantly(P<0.05) highest in group 95% boiled eggs diet compared to others. There were no differences in high density lipoprotein cholesterol(HDL-C) among rats fed the dietary boiled eggs. The levels of plasma TC, HDL-C, LDL$.$VLDL-C and the ratios of HDL-C/TC were not significant among the basal diet, 25% and 50% boiled eggs diets. These results suggest that the intakes of the dietary boiled eggs have the antithrombotic activity and plasma cholesterol lowering effect.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.19-23
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• 2003

Extended unbalanced magnetron sputtering system based on the cylindrical magnetron with a rotating cathode was developed. The unbalanced configuration of magnetic field was realized by means of additional lines of permanent magnets, placed along both sides of a 89 mm outer diameter and 600 mm long cylindrical cathode. The performance of the unbalanced magnetron was assessed in terms of the ion current density and the ion-to-atom ratio incident at the substrate. Furthermore, the paper presents the comparison of the internal plasma parameters, such as the electron temperature, electron density, plasma and floating potentials, measured by a Langmuir probe in various positions from the cathode, for conventional and unbalanced constructions of the cylindrical magnetron. The plasma density and ion current density are about 3-5 times higher than those of conventional one, in the unbalanced magnetron in a 0.24 Pa Ar atmosphere with a DC cathode power of 3 kW.

• Asian-Australasian Journal of Animal Sciences
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• v.23 no.10
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• pp.1299-1307
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• 2010

This study was conducted to evaluate the effect of dietary antioxidant and energy density on performance and antioxidative status in transition cows. Forty cows were randomly allocated to 4 dietary treatments in a $2{\times}2$ factorial design. High or low energy density diets (1.43 or 1.28 Mcal $NE_L$/kg DM, respectively) were formulated with or without antioxidant (AOX, a dry granular blend of ethoxyquin and tertiary-butylhydroquinone; 0 or 5 g/cow per d). These diets were fed to cows for 21 days pre-partum. During the post-partum period, all cows were fed the same lactation diets, and AOX treatment followed as for the pre-partum period. Feeding a high energy diet depressed the DMI, milk yield, and 4% fat-corrected milk (FCM) of cows. However, AOX inclusion in the diet improved the milk and 4% FCM yields. There was an interaction of energy density by AOX on milk protein, milk fat and total solids contents. Feeding a high energy diet pre-partum increased plasma glucose and ${\beta}$-hydroxybutyrate, whereas dietary AOX decreased plasma ${\beta}$-hydroxybutyrate value during the transition period. There were also interactions between time and treatment for plasma glutathione peroxidase activity and malondialdehyde content during the study. Cows fed high energy diets pre-partum had higher plasma glutathione peroxidase activity 3 days prior to parturition, compared with those on low energy diets. Inclusion of AOX in diets decreased plasma glutathione peroxidase activity in cows 3 and 10 days pre-partum. Addition of AOX significantly decreased malondialdehyde values at calving. Energy density induced marginal changes in fatty acid composition in the erythrocyte membrane 3 days post-partum, while AOX only significantly increased cis-9, trans-11 conjugated linoleic acid composition. The increase in fluidity of the erythrocyte membrane was only observed in the high energy treatment. It is suggested that a diet containing high energy density pre-partum may negatively affect the anti-oxidative status, DMI and subsequent performance. Addition of AOX may improve the anti-oxidative status and reduce plasma ${\beta}$-hydroxybutyrate, eventually resulting in improved lactation performance; the response to AOX addition was more pronounced on the high energy diet.