• Journal of the Korean Vacuum Society
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• v.12 no.3
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• pp.168-173
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• 2003

Recently, according to the rapid progress in Flat-panel-display industry, there has been a growing interest in the poly-Si process. Compared with a-Si, poly-Si offers significantly high carrier mobility, so it has many advantages to high response rate in Thin Film Transistors (TFT's). We have investigated a new process for the high temperature Solid Phase Crystallization (SPC) of a-Si films without any damages on glass substrates using thin film heater. because the thin film heater annealing method is a very rapid thermal process, it has very low thermal budget compared to the conventional furnace annealing. therefore it has some characteristics such as selective area crystallization, high temperature annealing using glass substrates. A 500 $\AA$-thick a-Si film was crystallized by the heat transferred from the resistively heated thin film heaters through $SiO_2$ intermediate layer. a 1000 $\AA$-thick $TiSi_2$ thin film confined to have 15 $\textrm{mm}^{-1}$ length and various line width from 200 to 400 $\mu\textrm{m}$ was used as the thin film heater. By this method, we successfully crystallized 500 $\AA$-thick a-Si thin films at a high temperature estimated above $850^{\circ}C$ in a few seconds without any thermal deformation of g1ass substrates. These surprising results were due to the very small thermal budget of the thin film heaters and rapid thermal behavior such as fast heating and cooling. Moreover, we investigated the time dependency of the SPC of a-Si films by observing the crystallization phenomena at every 20 seconds during annealing process. We suggests the individual managements of nucleation and grain growth steps of poly-Si in SPC of a-Si with the precise control of annealing temperature. In conclusion, we show the SPC of a-Si by the thin film heaters and many advantages of the thin film heater annealing over other processes

• Journal of the Korean Society for Nondestructive Testing
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• v.16 no.3
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• pp.174-183
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• 1996

Acoustic emission(AE) response during stress corrosion cracking(SCC) of Inconel 600 alloy has been monitored to study the AE detectability of crack generation and growth by comparing the crack behavior with AE parameters processed, and to evaluate the applicability as a nondestructive evaluation(AE) by measuring the minimum crack size detectable with AE. Variously heat-treated specimens were tensioned by constant extension rate test(CERT) in various extension rate to give rise to the different SCC behavior of specimens. The AE amplitude level generated from intergranular stress-corrosion cracking(IGSCC) is higher than those from ductile fracture and mechanical deformation, which means the AE amplitude can be a significant parameter for distinguishing the An source. AE can also provide the effective means to identify the transition from the small crack initiation and formation of dominant cracks to the dominant crack growth. Minimum crack size detectable with AE is supposed to be approximately 200 to $400{\mu}m$ in length and below $100{\mu}m$ in depth. The test results show that AE technique has a capability for detecting the early stage of IGSCC growth and the potential for practical application as a NDE.

• Korean Journal of Materials Research
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• v.16 no.4
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• pp.225-230
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• 2006

Nanoimprint lithography (NIL) is a novel method of fabricating nanometer scale patterns. It is a simple process with low cost, high throughput and resolution. NIL creates patterns by mechanical deformation of an imprint resist and physical contact process. The imprint resist is typically a monomer or polymer formulation that is cured by heat or UV light during the imprinting process. Stiction between the resist and the stamp is resulted from this physical contact process. Stiction issue is more important in the stamps including narrow pattern size and wide area. Therefore, the antistiction layer coating is very effective to prevent this problem and ensure successful NIL. In this paper, an antistiction layer was deposited and characterized by PECVD (plasma enhanced chemical vapor deposition) method for metal stamps. Deposition rates of an antistiction layer on Si and Ni substrates were in proportion to deposited time and 3.4 nm/min and 2.5 nm/min, respectively. A 50 nm thick antistiction layer showed 90% relative transmittance at 365 nm wavelength. Contact angle result showed good hydrophobicity over 105 degree. $CF_2$ and $CF_3$ peaks were founded in ATR-FTIR analysis. The thicknesses and the contact angle of a 50 nm thick antistiction film were slightly changed during chemical resistance test using acetone and sulfuric acid. To evaluate the deposited antistiction layer, a 50 nm thick film was coated on a stainless steel stamp made by wet etching process. A PMMA substrate was successfully imprinting without pattern degradations by the stainless steel stamp with an antistiction layer. The test result shows that antistiction layer coating is very effective for NIL.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.10-16
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• 2013

Ultra-fine planing and micro punching are separately used for improving surface roughness and machining dot patterns, respectively, of metal molds. If these separate machining processes are applied for machining of identical molds, there could be an aligning mismatch between the machine tool and the mold. A hybrid machining system combining ultra-fine planing and micro punching was newly developed in this study in order to solve this mismatch; hybrid process technology was also developed for machining dot patterns on a mirror surface of a metal mold. The hybrid machining system has X, Y, and Z axes, and a cam axis for ultra-fine planing. The cam axis and attachable and removable solenoid actuators for micro punching can make large and small sizes of dot patterns, respectively. Ultra-fine planing was applied in the first place to improve the surface roughness of a metal mold; the measured surface roughness was about 20nm. Then, micro punching was applied to machine dot patterns on the same mold. It was possible to control the diameter of the dot patterns by changing the input voltage of the solenoid actuator. Before machining, severe inhomogeneous plastic deformation around the machined dot patterns was also removed by annealing heat treatment. Therefore, it was verified that metal molds with dots patterns for optical products can be machined using a hybrid machining system and the hybrid process technology developed in this study.

• Elastomers and Composites
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• v.46 no.1
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• pp.45-53
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• 2011

The effect of the silane coupling agent, bis(triethoxysilypropyl)tetrasulfide (TESPT), on mechanical properties of a silica-filled NBR compound for oilseal was investigated. Curing behavior and crosslinking density of the compounds were measured using ODR (oscillating disk rheometer) and swelling ratio in toluene. UTM (universal testing machine) and shore A hardness tester were used in order to study the characteristics of mechanical properties of original vulcanizates and aged ones with heated air and ASTM No. 3. oil. Recovery of elasticity which influences the performance and service life of oilseal was investigated by giving bending deformation to vulcanizates in aging condition. After bending aging test, recovery distance was measured and calculated angle of recovery from it. TR (temperature retraction) test was performed on these vulcanizates to determine the low temperature recovery behavior. Wear resistance was measured by Taber type abrasion tester. In addition, SEM was used to characterize the morphology of the worn surface of vulcanizates. The result showed that addition of TESPT into silica-filled compound improves not only compound flow-ability, interaction between NBR and silica and crosslinking density, but also hardness, 100% modulus, recovery of elasticity, wear resistance, heat resistance and ASTM No.3 oil resistance of vulcanizates.

• Elastomers and Composites
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• v.46 no.1
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• pp.70-77
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• 2011

A new piece of test equipment, the slurry wear tester (SWT), was proposed in this study to evaluate the wear behavior of rubber vulcanizate in environmental contact with slurry. Natural rubber (NR) and chloroprene rubber (CR) were chosen as the basic matrices to test the slurry wear. The fluids used to fill the chamber of the SWT were 35% HCl and NaCl solution. The Akron abrasion test was used for comparison with SWT. According to the results of the Akron abrasion test, CR vulcanizate abraded more rapidly than NR vulcanizate under same test condition. It was found that the hysteresis of rubber was key factor contribute to the wear behavior. However, the slurry wear rate of the NR and CR vulcanizates did not change significantly, even with changes in the concentration of acid and the immersion time in both HCl and NaCl solutions; the fluid decreased the friction between the abrasive paper and the specimen. It also reduced the heat generated from repeated deformation and wear debris at the surface of the SWT's abrasion arm. Thus, these phenomena affected the wear behavior of rubber vulcanizate and caused different results in the conventional Akron abrasion test. This outcome could have resulted in an incorrect analysis if the slurry wear behavior of the rubber vulcanizate was estimated by the conventional abrasion tests, which are operated under dry conditions.

• The Journal of Korean Academy of Prosthodontics
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• v.41 no.3
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• pp.288-299
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• 2003

Statement of problem: Many kinds of post and core systems are in the market, but there are no clear selection criteria for them. Purpose: The purpose of this study was to compare the flexural strength and modulus of elasticity of core materials, and measure the bending strength of post systems made of a variety of materials. Material and Methods: The flexural strength and elastic modulus of thirteen kinds core buildup materials were measured on beams of specimens of $2.0{\times}2.0{\times}24{\pm}0.1mm$. Ten specimens per group were fabricated and loaded on an lnstron testing machine at a crosshead speed of 0.25mm/min. A test span of 20 mm was used. The failure loads were recorded and flexural strength calculated with the measured dimensions. The elastic modulus was calculated from the slopes of the linear portions of the stress-stram graphs. Also nine kinds commercially available prefabricated posts made of various materials with similar nominal diameters, approximately 1.25mm, were loaded in a three-point bend test until plastic deformation or failure occurred. Ten posts per group were tested and the obtained data were anaylzed with analysis of variance and compared with the Tukey multiple comparison tests. Results: Clearfil Photo Core and Luxacore had flexural strengths approaching amalgam, but its modulus of elasticity was only about 15% of that of amalgam. The strengths of the glass ionomer and resin modified glass ionomer were very low. The heat pressed glass ceramic core had a high elastic modulus but a relatively low flexural strength approximating that of the lower strength composite resin core materials. The stainless steel, zirconia and carbon fiber post exhibited high bending strengths. The glass fiber posts displayed strengths that were approximately half of the higher strength posts. Conclusion: When moderate amounts of coronal tooth structure are to be replaced by a post and core on an anterior tooth, a prefabricated post and high strength, high elastic modulus core may be suitable. CLINICAL IMPLICATIONS In this study several newly introduced post and core systems demonstrated satisfactory physical properties. However when the higher stress situation exists with only a minimal ferrule extension remaining a cast post and core or zirconia post and pressed core are desirable.

• Journal of the Korean Institute of Gas
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• v.23 no.4
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• pp.40-45
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• 2019

This paper is a purpose to study the failure example for heavy-duty vehicle fire. The first example, the researcher found the engine over-heating phenomenon causing a coolant leakage by the sealing poor of head-gasket because of D-ring part deformation contacting with cylinder liner top-part and cylinder head. He certified a fire breakout by short transferred to surrounding wiring of air-cleaner. The second example, a brake lining by return fault of break operating S cam causing with much wear of a rear 4 wheel brake lining repeatably was worn by friction. In the long run, it became the cause of fire. The third example, the researcher knew the fire cause was came about the short of wire by overload of tilting motor when the driver tilted up the cap to inspect a engine. Therefore, a heavy-duty fire must minimize the fire occurrence by thorough controlling.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.32 no.2
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• pp.75-86
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• 2019

The biggest obstacle in the nuclear power generation is the high level radioactive waste such as the spent nuclear fuel. High level radioactivities and generated heat make the safe treatment of the spent nuclear fuel very difficult. Nowadays, the only treatment method is a deep geological disposal technology. This paper treats the structural safe design problem of the spent nuclear fuel disposal canister which is one of the core technologies of the deep geological disposal technology. Especially, this paper executed the nonlinear structural analysis for the stresses and deformations occurring in the canister due to the impulsive force applied to the spent nuclear fuel disposal canister in the case of an accidental drop and ground impact event from the transportation vehicle in the repository. The main content of the analysis is about that the impulsive force is obtained using the commercial rigid body dynamic analysis computer code, RecurDyn, and the stress and deformation caused by this impulsive force are obtained using the commercial finite element static structural analysis computer code, NISA. The analysis results show that large stresses and deformations may occur in the canister, especially in the rid or the bottom of the canister, due to the impulsive force occurring during the collision impact period.

• Journal of the Microelectronics and Packaging Society
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• v.31 no.3
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• pp.18-23
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• 2024

Nanoimprint lithography (NIL) is widely used to form structures ranging from micro to nanoscale due to its advantage of generating high-resolution patterns at a low process cost. However, most NIL processes require the use of imprint resists and external elements such as ultraviolet light or heat, necessitating additional post-processes like etching or metal deposition to pattern the target material. Furthermore, patterning on flexible and/or non-planar films presents significant challenges. This study introduces an extreme pressure imprint lithography (EPIL) process that can form micro-/nano-scale patterns on the surface of a flexible rubber magnet composite (RMC) film at room temperature without an etching process. The EPIL technique can form ultrafine structures over large areas through the plastic deformation of various materials, including metals, polymers, and ceramics. In this study, we demonstrate the process and outcomes of creating a variety of periodic structures with diverse pattern sizes and shapes on the surface of a flexible RMC composed of strontium ferrite and chlorinated polyethylene. The EPIL process, which allows for the precise patterning on the surface of RMC materials, is expected to find broad applications in the production of advanced electromagnetic device components that require fine control and changes in magnetic orientation.