• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.66-66
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• 2006

Development of ArF Photo-lithography process has proceeded with the increase of numerical aperature (NA) and the decrease of resist thickness. It makes many problems such as cost and process complexity. A novel spin-on hard mask system is proposed to overcome many problems Spin-on hard mask composed of two layers of siloxane and carbon. The optical thickness of two layers is designed from reflectivity measurement at specified n, k respectively. The property of photo-resist shows different results according to Si contents. Si-contents was measured XPS(X-ray Photoelectron spectroscopy).

• 대한치과의사협회지
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• 제48권2호
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• pp.113-118
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• 2010

Titanium and titanium alloys are the most common materials used for dental and biomedical implants, owing to their biocompatibility and favourable mechanical properties. However infection of the region surrounding a dental implant by pathogenic microorganisms is a significant factor in implant failure. Prevention and control of microbial colonization of implant surfaces is considerable interest to the biomedical community. One important strategy is to render the implant surface antibacterial by impeding the formation of biofilm. A number of approaches have been proposed for this purpose. Therefore, we reviewed the researches of antibacterial coatings on titanium implants in this articles.

• 한국세라믹학회지
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• 제42권10호
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• pp.645-648
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• 2005

To fabricate a (100) silicon hard master, we used anisotropic wet etching for the embossing. The etching chemical for the sili­con wafer was a TMAH 25$\%$ solution. The anisotropic wet etching produces a smooth sidewall surface inclined at 54.7°, and the surface roughness of the fabricated master is about 1 nm. After spin coating an organic-inorganic sol-gel hybrid resin on a silicon substrate, we used the fabricated master to form patterns on the silicon substrate. Thus, we successfully obtained patterns via the hot embossing technique with the (100) silicon hard master. Moreover, by using a single hydrophobic surface treatment of the master, we succeeded in achieving uniform surface roughness of the embossed patterns for more than ten embossments.

• 한국안광학회지
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• 제6권1호
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• pp.87-91
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• 2001

PECVD 방법으로 60 Hz 상용전원을 사용하여 발생한 아세틸렌 플라스마로부터 다이아몬드성 탄소박막을 제작하고 Raman 분광에 의하여 D($sp^3$)와 G($sp^2$) 피크를 관측하여 박막의 다이아몬드성 정도를 확인하였고 $sp^3$와 $sp^2$의 비율과 FTIR 결과로부터 박막내의 수소함량의 측정을 통하여 아세틸렌 분압비와의 연관성을 확인하였다.

• 한국자기학회지
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• 제9권5호
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• pp.263-270
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• 1999

컴퓨터 하드디스크용 윤활제인 PFPE중 Z-DOL과 AM2001을 이용하여 pulling-up speed와 윤활제의 농도를 변화시키면서 윤활제의 두께변화를 알아보았으며, 또한 열처리를 통해 overcoat층인 carbon과 윤활제의 결합특성을 알아보았다. Pulling-up speed가 빠를수록, 그리고 윤활제의 농도가 증가할수록 윤활제의 두께는 두껍게 coating되었음을 알 수 있었으며, 또한 XPS을 이용하여 분석해 본 결과, overcoat층인 carbon에 존재하는 표면 오염물은 C-OH, CO가 지배적이었고, 열처리를 함으로써 overcoat층인 carbon과 윤활제의 결합력이 증진됨을 알 수 있었다.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.645-649
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• 2009

Liquid desiccant cooling technology can supply cooling by using waste heat and solar heat which are hard to use effectively. For compact and efficient design of a dehumidifier, it is important to sustain sufficient heat and mass transfer surface area for water vapor diffusion from air to liquid desiccant on heat exchanger. In this study, the plate type heat exchanger is adopted which has extended surface, and hydrophilic coating and porous layer coating are adopted to enhance surface wettedness. PP(polypropylene) plate is coated by porous layer and PET(polyethylene terephthalate) non-woven fabric is coated by hydrophilic polymer. These coated surfaces have porous structure, so that falling liquid film spreads widely on the coated surface foaming thin liquid film by capillary force. The temperature of liquid desiccant increases during dehumidification process by latent heat absorption, which leads to loss of dehumidification capacity. Liquid desiccant is cooled by cooling water flowing in plate heat exchanger. On the plate side, the liquid desiccant can be cooled by internal cooling. However the liquid desiccant on extended surface should be moved and cooled at heat exchanger surface. Optimal mixing and distribution of liquid desiccant between extended surface and plate heat exchanger surface is essential design parameter. The experiment has been conducted to verify effective surface treatment and distribution characteristics by measuring wall side flow rate and visualization test. It is observed that hydrophilic and porous layer coating have excellent wettedness, and the distribution can be regulated by adopting holes on extended surface.

• 한국결정성장학회지
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• 제16권3호
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• pp.121-126
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• 2006

HVOF thermal spray coating of Co-alloy T800 is progressively replacing the classical hard coatings such as chrome plating because of the very toxic $Cr^{6+}$ ion known as carcinogen causing lung cancer. For the study of the possibility of replacing of chrome plating, the wear properties of HVOF Co-alloy T800 coatings are investigated using the reciprocating sliding tester both at room and at an elevated temperature of $1000^{\circ}F\;(538^{\circ}C)$. The possibility as durability improvement coating is studied for the application to the high speed spindles vulnerable to frictional heat and wear. Wear mechanisms at the reciprocating sliding wear test are studied for the application to the systems similar to the sliding test such as high speed spindles. Wear debris and frictional coefficients of T800 coatings both at room and at an elevated temperature of $1000^{\circ}F\;(538^{\circ}C)$ are drastically reduced compared to those of non-coated surface of parent substrate Inconel 718. This study shows that the coating is recommendable for the durability improvement coatings on the surfaces vulnerable to frictional heat. The sliding surfaces are weared by the mixed mechanisms such as oxidative wear, abrasion by the sliding ball slurry erosion by the mixture of solid particles and small drops of the melts and semi-melts of the attrited particles cavitation by the relative motions among the coating, sliding ball, the melts and semi-melts. and corrosive wear. The oxide particles and the melts and semi-melts play roles as solid and liquid lubricant reducing the wear and friction coefficient.

• 폴리머
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• 제38권2호
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• pp.138-143
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• 2014

${\alpha},{\omega}$-Hydroxypropyl기를 갖는 polydimethylsiloxane을 합성하고 이를 hexamethylenediisocyanate(HDI)의 고리화 반응으로 제조된 HDI trimer와 반응시켜 말단에 이소시아네이트 기를 갖는 PDMS 변성 urethane(PSU)을 제조하였다. 이소시아네이트기를 갖는 PSU와 2-hydroxyethylmethacrylate를 urethane 반응으로 acrylate기를 갖는 PDMS 변성 urethane base 수지(PSUA)를 제조하였으며, 이를 FTIR, NMR로 구조를 확인하여 분석하였다. 제조한 base 수지에 아크릴계 경화제, 광 개시제, 용매들을 혼합하여 코팅 액을 제조하였으며 이를 PET 필름에 도포하고 자외선으로 조사하여 고경도의 유연성을 갖는 코팅 막을 얻었다. 얻어진 코팅 막의 광 투과도는 89.7%, 연필경도는 3H, 접촉각은 $88^{\circ}$였다.

• 공업화학
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• 제17권6호
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• pp.580-585
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• 2006

Boehmite 나노졸을 이용하여 자외선 및 열 경화가 동시에 가능한 내구성 코팅재료를 제조하였다. Boehmite (AlOOH) 나노입자에 3-(trimethoxysilyl)propylmethacrylate, (3-glycidyloxypropyl)trimethoxysilane 등의 유기 실란 커플링제를 혼합하는 sol-gel법으로 내구성 코팅 재료를 만들었다. 최초 boehmite 입자가 물에서만 분산 가능하였던 반면, 유기 실란이 도입된 입자는 알코올, tetrahydrofuran, acetonitrile 등의 유기 용매에서도 분산 가능케 되어 코팅 공정상 넓은 응용이 가능하게 되었다. 코팅 박막은 spin 코팅 방식을 이용하여 다양한 기질에 제조되었으며 제조된 박막은 FT-IR, Si/Al CP MAS NMR, UV-Vis spectrophotometer, 연필 경도계 및 FE-SEM, Taber abraser 등의 다양한 방법을 통하여 분석을 실시하였다. 유기실란의 배합 비율을 조절하여 최적화된 경도와 투명성을 갖는 박막을 얻었다. 또한 플라즈마로 전처리된 PMMA기질을 이용한 실험을 통하여 전처리의 효과성을 논의하였다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2017년도 제48회 춘계학술대회논문집
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• pp.857-863
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• 2017

본 논문은 다단연소사이클 엔진의 연소실 내벽을 고온, 고압의 환경으로부터 보호하기 위한 열차폐 코팅 공정 개발에 관한 내용이다. 기존 연소기 내벽에는 열차폐 특성이 우수한 Zr 기반의 세라믹용사코팅을 적용했지만, 세라믹의 특성상 연소실 내벽(금속)과 열팽창계수 차이로 인해 박리가 발생할 수 있다. 때문에 로켓 선진국에서는 열차폐 효과를 다소 희생 하더라도 밀착력 향상을 위하여 금속계 코팅인 Ni-Cr 도금을 적용하고 있다. 본 연구에서는 연소기에 적용 가능한 상향 순환식 유동셀을 적용한 도금조를 개발했으며, 반복적인 공정 개선을 통해 도금 두께 $100{\mu}m$이상, ${\pm}10%$의 두께 균일도를 만족하는 Ni, Cr 도금 공정조건을 확립했다.