• 제목/요약/키워드: grooving

검색결과 168건 처리시간 0.031초

패드 그루브의 치수가 CMP 연마특성에 미치는 영향 (The Effects of Groove Dimensions of Pad on CMP Characteristics)

  • 박기현;김형재;최재영;서헌덕;정해도
    • 대한기계학회논문집A
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    • 제29권3호
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    • pp.432-438
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    • 2005
  • CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.

A Study on Critical Depth of Cuts in Micro Grooving

  • Son, Seong-Min;Lim, Han-Seok;Paik, In-Hwan;Ahn, Jung-Hwan
    • Journal of Mechanical Science and Technology
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    • 제17권2호
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    • pp.239-245
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    • 2003
  • Ultra precision diamond cutting is a very efficient manufacturing method for optical parts such as HOE, Fresnel lenses, diffraction lenses, and others. During micro cutting, the rake angle is likely to become negative because the tool edge radius is considerably large compared to the sub-micrometer-order depth of cut. Depending on the ratio of the tool edge radius to the depth of cut, different micro-cutting mechanism modes appear. Therefore, the tool edge sharpness is the most important factor which affects the qualities of machined parts. That is why diamond, especially monocrystal diamond which has the sharpest edge among all other materials, is widely used in micro-cutting. The majar issue is regarding the minimum (critical) depth of cut needed to obtain continuous chips during the cutting process. In this paper, the micro machinability near the critical depth of cut is investigated in micro grooving with a diamond tool. The experimental results show the characteristics of micro-cutting in terms of cutting force ratio (Fx/Fy), chip shape, surface roughness, and surface hardening nea. the critical depth of cut.

CMP 패드 강성에 따른 산화막 불균일성(WIWNU)에 관한 연구 (A Study on the Within Wafer Non-uniformity of Oxide Film in CMP)

  • 박기현;정재우;박범영;서헌덕;이현섭;정해도
    • 한국전기전자재료학회논문지
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    • 제18권6호
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    • pp.521-526
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    • 2005
  • Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

C-means 알고리즘을 이용한 마이크로 엔드밀의 상태 감시 (Condition Monitoring of Micro Endmill using C-means Algorithm)

  • 권동희;정연식;강익수;김전하;김정석
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.162-167
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    • 2005
  • Recently, the advanced industries using micro parts are rapidly growing. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro to micro parts. Also, the method of micro-grooving using micro endmilling is used widely owing to many merit, but has problems of precision and quality of products due to tool wear and tool fracture. This study deals with condition monitoring using acoustic emission(AE) signal in the micro-grooving. First, the feature extraction of AE signal directly related to machining process is executed. Then, the distinctive micro endmill state according to the each tool condition is classified by using the fuzzy C-means algorithm, which is one of the methods to recognize data patterns. These result is effective monitoring method of micro endmill state by the AE sensing techniques which can be expected to be applicable to micro machining processes in the future.

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개선된 알고리즘을 이용한 그루브를 통한 표면형상변형 동특성 변경법 (Structural Dynamics Modification Using Surface Grooving Technique : Modified Algorithm and Result of Fine HDD Cover Model)

  • 박미유;박영진;박윤식
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2005년도 추계학술대회논문집
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    • pp.834-837
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    • 2005
  • Structural Dynamics Modification (SDM) is a very effective technique to improve structure's dynamic characteristics by adding or removing auxiliary structures, changing material properties and shape of structure. Among those of SDM technique, the method to change shape of structure has been mostly relied on engineer's experience and trial-and-error process which are very time consuming. In order to develop a systematic method to change structure shape, surface grooving technique is studied and successfully applied to HDD cover model. At first, to check the effect of mesh size, surface grooving technique was tested to the fine HDD cover FEmodel. And fur the more efficient method, the algorithm is modified. Removing the low-valued modal strain energy element among the target domain, computational effort can be greatly reduced and the result of simulation is similar with the other simulation result.

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Rapid and Specific Detection of Apple stem grooving virus by Reverse Transcription-recombinase Polymerase Amplification

  • Kim, Nam-Yeon;Oh, Jonghee;Lee, Su-Heon;Kim, Hongsup;Moon, Jae Sun;Jeong, Rae-Dong
    • The Plant Pathology Journal
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    • 제34권6호
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    • pp.575-579
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    • 2018
  • Apple stem grooving virus (ASGV) is considered to cause the most economically important viral disease in pears in Korea. The current PCR-based methods used to diagnose ASGV are time-consuming in terms of target detection. In this study, a novel assay for specific ASGV detection that is based on reverse transcription-recombinase polymerase amplification is described. This assay has been shown to be reproducible and able to detect as little as $4.7ng/{\mu}l$ of purified RNA obtained from an ASGV-infected plant. The major advantage of this assay is that the reaction for the target virus is completed in 1 min, and amplification only requires an incubation temperature of $42^{\circ}C$. This assay is a promising alternative method for pear breeding programs or virus-free certification laboratories.

Detection and Quantification of Apple Stem Grooving Virus in Micropropagated Apple Plantlets Using Reverse-Transcription Droplet Digital PCR

  • Kim, Sung-Woong;Lee, Hyo-Jeong;Cho, Kang Hee;Jeong, Rae-Dong
    • The Plant Pathology Journal
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    • 제38권4호
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    • pp.417-422
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    • 2022
  • Apple stem grooving virus (ASGV) is a destructive viral pathogen of pome fruit trees that causes significant losses to fruit production worldwide. Obtaining ASGV-free propagation materials is essential to reduce economic losses, and accurate and sensitive detection methods to screen ASGV-free plantlets during in vitro propagation are urgently necessary. In this study, ASGV was sensitively and accurately quantified from in vitro propagated apple plantlets using a reverse transcription droplet digital polymerase chain reaction (RT-ddPCR) assay. The optimized RT-ddPCR assay was specific to other apple viruses, and was at least 10-times more sensitive than RT-real-time quantitative PCR assay. Furthermore, the optimized RT-ddPCR assay was validated for the detection and quantification of ASGV using micropropagated apple plantlet samples. This RT-ddPCR assay can be utilized for the accurate quantitative detection of ASGV infection in ASGV-free certification programs, and can thus contribute to the production of ASGV-free apple trees.

A Reliable Reverse Transcription Loop-Mediated Isothermal Amplification Assay for Detecting Apple stem grooving virus in Pear

  • Lee, Hyo-Jeong;Jeong, Rae-Dong
    • 식물병연구
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    • 제28권2호
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    • pp.92-97
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    • 2022
  • Apple stem grooving virus (ASGV) is a high-risk viral pathogen that infects many types of fruit trees, especially pear and apple, and causes serious economic losses across the globe. Thus, rapid and reliable detection assay is needed to identify ASGV infection and prevent its spread. A reliable reverse transcription loop-mediated isothermal amplification (RT-LAMP) was developed, optimize, and evaluated for the coding region of coat protein of ASGV in pear leaf. The developed RT-LAMP facilitated the simple screening of ASGV using visible fluorescence and electrophoresis. The optimized reaction conditions for the RT-LAMP were 63℃ for 50 min, and the results showed high specificity and 100-fold greater sensitivity than the reverse transcription polymerase chain reaction. In addition, the reliability of the RT-LAMP was validated using field-collected pear leaves. Furthermore, the potential application of paper-based RNA isolation, combined with RT-LAMP, was also evaluated for detecting ASGV from field-collected samples. These assays could be widely applied to ASGV detection in field conditions and to virus-free certification programs.

Failure Analysis of Welded Pipe in Water Supplies for Apartment

  • Lee, Jong Kwon;Hong, Kyung Tae;Hwang, Woon Seok;Koh, Yong Tae;Park, Yong Soo
    • Corrosion Science and Technology
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    • 제3권2호
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    • pp.67-71
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    • 2004
  • Galvanized Steel pipes have been widely used in industries and apartments, Unexpected early leakage has been found in an apartment. Tunneling corrosion or penetration was found in the water supply pipes. The chemical compositions of the pipes and properties of coating layer were evaluated. The pipes met the specification of KS D 3507. The cause of early failure was analyzed through the examination of macrostructures and microstructures, It was found that the pipes were failed by grooving corrosion, which resulted from galvanic corrosion of weld bead and matrix.