• Journal of Surface Science and Engineering
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• v.38 no.1
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• pp.7-13
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• 2005

Bismuth thin films were prepared on glass substrate with RF magnetron sputtering and effects of substrate temperature on surface morphology and their electrical transport properties were investigated. Grain growth of bismuth after nucleation and the onset of coalescense of grains at 393 K were observed with field emission secondary electron microscopy. Continuous thin films could not be obtained above 473 K because of grain segregation and island formation. Hall effect measurements showed that substrate heating yields the decrease of carrier density and the increase of mobility. Resistivity of bismuth film has its minimum (about 0.7 x 10/sup -3/ Ωcm) in range of 403～433 K. Annealing of bismuth films deposited at room temperature was carried out in a radiation furnace with flowing hydrogen gas. The change of resistivity was not significant due to cancellation of the decrease of carrier density and the increase of mobility. The abrupt change of electrical properties of film annealed above 523 K was found to be caused by partial oxidation of bismuth layer in x-ray diffraction analysis.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.78-85
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• 2009

High performance functional fibers are demanded increasingly in the modern industries, while the inorganic fibers such as carbon fibers, glass fibers, and metal fibers are representative among them in that they have high strength, consistent properties in a broad temperature change, etc.. This paper reports on the experimental trial to apply the microwave furnace on melting the natural basalt rock that spreads overall on the global surface and is supposed to be used as the raw material for the inorganic high performance fiber. Results showed that the new method to use the microwave as the heating source to melt the basalt rock was feasible. The crucible spinning could effectively applied for producing the basalt fibers up to 10 micrometer diameter, when the crushed basalt rocks were used. For drawing the molten basalt the drawing roller surface feature was a very important factor.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.125-125
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• 2003

PZT(Pb(Zr,Ti)O3)는 우수한 강유전 특성을 가지기 때문에 FRAM (Ferroelectric Random Access Memory) 소자에 응용하기 위해 많은 연구가 진행되고 있다. 스퍼터에 의해 증착된 PZT는 처음에 pyrochlore상으로 존재하다가 후 열처리를 통해 이력 특성을 나타내는 perovskite상으로 천이된다. 일반적인 furnace열처리 방법은 고온에서의 장시간 열처리가 요구되고 Pb-loss현상이나 TiO2와 같은 이차상의 생성 그리고 하부 Pt전극의 roughness증가 및 crack과 같은 문제점이 있다. 최근 들어 후 열처리를 RTA로 이용하는 연구가 진행되고 있는데 이는 열처리 시간이 짧기 때문에 위와 같은 문제점을 개선할 수 있었다. 하지만 RTA방법 또한 어느 정도의 thermal budget이 존재하고 추가적 장비가 필요하며 기판의 전체적 가열공정이므로 다른 CMOS공정과 compatibility가 떨어진다. 따라서 본 실험에서는 위와 같은 문제를 해결하고자 노력을 집중하였고 이를 위한 새로운 열처리 방법을 개발하였다. 즉 Pt 하부전극에 전압(전류)을 인가하여 순간적으로 고온으로 결정화시키는 새로운 공정을 모색하였는데 이와 같은 방법은 열처리를 위한 추가적인 장비가 필요없고 국부적으로 순간적인 가열이기 때문에 glass기판에도 적합하며 RTA보다 승온시간 및 열처리 시간이 짧기 때문에 thermal budget도 줄일 수 있었다.

• 한국신재생에너지학회:학술대회논문집
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• 2007.06a
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• pp.326-329
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• 2007

$CuInS_{2}$ thin films were synthesized by sulpurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furnace annealing at temperature 200[$^{\circ}C$]. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_{2}$ thin films with non-stoichiometry composition. $CuInS_{2}$ thin film was well made at the heat treatment 200[$^{\circ}C$] of SLG/Cu/ln/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1 : 1 : 2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and Hall measurement system. At the same time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}$ [$cm^{-3}$], 312.502 [$cm^{2}/V{\cdot}s$] and $2.36{\times}10^{-2}$ [${\Omega}{\cdot}cm$], respectively.

• Journal of the Korean Ceramic Society
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• v.15 no.3
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• pp.157-167
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• 1978

The batch compositions and physical properties of slag-ceramics were studied with respect to their formability from the molten state and conditions of nucleation and crystal growth treatment. The selected batch compositions for nucleation and growth studies were slag, 56%; silica sand, 28%; $Na_2O＋MgO$, 8% and $TiO_2＋$chromite, 8%. The optimum nucleation condition was the temperature of 75$0^{\circ}C$ with 6 hrs. holding time and the optimum growth condition was the temperature 975$^{\circ}C$ with zero holding time. The slag-ceramics prepared under the above conditions showed the best developed microtexture. The grown crystals were identified as diopside with the average grain size of 5.7$\mu\textrm{m}$, and the amount of crystal grown were about 53% by weight. The prepared specimens of slag-ceramics showed the microhardness, 793kg/$\textrm{mm}^2$; MOR, 1,050 kg/$\textrm{cm}^2$ and thermal expansion coefficient, $85{\div}10^{-7}$cm/cm/$^{\circ}C$($25^{\circ}C$~$700^{\circ}C$).

• Journal of The Korean Digital Architecture Interior Association
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• v.11 no.4
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• pp.21-27
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• 2011

These materials in architecturally glass or metal have weaknesses such as inadequate insulating quality, combustibility and toxic gases in fires substance. However, Autoclaved Lightweight Concrete(ALC) has excellent thermal insulation properties and seem to possess the superb insulating quality as substitute of existing exterior materials. This research is to compare experimentally to the kind of the strength properties of ALC materials which mixed with blast furnace slag pounder and silica fume. For the purpose of increasing the strength, the plastic states of ALC evaluate the physical characteristics as microstructure and strength according to various specific gravity. According to the quicklime quantity the compressive strength is proportionate depend on the absolute dried specific gravity. When not putting in 10% quicklime, the compressive strength appeared most lowly with 14.0MPa. When putting in the quicklime, the strength appeared higher with 15.1MPa. And strength of specimen containing 2.25% silica fume is 15.6MPa increased 10.3% than reference specimen 14.0MPa.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.17-17
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• 2010

Polycrystalline $CuInS_2$ thin films were performed from S/In/Cu Stacked elemental layer(SEL) method with post annealing. In thin method, the thin films were annealed in Vacuum of $10^{-3}$ torr or in S ambient. $CuInS_2$ thin films were manufctured by using the evaporation and the annealing with vacuum quartz furnace of sulfurization process was used in the vacuum chamber to the substrate temperature on the glass substrate the annealing temperature and characteristics thereof were investigated. The physical properties of the thin film were investigated under various fabrication conditions including the substrate temperature annealing time by XRD, FE-SEM, and Hall measurement system.

• Proceedings of the Korea Concrete Institute Conference
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• 2010.05a
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• pp.247-248
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• 2010

This study is of manufacturing artificial lightweight aggregates using industrial wastes. The ingredients for manufacturing lightweight aggregate were stone sludge and bottom ash for main materials, and steel slag(SS), glass abrasive sludge(GS) and blast furnace slag(BS) respectively for accessory material. Their precursors were sintered in the range of $1,050{\sim}1,150^{\circ}C$ for 5 min. The sintered results show that the lightweight aggregate with SS had low water absorption ratio and density at $1,150^{\circ}C$. There's a possibility that if GS is used more than the range of this study, GS can be manufactured lightweight aggregate. But it is judged that BS are incongruent to be used for a raw material of lightweight aggregate.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.480.1-480.1
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• 2014

In this study, we suggest the new emitter formation applied solid phase epitaxy (SPE) growth process using rapid thermal process (RTP). Preferentially, we describe the SPE growth of intrinsic a-Si thin film through RTP heat treatment by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD). Phase transition of intrinsic a-Si thin films were taken place under $600^{\circ}C$ for 5 min annealing condition measured by spectroscopic ellipsometer (SE) applied to effective medium approximation (EMA). We confirmed the SPE growth using high resolution transmission electron microscope (HR-TEM) analysis. Similarly, phase transition of P doped a-Si thin films were arisen $700^{\circ}C$ for 1 min, however, crystallinity is lower than intrinsic a-Si thin films. It is referable to the interference of the dopant. Based on this, we fabricated 16.7% solar cell to apply emitter layer formed SPE growth of P doped a-Si thin films using RTP. We considered that is a relative short process time compare to make the phosphorus emitter such as diffusion using furnace. Also, it is causing process simplification that can be omitted phosphorus silicate glass (PSG) removal and edge isolation process.

• Journal of Powder Materials
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• v.21 no.6
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• pp.454-459
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• 2014

In this study, the porous ceramic filter was developed to be able to remove both dust and hazardous gas contained in fuel gas at high temperature. The porous ceramic filters were fabricated and used as a catalyst support. And the effects have been investigated such as the mean particle size, organic content and addition of foaming agent on the porosity, compressive strength and pressure drop of ceramic filters. With the increase of mean powder size and the organic content for the cordierite filter, the porosity was increased, but the compressive strength and pressure drop were decreased. From the results of the research, the optimum condition for the fabrication of ceramic filters could be acquired and they had the porosity of 58%, the compressive strength of 13.4 MPa and the pressure drop of 250 Pa. It was expected that this ceramic filter was able to be applied to the glass melting furnace, combustor, and dust/toxic gas removal filter.