• 한국진공학회지
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• 제13권2호
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• pp.47-53
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• 2004

국내 진공기술 기반을 구축하는 국가사업의 일환으로 게터펌프 성능평가장치를 개발하고 있다. 본격적으로 장치를 구성하기 전에 평가절차의 개발, 장치 설계요건 및 사양을 확정하기 위해 예비실험장치를 만들었다. 이 장치를 이용하여 밀봉형 기기에 들어가는 비교적 활성화 온도가 낮은 게터 소자들의 특성평가 절차를 만들고 이를 적용하여 수소, 일산화탄소, 질소 등에 대해 배기속도와 배기용량을 측정해 보았다. 주로 고순도 기체 공급장치용으로 국내에서 개발된 게터 소자와 램프용으로 널리 쓰이는 외국제품의 배기성능을 비교해 보았다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
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• pp.121-124
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• 2005

Getter는 진공을 이루고 유지하는데 사용되는 물질로, 잔존가스 및 불순가스를 흡수 & 제거하는 물질을 말한다. FPD나 PDP같은 평판 디스플레이는 내부에 진공을 요구하며 작동중에 발생하는 불순가스에 의해 진공도가 떨어져, plasma 방전시 방전개시전압이 상승하는 결과를 초래하기에 이에 적절한 getter의 필요성이 대두되고 있다. 본 연구의 최종 목적은 PDP 제조시 발생하는 잔존가스 및 운전중 발생하는 불순가스의 제거를 효율적으로 하여 PDP의 수명이 연장되는 고성능 getter 재료를 제조 하고자 하는 것이며, 이에 thermal plasma를 이용하여 nano size로 getter를 제조하였다. 전체적으로 $10\~30$ [nm] 크기의 Setter가 제조되었지만 응집이 많이 일어나 군집된 형상이 발생하였으며, 이는 입자가 완전히 성장하기까지 충분한 열을 받지 못하여 응집이 먼저 발생한 것으로 생각된다.

• 한국재료학회지
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• 제15권6호
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• pp.388-392
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• 2005

The $Zr_{57}V_{36}M_7$ getter alloy was prepared by Fe substituting Ga or Y for Fe on $Zr_{57}V_{36}M_7$ getter alloy(St707), and the activation temperatures and the hydrogen a sorption speeds of these alloys were investigated. The activation temperatures of these alloys were estimated from the ultimate pressure-temperature curve and lowered about $100\~200\;K$ compared to $Zr_{57}V_{36}M_7$, fetter alloy(St707). However, final pressures at fully activated temperature were increased with substitution of Fe by Ga and Y on $Zr_{57}V_{36}M_7$ getter alloy. The hydrogen sorption speeds of these alloys measured by an orifice method were decreased about $0.460\~0.586liter/sec$ g compared to $Zr_{57}V_{36}M_7$ getter alloy.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.1051-1052
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• 2002

Vacuum surroundings in Cathode Ray Tubes (CRT) are very important factor for CRT lifetime, especially cathode & getter's. A getter is a very good vacuum pump; unfortunately, it cannot absorb an inert gas and hydrocarbons. There are only argon and helium in CRT after $1^{st}$ emission test because other active gases are absorbed by getter and methane is decomposed during CRT working. It is also very important to know exactly where and when methane is decomposed during the CRT manufacturing process, because methane is known to be harmful to cathode when its amount is high, and getter can't absorb the methane.

• 한국진공학회지
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• 제14권4호
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• pp.171-179
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• 2005

몬테카를로 계산을 통해 표면 거칠기와 세공 표면밀도가 게터의 겉보기 부착계수에 미치는 영향을 정량화했다. 또 부착계수와 게터 내부에서 확산속도에 따라 게터 흡착속도가 어떤 형태로 변화하는지 해석한 결과를 소개한다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1999년도 춘계학술발표강연 및 눈문개요집
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• pp.48-48
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• 1999

• 한국재료학회지
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• 제15권5호
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• pp.306-312
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• 2005

The hydrogen sorption properties of $Ti_{0.3}Zr_{0.2}V_{0.5}$ NEC(non-evaporable getter) alloy and its hydrides were evaluated at room temperature. The alloy and hydride powders were prepared by the Hydride-DeHydride(HDH) method. The hydrogen sorption speed of $Ti_{0.3}Zr_{0.2}V_{0.5}$ alloy was measured to increase with the amounts of hydride phase in the getter. The hydrogen sorption speeds of $Ti_{0.3}Zr_{0.2}V_{0.5},\;(Ti_{0.3}Zr_{0.2}V_{0.5})H_{1.52},\;and\;(Ti_{0.3}Zr_{0.2}V_{0.5})H_{1.94}$ were 2.22, 3.14 and 5.08 liter/sec, respectively. The unexpected enhancement of hydrogen sorption speed with the presence of the hydride phase is considered to be due to the pre-saturation of hydrogen trap sites which can retard the diffusion of hydrogen in the alloy.

• 한국수소및신에너지학회논문집
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• 제15권3호
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• pp.220-227
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• 2004

The purpose of this paper is, based on the theoretical background of the principle of gas purification and absorption, and the absorbing ability of metals, to syudy the efficiency of gas purification of inorganic gases using Zr alloys, so as to contribute to the IT industry. To produce and distribute gas with high purity and ultra-high purity, different types of gas purifier are currently being used: distillation type, getter type, catalyst type, absorption at low-temperature type, and membrane separation equipment. From the different purification methods mentioned above, the getter type gas purifier is capable of not only high performance and capacity but also P.O.U(Point Of Use) method. The key of the getter type gas purifier is its efficiency of gas purification, which is the subject chosen for this study.

• 한국분말재료학회지
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• 제14권1호
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• pp.63-69
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• 2007

The present study was focused on the synthesis of a zirconium-based alloyed nanopowder by the plasma arc discharge process. The chemical composition, phase structure, particle size and hydrogen sorption property of the synthesized powders under various synthesis conditions were analyzed using XRF, XRD, SEM, XPS and the ASTM-F798 method. The chemical composition of the synthesized Zr-V-Fe-based powders approached that of the raw material with an increasing hydrogen fraction in the powder synthesis atmosphere. The synthesized $Zr_{55}V_{29}Fe_{16}$ powder consist of a mixed phase structure of the $Zr,\;ZrH_2,\;FeV\;and\;Zr(V_{1-x}Fe_{x})_2$ phases. This powder has an average particle size of about 20 nm. The synthesized $Zr_{55}V_{29}Fe_{16}$ nanopowder showed getter characteristics, even though it had a lower hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder. However, the synthesized Zr nanopowder with an average particle size of 20 nm showed higher hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder.

• 한국분말재료학회지
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• 제14권1호
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• pp.56-62
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• 2007

Getter property of nano-sized metallic powders was evaluated as a possible candidate for the future getter material. For the purpose, Ti powders of about 50 nm were prepared by electrical wire explosion. Commercial Ti powders of about 22 micrometer were tested as well for comparison. The room-temperature hydrogen-sorption speed of nano-sized Ti powders was $1.34\;L/sec{\cdot}cm^{2}$ which was more than 4 times higher than that of micron-sized ones. The value is comparable to or even higher than those of commercial products. Its sorption speed increases with activation temperature up to $500^{\circ}C$ above which it deteriorates due to low-temperature sintering effect of nano-sized particles.