F Ion-Assisted Effect on Dry Etching of GaAs over AlGaAs and InGaP (GaAs/AlGaAs와 GaAs/InGaP의 건식 식각 시 Flourine 이온의 효과)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.07a
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- pp.164-165
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- 2005