• Title/Summary/Keyword: gas-discharge

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F Ion-Assisted Effect on Dry Etching of GaAs over AlGaAs and InGaP (GaAs/AlGaAs와 GaAs/InGaP의 건식 식각 시 Flourine 이온의 효과)

  • Jang, Soo-Ouk;Park, Min-Young;Choi, Chung-Ki;Yoo, Seung-Ryul;Lee, Je-Won;Song, Han-Jung;Jeon, Min-Hyon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.164-165
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    • 2005
  • The dry etch characteristics of GaAs over both AlGaAs and InGaP in planar inductively coupled $BCl_3$-based plasmas(ICP) with additions of $SF_6$ or $CF_4$ were studied. The additions of flourine gases provided enhanced etch selectivities of GaAs/AlGaAs and GaAs/InGaP. The etch stop reaction involving formation of involatile $AlF_3$ and $InF_3$ (boiling points of etch products: $AlF_3\sim1300^{\circ}C$, $InF_3$ > $1200^{\circ}C$ at atmosphere) were found to be effective under high density inductively coupled plasma condition. Decrease of etch rates of all materials was probably due to strong increase of flourine atoms in the discharge, which blocked the surface of the material against chlorine neutral adsorption. The process parameters were ICP source power (0 - 500 W), RF chuck power (0 - 30 W) and variable gas composition. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching.

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Development of Thin Film Electrode by Thermal CVD and Its Anode Characteristics for Lithium Battery (Thermal CVD법을 이용한 박막전극의 개발 및 리튬이차전지의 음극특성)

  • Lee, Young-Ho;Kim, Seong-Il;Doh, Chil-Hoon;Jin, Bong-Soo;Min, Bok-Ki;Kim, Hyun-Soo;Moon, Seong-In;Yun, Mun-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.378-379
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    • 2006
  • The carbon thin film was developed by the CVD method using the carbon source of toluene with the stream of argon gas at $800{\sim}1100^{\circ}C$ for 1 hour. Developed carbon thin films have the material loading of 0.27 mg($800^{\circ}C$), 0.80 mg($900^{\circ}C$), 2.3 mg($1000^{\circ}C$), and 2.9 mg($1100^{\circ}C$) for the disk of 15 mm diameter on single side. The characteristics of carbon thin film as the anode of thin film battery were evaluated using Li|C coin cell. Li|C($1100^{\circ}C$) coin cell has the first specific discharge and charge capacity of 953 mAh/g and 374 mAh/g, respectively, resulting the first Ah efficiency of 39.3 %. Capacity retention of the 5th cycle was 93.2 % indicating good cycleability. The carbon thin film prepared by CVD shows good specific capacity and cycleability, but low Ah efficiency.

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Growth of vertically aligned carbon nanotubes on a large area Si substrates by thermal chemical vapor deposition

  • Lee, Cheol-Jin;Park, Jung-Hoon;Son, Kwon-Hee;Kim, Dae-Woon;Lyu, Seung-Chul;Park, Sung-Hoon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.212-212
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    • 2000
  • Since the first obserbvation of carbon nanotubes, extensive researches have been done for the synthesis using arc discharge, laser vaporization, and plasma-enhanced chemical vapor deposition. Carbon nanotubes have unique physical and chemical properties and can allow nanoscale devices. Vertically aligned carbon nanotubes with high quality on a large area is particularly important to enable both fundamental studies and applications, such as flat panel displays and vacuum microelectronics. we have grown vertically aligned carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition using C2H2 gas at 750-950$^{\circ}C$. we deposited catalytic metal on Si susbstrate using thermal evaporation. The nanotubes reveal highly purified surface. The carbon nanotubes have multi-wall structure with a hollow inside and it reveals bamboo structure agreed with base growth model. Figure 1 shows SEM micrograph showing vertically aligned carbon nanotubes whih were grown at 950$^{\circ}C$ on a large area (20mm${\times}$30mm) of Si substrates. Figure 2 shows TEM analysis was performed on the carbon nanotubes grown at 950$^{\circ}C$ for 10 min. The carbon nanotubes are multi-wall structure with bamboo shape and the lack of fringes inside the nanotube indicates that the core of the structure is hollow. In our experiment, carbon nanotubes grown by the thermal CVD indicate base growth model.

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Study on the Swirling Motion Effect of Ejector Performance (회전 운동이 이젝터 성능에 미치는 영향에 관한 연구)

  • Kang, Sang-Hoon;Park, Young-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.4
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    • pp.544-549
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    • 2017
  • This paper aims to examine the effect of rotational fluid motion about the efficiency of the gas - liquid ejector, which is a core unit in a ship equilibrium water treatment system. The ejector is a device for injecting ozone into ship equilibrium by the negative pressure generated by exchange of momentum between water and ozone. The existing ejector ejects the driving fluid with a simple form. In this paper, however, a rotation induction device is applied to the driving nozzle so that the driving fluid can be rotated and injected. To investigate the flow characteristics by the rotational movement of the driving fluid, CFD was used. The pressure and flow rate of the driving fluid, the negative pressure and suction flow rate of the suction fluid in the suction part, and the discharge pressure were predicted. On the basis of the results, the efficiency of the ejector using the rotation induction system was 22.25%, which was about 1.7% better than that of the existing ejector. Finally, to verify the feasibility of the CFD, an experiment was conducted on the ejector using the rotation induction device and the results were similar to those of the CFD.

Improvement of EIA Associated with Greenhouse Gases Subject Matter for the Preparedness of Post-2020 (Post-2020에 연계한 온실가스 항목의 환경영향평가 개선 방안)

  • Hong, Sang-Pyo
    • Journal of Environmental Impact Assessment
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    • v.28 no.5
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    • pp.483-491
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    • 2019
  • In orderto cope with the post-2020 in accordance with the Paris Agreement, greenhouse gas (GHG)reduction in Environmental Impact Assessment (EIA) and its contributions to post-2020 were discussed. The 26 Environmental Impact Statement (EIS) administered by Geum-River Basin Environmental Office from 2010 to 2019 were analyzed for reviewing GHG mitigation measures. From the case study, it was found that the assessment of GHG emissions reduction and climate change adaptation were not appropriately performed. In this study, the following measures are proposed to improve the inappropriate assessment of 'GHG subject matter' associated with EIA according to post-2020, 1) allotment of enforced charge on GHG emission during the EIA process, 2) addition of the 'GHG subject matter' in 'establishing permissible discharge standards' which is based on "Act on the Integrated Control of Pollutant-discharging Facilities", and 3) the participation of stakeholders in early EIA stage for governance. Also the details on the EIA for the preparedness of post-2020 were discussed here.

A Study on the Ozone Reduction of Plasma Devices by Catalyst Method (촉매법을 적용한 오존 저감형 플라즈마 기기)

  • Jeon, Sin Young;Kim, Dong Jun;Kim, Jong Yeop;Gwon, Jin Gu;Jeon, Young Min;Do, Gye Ryung;Lee, Seong Eui
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.56-62
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    • 2021
  • In this study, we created a DBD plasma device and a MnO2 catalyst mesh filter for evaluating ozone reduction of devices via the catalyst method. The DBD plasma device was manufactured by applying Ag paste to soda lime glass via the screen-printing method. The MnO2 catalyst mesh filter was manufactured by mixing MnO2 powder with binder with a 10% difference in concentration from 10% to 50% and then applying it using the dip-coating method. Finally, we sintered a MnO2 catalyst mesh filter in an electric furnace. We evaluated the characteristics of ozone generation according to the Ar gas flow of DBD plasma devices, the opening ratio, and ozone reduction performance of the MnO2 catalyst filters. Ozone reduction performance was approximately 20.4% at MnO2 10 wt%, 37.8% at MnO2 30 wt% and 50% at MnO2 50 wt%.

Fabrication and Property of Excimer Lamp Coated with Green-emitting Zn2SiO4:Mn2+ Phosphor Film (녹색발광 Zn2SiO4:Mn2+ 형광체가 코팅된 엑시머 램프의 제작 및 특성)

  • Kang, Busic;Jung, Hyunjee;Jeong, Yongseok;Son, Semo;Kim, Jongsu
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.106-109
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    • 2022
  • The green-emitting Zn2SiO4:Mn2+ phosphor film was evaluated in a xenon excimer lamp. The phosphor film with 2 ㎛ thick was formed of monolithic structure on the inner side of quartz through a long-time annealing process of coated ZnO solution doped with Mn2+ ion and SiO2 of quartz tube. The coated quartz was filled with 100 torr of xenon gas, and simultaneously both sides was melt and sealed. The xenon-field quartz tube was discharge by applying the voltage of 15 kV with a frequency of 26 kHz, and emitted the glow with dominant peak at 172 nm. The vacuum ultraviolet excited the inner-side coated Zn2SiO4:Mn2+ phosphor film, which emitted the pure and strong green light.

The timing of unprecedented hydrological drought under climate change

  • Yusuke Satoh;Hyungjun Kim
    • Proceedings of the Korea Water Resources Association Conference
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    • 2023.05a
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    • pp.48-48
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    • 2023
  • The intensified droughts under climate change are expected to threaten stable water resource availability. Droughts exceeding the magnitude of historical variability could occur increasingly frequently under future climate conditions. It is crucial to understand how drought will evolve over time because the assumption of hydrological stationarity of the past decades would be inappropriate for future water resources management. However, the timing of the emergence of unprecedented drought conditions under climate change has rarely been examined. Here, using multimodel hydrological simulations, we investigate the changes in the frequency of hydrological drought (defined as abnormally low river discharge) under high and low greenhouse gas concentration scenarios and with existing water resources management and estimate the timing of the first emergence of unprecedented regional drought conditions that persist for over several consecutive years. This new metric enables a new quantification of the urgency of adaptation and mitigation with regard to drought under climate change. The times are detected for several sub-continental-scale regions, and three regions, namely, southwestern South America, Mediterranean Europe, and northern Africa, exhibit particularly robust and earlier critical times under the high-emission scenario. These three regions are expected to confront unprecedented conditions within the next 30 years with a high likelihood, regardless of the emission scenarios. In addition, the results obtained herein demonstrate the benefits of the lower-emission pathway in reducing the likelihood of emergence. The Paris Agreement goals are shown to be effective in reducing the likelihood to the unlikely level in most regions. Nevertheless, appropriate and prior adaptation measures are considered indispensable to when facing unprecedented drought conditions. The results of this study underscore the importance of improving drought preparedness within the considered time horizons.

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A Pilot Study Exploring Temporal Development of Gut Microbiome/Metabolome in Breastfed Neonates during the First Week of Life

  • Imad Awan;Emily Schultz;John D. Sterrett;Lamya'a M. Dawud;Lyanna R. Kessler;Deborah Schoch;Christopher A. Lowry;Lori Feldman-Winter;Sangita Phadtare
    • Pediatric Gastroenterology, Hepatology & Nutrition
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    • v.26 no.2
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    • pp.99-115
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    • 2023
  • Purpose: Exclusive breastfeeding promotes gut microbial compositions associated with lower rates of metabolic and autoimmune diseases. Its cessation is implicated in increased microbiome-metabolome discordance, suggesting a vulnerability to dietary changes. Formula supplementation is common within our low-income, ethnic-minority community. We studied exclusively breastfed (EBF) neonates' early microbiome-metabolome coupling in efforts to build foundational knowledge needed to target this inequality. Methods: Maternal surveys and stool samples from seven EBF neonates at first transitional stool (0-24 hours), discharge (30-48 hours), and at first appointment (days 3-5) were collected. Survey included demographics, feeding method, medications, medical history and tobacco and alcohol use. Stool samples were processed for 16S rRNA gene sequencing and lipid analysis by gas chromatography-mass spectrometry. Alpha and beta diversity analyses and Procrustes randomization for associations were carried out. Results: Firmicutes, Proteobacteria, Bacteroidetes and Actinobacteria were the most abundant taxa. Variation in microbiome composition was greater between individuals than within (p=0.001). Palmitic, oleic, stearic, and linoleic acids were the most abundant lipids. Variation in lipid composition was greater between individuals than within (p=0.040). Multivariate composition of the metabolome, but not microbiome, correlated with time (p=0.030). Total lipids, saturated lipids, and unsaturated lipids concentrations increased over time (p=0.012, p=0.008, p=0.023). Alpha diversity did not correlate with time (p=0.403). Microbiome composition was not associated with each samples' metabolome (p=0.450). Conclusion: Neonate gut microbiomes were unique to each neonate; respective metabolome profiles demonstrated generalizable temporal developments. The overall variability suggests potential interplay between influences including maternal breastmilk composition, amount consumed and living environment.

Effect of Cold Plasma on Total Polyphenol Content and Anti-Inflammatory Activities of Peanut (Arachis hypogaea L.) Hull

  • Mihyang Kim;Yeo Ul Cho;Narae Han;Jin Young Lee;Yu-Young Lee;Moon Seok Kang;Hyun-Joo Kim
    • Proceedings of the Korean Society of Crop Science Conference
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    • 2022.10a
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    • pp.330-330
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    • 2022
  • In recent studies, cold plasma has been used to induce exudation of polyphenols and flavonoids from food materials, leading to enhancement of functional properties. And it is known that polyphenols interact with inflammation related metabolism. The objectives of this study were to investigate the effects of cold plasma treatments on the increase of total phenolic content (TPC), total flavonoid content (TFC), and anti-inflammatory activities of 'Sinpalkwang' peanut (Arachis hypogaea L.) hull. Plasma treatments were carried out using a dielectric barrier discharge gas exchange system at different radicals and temperatures (O3-25℃, O3-150℃, NOx-150℃). Significant differences in TPC, TFC, and inflammatory mediator such as nitric oxide (NO) and tumor necrosis factor a (TNF-α) in lipopolysaccharide stimulated Raw 264.7 macrophages were observed between treated and non-treated peanut hull samples (p < 0.001). Cold plasma treated samples showed higher content (TPC: 2.87-2.93 mg/g sample, TFC: 0.96-0.98 mg/g sample) than non-treated sample (TPC: 2.47 mg/g sample, TFC: 0.78 mg/g sample). Cold plasma treated samples showed lower content of NO (3.3-5.0 uM) and TNF-α (141.4-162.2 ng/mL) than non-treated sample (NO: 11.1 uM, TNF-α: 210.2 ng/mL). This study suggests that cold plasma has potential to improve functionalities of food materials and that cold plasma treated peanut hull can be used as immune enhancing materials.

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