• Title/Summary/Keyword: gas-discharge

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100KW DC Arc Plasma of CVD System for Low Cost Large Area Diamond Film Deposition

  • Lu, F.X.;Zhong, G.F.;Fu, Y.L.;Wang, J.J.;Tang, W.Z.;Li, G.H.;Lo, T.L.;Zhang, Y.G.;Zang, J.M.;Pan, C.H.;Tang, C.X.;Lu, Y.P.
    • The Korean Journal of Ceramics
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    • v.2 no.4
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    • pp.216-220
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    • 1996
  • In the present paper, a new type of DC arc plasma torch is disclosed. The principles of the new magnetic and fluid dynamic controlled large orifice long discharge tunnel plasma torch is discussed. Two series of DC Plasma Jet diamond film deposition equipment have been developed. The 20kW Jet equipped with a $\Phi$70 mm orifice torch is capable of deposition diamond films at a growth rate as high as 40$\mu\textrm{m}$/h over a substrate area of $\Phi$65 mm. The 100kW high power Jet which is newly developed based on the experience of the low power model is equipped with a $\Phi$120 mm orifice torch, and is capable of depositing diamond films over a substrate area of $\Phi$110 mm at growth rate as high as 40 $\mu\textrm{m}$/h, and can be operated at gas recycling mode, which allows 95% of the gases be recycled. It is demonstrated that the new type DC plasma torch can be easily scaled up to even higher power Jet. It is estimated that even by the 100kW Jet, the cost for tool grade diamond films can be as low as less than $4/carat.

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A Study on the Heat Resistance of Light-Weight Polymer Concrete Composites (경량 폴리머 콘크리트 복합체의 내열성능에 관한 연구)

  • Jo, Young-Kug
    • Journal of the Korea Institute of Building Construction
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    • v.8 no.6
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    • pp.131-137
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    • 2008
  • In recent years, the light-weight aggregate has widely been used to reduce the weight of construction structures, and to achieve the thermal insulation of building structures. The purpose of this study is to evaluate the heat resistance of polymer concrete composites with light-weight aggregate made by binders as resin and cement with polymer dispersion. The light-weight polymer concrete composites are prepared with various conditions such as binder content, filler content, void-filling ratio, light-weight aggregate content and polymer-cement ratio, and tested for heat resistant test, and measured the weight reducing ratio, strengths and exhaustion content of gas such as CO, NO and $SO_2$. From the test results, the weight reducing ratio of light weight polymer concrete using UP binder after heat resistance test increase with an increase in the UP content irrespective of the filler content. The weight reducing ratio of polymer cement concrete is considerably smaller than that of UP concrete. In general, the strengths after heat resistance of polymer concrete composites are reduced about 40 to 65% compared with those before test. The exhausted quantity of CO, NO and $SO_2$ gases in polymer concrete composites is less than EPS(Expanded poly styrene). From the this study, it is confirmed that the many types gases discharge according to binder type of polymer concrete composites, its amount is controlled by selection of the binder type and mix proportions.

Decomposition of Ethylene using a Hybrid Catalyst-packed Bed Plasma Reactor System (플라즈마 충진 촉매 시스템을 이용한 에틸렌 저감 연구)

  • Lee, Sang Baek;Jo, Jin-Oh;Jang, Dong Lyong;Mok, Young Sun
    • Journal of Korean Society for Atmospheric Environment
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    • v.30 no.6
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    • pp.577-585
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    • 2014
  • A series of experiments using atmospheric-pressure non-thermal plasma coupled with transition metal catalysts were performed to remove ethylene from agricultural storage facilities. The non-thermal plasma was created by dielectric barrier discharge, which was in direct contact with the catalyst pellets. The transition metals such as Ag and $V_2O_5$ were supported on ${\gamma}-Al_2O_3$. The effect of catalyst type, specific input energy (SIE) and oxygen content on the removal of ethylene was examined to understand the behavior of the hybrid plasma-catalytic reactor system. With the other parameters kept constant, the plasma-catalytic activity for the removal of ethylene was in order of $V_2O_5/{\gamma}-Al_2O_3$ > $Ag/{\gamma}-Al_2O_3$ > ${\gamma}-Al_2O_3$ from high to low. Interestingly, the rate of plasma-catalytic ozone generation was in order of $V_2O_5/{\gamma}-Al_2O_3$ > ${\gamma}-Al_2O_3$ > $Ag/{\gamma}-Al_2O_3$, implying that the catalyst activation mechanisms by plasma are different for different catalysts. The results obtained by varying the oxygen content indicated that nitrogen-derived reactive species dominated the removal of ethylene under oxygen-lean condition, while ozone and oxygen atoms were mainly involved in the removal under oxygen-rich condition. When the plasma was coupled with $V_2O_5/{\gamma}-Al_2O_3$, nearly complete removal of ethylene was achieved at oxygen contents higher than 5% by volume (inlet ethylene: 250 ppm; gas flow rate: $1.0Lmin^{-1}$; SIE: ${\sim}355JL^{-1}$).

A Study on Plasma Display Panel Barrier Rib Fabrication by Mold and Electromagnetic Wave (몰드와 전자기파에 의한 PDP격벽의 성형에 관한 연구)

  • Son, Jae-Hyeok;Im, Yong-Gwan;Jeong, Yeong-Dae;Jeong, Seong-Il;Jeong, Hae-Do
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.6
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    • pp.176-183
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    • 2002
  • Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. The mold for forming the barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing processes such as screen printing, sand-blasting and photosensitive glass methods. The mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper , Stripes of grooves of which width 48$\mu$m, depth 124$\mu$m , pitch 274$\mu$m was acquired by machining of single crystal silicon with dicing saw blade. Maximum roughness of the bottom of the grooves was 59.6 nm Ra in grooving Si. Barrier ribs were farmed with silicone rubber mold, which is transferred from grooved Si forming hard mold. Silicone rubber mold has the elasticity, which enable to accommodate the waviness of lower glass plate of PDP. The methods assisted by the microwave and UV was adopted for reducing the forming time of glass paste.

The Analysis of the Discharging Characteristics on the Base Vacuum Level in a Vacuum In-line Sealing Process for High-efficiency PDP (고효율 PDP 제작을 위한 진공 인라인 실장에서의 초기 진공도에 따른 방전특성 분석)

  • Kwon Sang Jik;Jang Chan-Kyu;Kim Yong-Jae
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.57-63
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    • 2006
  • We have examined the electrical and optical characteristics of the plasma display panel(PDP) produced by vacuum in-line sealing technology. We found that the luminous efficiency was decreased as the base vacuum level was increased. For the base vacuum level of $1\times10^{-3}$ Torr, the firing voltage was 235V at the discharge gas pressure of 400 Torr and the luminous efficiency was 0.8 lm/W at 180V sustaining pulse. However, for the base vacuum level of $1\times10^{-6}$ Torr, the firing voltage was reduced to 215V and the luminous efficiency was improved to 2.5lm/w. Finally, we demonstrated successfully the operation of tip-less PDP fabricated using vacuum in-line sealing method.

Electrochemical Performance of Activated Carbon Electrode Materials with Various Post Treatments for EDLC (활성탄의 후 처리에 의한 EDLC 전극재의 전기화학 성능 개선)

  • Lee, Eunji;Kwon, Soon Hyung;Choi, Pooreum;Jung, Ji Chul;Kim, Myung-Soo
    • Korean Journal of Materials Research
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    • v.24 no.6
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    • pp.285-292
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    • 2014
  • Commercial activated-carbon used as the electrode material of an electric double-layer capacitor (EDLC) was posttreated with various acids and alkalis to increase its capacitance. The carbon samples prepared were then heat-treated in order to control the amount of acidic functional groups formed by the acid treatments. Coin-type EDLC cells with two symmetric carbon electrodes were assembled using the prepared carbon materials and an organic electrolyte. The electrochemical performance of the EDLC was measured by galvanostatic charge-discharge, cyclic voltammetry, and electrochemical impedance spectroscopy. Among the various activated carbons, the carbon electrodes (CSsb800) prepared by the treatments of coconutshell-based carbon activated with NaOH and $H_3BO_5$, and then heat treated at $800^{\circ}C$ under a flow of nitrogen gas, showed relatively good electrochemical performance. Although the specific-surface-area of the carbon-electrode material ($1,096m^2/g$) was less than that of pristine activated-carbon ($1,122m^2/g$), the meso-pore volume increased after the combined chemical and heat treatments. The specific capacitance of the EDLC increased from 59.6 to 74.8 F/g (26%) after those post treatments. The equivalent series resistance of EDLC using CSsb800 as electrode was much lower than that of EDLC using pristine activated carbon. Therefore, CSsb800 exhibited superior electrochemical performance at high scan rates due to its low internal resistance.

Plasma-Surface-Treatment of Nylon 6 Fiber for the Improvement of Water-Repellency by Low Pressure RF Plasma Discharge Processing (나일론 6 섬유의 발수성 향상을 위한 RF 플라스마 표면처리)

  • Ji, Young-Yeon;Jeong, Tak;Kim, Sang-Sik
    • Polymer(Korea)
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    • v.31 no.1
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    • pp.31-36
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    • 2007
  • It has been reported that the surface properties of the plasma treated material were changed while maintaining its bulk properties. In this study, surface modification of nylon fiber by plasma treatment was tried to attain high water-repellency Nylon fiber was treated with RF plasma under a vacuum system using various parameters such as gas specious, processing time and processing power. Morphological changes by low pressure plasma treatment were observed using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Moreover, the mechanical and inherent properties were analyzed by tensile strength, differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA). The high water-repellency property of nylon fiber was evaluated by a water-drop standard test under various conditions in terms of aging effect. The results showed that the water-repellency of plasma-surface-treated nylon fiber was greatly improved compared to untreated nylon fiber.

Modeling of Two-dimensional Self-consistent RF Plasmas on Discharge Chamber Structures (전극 구조에 관한 2차원 RF 플라즈마의 모델링)

  • So, Soon-Youl;Lim, Jang-Seob;Kim, Chel-Woon
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.19 no.4
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    • pp.1-8
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    • 2005
  • Plasma researches using parallel-plate electrodes are widely used in semiconductor application such as etching and thin film deposition. Therefore, a quantitative understanding and control of plasma behavior are becoming increasingly necessary because their important applications and simulation techniques have been actively carried out in order to solve such problems above. In this paper, we developed a two-dimensional(2D) self-consistent fluid model, because 2D models can deal with real reactor geometries. The fluid model is based on particle continuity equations for taking account of an electrode system in a cylindrical geometry. An pure Ar gas was used at 500[mTorr] and radio-frequency (13.56(MHz)). Four models were simulated under the different electrode geometries which have chamber widths of 5.25, 6.0, 8.0, and 10.0[cm] and we compared their results with each other. Plasma uniformity and a do self-bias voltage were also discussed.

The development and evaluation of the RF excited slab-waveguide $CO_2$ laser (고주파 여기식 슬랩 도파관 $CO_2$ 레이저 제작 및 평가)

  • 김규식;최종운;우삼용;이영우
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.05a
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    • pp.424-428
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    • 2003
  • We have developed the RF discharge Excited slab Waveguide $CO_2$ laser and measured the output power. We make used of concave and concave mirror, concave and convex mirror that negative branch and positive branch unstable resonator, respectively. The resonator active dimension is 2$\times$40$\times$400 mm and ratio frequency is 123 MHz. The gas mixing ratio is $CO_2$: $N_2$ : He=1 : 1 : 3. The pressure in resonator is from 10 to 60 torr and RF input power increased from 100 to 900 W. so that We obtained laser maximum output power of negative branch and positive branch resonator 50.9 W and 70.8 W and efficiency is 6.5 % and 9.2 %, respectively.

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Development of an Ultra-Violet Lamp and a Ballast for Ship's Ballast Water Treatment (선박평형수 처리용 자외선 램프 및 안정기 개발)

  • Cheon, Sang-Gyu;Park, Dae-Won;Kil, Gyung-Suk
    • Journal of Advanced Marine Engineering and Technology
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    • v.35 no.5
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    • pp.675-681
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    • 2011
  • In this paper, we dealt with the design and fabrication of a medium pressure ultra-violet (UV) lamp and a magnetic ballast which are main components for ballast water treatment systems (BWTS). To acquire an optimal discharge condition of UV lamp, electrical and optical characteristics depending on the argon gas volume and the amount of mercury were experimentally analyzed. Rated voltage, current and power consumption of a prototype lamp were 490 [V], 8.6 [A] and 4.0 [kW], respectively. UV intensity of the lamp was 15 [%] higher than that of an equivalent lamp which is used in a BWTS. The magnetic ballast was designed in a UI core type through theoretical analysis and simulation. The open voltage and the rated power consumption of the ballast were 920 [V] and 8.5 [kVA] respectively. The disinfection efficacy which is carried out in a BWTS equipped with the UV lamp and magnetic ballast was over 99.99 [%], and this satisfy the IMO regulations.