• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.5 no.1
• /
• pp.83-86
• /
• 2004

A high temperature tolerant microelectronic-based carbon monioxde(CO) gas sensor has been developed. The gas sensing performance has been studied over a wide temperature range$(100-300^\circ{C)}$. The gas sensitivity of the sensor is high, its initial sensing behavior is very fast, and the sensor is reproducible. Pt-SiC and $Pt-SnO_2-SiC$ diodes are fabricated using standard semiconductor processes and their CO gas-sensing behaviors are analyzed as a function of CO gas concentration and temperature by I-V and $\Delta{I-t}$ methods under steady-state and transient conditions. The sensitivity of the device with $Pt-SnO_2$ catalytic gate is higher than that of the Pt gate. The experimental results indicate that $SnO_2$ layer improves the catalytic reaction of the Pt layer.

• Transactions on Electrical and Electronic Materials
• /
• v.11 no.2
• /
• pp.77-80
• /
• 2010

Indium tin oxide (ITO) films with a 5 nm thick Au interlayer were prepared on glass substrates. The effects of the Au interlayer on the gas sensitivity for detecting methanol vapors were investigated at room temperature. The conductivity of the film sensor increased upon exposure to methanol vapor and the sensitivity also increased proportionally with the methanol vapor concentration. In terms of the sensitivity measurements, the ITO film sensor with an Au interlayer shows a higher sensitivity than that of the conventional ITO film sensor. This approach is promising in gaining improvement in the performance of ITO gas sensors used for the detection of methanol vapor at room temperature.

• Journal of Mechanical Science and Technology
• /
• v.17 no.1
• /
• pp.139-145
• /
• 2003

Diode laser sensor is conducted to measure the gas temperature in the liquid-gas 2-phase counter flow flame. C$\_$10/H/ sub 22/ and city gas were used as liquid fuel and gas fuel, respectively. Two vibrational overtones of H$_2$O were selected and measurements were carried out in the spray flame region stabilized the above gaseous premixed flame. The path-averaged temperature measurement using diode laser absorption method succeeded in the liquid fuel combustion environment regardless of droplets of wide range diameter. The path-averaged temperature measured in the post flame of liquid-gas 2-phase counter flow flame showed qualitative reliable results. The successful demonstration of time series temperature measurement in the liquid-gas 2-phase counter flow flame gave us motivation of trying to establish the effective control system in practical combustion system. These results demonstrated the ability of real-time feedback from combustor inside using the non-intrusive measurement as well as the possibility of application to practical combustion system. Failure case due to influence of spray flame was also discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07b
• /
• pp.805-808
• /
• 2002

A carbon monoxide gas sensor utilizing Pt-SiC, Pt-SnO2-SiC diode structure was fabricated. Since the operating temperature for silicon devices in limited to 200oC, sensor which employ the silicon substrate can not at high temperature. In this study, CO gas sensor operating at high temperature which utilize SiC semiconductor as a substrate was developed. Since the SiC is the semiconductor with wide band gap. the sensor at above $700^{\circ}C$. Carbon monoxide-sensing behavior of Pt-SiC, Pt-SnO2-SiC diode is systematically compared and analyzed as a function of carbon monoxide concentration and temperature by I-V and ${\Delta}$I-t method under steady-state and transient conditions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07b
• /
• pp.814-817
• /
• 2003

As additive Pt of a little to $SnO_2$ that gas sensing property is superior oxide-semiconductor material to fabricate gas sensor that operation is possible at room temperature and fabricated ceramic gas sensing devices. And, the change amount and sintering temperature of addition material investigated gas sensitivity by change of operation temperature, humidity relativity, Long-term stability and hysteresis. And achieved SEM and XRD analysis for characteristics searching examination of devices.

• Proceedings of the KIEE Conference
• /
• 1997.11a
• /
• pp.324-326
• /
• 1997

Low power ZnO-Si gas sensor below 500 mW at operating temperature has been fabricated by using micromachining technique. I-V measurement shows the power consumption of 260 mW at $400^{\circ}C$ The sensitivity of the sensor was 45 percent at operating temperature of $350^{\circ}C$(230 mW) with 1,000 ppm CO gas atmosphere. The response and the recovery time found out to be 94 sec and 180 sec, respectively, when CO gas was used. In order to measure the exact temperature of the gas sensing layer, Pt/Cr bilayer-RTD was used in this experiment.

• Journal of Sensor Science and Technology
• /
• v.19 no.3
• /
• pp.197-201
• /
• 2010

This paper describes the fabrication and characteristics of a NO sensor using ZnO thin film integrated 3C-SiC micro heater based on polycrystalline 3C-SiC thin film of operation in harsh environments. The sensitivity, response time, and operating properties in high temperature and voltages of NO sensors based SiC MEMS are measured and analyzed. The sensitivity of device with pure ZnO thin film at the heater operating power of 13.5 mW ($300^{\circ}C$) is 0.875 in NO gas concentration of 0.046 ppm. In the case of Pt doping, the sensitivity of at power consumption of 5.9 mW ($250^{\circ}C$) was 1.92 at same gas flow rate. The ZnO with doped Pt was showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film. The NO gas sensor integrated SiC micro heater is more strength than others in high voltage and temperature environments.

• Journal of the Institute of Electronics Engineers of Korea TE
• /
• v.39 no.2
• /
• pp.90-94
• /
• 2002

This paper is related to remote meter-reading using magnetic sensor. Scan system which is developed recently has week point of temperature, humidity, dust, oscillation To solve these problems, this study used magnetic action to measure the consumption of gas. Gas consumption was detected by interaction of a permanent magnet and hall element. Permanent magnet was pasted on rolling change-gear in normal gas meter and hall sensor was pasted on the external wall of normal gas meter. This experiment proved high accuracy and wasn't influenced by temperature, humidity, oscillation and dust

• 한국신재생에너지학회:학술대회논문집
• /
• 2010.06a
• /
• pp.51.3-51.3
• /
• 2010

Due to the recent public awareness of global warming and sustainable economic growth, there has been a growing interest in alternative clean energy sources. Hydrogen is considered as a clean fuel for the next generation. One of the technical challenges related to the use of hydrogen is safe monitoring of the hydrogen leak during separation, purification and transportation. For detecting various gases, chemiresistor-type gas sensors have been widely studied and used due to their well-established detection scheme and low cost. However, it is known that many of them have the limited sensitivity and slow response time, when used at low temperature conditions. In our work, a sensor based on Schottky barriers at the electrode/sensing material interface showed promising results that can be utilized for developing fast and highly sensitive gas sensors. Our hydrogen sensor was designed and fabricated based on indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanoparticles with platinum (Pt) nanoclusters in combination with interdigitated electrodes. The sensor showed the sensitivity as high as $10^7%$ (Rair/Rgas) and the detection limit as low as 30 ppm. The sensor characteristics could be obtained via optimized materials synthesis route and sensor electrode design. Not only the contribution of electrical resistance from the film itself but also the interfacial effect was identified as an important factor that contribute significantly to the overall sensor characteristics. This promises the applicability of the developed sensor for monitoring hydrogen leak at room temperature.

• Journal of Institute of Control, Robotics and Systems
• /
• v.12 no.6
• /
• pp.539-546
• /
• 2006

The Air Quality Sensor(AQS), located near the fresh air inlet, serves to reduce the amount of pollution entering the vehicle cabin through the HVAC(heating, ventilating, and air conditioning) system by sending a signal to close the fresh air inlet door/ventilation flap when the vehicle enters a high pollution area. The sensor module which includes two independent sensing elements for responding to diesel and gasoline exhaust gases, and temperature sensor and humidity sensor was designed for intelligent AQS in automobile. With this sensor module, AVR microcontroller was designed with back propagation neural network to a powerful gas/vapor pattern recognition when the motor vehicles pass a pollution area. Momentum back propagation algorithm was used in this study instead of normal backpropagation to reduce the teaming time of neural network. The signal from neural network was modified to control the inlet of automobile and display the result or alarm the situation in this study. One chip microcontroller, ATmega 128L(ATmega Ltd., USA) was used for the control and display. And our developed system can intelligently reduce the malfunction of AQS from the dampness of air or dense fog with the backpropagation neural network and the input sensor module with four sensing elements such as reducing gas sensing element, oxidizing gas sensing element, temperature sensing element and humidity sensing element.