• ETRI Journal
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• v.30 no.4
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• pp.516-525
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• 2008

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at $200^{\circ}C$ and showed a good response to 100 ppb $NO_2$ gas.

• Bulletin of the Korean Chemical Society
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• v.33 no.6
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• pp.1851-1855
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• 2012

The $NO_2$ gas sensing properties of multiple-networked, Pt-loaded $TeO_2$ nanorod sensors were examined. Scanning electron microscopy revealed nanowires with diameters of 50-100 nm and lengths of a few micrometers. Transmission electron microscopy and X-ray diffraction showed that the nanrods were tetragonal-structured, single crystal $TeO_2$. The Pt-loaded $TeO_2$ nanorod sensors exhibited sensitivities of 11.00, 10.26, 11.23 and 11.97% at $NO_2$ concentrations of 10, 50, 100 and 200 ppm, respectively, at $300^{\circ}C$. These sensitivities were more than 10 times higher than those of bare-$TeO_2$ nanorod sensors. The response times of the sensors were 310, 260, 270 and 230 sec at $NO_2$ concentrations of 10, 50, 100 and 200 ppm, respectively. The recovery times of the Pt-loaded $TeO_2$ nanorods were 390, 330, 335, and 330 sec at $NO_2$ concentrations of 10, 50, 100 and 200 ppm, respectively. The origin of the enhanced sensing properties of the $TeO_2$ nanorods by Pt loading is discussed.

• Korean Journal of Materials Research
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• v.21 no.4
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• pp.232-235
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• 2011

ZnO nanorods for gas sensors were prepared by a hydrothermal method. The ZnO gas sensors were fabricated on alumina substrates by a screen printing method. The gas-sensing properties of the ZnO nanorods were investigated for $CH_4$ gas. The effects of growth time on the structural and morphological properties of the ZnO nanorods were investigated by X-ray diffraction and scanning electron microscope. The XRD patterns of the nanocrystallized ZnO nanorods showed a wurtzite structure with the (002) predominant orientation. The diameter and length of the ZnO nanorods increased in proportion to the growth time. The sensitivity of the ZnO sensors to 5 ppm $CH_4$ gas was investigated for various growth times. The ZnO sensors exhibited good sensitivity and rapid response-recovery characteristics to $CH_4$ gas, and both traits were dependent on the growth time. The highest sensitivity of the ZnO sensors to $CH_4$ gas was observed with the growth time of 7 h. The response and recovery times were 13 s and 6 s, respectively.

• Journal of the Korean Society of Safety
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• v.5 no.2
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• pp.32-39
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• 1990

The ${\gamma}$-Fe$_2$O$_3$ compounds were oxidized in the furance after gas detecting sensor made molding as the Fe$_3$O$_4$ the synthesized Fe$_3$O$_4$, by ferrous sulfate and sodium hydroxide. Their sensities on carbon monoxide, ethyl alcohol and L. P. G. were measured at various temperatures, respectively. And then their electrical resistivities, thermal properties (D.T.A. ＆ T.G.A.), were examined about their having an effet on the gas-sensing in company with the effect of pure ${\gamma}$-Fe$_2$O$_3$ and the detecting sensor ${\gamma}$-Fe$_2$O$_3$, which reacts with $K_2$CO$_3$ in the hydrothermal coundition, and the electrical conductive mechanism was reflected simultaneously. It was observed that the electrical conductivities and response ratios showed highest value at the endothermic temperature part, 300~35$0^{\circ}C$ of D.T.A.―curve. Consequently, the response ratios and response times of the hydrothermal detecting sensor were higher than that of pure detecting sensor, the specific surface areas were the highest at the endothermic range of D.T.A.-curve. These response ratios of detecting sensor for $K_2$CO$_3$, process at hydrothermal condition on carbon monoxide appeared higher than that on ethyl alcohol and in case of L.P.G. last.

• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.207-210
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• 2014

$TiO_2$ oxide semiconductor is being widely studied in various applications such as photocatalyst and photosensor. Pd/$TiO_2$ gas sensor is mainly used to detect $H_2$, CO and ethanol. This study focus on increasing hydrogen detection ability of Pd/$TiO_2$ in room temperature through Al-doping. Pd/$TiO_2$ was fabricated by the hydrothermal method. Contacting to Aluminum (Al) foil led to Al doping effect in Pd/$TiO_2$ by thermal diffusion and enhanced hydrogen sensing response. $TiO_2$ nanoparticles were sized at ~30 nm of diameter from scanning electron microscope (SEM) and maintained anatase crystal structure after Al doping from X-ray diffraction analysis. Presence of Al in $TiO_2$ was confirmed by X-ray photoelectron spectroscopy at 73 eV. SEM-energy dispersive spectroscopy measurement also confirmed 2 wt% Al in Pd/$TiO_2$ bulk. The gas sensing test was performed with $O_2$, $N_2$ and $H_2$ gas ambient. Pd/Al-doped $TiO_2$ did not response $O_2$ and $N_2$ gas in vacuum except $H_2$. Finally, the normalized resistance ratio ($R_{H2on}/R_{H2off}$) of Pd/Al-doped $TiO_2$ increases about 80% compared to Pd/$TiO_2$.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.418-422
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• 2022

α-pinene is a natural volatile organic compound secreted by coniferous trees to protect themselves from attacks by insects, microorganisms, and viruses. Recently, studies have reported that α-pinene possesses pharmacological effects on various biological reactions such as anxiolytic, sleep-enhancing, anti-nociceptive, and inflammatory activity. Thus, forest bathing has recently received great attention as a novel therapy for treating severe diseases as well as psychological issues. However, appropriate places and timings for effective therapies are still veiled, because on-site monitoring of α-pinene gas in forests is barely possible. Although portable chemosensors could allow real-time analysis of α-pinene gas in forests, the α-pinene sensing properties of chemosensors have never been reported thus far. Herein, we report for the first time, the α-pinene sensing properties of an oxide semiconductor gas sensor based on rhombohedral In₂O₃ (h-In₂O₃) nanoparticles prepared by a microwave-assisted hydrothermal reaction. The h-In₂O₃ nanoparticle sensor showed a high response to α-pinene gas at ppm levels, even under humid conditions (for example, relative humidity of 50 %). The purpose of this research is to identify the potential of oxide semiconductor gas sensors for implementing portable devices that can detect α-pinene gas in forests in real-time.

• Proceedings of the KAIS Fall Conference
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• 2006.05a
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• pp.223-226
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• 2006

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_2$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_2$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

• Korean Journal of Metals and Materials
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• v.48 no.2
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• pp.169-174
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• 2010

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.7
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• pp.388-393
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• 2000

Hydrogen-sensing behaviors of Pd- and Pt-SiC Schottky diodes, fabricated on the same SiC substrate, have been systematically compared and analyzed as a function of hydrogen concentration and temperature by I-V and$\DeltaI-t$ methods under steady-state and transient conditions. The effects of hydrogen adsorption on the device parameters such as the barrier height are investigated. The significant differences in their hydrogen sensing characteristics have been examined in terms of sensitivity limit, linearity of response, response rate, and response time. For the investigated temperature range, Pd-SiC Schottky diode shows better performance for H2 detection than Pt-SiC Schottky diode under the same testing conditions. The physical and chemical mechanisms responsible for hydrogen detection are discussed. Analysis of the steady-state reaction kinetics using I-V method confirmed that the atomistic hydrogen process is responsible for the barrier height change in the diodes.

• Journal of Sensor Science and Technology
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• v.30 no.2
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• pp.94-98
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• 2021

In this study, pure and Co3O4/CoFe2O4-loaded Indium oxide (In2O3) nanofibers were synthesized by the electrospinning of an Indium/Polyvinylpyrrolidone precursor solution containing cobalt and iron bimetallic zeolitic imidazolate frameworks and subsequent heat treatment. The ethanol, toluene, p-xylene, benzene, carbon monodxide, and hydrogen gas sensing characteristics of the solution were measured at 250-400 ℃. 0.5 at%-Co3O4/CoFe2O4-loaded In2O3 nanofibers exhibited extreme response (resistance ratio - 1) to 5 ppm of ethanol (210.5) at 250 ℃ and excellent selectivity over the interfering gases. In contrast, pure In2O3 nanofibers exhibited relatively low responses to all the analyte gases and low selectivity above 250-400 ℃. The superior response and selectivity toward ethanol is explained by the catalytic roles of Co3O4 and CoFe2O4 in gas sensing reaction and the electronic sensitization induced by the formation of p (Co3O4/CoFe2O4)-n (In2O3) junctions.