Korean Journal of Metals and Materials (대한금속재료학회지)

The Korean Institute of Metals and Materials (대한금속재료학회)
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Formaldehyde Gas-Sensing Characteristics of SnO2-ZnO Materials

SnO2-ZnO를 이용한 가스 센서의 포름알데히드 가스 감지특성

  • Yoon, Jin Ho (Department of Materials Science and Engineering, The University of Seoul) ;
  • Lee, Hoi Jung (Department of Materials Science and Engineering, The University of Seoul) ;
  • Kim, Jung Sik (Department of Materials Science and Engineering, The University of Seoul)
  • 윤진호 (서울시립대학교 신소재공학과) ;
  • 이회중 (서울시립대학교 신소재공학과) ;
  • 김정식 (서울시립대학교 신소재공학과)
  • Received : 2009.09.15
  • Published : 2010.02.20
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Abstract

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

Keywords

Acknowledgement

Supported by : 지식경제부

References

  1. Andersson, K., J. V. Bakke, O. Bjorseth, C. G. Bornehag, G. Clausen, J. K. Hongslo, J. K. Kjellman, M. Kjaergaarrd, S. Levy, F. Molhave, L. S. Skerfving, and J. Su dell, Indoor Air 7, 78 (1997) https://doi.org/10.1111/j.1600-0668.1997.t01-2-00002.x
  2. S. O. Baek and R. A. Jenkins, Indoor Built Environ. 10, 200 (2001) https://doi.org/10.1177/1420326X0101000313
  3. C. D. Klaassen, Toxicology, 6th (2001)
  4. D. C. Lee and D. H You, J. Kor. Sensors Soc. 4, 22 (1995)
  5. C. J. Kim and M. S. Kwon, Electron. Mater. Lett. 6, 113 (2009) https://doi.org/10.3365/eml.2009.09.113
  6. P. J. Shaver, Appl. Phys. Lett. 11, 255 (1967) https://doi.org/10.1063/1.1755123
  7. T. Seiyama, Denki Kagaku 40, 244 (1972)
  8. Y. S. Shen and T. S. Zhang, Sens. Actuators B 12, 5 (1993) https://doi.org/10.1016/0925-4005(93)85003-S
  9. T. Hashemi, H. M. Al-Allak, J. Illingsworth, A. W. Brinkman, and J. Woods, J. Mater. Sci. Lett 9, 776 (1990) https://doi.org/10.1007/BF00720155
  10. J. H. Yu and G. M. Choi, Sens. Actuators B 72, 141 (2001) https://doi.org/10.1016/S0925-4005(00)00642-0
  11. H. K. Hong, B. H. Kim, Y. I. Cheon, and Y. K. Sung, Journal of IEEK 13, 372 (1990)
  12. S. G. Lee, S. D. Choi, and K. H. Kim, KIEEME 3, 224 (1990)