• 제목/요약/키워드: gas sensing

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Gas Sensing Properties of Pt Doped Fe2O3 Nanoparticles Fabricated by Sol-Gel Method (Sol-Gel 방법을 이용하여 제작된 Pt이 첨가된 Fe2O3 나노 입자의 가스 감지 특성)

  • Jang, Min-Hyung;Lim, Yooseong;Choi, Seung-Il;Park, Ji-In;Hwang, Namgyung;Yi, Moonsuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.5
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    • pp.288-293
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    • 2017
  • $Fe_2O_3$ is one of the most important metal oxides for gas sensing applications because of its low cost and high stability. It is well-known that the shape, size, and phase of $Fe_2O_3$ have a significant influence on its sensing properties. Many reports are available in the literature on the use of $Fe_2O_3$-based sensors for detecting gases, such as $NO_2$, $NH_3$, $H_2S$, $H_2$, and CO. In this paper, we investigated the gas-sensing performance of a Pt-doped ${\varepsilon}$-phase $Fe_2O_3$ gas sensor. Pt-doped $Fe_2O_3$ nanoparticles were synthesized by a Sol-Gel method. Platinum, known as a catalytic material, was used for improving gas-sensing performance in this research. The gas-response measurement at $300^{\circ}C$ showed that $Fe_2O_3$ gas sensors doped with 3%Pt are selective for $NO_2$ gas and exhibita maximum response of 21.23%. The gas-sensing properties proved that $Fe_2O_3$ could be used as a gas sensor for nitrogen dioxide.

NO2 Sensing Characteristics of Si MOSFET Gas Sensor Based on Thickness of WO3 Sensing Layer

  • Jeong, Yujeong;Hong, Seongbin;Jung, Gyuweon;Jang, Dongkyu;Shin, Wonjun;Park, Jinwoo;Han, Seung-Ik;Seo, Hyungtak;Lee, Jong-Ho
    • Journal of Sensor Science and Technology
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    • v.29 no.1
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    • pp.14-18
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    • 2020
  • This study investigates the nitrogen dioxide (NO2) sensing characteristics of an Si MOSFET gas sensor with a tungsten trioxide (WO3) sensing layer deposited using the sputtering method. The Si MOSFET gas sensor consists of a horizontal floating gate (FG) interdigitated with a control gate (CG). The WO3 sensing layer is deposited on the interdigitated CG-FG of a field effect transistor(FET)-type gas sensor platform. The sensing layer is deposited with different thicknesses of the film ranging from 100 nm to 1 ㎛ by changing the deposition times during the sputtering process. The sensing characteristics of the fabricated gas sensor are measured at different NO2 concentrations and operating temperatures. The response of the gas sensor increases as the NO2 concentration and operating temperature increase. However, the gas sensor has an optimal performance at 180℃ considering both response and recovery speed. The response of the gas sensor increases significantly from 24% to 138% as the thickness of the sensing layer increases from 100 nm to 1 ㎛. The sputtered WO3 film consists of a dense part and a porous part. As reported in previous work, the area of the porous part of the film increases as the thickness of the film increases. This increased porous part promotes the reaction of the sensing layer with the NO2 gas. Consequently, the response of the gas sensor increases as the thickness of the sputtered WO3 film increases.

Improvement in ammonia gas sensing behavior by polypyrrole/multi-walled carbon nanotubes composites

  • Jang, Woo-Kyung;Yun, Ju-Mi;Kim, Hyung-Il;Lee, Young-Seak
    • Carbon letters
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    • v.13 no.2
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    • pp.88-93
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    • 2012
  • Polypyrrole (PPy)/multi-walled carbon nanotubes (MWCNTs) composites were prepared by in situ polymerization of pyrrole on the surface of MWCNTs templates to improve the ammonia gas sensing properties. PPy morphologies, formed on the surface of MWCNTs, were investigated by field emission scanning electron microscopy. The thermal stabilities of the PPy/MWCNTs composites were improved as the content of MWCNTs increased due to the higher thermal stability of the MWCNTs. PPy/MWCNTs composites showed synergistic effects in improving the ammonia gas sensing properties, attributed to the combination of efficient electron transfer between PPy/MWCNTs composites and ammonia gas, and the reproducible electrical resistance variation on PPy during the gas sensing process.

The highly sensitive NO2 gas sensor using ZnO nanorods grown by the sol-gel method (졸-겔법으로 증착된 ZnO 나노막대를 이용한 고감도 이산화질소 가스 센서 제작 및 특성 연구)

  • Park, S.J.;Kwak, J.H.;Park, J.;Lee, H.Y.;Moon, S.E.;Park, K.H.;Kim, J.;Kim, G.T.
    • Journal of Sensor Science and Technology
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    • v.17 no.2
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    • pp.147-150
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    • 2008
  • Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

Excellent Carbon Monoxide Sensing Performance of Au-Decorated SnO2 Nanofibers

  • Kim, Jae-Hun;Zheng, Yifang;Mirzaei, Ali;Kim, Sang Sub
    • Korean Journal of Materials Research
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    • v.26 no.12
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    • pp.741-750
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    • 2016
  • Nanofibers(NFs), because of their high surface area and nanosized grains, have appropriate morphologies for use in chemiresistive-type sensors for gas detection applications. In this study, a highly sensitive and selective CO gas sensing material based on Au-decorated $SnO_2$ NFs was fabricated by electrospinning. $SnO_2$ NFs were synthesized by electrospinning and subsequently decorated with various amounts of Au nanoparticles(NPs) by sputtering; this was followed by thermal annealing. Different characterizations showed the successful formation of Au-decorated $SnO_2$ NFs. Gas sensing tests were performed on the fabricated sensors, which showed bell-shaped sensing behavior with respect to the amount of Au decoration. The best CO sensing performance, with a response of ~20 for 10 ppm CO, was obtained at an optimized amount of Au (2.6 at.%). The interplay between Au and $SnO_2$ in terms of the electronic and chemical sensitization by Au NPs is responsible for the great improvement in the CO sensing capability of pure $SnO_2$ NFs, suggesting that Au-decorated $SnO_2$ NFs can be a promising material for fabricating highly sensitive and selective chemiresistive-type CO gas sensors.

Elect of Catalytic Configuration on Sensing Properties of Nano Gas Sensor (나노 가스 감지 소자의 특성에 미치는 촉매 구조의 영향)

  • Hong, Sung-Jei;Isshiki Minoru;Han, Jeong-In
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.10
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    • pp.917-923
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    • 2005
  • In this paper, effect of catalytic configuration on the sensing properties of $SnO_2$ nanoparticle gas sensitive thick film was investigated. Two types of catalytic configuration, mono and binary, were made on the $SnO_2$ nanoparticle. In case of mono catalytic system, $3 wt\%$ Pd or Pt catalyst was doped onto the $SnO_2$ nanoparticle, respectively. In case of binary catalytic system, Pd and Pt was doped simultaneously with concentration ratio of 1:2 to 2:1 onto the $SnO_2$ nanoparticle. After doping, gas sensitive thick film was printed on alumina substrate and heat-treated at 450 to $600^{\circ}C$. Gas sensing properties was evaluated using 500 to 10,000 ppm $CH_4$ gas. As a result, gas sensitive thick film with binary catalytic system showed unstable phenomena that the gas sensitivity was changed according to aging time. In contrary, the mono catalytic system showed relatively stable phenomena despite of aging time. Especially, gas sensitive thick film doped with $3 wt\%$ Pt catalyst and heat-treated at $500^{\circ}C$ showed good sensing properties such as 0.57 of $R_{3500}/R_{1000}$ and very small variation within $3.5\%$ after aging for 5 hours, and response time was very short less than 20 seconds.

Enhancing Gas Response Characteristics of Mixed Metal Oxide Gas Sensors

  • Balamurugan, Chandran;Song, Sun-Ju;Kim, Ho-Sung
    • Journal of the Korean Ceramic Society
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    • v.55 no.1
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    • pp.1-20
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    • 2018
  • Semiconducting nanomaterials have attracted considerable interest in recent years due to their high sensitivity, selectivity, and fast response time. In addition, for portable applications, they have low power consumption, lightweight, simple in operation, a low maintenance cost. Furthermore, it is easy to manufacture microelectronic sensor structures with metallic oxide sensitive thin layers. The use of semiconducting metal oxides to develop highly sensitive chemiresistive sensing systems remains an important scientific challenge in the field of gas sensing. According to the sensing mechanisms of gas sensors, the overall sensor conductance is determined by surface reactions and the charge transfer processes between the adsorbed species and the sensing material. The primary goal of the present study is to explore the possibility of using semiconducting mixed metal oxide nanostructure as a potential sensor material for selective gases.

Improved Ethanol Gas Sensing Performance of α-Fe2O3 Nanoparticles by the Addition of NiO Nanoparticles (NiO의 첨가에 따른 α-Fe2O3 나노입자 센서의 에탄올 가스 검출 특성 향상)

  • Park, Sunghoon;Kang, Wooseung
    • Journal of the Korean institute of surface engineering
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    • v.49 no.1
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    • pp.69-74
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    • 2016
  • In order to investigate the effect of NiO on the ethanol gas sensing performance of ${\alpha}-Fe_2O_3$ nanoparticles, NiO and ${\alpha}-Fe_2O_3$ nanoparticles are synthesized by hydrothermal method. The sensor with ${\alpha}-Fe_2O_3$ and NiO nanoparticles mixed at an optimum ratio of 7:3 showed 3.8 times improved sensing performance for 200ppm ethanol gas at $200^{\circ}C$. The enhanced gas sensing performance can be considered to be caused by pn heterojunction at the grain boundaries of ${\alpha}-Fe_2O_3$ and NiO nanopartcles.

Highly sensitive gas sensor using hierarchically self-assembled thin films of graphene oxide and gold nanoparticles

  • Ly, Tan Nhiem;Park, Sangkwon
    • Journal of Industrial and Engineering Chemistry
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    • v.67
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    • pp.417-428
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    • 2018
  • In this study, we fabricated hierarchically self-assembled thin films composed of graphene oxide (GO) sheets and gold nanoparticles (Au NPs) using the Langmuir-Blodgett (LB) and Langmuir-Schaefer (LS) techniques and investigated their gas-sensing performance. First, a thermally oxidized silicon wafer ($Si/SiO_2$) was hydrophobized by depositing the LB films of cadmium arachidate. Thin films of ligand-capped Au NPs and GO sheets of the appropriate size were then sequentially transferred onto the hydrophobic silicon wafer using the LB and the LS techniques, respectively. Several different films were prepared by varying the ligand type, film composition, and surface pressure of the spread monolayer at the air/water interface. Their structures were observed by scanning electron microscopy (SEM) and atomic force microscopy (AFM), and their gas-sensing performance for $NH_3$ and $CO_2$ was assessed. The thin films of dodecanethiol-capped Au NPs and medium-sized GO sheets had a better hierarchical structure with higher uniformity and exhibited better gas-sensing performance.

A Space Charge Model for Semiconductor Gas Sensors (반도체 가스감지소자를 위한 공간전하 모델)

  • 이성필;이덕동;손병기
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.11
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    • pp.1631-1636
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    • 1989
  • A space charge model for semiconductor reduced gas sensors has been roposed and applied to gas sensing mechanism. SnO2-x and SnO2-x/Pt thin film were deposited by vacuum evaporating method. And Hall effect and gas sensitivity characteristics of these sensors were measured. From the space charge model and carrier concentration, the number of the adsorbed gas atom on the solid surface was calculated quantitatively. The gas sensing model was compared with CO gas sensitivities of the fabricated thin film gas sensors.

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