• Analytical Science and Technology
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• v.16 no.5
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• pp.368-374
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• 2003

Halogen gases such as $BCl_3$ and $CF_4$ are among the most problematic gases used in semiconductor process. They raise serious environmental and health problems due to their extreme toxicity. This study is to develop a method to effectively remove those gases during the process by using various types of inorganic gas adsorption agents such as zeolite A, modified AgA zeolite, ZnO, and $AgMnO_3$, which have not been attempted in the conventional methods. The removal efficiencies of the gases were both qualitatively and quantitatively measured by a FT-IR spectrophotometer. The whole device for the measurement has been designed and built in our lab. The removal efficiencies of the gases were compared between those used resins. The experimental result revealed that ZnO showed the best removal efficiency for BCl3 gas that had removed 0.094 g per 1 g of the resin used. For $CF_4$ gas, none of the solid resins was able to remove the gas effectively. However, liquid $CHCl_3$ showed some removal ability of the $CF_4$ gas.

• Journal of the Korean Vacuum Society
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• v.14 no.1
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• pp.1-6
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• 2005

Getters are invariably covered with thin layers of oxides even in air. For the getter to function properly it is necessary to activate them by heating in vacuum during which the oxide layer is removed exposing clean surface. The so-called activation temperature is an important parameter along with gas sorption capacity since it determines the maximum temperature of a device in which a getter can be installed. Nevertheless, no standard method to measure activation temperature has been documented yet. In this study, a relatively simple method to measure the activation temperature based on the ultimate pressure measurement was suggested. The activation temperature of TiZrV alloy measured by the method was between 100℃～200℃.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.139-145
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• 2005

In the study, in order to deposit TaN thin film using diffusion barrier and bottom electrode we made the Plasma Assisted ALD equipment and confirmed the electrical characteristic of TaN thin films deposited PAALD method, PAALD equipment depositing TaN thin film using PEMAT(pentakis(ethylmethlyamlno) tantalum) Precursor and $NH_3$ reaction gas is aware that TaN thin film deposited of high density and amorphous phase with XRD measurement The degree of diffusion and react ion taking place in Cu/TaN(deposited using 150 W PAALD)/$SiO_2$/Si systems with increasing annealing temperature was estimated from MOS capacitor property and the $SiO_2(600\;\AA)$/Si system surface analysis by C-V measurement and secondary ion material spectrometer(SIMS) after Cu/TaN/$SiO_2(400\;\AA)$ system etching. TaN thin film deposited PAALD method diffusion barrier have a good diffusion barrier property up to $500^{\circ}C$.

• Journal of the Semiconductor & Display Technology
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• v.4 no.2 s.11
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• pp.39-43
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• 2005

In the study, in order to deposit TaN thin film for diffusion barrier and bottom electrode we made the Plasma Assisted ALD equipment and confirmed the electrical characteristics of TaN thin films grown PAALD method. Plasma Assisted ALD equipment depositing TaN thin film using PEMAT(pentakis(ethylmethlyamino) tantalum) precursor and NH3 reaction gas is shown that TaN thin film deposited high density and amorphous phase with XRD measurement. The degree of diffusion and reaction taking place in Cu/TaN (deposited using 150W PAALD)/$SiO_{2}$/Si systems with increasing annealing temperature was estimated for MOS capacitor property and the $SiO_{2}$, (600${\AA}$)/Si system surface analysis by C-V measurement and secondary ion material spectrometer (SIMS) after Cu/TaN/$SiO_{2}$ (400 ${\AA}$) layer etching. TaN thin film deposited PAALD method diffusion barrier have a good diffusion barrier property up to 500$^{\circ}C$.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.1
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• pp.116-124
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• 2007

An optical method to measure the size and number density of soot aggregates in diesel exhaust has been proposed in this study. Two laser beams in co-axial alignment transmit a soot loaded exhaust gas flow, and the transmittance at each wavelength is detected by a photo diode simultaneously. The volume equivalent diameter and number density of soot aggregates in the optical path can be theoretically given by the transmittance values measured at two wavelengths. A test conducted by a single cylinder, 4 cycle, small and DI diesel engine shows that the temporal variations of the size and number density of soot aggregates in the diesel exhaust can be measured by the proposed method at a transient mode operation. It is found that the volume equivalent diameter varied temporally from 70 to 110 nm during the period that high soot concentration is observed. One can also conclude that the optical length longer than 1 m in the dynamic range regarding this method is preferable for measuring soot concentration at the level of $1\;mg/m^3$.

• Transactions of the Korean Society of Automotive Engineers
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• v.7 no.6
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• pp.1-7
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• 1999

In this study, the prediction method of coolant flow rates has been developed and applied to an engine and vehicle cooling system. The flow rate passing through each component of the system is very important parameter to evaluate the heat transfer process form the combustion gas to the coolant and the heat rejection process form the radiator /heater to the ambient air. However, the present study reveals that the measurement using the flowmeter fails to give practical flow rates due to its additive resistance. In contrast, the present method which uses the parallel and serial relationship of flow resistance proved to be a good tool to predict the real flow rates. It can be also used to design the cooling system in the incipient stage of engine/vehicle development . The procedure was coded to the computer program so as to use it flexibly and, in the future, to expand it into an independent design tool of the whole cooling system including the heat release and rejection.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.611-615
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• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. Above all, Electrodeless fluorescent lamp is the removal of internal electrodes and heating filaments that are a light-limiting factor of conventional fluorescent lamps. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. Therefore, the electrodeless fluorescent lamps is substantially higher than that of conventional fluorescent lamps and last up to 60,000 hours. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an argon discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

• Journal of the korean society of oceanography
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• v.38 no.4
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• pp.166-172
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• 2003

Multi­Sensor Core Logger (MSCL) is a useful system for logging the physical properties (compressional wave velocity, wet bulk density, fractional porosity, magnetic susceptibility and/or natural gamma radiation) of marine sediments through scanning of whole cores in a nondestructive fashion. But MSCL has a number of problems that can lead to spurious results depending on the various factors such as core slumping, gas expansion, mechanical stretching, and the thickness variation of core liner and sediment. For the verification of MSCL data, compressional wave velocity, wet bulk density, and porosity were measured on discrete samples by Hamilton Frame and Gravimetric method, respectively. Acoustic impedance was also calculated. Physical property data (velocity, wet bulk density, and impedance) logged by MSCL were slightly larger than those of discrete sample, and porosity is reverse. Average difference between MSCL and discrete sample at both sites is relatively small such as 22­24 m/s in velocity, $0.02­-0.08\;g/\textrm{cm}^3$ in wet bulk density, and 2.5­2.7% in porosity. The values also show systematic variation with sediment depth. A variety of factors are probably responsible for the differences including instrument error, various measurement method, sediment disturbance, and accuracy of calibration. Therefore, MSCL can be effectively used to collect physical property data with high resolution and quality, if the calibration is accurately completed.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.4
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• pp.157-164
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• 2003

$LaF_{3}$ thin films have been fabricated on Si (100) substrates under the highest possible vacuum condition by pulsed laser deposition (PLD) method. The temperature of the sbustrate varied from $20^{\circ}C$ to $800^{\circ}C$. The films deposited at the higher temperature indicated the sharper peaks in the X-ray diffraction measurement. A highly oriented film was successfully obtained at a substrate temperature of $800^{\circ}C$. The surface observation by the AFM revealed that the many hexagonal structures constructed the film. The XPS analysis revealed that the lacking of F in the film deposited at $600^{\circ}C$ were much more than that in film at $^20{\circ}C$. Adding the adequate amount of $CF_{4}$ gas in the growth chamber can compensate this lacking of F.

• Particle and aerosol research
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• v.10 no.4
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• pp.131-136
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• 2014

The importance of waste treatments is increasing because of the lack of resources and environmental problems resulted from economic growth policy. Especially, the pollutant dust which is one of the wastes should be treated considerately because it could cause secondary damages on the human health as well as environmental systems. Recently, massive amount of coal fly-ash is being produced in thermoelectric power plants. In this study, we compared two general methods used in estimating the amount of unburned carbon in fly-ashes to categorize the coal fly-ashes into several groups following their carbon contents. One is the "loss on ignition(KS L 5405) method" which estimates the change of mass after combustion, and it is generally used. Another one is measuring $CO_2$ gas content by burning solid carbon in the fly-ash, and it is called "$CO_2$ analysis method."