• 제목/요약/키워드: gas heater

검색결과 304건 처리시간 0.022초

전기가열방식 스크러버의 NF3 제거 효율 (The progress in NF3 destruction efficiencies of electrically heated scrubbers)

  • 문동민;이진복;이지연;김동현;이석현;이명규;김진석
    • 분석과학
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    • 제19권6호
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    • pp.535-543
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    • 2006
  • 현재 반도체 및 LCD(Liquid Crystal Display) 제조 공정에 널리 사용하는 $NF_3$는 국제적으로 대기중 배출량에 대한 규제를 실시 중인 온실가스 중의 하나다. 온실가스의 배출량 감축을 위하여 국내 대상 산업체들은 $NF_3$ 배출량의 감소에 지속적으로 노력을 해 오고 있다. 본 연구는 LCD를 제조하는 국내 3사에 설치된 $NF_3$ 처리용 전기가열방식 스크러버(scrubber)의 제거효율(DRE, Destruction and Removal Efficiency)과 process chamber에서의 $NF_3$ 사용 비율(use rate in process)을 측정하였다. 스크러버의 효율을 정확하게 측정하기 위하여, 비활성 기체인 He을 일정 유량으로 주입시켜주는 방법으로 시료를 채취하고, 정밀 가스질량분석기(Gas-MS)를 이용하여 시료 중 화학종들의 분압을 측정하였다. 세 회사에 설치되어 있는 스크러버의 효율을 측정한 결과, 2004년 이전에 설치한 스크러버의와 그 이후 개선한 스크러버의 DRE는 각각 52%와 95% 이상임을 확인하였다. 또한 Process chamber의 $NF_3$ 사용 효율은 1세대 및 2세대 공정라인에 설치한 RFSC(Radio Frequency Source Chamber)의 경우 75% 보다 낮지만, 3세대 이상 라인에 설치한 RPSC(Remote Plasma Source Chamber)의 경우는 95% 이상으로 측정이 되었다. 반도체 및 디스플레이 공정에 개선된 스크러버와 RPSC식 process chamber를 사용할 경우 $NF_3$ 배출량을 99.95% 이상 줄일 수 있을 것으로 예상된다. 따라서 $NF_3$에 대한 국내 3사의 온실가스 감축 목표가 성공적으로 이루어 질 것으로 예상된다.

강릉지역 초등학생들의 폐기능과 영향 요인 분석 (Pulmonary Function and Its Influence Factors of Elementary School Children in Gangneung)

  • 유승도;유시은;이민정;최욱희;김대선;이철호;박경화
    • 한국환경보건학회지
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    • 제34권1호
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    • pp.20-26
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    • 2008
  • The objective of the study which utilised population based data was to determine the respiratory condition of elementary school children in Gangneung. From October 9th to December 14th, 2006, Pulmonary Function Tests (PFT) including Forced Vital Capacity (FVC) and Forced Expiratoy Volume in I Second $(FEV_1)$ were conducted on the target group of children using a spirometer. The prevalence of asthmatic symptoms was 29.8% among boys and 39.6% among girls. By using logistic regression, we found that family history of allergic rhinitis (OR=3.90, CI=1.05-14.51), experience of allergic conjunctivitis (OR=4.67, CI=1.54-14.16) and atopic dermatitis (OR=2.86, CI=1.17-7.05) significantly increased the asthmatic symptoms. Also, a family history of asthma and food allergy were associated with asthmatic symptoms. In relation to housing and environmental risk factors, residences under the ground (OR=3.59, CI=1.35-9.51) and big-size dolls (OR=2.71, CI=0.86-8.53) significantly increased the prevalence of asthmatic symptoms. For PFT, above four families, exposure of passive smoking and pets significantly reduced FVC in both groups (p<0.05). In girls, a big-size doll was significantly associated with decreased lung function (FVC and $FEV_1$). In boys, using bed significantly reduced $FEV_1$. Also, the risk of asthmatic symptoms was found to increase when the house has been built for 5 years or more, the house is close to a road $({\leq}100m)$, a gas/Kerosene heater or carpet is utilized within the house. However, their differences were not significant. It is concluded that genetic factor such as a family history of respiratory disease, allergic symptoms and housing risk factor are related to asthmatic symptoms. These results were worth noting because the findings will help address risk factors related respiratory symptoms especially in relation to housing and environment.

지열 난방시스템을 이용한 분만돈사의 난방효과 분석 (Evaluation on Heating Effects of Geothermal Heat Pump System in Farrowing House)

  • 최희철;박재홍;송준익;나재천;김민지;방한태;강환구;박성복;채현석;서옥석;유영선;김태원
    • 한국축산시설환경학회지
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    • 제16권3호
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    • pp.205-215
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    • 2010
  • 지열히트펌프를 이용한 축사용 냉난방시스템을 개발하고 농장 적용성을 검토하기 위하여 330 $m^2$ 규모의 농장에 개발 시스템을 설치하여 돈사에서의 난방 이용효과를 분석하였으며, 그 결과는 다음과 같다. 1. 지열 난방시 부하량은 24,104 kcal이었으며 농장시험 지열이용 냉난방시스템의 제원은 히트펌프 용량은 10 USRT 였으며, 상부 덕트형 30,000 kcal 홴코일유니트를 사용하였으며 FCU의 풍량은 90 $m^3$/분 이었다. 2. 지열 난방 1주령시 외부 최고기온 $14.2^{\circ}C$, 최저 영하 $9.3^{\circ}C$일때 시험구는 평균 $21.5^{\circ}C$로서 대조구 $19.8^{\circ}C$에 비하여 높았다. 3. 지열 난방 시험돈사의 먼지 농도는 PM10 185.3, PM2.5 40, PM1.0 $23.4{\mu}g/m^3$으로 대조구 PM10 481.4, PM2.5 47, PM1.0 $28.2{\mu}g/m^3$에 비하여 낮았다.4. 지열 난방 시험돈사의 유해가스농도는 $CO_2$ 1,470, $NH_3$ 10.6, $H_2S$ 0.05 ppm으로서 대조구 $CO_2$ 2,025, $NH_3$ 23.3, $H_2S$ 0.69 ppm에 비하여 유의적으로 (p<0.05) 낮았다. 5. 지열난방시 복당 이유두수는 10.5두로 대조구 10.4두에 비하여 높았으며 이유시체 중도 6.93 kg으로 대조구 6.86 kg에 비하여 컸으며 특히 온도가 낮은 대조구에서 모돈사료 섭취량이 99.6 kg으로 시험구 88.2 kg 보다 유의적으로 (p<0.05) 많았다. 6. 지열 난방시 외부기온과 지하수 순환량에 있어서 외부기온이 낮을 경우 1일간 8.4-12.9톤으로 지하수 순환량이 많았다.

설비공학 분야의 최근 연구 동향: 2011년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research: A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2011)

  • 한화택;이대영;김서영;최종민;백용규;김수민
    • 설비공학논문집
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    • 제24권6호
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    • pp.521-537
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    • 2012
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2011. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) Research trends of thermal and fluid engineering have been surveyed as groups of fluid machinery and fluid flow, thermodynamic cycle, and new and renewable energy. Various topics were presented in the field of fluid machinery and fluid flow. Research issues mainly focused on the rankine cycle in the field of thermodynamic cycle. In the new and renewable energy area, researches were presented on geothermal energy, fuel cell, biogas, reformer, solar water heating system, and metane hydration. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer, nanofluids and industrial heat exchangers. Researches on heat transfer characteristics included heat transfer above liquid helium surface in a cryostat, methane hydrate formation, heat and mass transfer in a liquid desiccant dehumidifier, thermoelectric air-cooling system, heat transfer in multiple slot impinging jet, and heat transfer enhancement by protrusion-in-dimples. In the area of pool boiling and condensing heat transfer, researches on pool boiling of water in low-fin and turbo-B surfaces, pool boiling of R245a, convective boiling two-phase flow in trapezoidal microchannels, condensing of FC-72 on pin-finned surfaces, and natural circulation vertical evaporator were actively performed. In the area of nanofluids, thermal characteristics of heat pipes using water-based MWCNT nanofluids and the thermal conductivity and viscosity were measured. In the area of industrial heat exchangers, researches on fin-tube heat exchangers for waste gas heat recovery and Chevron type plate heat exchanger were implemented. (3) Refrigeration systems with alternative refrigerants such as $CO_2$, hydrocarbons, and mixed refrigerants were studied. Heating performance improvement of heat pump systems were tried applying supplementary components such as a refrigerant heater or a solar collector. The effects of frost growth were studied on the operation characteristic of refrigeration systems and the energy performance of various defrost methods were evaluated. The current situation of the domestic cold storage facilities was analyzed and the future demand was predicted. (4) In building mechanical system fields, a variety of studies were conducted to achieve effective consumption of heat and maximize efficiency of heat in buildings. Various researches were performed to maximize performance of mechanical devices and optimize the operation of HVAC systems. (5) In the fields of architectural environment and energy, diverse purposes of studies were conducted such as indoor environment, building energy, and renewable energy. In particular, renewable energy and building energy-related researches have mainly been studied as reflecting the global interests. In addition, various researches have been performed for reducing cooling load in a building using spot exhaust air, natural ventilation and energy efficiency systems.