• Title/Summary/Keyword: gas heater

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A Study on Thermal Performances of Micro Gas Sensor with Micro Hotplate (마이크로 핫플레이트를 갖는 마이크로 가스센서의 열적성능에 관한 연구)

  • Joo, Young-Cheol;Im, Jun-Hyoung;Lee, Joon-Hun;Kim, C.K.
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.5
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    • pp.278-285
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    • 2006
  • A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

Corrosion Monitoring for Protected Systems using Thin-Film Electrical Resistance (TFER) Sensor

  • Lee, Seong-Min;Li, SeonYeob;Jung, Sung-Won;Kim, YoungGeun;Song, HongSeok;Won, Deok-Soo
    • Corrosion Science and Technology
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    • v.5 no.3
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    • pp.112-116
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    • 2006
  • This study has been conducted to monitor the corrosion rate of cathodically protected structure and corrosion inhibited system using multi-line thin-film electrical resistance (TFER) sensor in various environments. The field test data of TFER sensor for the corrosion monitoring of cathodically protected underground pipeline in soil environments and of corrosion inhibited gas heaters were also presented. The sensor was found to be a powerful method to commit the sensitive pick-up of small corrosion rate which can be observed in the cathodically protected and corrosion inhibited systems.

Effect of Process Parameters of UV Enhanced Gas Phase Cleaning on the Removal of PMMA (Polymethylmethacrylate) from a Si Substrate

  • Kwon, Sung Ku;Kim, Do Hyun
    • Transactions on Electrical and Electronic Materials
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    • v.17 no.4
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    • pp.204-207
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    • 2016
  • Experimental study of UV-irradiated O2/H2 gas phase cleaning for PMMA (Polymethylmethacrylate) removal is carried out in a load-locked reactor equipped with a UV lamp and PBN heater. UV enhanced O2/H2 gas phase cleaning removes polymethylmethacrylate (PMMA) better at lower process pressure with higher content of H2. O2 gas compete for UV (184.9 nm) absorption with PMMA producing O3, O(1D) and lower dissociation of PMMA. In our experimental conditions, etching reaction of PMMA at the substrate temperature between 75℃ and 125℃ had activation energy of about 5.86 kcal/mol indicating etching was controlled by surface reaction. Above the 180℃, PMMA removal was governed by a supply of reaction gas rather than by substrate temperature.

Design and Fabrication of MOSFET Type Hydrogen Gas Sensor Using MEMS Process (MEMS 공정기술을 적용한 MOSFET형 수소센서의 설계, 제작에 관한 연구)

  • Kim, Bum Joon;Kim, Jung Sik
    • Korean Journal of Metals and Materials
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    • v.49 no.4
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    • pp.304-312
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    • 2011
  • In this study, MOSFET type micro hydrogen gas sensors with platinum catalytic metal gates were designed, fabricated, and their electrical characteristics were analyzed. The devised MOSFET Hydrogen Sensors, called MHS-1 and -2, were designed with a platinum gate for hydrogen gas adsorption, and an additional sensing part for higher gas sensitivity and with a micro heater for operation temperature control. In the electrical characterization of the fabricated Pt-gate MOSFET (MHS-1), the saturated drain current was 3.07 mA at 3.0 V of gate voltage, which value in calculation was most similar to measurement data. The amount of threshold voltage shift and saturated drain current increase to variation of hydrogen gas concentration were calculated and the hydrogen gas sensing properties were anticipated and analyzed.

Development of SPM Dynamic Analysis Software (SPM의 동적해석 S/W 개발)

  • 이문성;김진석;조철희;홍성근;정광식
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2000.10a
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    • pp.84-89
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    • 2000
  • Thermal simulation of typical stack-type and newly proposed planar-type micro-gas sensors were studied by FEM method. The thermal analyses for the proposed planar structure including temperatur distribution over the sensing layer and power consumption of the heater were carried using finite element method by computer simulation and well compared with those of typical stack-type micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of a actual device to investigate the acceptability of the computer simulation.

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A Study on the Gas Heater Control to Obtain Stable Downstream Gas Temperature (가스히터 후단 공급가스온도 안정제어에 관한 연구)

  • 윤영석;한정옥;이중성;유현석
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1998.10a
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    • pp.96-102
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    • 1998
  • 천연가스 공급설비 중 하나인 가스히터의 온도제어 특성을 파악하고 온도제어 성능을 개선하기 위해 모의실험장치를 구성하여 가스히터에 적합한 시스템 인식 및 제어기 조율관계식을 결정하였다. 또한 모의실험결과를 가스히터에 적용하여 전달함수 및 제어값을 결정하였으며 운전결과 양호한 응답특성을 얻었다. 경제성 분석을 통해 비례운전 방법이 단속운전 방법보다 약 15%의 연료절감 효과가 있음을 확인하였다.

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Numerical Investigation on the Urea Melting Characteristics with Coolant and Electric Heaters (냉각수 및 전기 가열 방식에 따른 요소수 해동 특성에 관한 수치해석 연구)

  • Lee, Seung Yeop;Kim, Man Young
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.1
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    • pp.1-7
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    • 2016
  • A Urea-SCR(Selective Catalytic Reactor) system, which converts nitrogen oxides into nitrogen and water in the presence of a reducing agent, creates a major exhaust gas aftertreatment system for NOx reduction among other compounds. With regard to vehicle applications, a urea solution was chosen based on its eutectic composition of a 32.5wt% urea-water solution. An important advantage of this eutectic composition is that its melting point of $-11.7^{\circ}C$ is sufficiently low to avoid solidification in cold environments. However, the storage tanks must be heated separately in case of low ambient temperature levels to ensure a sufficient amount of liquid is available during scheduled start ups. In this study, therefore, a numerical investigation of three-dimensional unsteady heating problems analyzed to understand the melting processes and heat transfer characteristics including liquid volume fraction, temperature distributions, and temperature profiles. The investigations were performed using Fluent 6.3 commercial software that modeled coolant and electric heater models based on a urea solution. It is shown that the melting performance with the electric heater is higher than a coolant heater and is more efficient.

Heat Transfer and Pressure Drop of $CO_2$ Gas Cooler in a Helically Coiled Tube (헬리컬코일형 $CO_2$ 가스쿨러의 열전달과 압력강하)

  • Kyoung, Nam-Soo;Yu, Tae-Guen;Son, Chan-Hyo;Oh, Hoo-Kyu
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2005.11a
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    • pp.246-247
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    • 2005
  • The paper presents the heat transfer characteristics during cooling process of carbon dioxide($CO_2$) in a helically coiled tube. The main components of the apparatus consist of a receiver, a variable speed pump, a mass flowmeter, a pre-heater, a gas cooler(test section) and an isothermal tank. The test section with the inner diameter 4.55 [mm] is a tube in tube type heat exchanger with refrigerant flowing in the inner tube and water flowing in the annulus. The main results were summarized as follows : The heat transfer coefficient increases with respect to the decrease of the gas cooler pressure in a supercritical region and the increase of the refrigerant mass flux. The pressure drop decreases in increases of the gas cooler pressure and increases with respect to increases the refrigerant mass flux.

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Fabrication of low power NO micro gas senor by using CMOS compatible process (CMOS공정 기반의 저전력 NO 마이크로가스센서의 제작)

  • Shin, Han-Jae;Song, Kap-Duk;Lee, Hong-Jin;Hong, Young-Ho;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
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    • v.17 no.1
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    • pp.35-40
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    • 2008
  • Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.