• Journal of the Korean Vacuum Society
• /
• v.17 no.4
• /
• pp.262-269
• /
• 2008

The residual gas analyzer (RGA) is employed for the process control of a vacuum system by measuring residual gases in it. This review paper introduces operating principles of the RGA and problems that can be encountered during use, together with their possible solutions.

• Journal of Industrial Technology
• /
• v.21 no.B
• /
• pp.149-153
• /
• 2001

A study on the particle growth in $TEOS/O_2$ plasma was performed, and particle size and its distribution was measured by the electrical aerosol analyzer (EAA), light scattering particle size analyzer and the particle size was also determined by SEM. The effects of process variables such as total gas flow rate, reactor pressure, supplied power and initial reactant concentration on the particle growth were investigated. From the EAA results, the particle size distribution is divided into three groups of the cluster size and the small and large size particles. The particle size distribution measured by the light scattering particle size analyzer becomes bimodal, because the cluster size particles smaller than 20 nm in diameter cannot be detected by the light scattering particle size analyzer. The size of particles measured by the light scattering particle size analyzer is in good agreements with those by the SEM. Also we could understand that the particle formation is very sensitive to the changes of reactor pressure and reactant concentration. As the total gas flow rate increases, the particle size decreases because of the shorter residence time. As the reactor pressure, or the reactant concentration increases, the particle concentration increases and the particles grow more quickly by the faster coagulation between particles.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2006.05a
• /
• pp.1032-1036
• /
• 2006

In this study, we implement the potable blood gas analyzer measuring pH, $pCO_2\;and\;pO_2$ of the arterial blood. The implemented system by this study is divided into hardware and software part and also the hardware portion is parted by mechanism and electronic circuit mit. The system program is composed of operating, washing, correcting and measuring program. And to correct the system, two-point calibration method is used, one-point calibration method is also added for more accuracy, and system program is coded. For verifying the implemented system, We examine to response property of each electrode. And evaluate accuracy of the system using standard reagent and was construed as statistical.

• Journal of the Korean Vacuum Society
• /
• v.16 no.2
• /
• pp.91-98
• /
• 2007

The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.

• Journal of the Korean Society of Combustion
• /
• v.15 no.4
• /
• pp.43-52
• /
• 2010

A non-intrusive measurement, Planar Laser Induced Fluorescence was employed to visualize and measure the fuel distribution of the non-reacting field at the burner exit of gas turbine combustor. Measurement techniques, image processing method and quantification procedure were presented. Also, concentration measurement with gas analyzer was carried out to verify the propriety of PLIF result. The PLIF result coincides well with gas analyzer measurement result. PLIF test result for several other conditions are mentioned as well.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.68 no.1
• /
• pp.102-107
• /
• 2019

This paper proposes a method to improve the mass spectral detection performance of the residual gas analyzer. By improving the mode estimation method for setting the threshold value and improving the additive noise elimination method, it is possible to detect mass spectrums having low peak values of the threshold level difficult to distinguish from noise. Ion signal blocks for each mass index with noise removed by the improved method are effective for eliminating invalid ion signals based on the linear and quadratic fittings. The mass spectrum can be obtained from the quadratic fitted curves for the reconstructed ion signal block using only the valid ion signals. In addition, the resolution of the mass spectrum can be improved by correcting the error caused by the shift of the spectral peak position. To verify the performance of the proposed method, computer simulations were performed using real ion signals obtained from the residual gas analysis system under development. The simulation results show that the proposed method is valid.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.18 no.2_spc
• /
• pp.327-336
• /
• 2020

The high-flux advanced neutron application reactor (HANARO) is a research reactor with thermal power of 30 MW applied in various research and development using neutrons generated from uranium fission chain reaction. A degasifier tank is installed in the ancillary facility of HANARO. This facility generates gas pollutants produced owing to internal environmental factors. The degasifier tank is designed to maintain the gas contaminants below acceptable levels and is monitored using an analyzer in the gas sampling panel. If condensate water is generated and flows into the analyzer of the gas sampling panel, corrosion occurs inside the analyzer's measurement chamber, which causes failure. Condensate water is generated because of the temperature difference between the degasifier tank and analyzer when the gas flows into the analyzer. A heating system is installed between the degasifier tank and gas sampling panel to suppress condensate water generation and effectively remove the condensate water inside the system. In this study, we investigated the efficiency of the heating system. In addition, the variations in the pipe temperature and the amount of average condensate water were modeled using a wall condensation model based on the changes in the fluid inlet temperature, outside air temperature, and heating cable-setting temperature.

• Journal of the Korean Wood Science and Technology
• /
• v.35 no.6
• /
• pp.65-72
• /
• 2007

The VOC (volatile organic compound) analyzer is devised to measure the four main aromatic hydrocarbon gases: toluene, ethylbenzene, xylene and styfene. It is not affected by ambient temperature and humidity. In addition, standby and measuring time of VOC Analyzer is a short as below 30 min and 8 min, respectively. Since the semiconductor gas sensor is supersensitive to gas components, it is not necessary to use a conventional gas concentrator or other complicated equipment. In this study, VOC emission behavior from 4 types paints (lacquer, urethane vanish, water-base paint, enamel paint) for wood-based panel was investigated using VOC Analyzer. After a specimen was spreaded on aluminum foil ($6.32{\times}6.32cm$) in $3{\ell}$ polyester bag, after 24 hours we could measure maximum VOC emission level that is a stabilized VOC value. Xylene of VOCs was high emitted from lacquer, urethane vanish and water-based paint, and TVOC (Toluene + Ethylbenzene + Xylene + Styrene) of lacquer was the highest emission concentration than another.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.50-50
• /
• 2000

당사는 1970년 제우스 콤 상사로부터 출발하여 1988년 12우러 주식회사 제우스로 법인 전환한 후 현재 한국반도체 산업협회 및 회원으로 등록 활동하고 있다. 이번 발표에서는 회사에 대한 소개와 함께 취급품목을 설명하고자 한다. 취급품목은 Ion beam sources(CSC), E-beam evaporator & E-beam source(Temescal), Residual Gas Analyzer(SPECTRA), Cryopump & Waterpump(CTI-Cryogenics), Thickness Monitor & Controller, Electrical Feedthrough, RTP system, Thin Film Analyzer, PECVD, RIE 등이다.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.27 no.11
• /
• pp.1604-1611
• /
• 2003

The experimental investigation of a coal splitter used in the 500㎿(e) boilers of fossil power plant is carried out to validate the design criteria. To predict air flow and the amount of particles at the exit, velocity and the weight of particles are measured on test planes using the coal splitter model with two-dimensional phase doppler particle analyzer and the glass fiber filter. It is found that the position of guide plate influences significantly both flow rates of gas and particle at the exit. Gas flow rate was a linear function of the guide plate, whereas particle flow rate was a exponential function of it.