• 한국재료학회지
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• 제19권8호
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• pp.437-442
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• 2009

This paper describes an improved strategy for controlling the adhesion force using both the antiadhesion and adhesion layers for a successful large-area transfer process. An MPTMS (3-mercaptopropyltrimethoxysilane) monolayer as an adhesion layer for Au/Pd thin films was deposited on Si substrates by vapor self assembly monolayer (VSAM) method. Contact angle, surface energy, film thickness, friction force, and roughness were considered for finding the optimized conditions. The sputtered Au/Pd ($\sim$17 nm) layer on the PDMS stamp without the anti-adhesion layer showed poor transfer results due to the high adhesion between sputtered Au/Pd and PDMS. In order to reduce the adhesion between Au/Pd and PDMS, an anti-adhesion monolayer was coated on the PDMS stamp using FOTS (perfluorooctyltrichlorosilane) after $O_2$ plasma treatment. The transfer process with the anti-adhesion layer gave good transfer results over a large area (20 mm $\times$ 20 mm) without pattern loss or distortion. To investigate the applied pressure effect, the PDMS stamp was sandwiched after 90$^{\circ}$ rotation on the MPTMS-coated patterned Si substrate with 1-${\mu}m$ depth. The sputtered Au/Pd was transferred onto the contact area, making square metal patterns on the top of the patterned Si structures. Applying low pressure helped to remove voids and to make conformal contact; however, high pressure yielded irregular transfer results due to PDMS stamp deformation. One of key parameters to success of this transfer process is the controllability of the adhesion force between the stamp and the target substrate. This technique offers high reliability during the transfer process, which suggests a potential building method for future functional structures.

• 한국추진공학회지
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• 제17권5호
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• pp.113-120
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• 2013

마모 마찰기구로 널리 사용되는 그라파이트에 대하여, 고온가스 조절 밸브 내에서 가스 유입 방지용 씰링 그라파이트 소재(HK-6)의 고온 마모 거동에 대하여 연구하였다. 구동축과 라이너 사이에 위치하여 지속적인 마모의 발생을 모사하기 위해 왕복동 마모 시험을 수행하였다. 마모 거동 변화의 영향 인자로 접촉 하중, 미끄럼 속도, 온도를 설정하고 민감도를 확인하였다. 마모 발생이 가장 적고 씰링 그라파이트 소재(HK-6)의 효율이 증대되는 최적조건에 대해 논의하였다.

• 한국재료학회지
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• 제24권1호
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• pp.60-65
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• 2014

Fe-based amorphous coatings were fabricated on a soda-lime glass substrate by the vacuum kinetic spray method. The effect of the gas flow rate, which determines particle velocity, on the deposition behavior of the particle and microstructure of the resultant films was investigated. The as-fabricated microstructure of the film was studied by field emission scanning electron microscopy (FE-SEM) and high resolution transmission electron microscopy (HR-TEM). Although the activation energy for transformation from the amorphous phase to crystalline phase was lowered by severe plastic deformation and particle fracturing under a high strain rate, the crystalline phases could not be found in the coating layer. Incompletely fractured and small fragments 100~300 nm in size, which are smaller than initial feedstock material, were found on the coating surface and inside of the coating. Also, some pores and voids occurred between particle-particle interfaces. In the case of brittle Fe-based amorphous alloy, particles fail in fragmentation fracture mode through initiation and propagation of the numerous small cracks rather than shear fracture mode under compressive stress. It could be deduced that amorphous alloy underwent particle fracturing in a vacuum kinetic spray process. Also, it is considered that surface energy caused by the formation of new surfaces and friction energy contributed to the bonding of fragments.

• Tribology and Lubricants
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• 제35권5호
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• 한국표면공학회지
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• 제54권5호
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• pp.230-237
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• 2021

In this study, the influence of silicon contents on the microstructure, mechanical and tribological properties of Ti-Al-Si-N coatings were systematically investigated for application of cutting tools. The composition of the Ti-Al-Si-N coatings were controlled by different combinations of TiAl₂ and Ti₄Si composite target powers using an arc ion plating technique in a reactive gas mixture of high purity Ar and N₂ during depositions. Ti-Al-Si-N films were nanocomposite consisting of nanosized (Ti,Al,Si)N crystallites embedded in an amorphous Si₃N₄/SiO₂ matrix. The instrumental analyses revealed that the synthesized Ti-Al-Si-N film with Si content of 5.63 at.% was a nanocomposites consisting of nano-sized crystallites (5-7 nm in dia.) and a three dimensional thin layer of amorphous Si₃N₄ phase. The hardness of the Ti-Al-Si-N coatings also exhibited the maximum hardness value of about 47 GPa at a silicon content of ~5.63 at.% due to the microstructural change to a nanocomposite as well as the solid-solution hardening. The coating has a low friction coefficient of 0.55 at room temperature against an Inconel alloy ball. These excellent mechanical and tribological properties of the Ti-Al-Si-N coatings could help to improve the performance of machining and cutting tool applications.

• Tribology and Lubricants
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• 제39권1호
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• pp.28-34
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• 2023

Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

• Advances in nano research
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• 제16권4호
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• pp.341-352
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• 2024

This study investigates the heat and mass transfer characteristics of a MoS₂ nanoparticle suspension in ethylene glycol over a porous stretching sheet. MoS₂ nanoparticles are known for their exceptional thermal and chemical stability which makes it convenient for enhancing the energy and mass transport properties of base fluids. Ethylene glycol, a common coolant in various industrial applications is utilized as the suspending medium due to its superior heat transfer properties. The effects of variable thermal conductivity, variable mass diffusivity, thermal radiation and thermophoresis which are crucial parameters in affecting the transport phenomena of nanofluids are taken into consideration. The governing partial differential equations representing the conservation of momentum, energy, and concentration are reduced to a set of nonlinear ordinary differential equations using appropriate similarity transformations. R software and MATLAB-bvp5c are used to compute the solutions. The impact of key parameters, including the nanoparticle volume fraction, magnetic field, Prandtl number, and thermophoresis parameter on the flow, heat and mass transfer rates is systematically examined. The study reveals that the presence of MoS₂ nanoparticles curbs the friction between the fluid and the solid boundary. Moreover, the variable thermal conductivity controls the rate of heat transfer and variable mass diffusivity regulates the rate of mass transfer. The numerical and statistical results computed are mutually justified via tables. The results obtained from this investigation provide valuable insights into the design and optimization of systems involving nanofluid-based heat and mass transfer processes, such as solar collectors, chemical reactors, and heat exchangers. Furthermore, the findings contribute to a deeper understanding of stretching sheet systems, such as in manufacturing processes involving continuous casting or polymer film production. The incorporation of MoS₂-C₂H₆O₂ nanofluids can potentially optimize temperature distribution and fluid dynamics.

• 한국정밀공학회지
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• 제28권7호
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• pp.777-782
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• 2011

Micro features on the surface are well-known to have significant effects on optical or mechanical properties such as the optical interference, reflectance at the surface, contact angle, interfacial friction, etc. These surface micro features are increasingly employed to enhance the functionality of the applications in various application areas such as optical components for LCD or solar panel. Diverse surface features have been proposed and some of them are showing excellent efficiency or functionality, especially in optical applications. Most applications employing the micro features need manufacturing process for mass production and the injection molding and roll-to-roll forming, which are typical processes for mass production adopting polymeric materials, may be also preferred for micro patterned plastic product. Since the functionality or efficiency of the surface structures generally depends on the shape and the size of the structure itself or the array of the structures on the surface, it would be very important to replicate the features very precisely as being designed during the molding the micro pattern applications. In this paper, a series of research activities is introduced for roll-to-roll forming of micro patterned film including filling of patterns with UV curable resin, demolding of surface structures from the roll tool, control of surface energy and cure shrinkage of resin and dispose time and intensity of the UV light for curing of UV curable resin.

• 한국분말재료학회지
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• 제22권5호
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• pp.321-325
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• 2015

The triboelectric property of a material is important to improve an efficiency of triboelectric generator (TEG) in energy harvesting from an ambient energy. In this study, we have studied the TEG property of a semiconducting $SnO_2$ which has yet to be explored so far. As a counter triboelectric material, PET and glass are used. Vertical contact mode is utilized to evaluate the TEG efficiency. $SnO_2$ thin film is deposited by atomic layer deposition on bare Si wafer for various thicknesses from 5.2 nm to 34.6 nm, where the TEG output is increased from 13.9V to 73.5V. Triboelectric series are determined by comparing the polarity of output voltage of 2 samples among $SnO_2$, PET, and glass. In conclusion, $SnO_2$, as an intrinsic n-type material, has the most strong tendency to be positive side to lose the electron and PET has the most strong tendency to be negative side to get the electron, and glass to be between them. Therefore, the $SnO_2$-PET combination shows the highest TEG efficiency.

• 한국산학기술학회논문지
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• 제20권2호
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• pp.732-740
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• 2019

가습 소자를 이용한 증발식 가습은 건물이나 데이터 센터의 공조에 널리 사용되고 있다. 가습 소자의 성능은 가습 효율로 나타내는데 이 효율은 공기의 온습도나 물 온도에 무관하게 사용되고 있다. 본 연구에서는 데이터 센터와 건물 공조의 두 공기 조건에 대하여 셀룰로오스/PET, Glasdek의 두 소자를 사용하여 전벙 풍속과 물 온도를 변화시키며 일련의 실험을 수행하였다. 실험 결과 측정된 가습 효율은 공기 조건과 물 온도에 따라 다르게 나타났다. 심지어 건물 조건에서는 소자의 입구부에서 감습이 나타나기도 하였는데 그 이유는 공급수 온도가 입구 공기의 노점온도보다 낮았기 때문이었다. 건물 조건에서는 공급수 온도와 공기의 노점 온도 차이가 증가할수록 가습 효율은 감소하였다. 이로부터 가습 효율 모델을 적절히 세우려면 길이 방향으로 수분 전달량이 변화하는 입구 영역에 대한 해석이 중요하다고 판단된다. 셀룰로오스/PET 소자에 대하여 성능 해석을 수행한 결과 Sherwood 수는 적절히 예측하였으나 마찰 손실은 과대 예측하였다. 이는 해석시 채널 형상을 단순한 삼각형으로 가정하고 소자 표면에 형성된 액막의 영향을 무시한 때문으로 판단된다.