• Journal of Sensor Science and Technology
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• v.26 no.5
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• pp.366-369
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• 2017

This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Conventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the device is manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, the commercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the accessories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with the capable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spray coating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.550-551
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• 2012

Physically responsive field-effect transistors (physi-FETs), which are sensitive to physical stimuli, have been studied for decades. However, the primary issue of separating responses by sensing materials from interferences by other subcomponents in a FET transducer under global physical stimuli has not been completely resolved. Recent challenges of structural design and employing smart materials with a large electro-physical coupling effect for flexible physi-FETs still remain. In this article, we propose directly integrating nanocomposites of barium titanate (BT) nanoparticles (NPs) and highly crystalline poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) as gate dielectrics into flexible organic FETs to precisely separate and quantify tiny variations of remnant polarization caused by mechanical stimuli. Investigations under static stimuli resulted in first-reported giant-positive piezoelectric coefficients of d33 up to 960 pC/N, presumably due to significant contribution of the intrinsic piezoelectricity of BT NPs and P(VDF-TrFE) crystallites. This approach provides a general research direction, and not limited to physic-FETs.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.6
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• pp.411-416
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• 2016

This paper presents the design methodology of an unknown input observer for Lipschitz nonlinear systems with unknown inputs in the framework of convex optimization. We use an unknown input observer (UIO) to consider both nonlinearity and disturbance. By deriving a sufficient condition for exponential stability in the linear matrix inequality (LMI) form, existence of a stabilizing observer gain matrix of UIO will be assured by checking whether the quadratic stability margin of the error dynamics is greater than the Lipschitz constant or not. If quadratic stability margin is less than a Lipschitz constant, the coordinate transformation may be used to reduce the Lipschitz constant in the new coordinates. Furthermore, to reduce the maximum singular value of the observer gain matrix elements, an object function to minimize it will be optimally designed by modifying its magnitude so that amplification of sensor measurement noise is minimized via multi-objective optimization algorithm. The performance of UIO is compared to a nonlinear observer (Luenberger-like) with an application to a flexible joint robot system considering a change of load and disturbance. Finally, it is validated via simulations that the estimated angular position and velocity provide true values even in the presence of unknown inputs.

• Journal of Sensor Science and Technology
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• v.28 no.4
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• pp.205-215
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• 2019

A flexible polyvinylidene fluoride (PVDF)/polydimethylsiloxane (PDMS) composite prototype with high piezoelectricity and force sensitivity was constructed, and its huge potential for applications such as biomechanical energy harvesting, self-powered health monitoring system, and pressure sensors was proved. The crystallization, piezoelectric, and electrical properties of the composites were characterized using an X-ray diffraction (XRD) experiment and customized experimental setups. The composite can sustain up to 100% strain, which is a huge improvement over monolithic PVDF fibers and other PVDF-based composites in the literature. The Young's modulus is 1.64 MPa, which is closely matched with the flexibility of the human skin, and shows the possibility for integrating PVDF/PDMS composites into wearable devices and implantable medical devices. The $300{\mu}m$ thick composite has a 14% volume fraction of PVDF fibers and produces high piezoelectricity with piezoelectric charge constants $d_{31}=19pC/N$ and $d_{33}=34pC/N$, and piezoelectric voltage constants $g_{31}=33.9mV/N$ and $g_{33}=61.2mV/N$. Under a 10 Hz actuation, the output voltage was measured at 190 mVpp, which is the largest output signal generated from a PVDF fiber-based prototype.

• Korean Journal of Materials Research
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• v.21 no.3
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• pp.133-137
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• 2011

Gold have been used as an electrode materials having a good mechanical flexibility as well as electrical conductivity, however the stretchability of the gold on a flexible substrate is poor because of its small elastic modulus. To overcome this mechanical inferiority, the reinforcing gold is necessary for the stretchable electronics. Among the reinforcing materials having a large elastic modulus, carbon nanotube (CNT) is the best candidate due to its good electrical conductivity and nanoscale diameter. Therefore, similarly to ferroconcrete technology, here we demonstrated gold electrodes mechanically reinforced by inserting fabrics of CNTs into their bodies. Flexibility and stretchability of the electrodes were determined for various densities of CNT fabrics. The roles of CNTs in resisting electrical disconnection of gold electrodes from the mechanical stress were confirmed using field emission scanning electron microscope and optical microscope. The best mechanical stability was achieved at a density of CNT fabrics manufactured by 1.5 ml spraying. The concept of the mechanical reinforced metal electrode by CNT is the first trial for the high stretchable conductive materials, and can be applied as electrodes materials in various flexible and stretchable electronic devices such as transistor, diode, sensor and solar cell and so on.

• Journal of Satellite, Information and Communications
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• v.12 no.4
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• pp.11-17
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• 2017

In this paper, we propose the authoring tools engine supported a 4 dimension display contents which serve display of high quality (UHD*250) curved using 4 dimension engine, which is a innovation technology by authoring tools of management software supported 4 dimension editing environment on curved flexible display. The important technology is as follows, the first, the authoring tools of 4 dimension viedo wall for a flexible high quality display(UHD*256) using multiscreen synchornization, the second implemented a bidirection interaction technology of UI/UX interface, which is established by 360 degree recognition sensor for digital signage, the 4 dimension viedowall flexible display with curve, the third, implemented the authoring tool software for various dimension electronic books first in the world.

• Smart Structures and Systems
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• v.25 no.5
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• pp.559-567
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• 2020

Vibration at the tip of various flexible manipulators may affect their operation accuracy and work efficiency. To suppress such vibrations, the feasibility of using MFC actuators and sensors is investigated in this paper. Considering the convergence of the famous filtered-x least mean square (FXLMS) algorithm could not be guaranteed while it is employed for vibration suppression of plants with varying secondary path, this paper proposes a new multiple model switching adaptive control algorithm to implement the real time active vibration suppression tests with a new multiple switching strategy. The new switching strategy is based on a cost function with reconstructed error signal and disturbance signal instead of the error signal from the error sensor. And from a robustness perspective, a new variable step-size sign algorithm (VSSA) based FXLMS algorithm is proposed to improve the convergence rate. A cantilever beam with varying tip mass is employed as flexible manipulator model. MFC layers are attached on both sides of it as sensors and actuators. A co-simulation platform was built using ADAMS and MATLAB to test the feasibility of the proposed algorithms. And an experimental platform was constructed to verify the effectiveness of MFC actuators and sensors and the real-time vibration control performance. Simulation and experiment results show that the proposed FXLMS algorithm based multiple model adaptive control approach has good convergence performance under varying load conditions for the flexible cantilever beam, and the proposed FX-VSSA-LMS algorithm based multiple model adaptive control algorithm has the best vibration suppression performance.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.165-165
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• 2014

In this study, we demonstrated that the soft lithographic patterning processing of chemical vapor deposition (CVD) graphene and rGO sheets as large scale, low cost, high quality and simplicity for future industrial applications. Recently, a previous study has reported that single layer graphene grown via CVD was patterned and transferred to a target surface by controlling the surface energy of the polydimethylsiloxane (PDMS) stamp [1]. Using this approach, the surface of a relief-patterned elastomeric stamp was functionalized with hydrophilic dimethylsulfoxide (DMSO) molecules to enhance the surface energy of the stamp and to remove the graphene-based layer from the initial substrate and transfer it to a target surface [2]. Further, we developed a soft lithographic patterning process via surface energy modification for advanced graphene-based flexible devices such as transistors or simple and efficient chemical sensor consisting of reduced graphene oxide (rGO) and a metallic nanoparticle composite. A flexible graphene-based device on a biocompatible silk fibroin substrate, which is attachable to an arbitrary target surface, was also successfully fabricated.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.171-176
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• 2021

Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

• Journal of Sensor Science and Technology
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• v.26 no.2
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• pp.96-100
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• 2017

Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) has been extensively studied as the active material in ammonia gas sensor because of its fast response time, high conductivity and environmental stability. It is well known that a post annealing process for organic devices based on PEDOT:PSS significantly increases the device performance. In this study, we propose the solvent annealing of PEDOT:PSS and investigated its effects. As a results, post solvent annealing on PEDOT:PSS lead to the surface chemical and physical properties change. These changes result in improved conductivity of the PEDOT:PSS. In additional, ammonia sensitivity of solvent annealed PEDOT:PSS become higher than pristine polymer film. The enhancement is mainly caused by the depletion of gas barrier PSS and structural re-forming PEDOT networks. We believe that the post solvent annealing is a promising method to achieve highly sensitivity PEDOT:PSS films for applications in efficient, low-cost and flexible ammonia gas sensor.