• Title/Summary/Keyword: fine Si powder

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Novel Low-Volume Solder-on-Pad Process for Fine Pitch Cu Pillar Bump Interconnection

  • Bae, Hyun-Cheol;Lee, Haksun;Eom, Yong-Sung;Choi, Kwang-Seong
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.2
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    • pp.55-59
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    • 2015
  • Novel low-volume solder-on-pad (SoP) process is proposed for a fine pitch Cu pillar bump interconnection. A novel solder bumping material (SBM) has been developed for the $60{\mu}m$ pitch SoP using screen printing process. SBM, which is composed of ternary Sn-3.0Ag-0.5Cu (SAC305) solder powder and a polymer resin, is a paste material to perform a fine-pitch SoP in place of the electroplating process. By optimizing the volumetric ratio of the resin, deoxidizing agent, and SAC305 solder powder; the oxide layers on the solder powder and Cu pads are successfully removed during the bumping process without additional treatment or equipment. The Si chip and substrate with daisy-chain pattern are fabricated to develop the fine pitch SoP process and evaluate the fine-pitch interconnection. The fabricated Si substrate has 6724 under bump metallization (UBM) with a $45{\mu}m$ diameter and $60{\mu}m$ pitch. The Si chip with Cu pillar bump is flip chip bonded with the SoP formed substrate using an underfill material with fluxing features. Using the fluxing underfill material is advantageous since it eliminates the flux cleaning process and capillary flow process of underfill. The optimized interconnection process has been validated by the electrical characterization of the daisy-chain pattern. This work is the first report on a successful operation of a fine-pitch SoP and micro bump interconnection using a screen printing process.

A Studyon Synthesis of High Purity $\beta$-SiC Fine Particles from Ethyl Silicate(II) (Powder Properties, Reaction Type and Activation Energy) (Ethyl Silicate를 이용한 고순도 $\beta$-SiC미분말 합성에 관한 연구(II) (분말의 특성, 반응형식 및 활성화에너지))

  • 최용식;박금철
    • Journal of the Korean Ceramic Society
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    • v.26 no.2
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    • pp.195-200
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    • 1989
  • The Silica-Carbon mixture was made with addition of carbon black in the composition which monodispersed spherical fine silica was formed by the hydrolysis of ethylsilicate, mole ratio of Carbon/Alkoxide was 3.1 and $\beta$-SiC powder was synthesized by reacting this mixture at 1,350~1,50$0^{\circ}C$ in Ar atmosphere. The results of this study are as follow : (1) The purity of synthesized $\beta$-SiC powder was above 99.98% and it was in cubic modification with lattice constant of 4.3476$\AA$. (2) The rate-controlling steps varied with the reaction temperature for the syntehsis of $\beta$-SiC in this study ; nucleation and growth of $\beta$-SiC at 1,350~1,40$0^{\circ}C$, interfacial reaction at 1,45$0^{\circ}C$ and diffusion described by Jander Equation at 1,50$0^{\circ}C$. (3) When the rate-determining step was nucleation and growth, the activation energy was about 87.8kcal/mol.

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Phase Transformation and Microstructure of FeSi2 Thermoelectric Compounds Manufactured by Powder Metallurgy (분말야금법으로 제조된 FeSi2 열전특성 화합물의 열처리 시간에 따른 미세조직과 상변화)

  • Park, Kyoung-Tae;Shin, Jin-Gyo;Hong, Soon-Jik;Chun, Byong-Sun
    • Journal of Powder Materials
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    • v.17 no.6
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    • pp.482-488
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    • 2010
  • In this study, $FeSi_2$ as high temperature performance capable thermoelectric materials was manufactured by powder metallurgy.The as-casted Fe-Si alloy was annealed for homogenization below $1200^{\circ}C$ for 3 h. Due to its high brittleness, the cast alloy transformed to fine powders by ball-milling, followed by subsequent compaction (hydraulic pressure; 2 GPa) and sintering ($1200^{\circ}C$, 12 h). In order to precipitate ${\beta}-FeSi_2$, heat treatment was performed at $850^{\circ}C$ with varying dwell time (7, 15 and 55 h). As a result of this experiment thermoelectric phase ${\beta}-FeSi_2$ was quickly transformed by powder metallurgical process. There was not much change in powder factor between 7h and 55h specimens.

On the Micro-structures of Rapidly Solidified Al-Si Alloy Powder and Growth Direction of Eutectic Silicon (급속응고된 Al-Si 합금분말의 미세조직과 공정 Si 의 성장방향)

  • Ra, Hyung-Yong;Lee, Joo-Dong
    • Journal of Korea Foundry Society
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    • v.8 no.4
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    • pp.453-458
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    • 1988
  • Al-Si alloy powder produced by the gas atomizer showed fine eutectic structure between ${\alpha}-dendrites$, that was grown by coupled growth, and there remained small amount of ${\alpha}$ in Al - 20 wt% Si alloy. The morphology of Si in the eutectic structure was largely influenced by the recalescence caused by solidification latent heat, and that was thought to be due to decrement of the surface energy of Si. In modified eutectic Si by rapid solidification, fine twin about $0.01\;{\mu}m$ was observed and growth direction of eutectic Si was <112>. This fact implied that the growth mechanism of eutectic Si in rapid solidification was related to TPRE mechanism. Due to rapid solidification Si was soluble in ${\alpha}-phase$ in Al - 12.6wt%Si alloy up to about 3.4wt%, and the solubility of Si in ${\alpha}-phase$ reaches the equilibrium solubility stare after 60min, holding when it was held isothermally at $253-296^{\circ}C$.

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Synthesis of Titanium Silicides by Mechanical Alloying (기계적합금화에 의한 Ti Silicide 화합물의 합성)

  • 변창섭;이상호;김동관;이진형
    • Journal of Powder Materials
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    • v.5 no.4
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    • pp.250-257
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    • 1998
  • The synthesis of titanium silicides ($Ti_3Si$, $TiSi_2$, $Ti_5Si_4$, $Ti_5Si_3$ and TiSi) by mechanical alloying has been investigated. Rapid, self-propagating high-temperature synthesis (SHS) reactions were observed to produce the last three phases during room-temperature high-energy ball milling of elemental powders. Such reactions appeared to be ignited by mechanical impact in an intimate, fine powder mixture formed after a critical milling period. During the high-energy ball milling, the repeated impact at contact points leads to a local concentration of energy which may ignite a self-propagating reaction. From in-situ thermal analysis, each critical milling period for the formation of $Ti_5Si_4$, $Ti_5Si_3$ and TiSi was observed to be 22, 35.5 and 53.5 min, respectively. $Ti_3Si$ and $TiSi_2$, however, have not been produced even till the milling period of 360 min due to lack of the homogeneity of the powder mixtures. The formation of titanium silicides by mechanical alloying and the relevant reaction rates appeared to depend upon the critical milling period, the homogeneity of the powder mixtures, and the heat of formation of the products involved.

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Novel Synthesis and Properties of $Si_3N_4$-based Nano/Nano-Type Composites

  • Yoshimura, Masahi
    • Journal of Powder Materials
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    • v.8 no.3
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    • pp.210-213
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    • 2001
  • $Si_3N_4$/TiN nano/nano-type composites were successfully fabricated by the combination of a mechano-chemical grinding (MCG) method and a short time sintering process, and their wear resistance was evaluated. Powder mixtures of $\alpha-Si_3N_4$and Ti were prepared using mechano-chemical grinding process and the resulting nanocomposite powder mixtures were consolidated using pulsed electric current sintering (PECS). TEM observation showed that the nano/nano-type composites consisted of homogeneous and very fine matrix grains with the size less than 100 nm. The obtained $Si_3N_4$-based nano/nano-type showed high wear resistance and electric discharge machinability.

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Properties of Powders and Sintered Bodies of $\beta$-SiC Prepared from Jecheon Quartzite (제천규석으로부터 제조한 $\beta$-SiC분말 및 소결체의 특성)

  • 이홍림;신석호;배철훈;김무경
    • Journal of the Korean Ceramic Society
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    • v.24 no.2
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    • pp.139-146
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    • 1987
  • ${\beta}$-SiC powders were prepared by the simultaneous reduction and carbiding of Jecheon quartzite at 1400$^{\circ}C$ for 7 hours in hydrogen atmosphere, using graphite or carbon black as the reducing and carbiding reagent. The prepared SiC powder was acid-treated with the mixture of fluoric acid and hydrochloric acid at room temperature and also by heating on an alcohol lamp for one hour, respectively. The impurities were mostly eliminated and the purity of SiC became 98.5% after hot acid treatment. The specific surface area of SiC powder was also increased up to 115㎡/g by hot acid treatment. This pure and fine SiC powder was hot-pressed at 1900$^{\circ}C$ for 30min, using 5wt% Al2O3 as a sintering aid. The density, M.O.R., KIC and hardness of the hot-pressed SiC ceramics were 3.195g/㎤, 48.7Kgf/$\textrm{mm}^2$, 5.4MN/㎥/2 and 2,182Kgf/$\textrm{mm}^2$, respectively.

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Improvement of Wear Resistance and Formation of Si Alloyed Layer on Aluminum Alloy by PTA Process (PTA법에 의한 Al 합금표면의 Si 합금층 형성과 내마모성 개선)

  • ;;松田福久;中田一博
    • Journal of Welding and Joining
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    • v.15 no.5
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    • pp.134-143
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    • 1997
  • The formation of thick alloyed layer with high Si content have been investigated on the surface of Al alloy (A5083) plate by PTA process with Si powder. Hardening characteristics and wear resistance of alloyed layer was examined in relation to the microstructure of alloyed layer. Thick hardened layer in mm-order thickness on the surface of A5083 plate can be formed by PTA process with wide range of process condition by using Si powder as alloying element because of eutectic reaction of Al-Si binary alloy. High temperature and rapid solidification rate of molten pool, which are features of PTA process, enable the formation of high Si content alloyed layer with uniform distribution of fine primary Si paticle. High plasma arc current was beneficial to make the alloyed layer with smooth surface appearance in wide range of powder feeding rate, because enough volume of molten pool was necessary make alloyed layer. Uniform dispersion of fine primary Si particle with about 30${\mu}{\textrm}{m}$ in particle size can be obtained in layer with Si content ranging from 30 to 50 mass %. Hardness of alloyed layer increased with increasing Si content, but increasing rate of hardness differed with macrostructure of alloyed layer. Wear resistance of alloyed layer depended on $V_{si}$(volume fraction of primary Si) and was remarkably improved to two times of base metal at 20-30% $V_{si}$ without cracking, but no more improvement was obtained at larger $V_{si}$.

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Conversion of Carbon Fiber into Silicon Carbide Fiber by Pack-Cementation

  • Joo, Hyeok-Jong;Kim, Jung-Il;Lee, Jum-Kyun
    • Carbon letters
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    • v.1 no.1
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    • pp.12-16
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    • 2000
  • Carbon fiber was reacted with gaseous silicon monoxide which is produced from pack-powder mixture at elevated temperature. As a result of the reaction, two kinds of SiC fiber were obtained. The first one was SiC fibers which were converted from carbon fiber. The fiber is constituted with polycrystal like fine grains or monolithic crystals that have a size from sub-micron to $10\;{\mu}m$. Their size depends on the temperature during the conversion reaction. The second one was ultra-fine SiC fibers that were found on the surface of the converted SiC fibers. The ultra-fine fibers have diameters from 0.08 to $0.2\;{\mu}m$ and their aspect ratio were larger than 100. The chemical composit ion of the ultra-fine fibers was analyzed using an Auger electron spectroscopy. In result, the fibers consist of 51% silicon, 38% carbon and 11% oxygen by weight.

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A Study on Synthesis of High Purity $\beta$-SiC Fine Particle from Ethylsilicate(I) -Reaction Conditon, Yeild and Properties of $\beta$-SiC- (Ethyl Silicate를 고순도 $\beta$-SiC미분말 합성에 관한 연구(I) 반응조건과 $\beta$-SiC의 생성율 및 특성)

  • 최용식;박금철
    • Journal of the Korean Ceramic Society
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    • v.25 no.5
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    • pp.473-478
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    • 1988
  • In order to obtain the high purity $\beta$-SiC powder that possesses the excellent sinterability and is close to the spherical shape, the carbon black was mixed into the composition of Si(OC2H5)4-H2O-NH3-C2H5OH which the monodispersed spherical fine particles is formed the hydrolysis of Ethylsilicate and the mixture was carbonized under an argon atmosphere. Particle shpae, size and the yield of $\beta$-SiC powder were investigated according to the molar ratio of carbon/alkoxide and variations of reaction temperature and reaction time. The results of this study are as follow ; 1) The yield of $\beta$-SiC gained from the reaction for one hour at 150$0^{\circ}C$ almost got near 100% and the particle size of $\beta$-SiC from the reaction for 15 hrs at 150$0^{\circ}C$ was 0.2${\mu}{\textrm}{m}$ on the average and close to the spherical shape agglomerate state. 2) When the molar ratio carbon/alkoxide is over 3.1 and the reaction occurs at 145$0^{\circ}C$ for 5hrs, the carbon content has not an effect on the kind of crystal of product.

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