• 제목/요약/키워드: film techniques

검색결과 695건 처리시간 0.032초

태양전지용CuInSe2와 CuGaSe2 흡수층의 전자구조해석을 위한 표면 청정기술 개발 (Development of Surface Cleaning Techniques for Analysis of Electronics Structure in CuInSe2, CuGaSe2 Solar Cell Absorber Layer)

  • 김경환;최형욱;공석현
    • 한국전기전자재료학회논문지
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    • 제18권2호
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    • pp.125-129
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    • 2005
  • Two kinds of physical treatments were examined for the analysis both of intrinsic surface and interior nature of CuInS $e_2$[CIS] and CuGaS $e_2$[CGS] films grown in separated systems. For the first method, a selenium protection layer which was immediately deposited after the growth of the CIS was investigated. The Se cap layer protects CISe surface from oxidation and contamination during the transport under ambient atmosphere. The Se cap was removed by thermal annealing at temperature above 15$0^{\circ}C$. After the decapping treatment at 2$25^{\circ}C$ for 60 min, ultraviolet photoemission and inverse photoemission measurements of the CIS film showed that its valence band maximum(VBM) and conduction band minimum (CBM) are located at 0.58 eV below and 0.52 eV above the Fermi level $E_{F}$, respectively. For the second treatment, an Ar ion beam etching was exploited. The etching with ion kinetic energy $E_{k}$ above 500 eV resulted in broadening of photoemission spectra of core signals and occasional development of metallic feature around $E_{F}$. These degradations were successfully suppressed by decreasing $E_{k}$ below 400 eV. CGS films etched with the beam of $E_{k}$ = 400 eV showed a band gap of 1.7 eV where $E_{F}$ was almost centered.st centered.

양극산화 후 실링처리된 알루미늄 합금의 해수 내 내식성과 캐비테이션 침식 저항성 평가 (Evaluation of Corrosion and Cavitation Erosion Resistance of Sealed Aluminum Alloy after Anodizing Treatment in Seawater)

  • 박일초;이정형;한민수;김성종
    • 한국표면공학회지
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    • 제51권2호
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    • pp.87-94
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    • 2018
  • Various sealing techniques were applied to the anodized 5083 aluminum alloy for marine environment to reduce corrosion and cavitation erosion damage. Electrochemical experiments and cavitation erosion tests were conducted to evaluate the corrosion resistance and cavitation resistance of the anodic oxide film treated with sealing in natural seawater solution. Then, damaged surface morphology was analyzed by scanning electron microscope(SEM) and 3D microscope. As the results of the electrochemical experiments, it was observed that the surface damage of all the experimental conditions in the anodic polarization experiment was locally grown by the combination of crack and corrosion damage. In the Tafel analysis, the corrosion resistance of all sealing treatment conditions was improved compared to the anodizing. On the other hand, cavitation erosion tests showed that the anodizing and all the sealing treatment conditions generated local pit damage by cavitation erosion attack and grew to crater damage in the observation of damaged surface by SEM. Also, the weight loss and the surface damage depth measured with the experiment time presented that most of the sealing treatment conditions showed better cavitation erosion resistance than the anodizing, and they had an incubation period at the beginning of the experiment.

Surface Treatment Effect on Electrochemical characteristics of Al Alloy for ship

  • 이승준;김성종
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.149-149
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    • 2017
  • Aluminum alloys have poor corrosion resistance compared to the pure aluminum due to the additive elements. Thus, anodizing technology artificially generating thick oxide films are widely applied nowadays in order to improve corrosion resistance. Anodizing is one of the surface modification techniques, which is commercially applicable to a large surface at a low price. However, most studies up to now have focused on its commercialization with hardly any research on the assessment and improvement of the physical characteristics of the anodized films. Therefore, this study aims to select the optimum temperature of sulfuric electrolyte to perform excellent corrosion resistance in the harsh marine environment through electrochemical experiment in the seawater upon generating porous films by variating the temperatures of sulfuric electrolyte. To fabricate uniform porous film of 5083 aluminum alloy, we conducted electro-polishing under the 25 V at $5^{\circ}C$ condition for three minutes using mixed solution of ethanol (95 %) and perchloric (70 %) acid with volume ratio of 4:1. Afterward, the first step surface modification was performed using sulfuric acid as an electrolyte where the electrolyte concentration was maintained at 10 vol.% by using a jacketed beaker. For anode, 5083 aluminum alloy with thickness of 5 mm and size of $2cm{\times}2cm$ was used, while platinum electrode was used for cathode. The distance between the two was maintained at 3 cm. Anodic polarization test was performed at scan rate of 2 mV/s up to +3.0 V vs open circuit potential in natural seawater. Surface morphology was compared using 3D analysis microscope to observe the damage behavior. As a result, the case of surface modification showed a significantly lower corrosion current density than that without modification, indicating excellent corrosion resistance.

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Nb Trilayer를 사용한 단자속양자 논리연산자의 제작공정 (Fabrication Process of Single Flux Quantum ALU by using Nb Trilayer)

  • 강준희;홍희송;김진영;정구락;임해용;박종헉;한택상
    • Progress in Superconductivity
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    • 제8권2호
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    • pp.181-185
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    • 2007
  • For more than two decades Nb trilayer ($Nb/Al_2O_3/Nb$) process has been serving as the most stable fabrication process of the Josephson junction integrated circuits. Fast development of semiconductor fabrication technology has been possible with the recent advancement of the fabrication equipments. In this work, we took an advantage of advanced fabrication equipments in developing a superconducting Arithmetic Logic Unit (ALU) by using Nb trilayers. The ALU is a core element of a computer processor that performs arithmetic and logic operations on the operands in computer instruction words. We used DC magnetron sputtering technique for metal depositions and RF sputtering technique for $SiO_2$ depositions. Various dry etching techniques were used to define the Josephson junction areas and film pattering processes. Our Nb films were stress free and showed the $T{_c}'s$ of about 9 K. To enhance the step coverage of Nb films we used reverse bias powered DC magnetron sputtering technique. The fabricated 1-bit, 2-bit, and 4-bit ALU circuits were tested at a few kilo-hertz clock frequency as well as a few tens giga-hertz clock frequency, respectively. Our 1-bit ALU operated correctly at up to 40 GHz clock frequency, and the 4-bit ALU operated at up to 5 GHz clock frequency.

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다공성 실리콘위에 증착된 Cu 박막의 구조적 물리적 특성 (Structuyal and physical properties of thin copper films deposited on porous silicon)

  • 홍광표;권덕렬;박현아;이종무
    • 한국진공학회지
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    • 제12권2호
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    • pp.123-129
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    • 2003
  • 다공질 실리콘(PS)기판 위에 rf-스퍼터링법으로 10~40 nm의 두께의 반 투과성 구리박막을 증착하였다. PS는 p형 (100) 실리콘 웨이퍼를 기판으로 50㎃/$\textrm{cm}^2$의 전류밀도를 사용하여 전해 에칭법으로 양극 산화하여 제작하였다. PS층과 Cu박막의 미세구조를 분석하기 위하여 SEM, AFM 그리고 XRD 분석을 시행하였다. AFM 분석결과 Cu 박막의 RMS roughness 값은 약 1.47nm로 Volmer-Weber 유형의 결정립 성장을 보였으며, 결정립의 성장은 (111) 배향성을 나타냈다. PS층의 PL 스펙트럼은 blue green 영역에서 관찰되었고, Cu 박막 증착 후 0.05eV의 blue shift가 나타났으며, 약간의 강도저하를 보였다. PS/Cu접합구조의 FTIR스펙트럼은 주 피크변화는 없으나 전반적인 강도의 감소를 보였다. I-V 특성곡선으로 본 PS/Cu 접합구조는 ideality factor가 2.77이고 barrier의 높이가 0.678eV인 Schottky 유형의 다이오드 특성을 보였다. PS/Cu 접합구조로 만든 다이오드 제조로 EL특성을 관찰할 수 있었다.

초고집적회로를 위한 구리박막의 화학적 형성기술 (Chemical vapor deposition of copper thin films for ultra large scale integration)

  • 박동일;조남인
    • 한국진공학회지
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    • 제6권1호
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    • pp.20-27
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    • 1997
  • 0.25$\mu\textrm{m}$이하의 최소선폭을 같는 초고집적회로에 사용할 수 있는 구리박막의 형성기술 을 조사하였다. 본 실험에서는 측면박막 형성에 적합한 화학적 증착을 시도하였으며 (hfac)Cu(VTMS)(hexafluoroacetylacetonate vinyltrimethylisilane copper(I))로 명명된 금속 유기 화합물을 원료로 사용하였다. 구리박막의 형성은 TiN와 $SiO_2$모재 위에 이루어 졌으며, 형성 중에 모재의 온도와 증착용기 내 압력의 함수로서 집적회로 공정상 주요 변수인 박막 의 비저항, 박막의 증착선택도를 측정하였다. 구리박막은 모재온도 $180^{\circ}C$와 증착용기의 압력 0.6Torr의 조건에서 가장 좋은 전기적 성질을 보여 주었다. 이 조건에서 형성된 구리박막은 다결정 구조를 나타내었으며 구리박막의 증착속도는 120nm/min, 비저항은 0.25$mu \Omega$.cm, 평균거칠기는 15.5nm로서 0.25$\mu\textrm{m}$이하 선폭의 집적회로에서 요구되는 전기적, 재료적 사양에 근접한 구리박막을 얻었다. 또한 140-$250^{\circ}C$의 모재 온도 범위에서 TiN모재와 $SiO_2$모재 사 이에 뚜렸한 증착선택성이 관측되었다.

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EPD를 이용한 IT-SOFC용 SDC 전해질 필름의 제조 (Preparation of SDC electrolyte film for IT-SOFCs by electrophoretic deposition)

  • 이경섭;김영순;조철기;신형식
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 추계학술대회 논문집
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    • pp.158-158
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    • 2009
  • The electrophoretic deposition(EPD) technique with a wide range of novel applications in the processing of advanced ceramic materials and coatings, has recently gained increasing interest both in academic and industrial sector not only because of the high versatility of its use with different materials and their combinations but also because of its cost-effectiveness requiring simple apparatus. Compared to other advanced shaping techniques, the EPD process is very versatile since it can be modified easily for a specific application. For example, deposition can be made on flat, cylinderical or any other shaped substrate with only minor charge in electrode design and positioning[1]. The synthesis of the nano-sized Ce0.2Sm0.8O1.9(SDC)particles prepared by aurea based low temperature hydrothermal process was investigated in this study[2].When we made the SDC nanoparticles, changed the time of synthesis of the SDC. The SDC nanoparticles were characterized with field-emission scanning electron microscope(FESEM), energy dispersive X-ray analysis(EDX), and X-ray diffraction(XRD). And also we researched the results of our investigation on electrophoretic deposition(EPD) of the SDC particles from its suspension in acetone solution onto a non-conducting NiO-SDC substrate. In principle, it is possible to carry out electrophoretic deposition on non-conducting substrates. In this case, the EPD of SDC particles on a NiO-SDC substrate was made possible through the use of a adequately porous substrate. The continuous pores in the substrates, when saturated with the solvent, helped in establishing a "conductive path" between the electrode and the particles in suspension[3-4]. Deposition rate was found to increase its increasing deposition time and voltage. After annealing the samples $1400^{\circ}C$, we observed that deposited substrate.

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평면 충돌제트에서 노즐 깃이 단상 및 비등 열전달에 미치는 영향 (The Effect of Nozzle Collar on Single Phase and Boiling Heat Transfer by Planar Impinging Jet)

  • 신창환;임성환;우성제;조형희
    • 대한기계학회논문집B
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    • 제29권7호
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    • pp.878-885
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    • 2005
  • The water jet impingement cooling is one of the techniques to remove the heat from high heat flux equipments. Local heat transfer of the confined water impinging jet and the effect of nozzle collar to enhance the heat transfer are investigated in the fee surface jet and submerged jet. Boiling is initiated from the farthest downstream and increase of the wall temperature is reduced with developing boiling, forming the flat temperature distributions. The reduction in the nozzle-to-surface distance fur H/W$\le$1 causes significant increases and distribution changes of heat transfer. Developed boiling reduces the differences of heat transfer for various conditions. The nozzle collar is employed at the nozzle exit. The distances from heated surface to nozzle collar, Hc are 0.25W, 0.5W and 1.0W. The liquid film thickness is reduced and the velocity of wall jet increases as decreased spacing of collar to heated surface. Heat transfer is enhanced fur region from the stagnation to x/W$\~$8 in the free surface jet and to x/W$\~$5 in the submerged jet. For nucleate boiling region of further downstream, the heat transfer by the nozzle collar is decreased in submerged jet comparing with higher velocity condition. It is because the increased velocity by collar is de-accelerated downstream.

NON-DESTRUCTIVE DETECTION FOR FOREIGN MATERIALS IN FOOD AND AGRICULTURAL PRODUCTS USING X-RAY SYSTEM

  • Morita, Kazuo;Tanaka, Shun'ichirou;Ogawa, Yukiharu
    • 한국농업기계학회:학술대회논문집
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    • 한국농업기계학회 1996년도 International Conference on Agricultural Machinery Engineering Proceedings
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    • pp.334-343
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    • 1996
  • Quality evaluation for food and agricultural products have always been one of the most elusive problems associated with the handling , processing and marketing in a food plant production. In order to detect physical foreign materials in food and agricultural products, non-destructive techniques have been developed for many years. Application of X-ray system to detect physical foreign materials in food and agricultural products could be considered to be a high potential method. Especially , it is impossible to detect internal physical foreign materials by visual inspections. In this study, it was tried to be applied for two different X-ray devices. Soft X-ray system with CdTe sensor and X-ray CT scanner were evaluated for advantage of the detection of non-meltallic foreign materials in food and agricultural products . Though the soft X-ray is not a high energy radiation, it is possible to detect small different density in a material. The CdTe sensor has a high resolution for t e soft X-ray energy region. The density characteristics of foods and foreign material were expressed region. The density characteristics of foods and foreign materials were expressed as a soft X-ray energy spectrum. The energy spectrum was analyzed by a personal computer with a multi-channel analyzer. X-ray CT scanner can provide visual image and analyze by three dimensional information inside food and agricultural products. The X-ray CT scanner using as a medical equipment was used to detect a foreign material. The density characteristics of food and foreign materials in food were tried to be detected by the threshold value on the basis of the CT numbers. The soft X-ray absorption characteristics for acrylin plates and distilled water were obtained and could be found the possibility of detecting a small physical foreign materials such as a plastic wrapping film , a stone and grasshopper in food and agricultural products.

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마찰을 고려한 포일저널베어링의 동특성해석: 회전불균형 응답 (The Dynamic Performance Analysis of Foil Journal Bearings Considering Coulomb Friction: Rotating Unbalance Response)

  • 김경웅;이동현;김영철
    • Tribology and Lubricants
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    • 제23권5호
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    • pp.219-227
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    • 2007
  • The dynamic performance of air foil bearings relies on a coupling between a thin air film and an elastic foil structure. A number of successful analytical techniques to predict dynamic performance have been developed. However, the evaluation of its dynamic characteristic is still not enough because of the mechanical complexity of the foil structure and strong nonlinear behavior of friction force. This work presents a nonlinear transient analysis method to predict dynamic performance of foil bearings. In this method, time dependent Reynolds equation is used to calculate pressure distribution and a finite element method is used to model the bump foil structure. The analysis is treated with a direct implicit integration technique that can handle nonlinear problems and the stick-slip algorithm is used to consider friction force. Using this method the response to the mass unbalance excitation is investigated for various design parameters and operating conditions. The results of analysis show that foil bearing is very effective on the restriction of vibration at the resonance frequency compared to the rigid surface bearings and the effectiveness depends on the operating conditions, static load and a amount of mass unbalance. In addition, there exist optimum values of friction coefficient, bump foil stiffness and number of circumferential slit with regards to minimizing dynamic response at the resonance frequency. These optimum values are system dependent.