• 한국전기전자재료학회논문지
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• 제24권3호
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• pp.177-181
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• 2011

We have studied structural, optical, and electrical properties of the Al-doped ZnO (AZO) thin films being usable in transparent conducting oxides. The AZO thin films were deposited on the corning 1737 glass plate by the RF magnetron sputtering system. To find optimal properties of AZO for transparent conducting oxides, the RF power in sputtering process was varied as 40 W, 60 W, and 80 W, respectively. As RF power increased, the crystallinity of AZO thin film was decreased, the optical bandgap of AZO thin film increased. The transmittance of the film was over 80% in the visible light range regardless of the changes in RF power. The measurement of Hall effect characterizes the whole thin film as n-type, and the electrical property was improved with increasing RF power. The structural, optical, and electrical properties of the AZO thin films were affected by Al dopant content in AZO thin film.

• 한국전기전자재료학회논문지
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• 제22권10호
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• pp.837-843
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• 2009

$TiO_2$(2 wt.%)-doped ZnO(TZO) films with thickness from 100 nm to 500 nm were prepared on polyethylene naphthalate(PEN) substrate under various rf-power range from 40 W to 80 W. Their electrical and optical properties were investigated as a function of rf-power. We think that these properties were closely related with the crystallization and the film density of TZO films. It was also presumed that the vaporization of the water vapor and other adsorbed particles such as an organic solvents can affect the electrical properties of the conventional transparent conductive oxide(TCO) films. On the other hand, since the TZO film deposited on glass substrate at room temperature with rf-power of 80 W shows a very low resistivity of $7.5\times10^{-4}\;\Omega{\cdot}cm$ and a very excellent transmittance over an average 85% in the visible range, that is comparable to that of ITO films. Therefore, we expect that the TZO films can be used as transparent electrode for optoelectronic devices such as touch-panels, flat-panel displays, and thin-film solar cells.

• 조명전기설비학회논문지
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• 제22권11호
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• pp.36-43
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• 2008

In this parer aluminium-doped zinc oxide(ZnO:Al) conducting layer was deposited on polyethylene terephthalate(PET) substrate by r. f. magnetron sputtering method. The effects of gas pressure and r. f. sputtering power on the structural and electrical properties of ZnO:Al thin film were investigated experimentally. Especially the effect of position of PET substrate on the electrical properties of the film was studied and fixed to improve the electrical properties and also to increase the deposition rate. The results show that the structural and electrical properties of ZnO:Al thin film were strongly influenced by the gas pressure and sputtering power. The minimum resistivity of $1.1{\times}10^{-3}[{\Omega}-cm]$ was obtained at 5[mTorr] of gas pressure, and 18D[W] of sputtering power. The deposition rate of ZnO:Al film at 5[mTorr] of gas pressure was 248[nm/min]. and is higher by around 3 times compared to that at 25[mTorr].

• 산업식품공학
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• 제15권1호
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• pp.70-74
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• 2011

전분필름의 물성에 미치는 고압균질 처리의 영향을 검토한 결과, 고압균질처리 옥수수전분필름은 산화전분필름과 유사한 투명도를 가지며, 용해도와 산소투과억제력의 증가와 함께 인장강도가 다소 높아지는 것을 확인하였다. 이러한 고압균질처리 옥수수전분필름의 물성변화는 고압균질기의 고압과 전단력에 의해 호화전분입자가 완전히 소실되고 전분의 용해도 증가와 보다 균일한 분산상이 형성되기 때문으로 판단되었다. 일반적인 호화과정을 통해 형성되는 전분필름의 구조는 연속상의 아밀로오스에 팽윤된 접분입자가 분산되어 있는 network 형태에서 형성된다. 반면 고압균질처리의 경우, 호화전분입자의 붕괴로 아밀로펙틴이 연속상을 이루고 여기에 아밀로오스가 분산상으로 존재하는 새로운 분산계(dispersed system)가 형성되어, 기존 호화 방법으로 제조한 필름과 다른 물성을 나타내는 것으로 판단되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.478-480
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• 2001

Fe-base amorphous films exhibit large saturation magnetostriction and soft magnetic Properties, which make them suitable for strain sensor applications. Most important material properties for the performance of these elements are the superior soft magnetic properties, such as high permeability and small coercive force, as well as magnetoelastic properties. It is well known that the strain generated in film deposition and/or post-heat treatment processes is one of important material properties, which effects on the soft magnetic properties of the film via magnetoelastic coupling. In this study, the effect of an isotropic strain in plane of magnetic films have been performed experimently. Amorphous films with the composition of (F $e_{90}$ $Co_{10}$)$_{78}$S $i_{l2}$ $B_{10}$ were employed in this study. The film with 5${\mu}{\textrm}{m}$ thick was deposed onto the polyimide substrate with 50${\mu}{\textrm}{m}$ thick by virtue of RF sputtering. The film was subject to post annealing with a static magnetic field with 500Oe magnetic field intensity at 35$0^{\circ}C$ for 1 hour. The polyimide substrate with the film was bonded with an adhesive on PZT piezoelectric substrate with 600${\mu}{\textrm}{m}$ thick in applying voltage of 500V. The change in MH loops of films due to the isotropic strain was measured by using VSM. The coercive force was evaluated from MH loops. It has shown in the results that M-H loops of films are subject to change considerably with a dc voltage, resulting of the magnetization rotation from normal to plane direction as the applied voltage is changed from 500V to 250V.50V.V.

• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.23-26
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• 2004

Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.

• Macromolecular Research
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• 제14권3호
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• pp.267-271
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• 2006

Polyelectrolyte complex films were prepared with two compounds, chitosan and poly(ethylene glycol)-monosuccinate, using a casting in order to synthesize a polyelectrolyte complex film with various mole ratios of chitosan and poly(ethylene glycol)-monosuccinate. The solution properties of isolated PEC were investigated for the effects of FTIR, pH value, Brookfield viscosity and cell viability assay using MTT staining. The PEC films were evaluated for mechanical properties by typical stress-strain curve, far thermal properties by DSC and TGA and for surface morphology Properties by SEM. Furthermore, the surface resistance, moisture regain and water content of the films were characterized. The solution properties were affected by several factors including the chitosan content in the PEC, the mixing ratio of PEG and chitosan, and pH. Several PEC in acidic conditions exhibited film formation under appropriate conditions of mixing ratio and chitosan concentration in the mixing process. These PEC films were found to have sufficiently flexible and stable properties due to their hydrophilic structure, which was farmed by the oppositely charged interaction between PEG-MS and chitosan matrix. The results showed the potential applicability of chitosan and poly(ethylene glycol)-monosuccinate films as a biocompatible polymer.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.175-176
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• 2002

Our study is to search for tribological properties of diamond-like carbon (DLC) films as known as anti- wear hard thin film on various polymers. This report deals with the deposition of DLC films on various polymer substrates in vacuum by magnetron radio frequency (RF) sputtering method with using argon plasma and graphite, titanium target. The properties of friction and wear are measured using a ball-on-disk wear -testing machine. The properties of friction and wear have been remarkably improved by DLC coating. Moreover the composition of DLC films has been analyzed by using auger electron spectroscopy(AES). The wear rate of titanium-containing DLC film is lower than that of no-metal-containing DLC film.

• 한국전기전자재료학회논문지
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• 제16권12S호
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• pp.1305-1309
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• 2003

To utilize FeCoSiB amorphous films for magnetoelastic sensors, the temperature dependency of magnetization (M-T curve) and the magnetization properties of the amorphous films were investigated in this study. As the amount of cobalt In the films increased, the Curie temperature decreased but the crystallization temperature increased. In addition to this, the crystallization temperature was lower than the Curie temperature in the film containing 20 at% cobalt. The optimized annealing condition was set up by analyzing the H-T curve. And then, the amorphous film that has excellent magnetic properties and uni-axal anisotropy could be prepared for construction of the magnetoelastic sensor devices. The coercive force of the film was below 0.5 Oe and the anisotripic field was about 5 Oe.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.155-158
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• 2002

Eu-doped lead zirconium titanate $Pb_{1.1}(Zr_{0.3}Ti_{0.7})O_{3}$ thin films on the Pt/Ti/$SiO_2$/Si substrates prepared by a metalorganic decomposition (MOD) method. The effect on the structural and electrical properties of the films measured according to Eu content. Eu-doping altered significantly the dielectric and ferroelectric properties. The remanent polarization and coercive field decreased with increasing the concentration of Eu content. The dielectric constant and dielectric loss of the film decreased with increasing Eu contents. The 3 mol% of Eu-doped PZT thin film showed large remanent polarization and the fatigue characteristic of the film did not change up to $10^9$ switching cycles.