• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.2
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• pp.250-256
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• 2014

In this study, we deposited and investigated ${\mu}c$-Si:H thin films prepared by Plasma Enhanced Chemical Vapor Deposition(PECVD) system. To deposition silicon thin films, we controlled $SiH_4$ gas concentration, RF input power, and heater temperature. According to the experiments, the more $SiH_4$ gas concentration increased, deposition rate also increased but crystalline property decreased at the same conditions. In the RF input power case, deposition rate and crystalline property increased together when the input power increased from 100[W] to 300[W]. If RF input power was 300[W], deposition rate has reached saturation point. In the heater temperature, deposition rate increased when heater temperature increased. Crystalline property maintained a certain level until heater temperature was $250[^{\circ}C]$. And then it was a suddenly increased. Multistep method has been proposed to improve the quality of ${\mu}c$-Si:H thin film. $SiH_4$ gas was injected with a time interval. According to the experiments, crystallite ratio improve about 20~60[%] and photo conductivity increased up to six times.

• Journal of Sensor Science and Technology
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• v.8 no.2
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• pp.115-123
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• 1999

A micro-gas sensor with heater and sensing electrode on the same plane was fabricated on phosphosilicate glass(PSG, 800nm)/$Si_3N_4$ (150nm) dielectric membrane. PSG film was provided by atmospheric pressure chemical vapor deposition(APCVD), and $Si_3N_4$ film by low pressure chemical vapor deposition (LPCVD). Total area of the fabricated device was $3.78{\times}3.78mm^2$. The area of diaphragm was $1.5{\times}1.5mm^2$, and that of the sensing layer was $0.24{\times}0.24mm^2$. Finite-element simulation was employed to estimate temperature distribution for a square-shaped diaphragm. The power consumption of Pt heater was about 85mW at $350^{\circ}C$. Tin thin films were deposited on the silicon substrate by thermal evaporation at room temperature and $232^{\circ}C$, and tin oxide films($SnO_2$) were prepared by thermal oxidation of the metallic tin films at $650^{\circ}C$ for 3 hours in oxygen ambient. The film analyses were carried out by SEM and XRD techniques. Effects of humidity and ambient temperature on the resistance of the sensing layer were found to be negligible. The fabricated micro-gas sensor exhibited high sensitivity to butane gas.

• Journal of Korea Society of Digital Industry and Information Management
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• v.13 no.4
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• pp.41-48
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• 2017

It is necessary to develop an LED traffic light lens having a snow removal function capable of clearly providing a traffic signal to the driver even when a traffic light is blurred due to heavy snow and wind in the winter season. This study is focused on the research and development of the traffic light lens in the process of developing the LED traffic light with the snow removal function. In the developed traffic light lens, instead of attaching the film heater, the coated nichrome wire was wound into a coil shape and inserted directly into the groove in the lens. The developed heater system facilitates the insertion of the heating wire with high elasticity into a curved lens and can provide a sufficient heat without deformation of the PC lens. The proposed traffic lights were tested in various external environments and the test results showed that complete snow removal is possible without tunnel effect.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.4 s.235
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• pp.526-533
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• 2005

Reliability problem in inkjet printhead, one of MEMS devices, is also very important. To eject an ink drop, the temperature of heater must be high so that ink contacting with surface reaches above $280^{o}C$ on the instant. Its heater is embedded in the thin multi-layer in which several materials are deposited. MEMS processes are the main sources of residual stresses development. Residual stress is one of the factors reducing the reliability of MEMS devices. We measured residual stresses of single layers that consist of multilayer. FE analysis is performed using design of experiment(DOE). Transient analysis for heat transfer is performed to get a temperature distribution. And then static analysis is performed with the temperature distribution obtained by heat transfer analysis and the measured residual stresses to get a stress distribution in the structure. Although the residual stress is bigger than thermal stress, thermal stress is more influential on fatigue life.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.2
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• pp.243-251
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• 2004

Absorption chiller/heater can utilize the unused energy of the daily life waste heat, the industry waste heat. the solar energy and the earth energy. These can contribute to energy savings. But the absorption chiller/heater has a demerit that the size of absorption chiller/heater is larger than that of the vapor compression type based on same capacity. In this study. the experimental apparatus of an absorber is manufactured as a plate. which is newly applied in an absorber. The experimental apparatus is composed of a plate type absorber. which can increase the heat exchange area per unit volume and thus facilitating to deeply investigate more detail features instead of that done by the existing type. i.e.. horizontal tube bundle type. The characteristics of heat transfer and refrigeration capacity are studied experimentally. The absorption enhancement by using surfactant is closely examined through the experiment and comparative figures are presented in quantitative and qualitative analysis.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.5
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• pp.597-607
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• 2006

This paper presents a numerical simulation of the behavior of the LiBr solution droplets and falling films in horizontal tube banks of absorber. The model developed here accounts for the details of the droplets formation and impact process for absorption on horizontal tubes including the heat transfer from solution film to the tube wall. Especially. the characteristic of unsteady behavior of solution flow has been investigated. Flow visualization studies shown that the solution droplets and falling films have some of the complex characteristics. It is found that. with the numerical conditions similar to the operating condition of an actual absorption chiller/heater, the outlet solution temperature and heat flux from solution film to the tube wall have a stable periodic behavior with time. The solution droplets and falling films in horizontal tube banks of absorber is a periodic unsteady flow. The results from this model are compared with previous experimental observation taken with a high-speed digital video camera and shown good agreement.

• Transactions on Electrical and Electronic Materials
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• v.13 no.1
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Journal of Sensor Science and Technology
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• v.5 no.6
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• pp.51-59
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• 1996

A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric diaphragm which has low thermal conductivity and balanced stress with silicon substrate for the purpose of improving the thermal isolation between heater and silicon substrate. Pt-heater showed nonlinear I-V characteristics due to the thermal isolation effect of the diaphragm. Its temperature coefficient of resistance was about $0.00378\;/^{\circ}C$ and Seebeck coefficient of Bi-Sb thermocouple was about $97\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and flow sensitivity increased as heater voltage increased or as the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_{2}$-flow sensitivity and thermal response time of the sensor were about $1.27\;mV{\cdot}(sccm)^{-1/2}$ and 0.13 sec., respectively.

• Journal of the Korean Society of Safety
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• v.15 no.1
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• pp.66-71
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• 2000

This paper presents a development of an electric hole cutter for agricultural polyethylen film. Mechanical hole cutter with blades and electrical hole cutters are being tried in products now. But Mechanical hole cutter systems have a few faults. So the hole cutter systems using electrical heater have mainly been developed and optimized. Computer aided engineering was introduced for the purpose of electric heated hole cutter being developed, because it helped reduce the unnecessary tests. Three types of heated cups were surveyed with MSC/Nastran, and the type of model C was most effective in heat transfer.

• Journal of the Korean Vacuum Society
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• v.2 no.4
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• pp.480-485
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• 1993

Factros considered building the magnetron sputtering system for TFT LCD (thin film transistor liquid crystal display0 metallization were thin film thichnes uniformity, temperature uniformity and the pressure gradient of sputtering gas flow in vacuum chamber, base pressure, and the stability fo the carrier moving . The system was consisted of a deposition chamber, a pre-heating chamber, a RF-precleaning chamber and a load/unload lock chamber. The system was designed to handle a substrate with dimension of 400$\times$400mm. The temperautre uniformity of a heater table developed showed $250 ^{\circ}C\pm$5% accuracyon the substrate glass. A base pressure of 1.8 $\times$10-7 torr was obtained after 24 hours pumping with a cryo pump. After an aluminum target was installed in a sputtering source and the film wa sdeposited on the glass, the uniformity, reflectivity and sheet resistance of the deposited film were measured.