• 제목/요약/키워드: film density

검색결과 2,367건 처리시간 0.026초

PLT(5) 박막의 Switching 및 Retention 특성에 관한 연구 (A Study on the Switching and Retention Characteristics of PLT(5) Thin Films)

  • 최준영;장동훈;강성준;윤영섭
    • 대한전자공학회논문지SD
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    • 제42권1호
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    • pp.1-8
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    • 2005
  • Sol-gel 법을 이용하여 Pt/TiO/sub x/SiO₂/Si 기판 위에 3.14×10/sup -4/㎠ 의 상부전극 면적을 갖는 PLT(5) 박막을 제작하여 스위칭 및 retention 특성에 대해 연구하였다. 4V 에서 3.56×10/sup -7/A/㎠의 누설전류밀도 값을 갖는 우수한 PLT(5) 박막에 펄스전압을 2V 에서 5V 까지 인가하였다. 펄스전압 증가에 따라 스위칭 시간은 0.52㎲ 에서부터 0.14㎲ 까지 감소하는 경향을 나타냈으며, 부하저항을 50Ω 에서 3.3Ω 으로 증가시킴에 따라 스위칭 시간이 0.14㎲에서 13.7㎲ 로 증가하는 것이 관찰되었다. 인가된 펄스 전압에 대한 스위칭 시간의 관계로부터 구한 활성화 에너지(Ea) 는 135kV/cm 이었다. PLT(5) 박막의 이력곡선과 분극 스위칭 실험으로부터 구한 switched charge density 사이의 오차는 약 10% 정도로 비교적 잘 일치하였으며, retention 특성은 105s 이후에도 약 8% 정도의 우수한 분극 감소 특성을 나타내었다.

Characterization of carrier transport and trapping in semiconductor films during plasma processing

  • Nunomura, Shota;Sakata, Isao;Matsubara, Koji
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.391-391
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    • 2016
  • The carrier transport is a key factor that determines the device performances of semiconductor devices such as solar cells and transistors [1]. Particularly, devices composed of in amorphous semiconductors, the transport is often restricted by carrier trapping, associated with various defects. So far, the trapping has been studied for as-grown films at room temperature; however it has not been studied during growth under plasma processing. Here, we demonstrate the detection of trapped carriers in hydrogenated amorphous silicon (a-Si:H) films during plasma processing, and discuss the carrier trapping and defect kinetics. Using an optically pump-probe technique, we detected the trapped carriers (electrons) in an a-Si:H films during growth by a hydrogen diluted silane discharge [2]. A device-grade intrinsic a-Si:H film growing on a glass substrate was illuminated with pump and probe light. The pump induced the photocurrent, whereas the pulsed probe induced an increment in the photocurrent. The photocurrent and its increment were separately measured using a lock-in technique. Because the increment in the photocurrent originates from emission of trapped carriers, and therefore the trapped carrier density was determined from this increment under the assumption of carrier generation and recombination dynamics [2]. We found that the trapped carrier density in device grade intrinsic a-Si:H was the order of 1e17 to 1e18 cm-3. It was highly dependent on the growth conditions, particularly on the growth temperature. At 473K, the trapped carrier density was minimized. Interestingly, the detected trapped carriers were homogeneously distributed in the direction of film growth, and they were decreased once the film growth was terminated by turning off the discharge.

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인히비터 첨가용액의 침지에 의한 용융아연도금 강판의 내식성 개선에 관한 전기화학적 연구 (An Electrochemical Study on the Corrosion Resistance Improvement of Galvanizing Steel by Dipping to Solution with Inhibitor)

  • 문경만;조황래;강태영;이명훈;김윤해
    • Journal of Advanced Marine Engineering and Technology
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    • 제31권2호
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    • pp.173-181
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    • 2007
  • Recently, galvanizing method is predominantly being used not only a economical point of view but also due to it s stability and long life. For example, guard rail of high way, all kinds of structures for ship etc. were protected with galvanizing and demand of galvanized structural materials was being increased with more and more. However, galvanized structures were inevitably being deteriorated with time eventually because they were corroded with solution of galvanizing film and exfoliation of it s film in the present severe corrosive environment. Therefore, it is necessary to improve the corrosion resistance of the galvanizing film through various methods such as variation of chemical composition of galvanizing bath, chromate treatment and coating treatment. In this study, three test specimens such as pure galvanizing, galvarium, and chromate treatment were submerged at tap water with inhibitor addition. And the effect of their corrosion resistance improvement was comparatively investigated with electrochemical method. Corrosion current density of the galvanized steel was the largest among three specimens, however, the galvarium steel showed the lowest corrosion current density. Futhermore, these three kinds of test specimens indicated considerably excellent corrosion resistance by dipped at tap water with inhibitor addition. Especially, the galvanized steel showed the best effect of corrosion resistance improvement than other test specimens.

$Y_2O_3$ 나노입자가 $YBa_2Cu_3O_{7-x}$ 박막의 임계전류밀도에 미치는 영향 (Effect of $Y_2O_3$ Nanoparticles on Critical Current Density of $YBa_2Cu_3O_{7-x}$ Thin Films)

  • ;;위창환;강병원;오상준;이성익
    • Progress in Superconductivity
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    • 제11권1호
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    • pp.62-66
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    • 2009
  • Introduction of proper impurity into $YBa_2Cu_3O_{7-x}$ (YBCO) thin films is an effective way to enhance its flux-pinning properties. We investigate effect of $Y_2O_3$ nanoparticles on the critical current density $J_c$ of the YBCO thin films. The $Y_2O_3$ nanoparticles were created perpendicular to the film surface (parallel with the c-axis) either between YBCO and substrate or on top of YBCO, YBCO/$Y_2O_3$/LAO or $Y_2O_3$/YBCO/STO, by pulsed laser deposition. The deposition temperature of the YBCO films were varied ($780^{\circ}C$ and $800^{\circ}C$) to modify surface morphology of the YBCO films. Surface morphology characterization revealed that the lower deposition temperature of $780^{\circ}C$ created nano-sized holes on the YBCO film surface which may behave as intrinsic pinning centers, while the higher deposition temperature produced much denser and smoother surface. $J_c$ values of the YBCO films with $Y_2O_3$ particles were either remained nearly the same or decreased for the samples in which YBCO is grown at $780^{\circ}C$. On the other hand, $J_c$ values were enhanced for the samples in which YBCO is grown at higher temperature of $800^{\circ}C$. The difference in the effect of $Y_2O_3$ can be explained by the fact that the higher deposition temperature of $800^{\circ}C$ reduces intrinsic pinning centers and $J_c$ is enhanced by introduction of artificial pinning centers in the form of $Y_2O_3$ nanoparticles.

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Soil Physico-chemical Properties by Land Use of Anthropogenic Soils Dredged from River Basins

  • Park, Jun-Hong;Park, Sang-Jo;Won, Jong-Gun;Lee, Suk-Hee;Seo, Dong-Hwan;Park, So-Deuk
    • 한국토양비료학회지
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    • 제49권4호
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    • pp.341-346
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    • 2016
  • This study was conducted to analyze soil physico-chemical properties of agricultural land composed from the river-bed sediments. We investigated the changes of soil physico-chemical properties at 30 different sampling sites containing paddy, upland and plastic film house from 2012 to 2015. pH, exchangeable calcium and magnesium decreased gradually in paddy soils during the four years, whereas the available $P_2O_5$, exchangeable Ca, Mg and EC increased in upland and plastic film house soil. For the soil physical properties, bulk density and hardness of topsoil were $1.47g\;cm^{-3}$ and 21.5 mm and those of subsoil were $1.71g\;cm^{-3}$ and 25.7 mm in paddy soils. In upland soils, bulk density and hardness of topsoil were $1.48g\;cm^{-3}$ and 15.9 mm and those of subsoil were $1.55g\;cm^{-3}$ and 16.9 mm. In plastic film house soils, bulk density and hardness of topsoil were $1.42g\;cm^{-3}$ and 14.4 mm and those of subsoil were $1.40g\;cm^{-3}$ and 18.5 mm, respectively. The penetration hardness was higher than 3 MPa below soil depth 20 cm, and it is impossible to measure below soil depth 50 cm. As these results, in agricultural anthropogenic soils dredged from river basins, the pH, amount of organic matter and exchangeable cations decreased and soil physical properties also deteriorated with time. Therefore, it is needed to apply more organic matters and suitable amount of fertilizer and improve the soil physical properties by cultivating green manure crops, deep tillage, and reversal of deep soils.

Assessment and Applications of Multi-Degradable Polyethylene Films as Packaging Materials

  • Chung, Myong-Soo;Lee, Wang-Hyun;You, Young-Sun;Kim, Hye-Young;Park, Ki-Moon;Lee, Sun-Young
    • Food Science and Biotechnology
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    • 제15권1호
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    • pp.5-12
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    • 2006
  • Degradation performance of environmentally friendly plastics that can be disintegrated by combination of sunlight, microbes in soil, and heat produced in landfills was evaluated for use in industries. Two multi-degradable master batches (MCC-101 and MCC-102 were manufactured, separately mixed with polyethylene using film molding machine to produce 0.025 mm thick films, and exposed to sunlight, microbes, and heat. Low- and high-density polyethylene (LDPE and HDPE) films containing MCC-101 and MCC-102 became unfunctional by increasing severe cleavage at the surface and showed high reduction in elongation after 40 days of exposure to ultraviolet light. LDPE and HDPE films showed significant physical degradation after 100 and 120 days, respectively, of incubation at $68{\pm}2^{\circ}C$. SEM images of films cultured in mixed mold spore suspension at $30^{\circ}C$ and 85% humidity for 30 days revealed accelerated biodegradation on film surfaces by the action of microbes. LDPE films containing MCC-l01 showed absorption of carbonyls, photo-sensitive sites, at $1710\;cm${-1}$ when exposed to light for 40 days, whereas those not exposed to ultraviolet light showed no absorption at the same frequency. MCC-101-based LDPE films showed much lower $M_w$ distribution after exposure to UV than its counterpart, due to agents accelerating photo-degradation contained in MCC-101.

게이트 절연막 응용을 위한 Ca $F_2$ 박막연구 (The study of Ca $F_2$ films for gate insulator application)

  • 김도영;최유신;최석원;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.239-242
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    • 1998
  • Ca $F_2$ films have superior gate insulator properties than conventional gate insulator such as $SiO_2$, Si $N_{x}$, $SiO_{x}$, and T $a_2$ $O_{5}$ to the side of lattice mismatch between Si substrate and interface trap charge density( $D_{it}$). Therefore, this material is enable to apply Thin Film Transistor(TFT) gate insulator. Most of gate oxide film have exhibited problems on high trap charge density, interface state in corporation with O-H bond created by mobile hydrogen and oxygen atom. This paper performed Ca $F_2$ property evaluation as MIM, MIS device fabrication. Ca $F_2$ films were deposited at the various substrate temperature using a thermal evaporation. Ca $F_2$ films was grown as polycrystalline film and showed grain size variation as a function of substrate temperature and RTA post-annealing treatment. C-V, I-V results exhibit almost low $D_{it}$(1.8$\times$10$^{11}$ $cm^{-1}$ /le $V^{-1}$ ) and higher $E_{br}$ (>0.87MV/cm) than reported that formerly. Structural analysis indicate that low $D_{it}$ and high $E_{br}$ were caused by low lattice mismatch(6%) and crystal growth direction. Ca $F_2$ as a gate insulator of TFT are presented in this paper paperaper

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해양환경하에서의 알루미늄 합금 선박용 재료의 기계적 특성과 전기화학적 특성 평가

  • 김성종;고재용;정석기;김정일
    • 해양환경안전학회:학술대회논문집
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    • 해양환경안전학회 2005년도 춘계학술발표회
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    • pp.161-165
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    • 2005
  • Recently, it is on the increase interest for Al alloy with new material for ship application to substitute for FRP ship. The reason is thatAl alloy ship has beneficial characteristics such as high sea speed, increase of loadage and easy to recycle compared with FRP ship. In this paper, mechanical and electrochemical properties are investigated by slow strain rate test experiment in various applied potential condition. These results will provide as reference data to design ship by deciding optimum protection potential regard to hydrogen embrittlement and stress corrosion cracking. In general, Al and Al alloys are not corroded with forming film which has the corrosion resistance property in neutral solution. However, it was observed that formation and destruction of passive film by $Cl^-$ ion in sea water environment. At comparison of current density after 1200 sec in potentiostatic experiment, the current density in the potential range of -0.68 $\~$-1.5 V is shown low value. The low current density means protection potential range. Elongation in applied potential of 0 V was high. However, the corrosion protection application in this condition is impossible potential because the toughness is low value by decreasing strength by active dissolution reaction at parallel part of specimen. The film composed with $CaCO_3$ and $Mg(OH)_2$ has a corrosion resistance property. However, the uniform electrodeposition coating at below -1.6 V potential is not formed since the time to form the uniform electrodeposition coating is short. Therefore, it is concluded that mechanical property is poor because effect by hydrogen gas generation is larger than that of electrodeposition coating. It is concluded that the optimum protection potential range from comparison of_maxim urn tensile strength, elongation and time to fracture is -1.3$\~$0.7 V (SSCE).

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누설전류를 고려한 Quasi-MFISFET 소자의 특성 (Characteristics of Quasi-MFISFET Device Considering Leakage Current)

  • 정윤근;정양희;강성준
    • 한국정보통신학회논문지
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    • 제11권9호
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    • pp.1717-1723
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    • 2007
  • 본 연구에서는 PLZT(10/30/70), PLT(10), PZT(30/70) 강유전체 박막을 이용한 quasi-MFISFET (Metal-Ferroelectric-Insulator-Semiconductor FET) 소자를 제작하여 드레인 전류 특성을 조사하였다. 이로부터, quasi-MHSFET 소자의 드레인 전류 크기가 강유전체 박막의 분극 크기에 따라 직접적인 영향을 받으며 결정된다는 사실을 알 수 있었다. 또, ${\pm}5V$${\pm}10V$의 게이트 전압변화를 주었을 때 메모리 윈도우는 각각 0.5V 와 1.3V 이었고, 강유전체 박막에 인가되는 전압에 의해 만들어지는 항전압의 변동에 따라 메모리 윈도우가 변화된다는 사실을 확인할 수 있었다. MFISFET 소자의 retention 특성을 알아보기 위 해 PLZT(10/30/70) 박막의 전기장과 시간지연에 따른 누설전류 특성을 측정하여 전류밀도 상수 $J_{ETO}$, 전기장 의존 요소 K, 시간 의존 요소 m을 구하고, 이들 파라미터를 이용하여 시간에 따른 전하밀도의 변화를 정량적으로 분석하였다.

유화 Chlorosulfonated Polyethylene Rubber (CSM)의 제조 및 특성 연구 (Preparation and Characterization of Emulsified Chlorosulfonated Polyethylene Rubber (CSM))

  • 최세영;이은경;최교창
    • Elastomers and Composites
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    • 제40권1호
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    • pp.12-21
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    • 2005
  • 본 연구에서는 CSM 에멀젼의 물성을 향상시키고자 금속성 가교제인 magnesium carbonate 및 calcium hydroxide를 첨가하여 가교밀도, 열적특성, 표면자유에너지 그리고 인장강도, 파단신율 및 인열강도 특성을 고찰하였다, 금속성 가교제인 magnesium carbonate 및 calcium hyroxide 양이 증가함에 따라 CSM 에멀젼 필름은 가교밀도는 증가하였고, 이에 내수성과 $T_g$ 값도 증가하였다. 금속성 가교제로 magnesium carbonate를 첨가하였을 때 calcium hydroxide에 비해서 다소 높은 가교밀도와 $T_g$ 값을 보였다. 하지만 CSM 에멀젼 필름의 표면에너지 및 기계적 특성들은 다소 다른 거동을 보였다. Magnesium carbonate 0.75% 그리고 calcium hydroxide 1.0% 첨가한 경우가 가장 높은 표면 자유에너지 값과 인장강도 및 인열강도를 보였으나, 그 이상의 양을 첨가하였을 경우에는 오히려 감소함을 확인하였다. 그러므로 본 연구에서 CSM 에멀젼의 물성을 향상시키는데 적용되는 금속성 가교제로서 calcium hydroxide 보다 magnesium carbonate가 더 적당하며, 0.75% 첨가하였을 때 보다 향상된 물성을 얻을 수 있었다.