• Title/Summary/Keyword: film crystallinity

Search Result 643, Processing Time 0.024 seconds

V-I Characteristics of $(Sr_{0.85}Ca_{0.15})TiO_3$ Thin Film by RF Sputtering Method (RF 스퍼터링법에 의한 $(Sr_{0.85}Ca_{0.15})TiO_3$ 박막의 전압-전류 특성)

  • Kim, J.S.;Cho, C.N.;Shin, C.G.;Choi, W.S.;Kim, C.H.;Lee, J.U.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.04b
    • /
    • pp.88-91
    • /
    • 2000
  • The $(Sr_{0.85}Ca_{0.15})TiO_3$(SCT) thin films are deposited on Pt-coated electrode(Pt/TiN/$SiO_2$/Si) using RF sputtering method. The crystallinity of SCT thin films is increased with increase of substrate temperature in the temperature range of 200~500$[^{\circ}C]$. V-I characteristics of SCT thin films show the increasing leakage current with the increases of deposition temperature. The conduction mechanism of the SCT thin films observed in the temperature range of 25~100$[^{\circ}C]$ can be divided into four characteristic regions with different mechanism by the increasing current.

  • PDF

RF-enhanced DC-magnetron Sputtering of Indium Tin Oxide

  • Futagami, Toshiro;Kamei, Masayuki;Yasui, Itaru;Shigesato, Yuzo
    • The Korean Journal of Ceramics
    • /
    • v.7 no.1
    • /
    • pp.26-29
    • /
    • 2001
  • Indium tin oxide (ITO) films were deposited on glass substrates at $300^{\circ}C$ in oxygen/argon mixtures by RF-enhanced DC-magnetron sputtering and were compared to those by conventional DC magnetron sputtering. The RF enhancement was performed using a coil above an ITO target. X-ray diffraction measurements revealed that RF-enhanced plasma affected the preferred orientation and the crystallinity of the films. The resistivity of the films prepared by RF-enhanced DC-magnetron sputtering was almost constant at oxygen content lower than 0.3% and then increased sharply with increasing oxygen content. However the resistivity of the films by conventional sputtering has little dependence on the oxygen content. Those results can be explained on the basis of the incorporation of oxygen into the ITO films due to the RF enhancement.

  • PDF

Preparation of YBCO thin films by MOD-TFA process (MOD-TFA법에 의한 YBCO 박막의 제조)

  • 김영국;유재무;고재웅;허순영;이동철
    • Progress in Superconductivity
    • /
    • v.5 no.1
    • /
    • pp.80-83
    • /
    • 2003
  • Superconducting YBCO thin films are fabricated on single-crystalline substrates by Metallo-organic Depostion process employing Trifluoroacetic acid as a chelating agent (MOD-TFA). (100)-oriented single crystalline LaAlO$_3$ substrates were employed to grow superconducting film with high crystallinity. The fully processed YBCO thin films were characterized with XRD, SEM, EDS, etc. The microstructures of YBCO thin films show labyrinth-like patterns. The origin of this microstructure was delineated by compositional inhomogeneity during the MOD process and it was shown that the microstructure may be modified by additives. In this work, effects of additives on the microstructures and electrical properties of YBCO thin films have been investigated.

  • PDF

The effect of annealing temperature and solvent on the fabrication of YBCO thin films by MOD-TFA process (MOD-TFA 공정으로 YBCO 박막제조 시 열처리 온도와 용매의 영향)

  • 허순영;유재무;김영국;고재웅;이동철
    • Progress in Superconductivity
    • /
    • v.5 no.1
    • /
    • pp.84-87
    • /
    • 2003
  • $YBa_2$$Cu_3$$O_{7-x}$ (YBCO) thin films were fabricated by MOD-TFA process via dip-coating method on LaAlO$_3$, (LAO) single crystalline substrates. In this study, we investigated effect of annealing temperature and solvent on the microstructure and texture of YBCO thin films. The precursor films were annealed at various temperature to improve surface morphologies and phase purities. It was shown that the films annealed at relatively lower and higher temperature exhibit low phase purity and crystallinity. The effect of various solvents on surface morphologies and second phase has been investigated.

  • PDF

Suface Morphology and Structure of Ceramic Thin Film by RF Sputtering Method (RF 스퍼터링법에 의한 세라믹 박막의 표면형상 및 구조)

  • Kim, Jin-Sa;Cho, Choon-Nam;Choi, Woon-Shick;Song, Min-Jong;So, Byeong-Mun;Kim, Chung-Hyeok
    • Proceedings of the KIEE Conference
    • /
    • 2009.07a
    • /
    • pp.1248_1249
    • /
    • 2009
  • The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method with RF power and Ar/$O_2$ ratio. The size of grain of SBN thin films were increased with the increase of Ar/$O_2$ ratio and RF power respectively. Also, the crystallinity of SBN thin films were increased remarkably at RF power and Ar/$O_2$ ratio were 80[W] and 80/20, respectively.

  • PDF

Effects of electron beam treatment on cotton linter for the preparation of nanofibrillated cellulose

  • Le, Van Hai;Seo, Yung Bum
    • Journal of Korea Technical Association of The Pulp and Paper Industry
    • /
    • v.48 no.2
    • /
    • pp.68-74
    • /
    • 2016
  • Nanofibrillated cellulose (NFC) was prepared from cotton linter after electron beam irradiation to investigate its effects on the manufacturing efficiency of the NFC preparation and the property changes by the treatment. Mechanical device (Super Masscolloider) was used to prepare the NFC and its passing frequency for each NFC preparation was recorded. More electron beam irradiation resulted in less passing frequency. Alpha cellulose content, molecular weight, crystallinity index, and thermal decomposition behavior of each treatment were lowered by electron beam treatment (10 and 100 kGy) and grinding process. NFC films were prepared to investigate their mechanical properties. There were little changes in tensile properties of the NFC films.

Electrical and Structural Properties of $V_{2-n}W_nO_5$ Thin Films as a function of Tungsten Contents (텅스텐 첨가에 따른 $V_{2-n}W_nO_5$ 박막의 구조적, 전기적 특성)

  • Nam, Sung-Pill;Lee, Sung-Gap;Lee, Seon-Gi;Lee, Young-Hie
    • Proceedings of the KIEE Conference
    • /
    • 2008.10a
    • /
    • pp.117-118
    • /
    • 2008
  • The $V_{1.85}W_{0.15}O_5$ thin films deposited on Pt/Ti/$SiO_2$/Si substrates by RF sputtering method exhibited fairly good TCR and dielectric properties. It was found that film crystallinity, dielectric properties, and TCR properties were strongly dependent upon the annealing temperature. The dielectric constants of the $V_{1.85}W_{0.15}O_5$ thin films annealed at $400^{\circ}C$ were 38.11, with a dielectric loss of 1%, respectively. Also, the TCR values of the $V_{1.85}W_{0.15}O_5$ thin films annealed at $400^{\circ}C$ were about -3.45%/K.

  • PDF

The effect of oxygen in RF PACVD diamond thin film (고주파 플라즈마 CVD 다이아몬드 박막의 합성시 첨가된 산소의 효과)

  • Kim, Dae-Il;Lee, Sang-Hee;Lee, Byoung-Soo;Park, Jong-Kwan;Park, Sang-Hyun;Kim, Bo-Youl;Woo, Ho-Whan;Lee, Duck-Chool
    • Proceedings of the KIEE Conference
    • /
    • 1998.11c
    • /
    • pp.786-788
    • /
    • 1998
  • Synthetic diamond films were deposited on pretreated silicon substrate in activated gas phase using RF plasma-assisted CVD. We investigated the influence of $O_2$ gas on facets of diamond crystal. In $H_2-CH_4-O_2$ gas mixture, the increase of oxygen concentration lead to well-faceted diamond particles and increasing crystallinity of diamond films. The deposited diamond films were analyzed by SEM, XRD, Raman spectroscopy.

  • PDF

Self-Cleaning and Photocatalytic Performance of TiO2 Coating Films Prepared by Peroxo Titanic Acid

  • Yadav, Hemraj M.;Kim, Jung-Sik
    • Korean Journal of Materials Research
    • /
    • v.27 no.11
    • /
    • pp.577-582
    • /
    • 2017
  • Self-cleaning and photocatalytic $TiO_2$ thin films were prepared by a facile sol-gel method followed by spin coating using peroxo titanic acid as a precursor. The as-prepared thin films were heated at low temperature($110^{\circ}C$) and high temperature ($400^{\circ}C$). Thin films were characterized by X-ray diffraction(XRD), Field-emission scanning electron microscopy(FESEM), UV-Visible spectroscopy and water contact angle measurement. XRD analysis confirms the low crystallinity of thin films prepared at low temperature, while crystalline anatase phase was found the for high temperature thin film. The photocatalytic activity of thin films was studied by the photocatalytic degradation of methylene blue dye solution. Self-cleaning and photocatalytic performance of both low and high temperature thin films were compared.

Microstructural, Electrical and Optical Features of ZnO Thin Films Prepared by RF Sputter Techniques

  • Cho, Nam-Hee;Park, Jung-Ho;Kim, Byung-Jin
    • The Korean Journal of Ceramics
    • /
    • v.7 no.2
    • /
    • pp.85-92
    • /
    • 2001
  • Thin films of ZnO and Al doped ZnO were prepared by rf magnetron sputter techniques. When the oxygen fraction in Ar-O$_2$ sputter gas was about 2.0%, the films exhibited the composition of Zn:O=1.05:1. The films prepared at 250 W contain larger grains than the films grown at 100 W. However, high deposition rate seems to deteriorates the crystallinity as well as Al-substitution, resulting in lower concentration of mobile electrons. The Al-doped ZnO films which were deposited at $500^{\circ}C$ show resistance of 1$\times$10$^-2$ Wcm; optical band gap of the films ranges from 3.25 to 3.40 eV. These electrical and optical features are related with microstructural as well as crystalline characteristics of the films.

  • PDF