• Title/Summary/Keyword: film crystallinity

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Effect of Methane Gases on the Properties of Diamond Thin Films Synthesized by MPCVD (MPCVD법으로 증착된 다이아몬드 박막 특성에 미치는 메탄가스의 영향)

  • Song, Jin-Soo;Nam, Tae-Woon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.3
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    • pp.229-233
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    • 2011
  • Diamond thin films were deposited on pretreated Co cemented tungsten carbide (WC-6%Co) inserts as substrate by microwave plasma chemical vapor deposition (MPCVD) system, equipped with a 915MHz, 30kW generator for generating a large-size plasma. The substrates were pretreated with two solutions Murakami solution $[KOH:K_3Fe(CN)_6:H_2O]$ and nitric solution $[HNO_3:H_2O]$ to etch, WC and Co at cemented carbide substrates, respectively. The deposition experiments were performed at an input power of 10 kW and in a total pressure of 100 torr. The influence of various $CH_4$ contents on the crystallinity and morphology of the diamond films deposited in MPCVD was investigated using scanning electron microscopy (SEM) and Raman spectroscopy. The diamond film synthesized by the $CH_4$ plasma shows a triangle-faceted (111) diamond. As $CH_4$ contents was increased, the thickness of diamond films increased and the faceted planes disappeared. Finally, Faceted diamond changed into nano-crystalline diamond with random crystallinity.

Structure and Influence of $Sr_{0.7}Bi_{2.3}Nb_2O_9$ Thin Film with $Ar/O_2$ Ratio ($Ar/O_2$비에 따른 $Sr_{0.7}Bi_{2.3}Nb_2O_9$ 박막의 구조 및 영향)

  • Kim, Jin-Sa;Choi, Woon-Shik
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.2
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    • pp.11-14
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    • 2009
  • The $Sr_{0.7}Bi_{2.3}Nb_2O_9$(SBN) thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various $Ar/O_2$ ratio. We investigated the effect of deposition condition(specially $Ar/O_2$ ratio) on the structural properties of SBN thin film. As $Ar/O_2$ ratio was increased, the peaks in the XRD pattern became more sharp. Also, the peaks(008)(115)(220) in 80/20 of $Ar/O_2$ ratio were suddenly appeared. The optimum of the rougness showed about 4.33 nm in 70/30 of $Ar/O_2$ ratio. The crystallinity of SBN thin films were increased with the increase of $Ar/O_2$ ratio. Also, Deposition rate of SBN thin films was about 4.17 nm/min in 70/30 of $Ar/O_2$ ratio. The capacitance of SBN thin films were increased with the increase of $Ar/O_2$ ratio.

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The Effects of Substrate Temperature on Electrical and Physical Properties of ZnO:Al for the Application of Solar Cells (태양전지 응용을 위한 ZnO:Al 박막의 전기적·물리적 특성에서 증착 온도의 영향)

  • Park, Chan Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.39-43
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    • 2021
  • In the case of ZnO:Al thin films, it is the best material that can replace ITO that is mainly used as a transparent electrode in electronic devices such as solar cells and flat-panel displays. In this study, ZnO:Al films were fabricated by using the RF dual magnetron sputtering method at various substrate temperatures. As the substrate temperature increased, the crystallinity of the ZnO:Al thin films was improved, and the electrical conductivity and electrical properties of the thin film improved owing to the increase in grain size. In addition, the surface roughness of the ZnO:Al thin films increased due to changes in the surface and density of the thin films. Moreover, the substrate temperature increased the density of thin films and improved their transmittance. To be applied to solar cells and other several electronic devices in the future, the hardness and adhesion properties of the thin film improve as the substrate temperature increases.

A Study on Fabrication of Polyester Copolymers (Ⅵ) -Physical Properties of PET/PETG Copolymer Blend by the Drawing Conditions- (폴리에스테르 공중합체의 Fabrication 연구 (Ⅵ) -PET/PETG 공중합체 블렌드의 연신조건에 따른 물리적 특성-)

  • 현은재;이소화;김기영;제갈영순;장상희
    • Polymer(Korea)
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    • v.26 no.3
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    • pp.335-343
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    • 2002
  • Blend resin (PET/PETG 70/30 blend) of poly (ethylene terephthalate) (PET) and poly (ethylene terephthalate glycol) (PETG) of weight percent 70/30 was prepared by a twin-screw extruder. Undrawn films of the blend and pure PETG were made by melt-press in hot press. Drawn films were made by capillary rheometer. Crystallinity, shrinkage, thermal, dynamic mechanical, and mechanical properties of these blends and PETG drawn films were investigated by wide angle X-ray diffractometer, dry oven, DSC thermal analyzer, and tensile tester. The crystallinity and density of these films increased with increasing draw ratio and draw rate but decreased with increasing draw temperature. The crystallinity and density of the blend films were higher than those of PETG films. The tensile strength and tensile modulus of these drawn alms increased with increasing draw ratio and draw rate but decreased with increasing draw temperature. The tensile strength and tensile modulus of blend films were higher than those of PETG films. Shrinkage of PETG md blend films decreased with draw ratio and draw rate. Shrinkage of undrawn blend film was 600% higher than that of pure PET film.

Effect of Transesterification on the Characteristics of PET/PEN Blend Flexible Substrate (상호에스테르 교환반응이 폴리(에틸렌 테레프탈레이트)/폴리(에틸렌 나프탈레이트) 블렌드 유연기관 특성에 미치는 영향)

  • Kim, Jae-Hyun;Kim, Whan-Ki;Yum, Ju-Sun;Kang, Ho-Jong
    • Polymer(Korea)
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    • v.35 no.3
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    • pp.249-253
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    • 2011
  • The effect of morphological development in PET/PEN blending on the physical properties of PET/PEN blend film as a flexible substrate was investigated. The two phase morphology was obtained in PET/PEN blends and it caused the improvement of dimensional stability of PET/PEN blend as a flexible substrate. The two phase morphology and crystallinity of PET/PEN blends could be controlled by the transesterification between PET and PEN during the film processing and this macroscopic structural development affected the dimensional stability of PET/PEN blend films. Better dimensional stability was obtained with increasing crystallinity and decreasing the level of transesterification.

Enhancement of Crystallinity in ZnO:Al Films Using a Two-Step Process Involving the Control of the Oxygen Pressure (산소 압력의 조절과 함께 두 번의 증착 과정을 이용한 ZnO:Al 박막에 결정성의 향상)

  • Moon, Tae-Ho;Yoon, Won-Ki;Lee, Seung-Yoon;Ji, Kwang-Sun;Eo, Young-Joo;Ahn, Seh-Won;Lee, Heon-Min
    • Journal of the Korean Vacuum Society
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    • v.19 no.2
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    • pp.128-133
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    • 2010
  • ZnO:Al films were deposited by DC-pulsed magnetron sputtering using a two-step process involving the control of the oxygen pressure. The seed layers were prepared with various Ar to oxygen flow ratios and the bulk layers were deposited under pure Ar. As the oxygen pressure during the deposition of the seed layer increased, the crystallinity and degree of (002) texturing increased. The resistivity gradually decreased with increasing crystallinity from $4.7\times10^4\Omega{\cdot}cm$ (no seed) to $3.7\times10^4\Omega{\cdot}cm$ (Ar/$O_2$ = 9/1). The etched surface showed a crater-like structure and an abrupt morphology change appeared as the crystallinity was increased. The sample deposited at an Ar/$O_2$ flow ratio of 9/1 showed a very high haze value of 88% at 500 nm, which was explained by the large feature size of the craters, as shown in the AFM image.

Fabrication of carbon nanotube electron beam (C-beam) for thin film modification

  • Kang, Jung Su;Lee, Su Woong;Lee, Ha Rim;Chung, Min Tae;Park, Kyu Chang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.171.1-171.1
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    • 2015
  • Carbon nanotube emitters is very promising electron emitter for electron beam applications. We introduced the carbon nanotube electron beam (C-beam) exposure technic using triode structure. As a source, the electron beam emit from CNT emitters placed at the cathode by high electric field. Through the gate mesh, with high accelerating energy, the electron can be extracted easily and impact at the anode plate. For thin film modification, after the C-beam exposure on the amorphous silicon thin film, we found phase changes and it showed a high crystallinity from the Raman measurement. We expect that this crystallized film will be a good candidate as a new active layer of TFT.

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Effect of Activation Energy and Crystallization Kinetics of Polyethylenes on the Stability of Film Casting Processes

  • Lee, Joo-Sung;Cho, Joon-Hee
    • Korea-Australia Rheology Journal
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    • v.21 no.2
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    • pp.135-141
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    • 2009
  • Effect of activation energy and crystallization kinetics of polyethylenes (PEs) on the dynamics and stability has been investigated by changing rheological properties and crystallization rate in film casting process. The effect of changes of these properties has been shown using a typical example of short-chain branching (SCB) in linear polyethylenes. SCBs in linear polymers generally lead to the increase of the flow activation energy, and to the decrease of the crystallization rate, making polymer viscosity lower in the case of equivalent molecular weight. In general, the increment of the crystallinity of polymers under partially crystallized state helps to enhance the process stability by increasing tension, and lower fluid viscoelasticity possesses the stabilizing effect for linear polymers. It has been found that the fluid viscoelasticity plays a key role in the control of process stability than crystallization kinetics which critically depends on the cooling to stabilize the film casting process of short-chain branched polymers operated under the low aspect ratio condition.

electrical Damage of Metallized Film Capacitors (필름 Capacitor의 전기적Damage에 관한 연구)

  • ;Chathan M. Cooke
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.40 no.6
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    • pp.574-581
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    • 1991
  • Damage in film capacitors has been investigated, using FTIR and ESCA, aiming to elucidate the nature of electrode removal and the possibility of base films to be damaged. Also, tests were conducted to investigate the effect of a long-term thermal aging at elevated temperatures. Unsuccessful clearing or grape-clustering processes can induce a long-term degradation which involves the chemical and morphological changes. Major changes are the oxidation and the decrease in surface crystallinity possibly arising from the corona discharge. An immediate deterioration of BOPP film may occur when the air entrapped between the film layers induces an extensive autocatalytic oxidative degradation. This type of immediate damage may result in a premature failure at an early stage of qualification test. As far as the nature of electrode removal is concerned, a permanent removal of electrode materials was observed in the main erosion area.

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Electrical and Optical Properties of Sb-doped SnO2 Films Prepared by Chemical Vapor Deposition (화학증착법에 의해 제조된 Sb-doped $SnO_2$ 박막의 전기적 및 광학적 특성)

  • 이수원;김광호
    • Journal of the Korean Ceramic Society
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    • v.29 no.4
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    • pp.319-327
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    • 1992
  • Sb-doped SnO2 films were formed on Corning glass 7059 substrate by chemical vapor deposition using simulataneous hydrolysis of SnCl4 and SbCl5. Fairly good transparent conducting film with a low resistivity of ~6$\times$10-4{{{{ OMEGA }}cm and high average optical transparency above ~85% in the range of visible light was obtained at the deposition condition of 50$0^{\circ}C$ and input-gas ratio, [Psbcl5/Psncl4] of 0.05. Film conductivity was improved without loosing optical transparency at light doping of Sb and found to be due to the increase of electron concentration. However, high doping of Sb into SnO2 film largely deteriorated conductivity, optical transparency and crystallinity of the film.

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