• Journal of the Korean Ceramic Society
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• v.54 no.6
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• pp.511-517
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• 2017

With different working pressures and substrate biases, Cr-Al-N coatings were deposited by hybrid physical vapor deposition (PVD) method, consisting of unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) processes. Cr and Al targets were used for the arc ion plating and the sputtering process, respectively. Phase analysis, and composition, binding energy, and microstructural analyses were performed using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and field emission scanning electron microscopy (FESEM), respectively. Surface droplet size of Cr-Al-N coatings was found to decrease with increasing substrate bias. A decrease of the deposition rate of Cr-Al-N films was expected due to the increase of substrate bias. The coatings were grown with textured CrN phase and (111), (200), and (220) planes. X-ray diffraction data show that all Cr-Al-N coatings shifted to lower diffraction angles due to the addition of Al. The XPS results were used to determine the $Cr_2N$, CrN, and (Cr,Al)N binding energies. The compositions of the Cr-Al-N films were measured by XPS to be Cr 23.2~36.9 at%, Al 30.1~40.3 at%, and N 31.3~38.6 at%.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.118-118
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• 2008

The oxide CMP has been applied to interlayer dielectric(ILD) and shallow trench isolation (STI) in chip fabrication. Recently the slurry used in oxide CMP being changed from silica slurry to ceria (cerium dioxide) slurry particularly in STI CMP, because the material selectivity of ceria slurry is better than material selectivity of silica slurry. Moreover, the ceria slurry has good a planarization efficiency, compared with silica slurry. However ceria abrasives make a material removal rate too high at the region of wafer center. Then we focuses on why profile of material removal rate is convex. The material removal rate sharply increased to 3216 $\AA$/min by $4^{th}$ run without conditioning. After $4^{th}$ run, material removal rate converged. Furthermore, profile became more convex during 12 run. And average material removal rate decreased when conditioning process is added to end of CMP process. This is due to polishing mechanism of ceria. Then the ceria abrasive remains at the pad, in particular remains more at wafer center contacted region of pad. The field emission scanning electron microscopy (FE-SEM) images showed that the pad sample in the wafer center region has a more ceria abrasive than in wafer outer region. The energy dispersive X-ray spectrometer (EDX) verified the result that ceria abrasive is deposited and more at the region of wafer center. Therefore, this result may be expected as ceria abrasives on pad surface causing the convex profile of material removal rate.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.63 no.4
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• pp.351-355
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• 2014

Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway to increased the reaction area of graphite electrodes used carbon nanotube (CNT) and porous carbon. CNT is limited to device utilization in order to used a metal catalyst by lack of surface area to improve. In contrast carbon nanowall (CNW) is chemically very stable. So this paper, microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow carbon nanowall (CNW) on Si substrate with methane ($CH_4$) and hydrogen ($H_2$) gases. To find the growth properties of CNW according to the reaction gas ratio, we have changed the methane to hydrogen gas ratios (4:1, 2:1, 1:2, and 1:4). The vertical and surficial conditions of the grown CNW according to the gas ratios were characterized by a field emission scanning electron microscopy (FE-SEM) and Raman spectroscopy measurements showed structure variations.

• Corrosion Science and Technology
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• v.19 no.1
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• pp.16-22
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• 2020

It is important to realize that benzoate was intercalated into hydrotalcite (HTC-Bz) by the co-precipitation method. In this case, acrylic coating with 0.5 wt% HTC-Bz was deposited on carbon steel using the spin coating method. Next, the HTC-Bz structure was characterized by Field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and Fourier transform infrared spectroscopy (FT-IR). In fact, an ultraviolet vision spectroscopy (UV-Vis) was used to determine the benzoate content in HTC-Bz, and the UV absorption ability of HTC-Bz. Using electrochemical techniques, water contact angle measurement, and thermal-gravimetric analysis, we compared the protective properties before and after QUV test, hydrophobicity and the thermal stability of acrylic coating containing HTC-Bz. The obtained results showed that HTC-Bz with a plate-like structure was successfully synthesized; benzoate was intercalated into the interlayer of hydrotalcite with a concentration of 28 wt%. Additionally, it was noted that HTC-Bz has an UV absorption peak at 225 nm. In conclusion, the addition of HTC-Bz enhanced the UV stability, hydrophobicity and the thermal stability of acrylic coating.

• Membrane and Water Treatment
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• v.6 no.3
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• pp.205-224
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• 2015

A novel hydrophilic poly (vinylidene fluoride)/poly (p-phenylene terephthalamide) (PVDF/PPTA) blend membrane was prepared by in situ polycondensation of p-phenylene diamine (PPD) and terephthaloyl chloride (TPC) in PVDF solution with subsequent nonsolvent induced phase separation (NIPS) process. For comparison, conventional solution blend membrane was prepared directly by adding PVDF powder into PPTA polycondensation solution. Blend membranes were characterized by means of viscometry, X-ray photoelectron spectroscopy (XPS), Field Emission Scanning Electron Microscopy (FESEM). The effects of different blending methods on membrane performance including water contact angle (WCA), mechanical strength, anti-fouling and anti-compression properties were investigated and compared. Stronger interactions between PVDF and PPTA in in situ blend membranes were verified by viscosity and XPS analysis. The incorporation of PPTA accelerated the demixing rate and caused the formation of a more porous structure in blend membranes. In situ blend membranes exhibited better hydrophilicity and higher tensile strength. The optimal values of WCA and tensile strength were $65^{\circ}$ and 34.1 MPa, which were reduced by 26.1% and increased by 26.3% compared with pure PVDF membrane. Additionally, antifouling properties of in situ blend membranes were greatly improved than pure PVDF membrane with an increasing of flux recovery ratio by 25%. Excellent anti-compression properties were obtained in in situ blend membranes with a stable pore morphology. The correlations among membrane formation mechanism, structure and performance were also discussed.

• Journal of Adhesion and Interface
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• v.11 no.2
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• pp.70-75
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• 2010

It described the modification of polydimethylsiloxane (PDMS) with amphiphilic methyl methacrylate-based polyethylene glycol (PMMA-b-PEG) to enhance the hydrophilicity of a PDMS surface and cytotoxicity of it. PMMA-b-PEG solutions in water/ethanol mixture was spun-cast on the PDMS surface and the surface was characterized by long-term measurement of water contact angle. The morphology of PDMS surfaces coated with PMMA-b-PEG was characterized by field emission scanning electron microscopy and atomic force microscope. Cytotoxicity of the modified surfaces was investigated by MTT assay which would be necessary for the evaluation of tissue compatibility after implantation of the materials. Based on the MTT assay, PDMS coated with PMMA-b-PEG didn't show any significant cytotoxcity.

• Elastomers and Composites
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• v.53 no.3
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• pp.175-180
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• 2018

Solution-styrene-butadiene rubber (SSBR) composites were manufactured using four kinds of fillers: silica-silane coated carbon black (SC-CB) hybrid, starch-SC-CB hybrid, pure silica, and pure starch. The influence of filler type on the mechanical properties of the rubber matrix was studied in this work. SC-CB was prepared by silane-graft-coating using vinyl triethoxy silane and carbon black, which enhanced the dispersion effect between the rubber matrix and the filler, and improved the mechanical properties of the compounds. The morphology of the composites was observed by field-emission scanning electron microscopy (FE-SEM). The thermal decomposition behavior of the composites was determined by thermogravimetric analysis (TGA), and the crosslinking behavior of the composites was tested using a rubber process analyzer (RPA). The hardness, tensile strength, swelling ratio, and gas transmittance rate of the composites were evaluated according to ASTM. The test results revealed that with the addition of SC-CB, the hybrid fillers, especially those blended with silica, showed a better reinforcement effect, the highest hardness and tensile strength, and stable thermal decomposition behavior. This implies that the silica-SC-CB hybrid filler has a notable mechanical reinforcement effect on the SSBR matrix. Because of self-crosslinking during its synthesis, the starch-SC-CB hybrid filler produced the most dense matrix, which improved the anti-gas transmittance property. The composites with the hybrid fillers had better anti-swelling properties as compared to the neat SSBR composite, which was due to the hydrophilicity of silica and starch.

• Bulletin of the Korean Chemical Society
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• v.31 no.12
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• pp.3593-3599
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• 2010

In an original effort, this lab attempted to employ polystyrene nanoparticles as a template for the synthesis of ordered and highly porous macroporous $SiO_2$ thin films, utilizing their high combustion temperature and narrow size distribution. However, polystyrene nanoparticle thin films were not obtained due to the low interaction between individual particles and between the particle and silicon substrate. However, polystyrene-polyacrylic acid (PS-AA) colloidal particles of a core-shell structure were synthesized by a one-pot miniemulsion polymerization approach, with hydrophilic polyacrylic acid tails on the particle surface that improved interaction between individual particles and between the particle and silicon substrate. The PS-AA thin films were spin-coated in the thickness ranges from monolayer to approximately $1.0\;{\mu}m$. Using the PS-AA thin films as sacrificial templates, macroporous $SiO_2$ thin films were successfully synthesized by vapor deposition or conventional solution sol-gel infiltration methods. Inspection with field emission scanning electron microscopy (FE-SEM) showed that the macroporous $SiO_2$ thin films consist of interconnected air balls (~100 nm). Typical macroporous $SiO_2$ thin films showed ultralow refractive indices ranging from 1.098 to 1.138 at 633 nm, according to the infiltration conditions, which were confirmed by spectroscopy ellipsometry (SE) measurements. This research shows how the synthetic control of the macromolecule such as hydrophilic polystyrene nanopaticles and silicate sol precursors innovates the optical properties and processabilities for actual applications.

• Korean Journal of Materials Research
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• v.24 no.7
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• pp.370-374
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• 2014

Inorganic pigments have high thermal stability and chemical resistance at high temperature. For these reasons, they are used in clay, paints, plastic, polymers, colored glass and ceramics. $CoAl_2O_4$ nano-powder was synthesized by reverse-micelle processing the mixed precursor(consisting of $Co(NO_3)_2$ and $Al(NO_3)_3$). The $CoAl_2O_4$ was prepared by mixing an aqueous solution at a Co:Al molar ratio of 1:2. The average particle size, and the particle-size distribution, of the powders synthesized by heat treatment (at 900; 1,000; 1,100; and $1,200^{\circ}C$ for 2h) were in the range of 10-20 nm and narrow, respectively. The average size of the synthesized nano-particles increased with increasing water-to-surfactant molar ratio. The synthesized $CoAl_2O_4$ powders were characterized by X-ray diffraction analysis(XRD), field-emission scanning electron microscopy(FE-SEM) and color spectrophotometry. The intensity of X-ray diffraction of the synthesized $CoAl_2O_4$ powder, increased with increasing heating temperature. As the heating temperature increased, crystal-size of the synthesized powder particles increased. As the R-value(water/surfactant) and heating temperature increased, the color of the inorganic pigments changed from dark blue-green to cerulean blue.

• Nuclear Engineering and Technology
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• v.52 no.10
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• pp.2320-2327
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• 2020

The extreme hydrophobicity of expanded polytetrafluoroethylene (ePTFE) hinders bone-tissue integration, thus limiting the use of ePTFE in medical implant applications. To improve the potential of ePTFE as a biomaterial, 2-hydroxyethyl methacrylate (HEMA) was grafted onto the ePTFE surface using the gamma irradiation technique. The characteristics of the grafted ePTFE were successfully evaluated using attenuated total reflectance Fourier transform infrared (ATR-FTIR), field-emission scanning electron microscopy (FESEM)/energy dispersive X-ray (EDX), and X-ray photoelectron spectroscopy (XPS). Under the tensile test, the modified ePTFE was found to be more brittle and rigid than the untreated sample. In addition, the grafted ePTFE was less hydrophobic with a higher percentage of water uptake compared to the untreated ePTFE. The protein adsorption test showed that grafted ePTFE could adsorb protein, which was denoted by the presence of N peaks in the XPS analysis. Moreover, the formation of the globular mineral on the grafted ePTFE surface was successfully visualized using the FESEM analysis, with a ratio of 1.94 for Ca:P minerals by the EDX. To summarize, the capability of the modified ePTFE to show protein adsorption and mineralization indicates the improvement of the polymer properties, and it can potentially be used as a biomaterial for implant application.